EP2000840A4 - OPTICAL PROJECTION SYSTEM, EXPOSURE DEVICE AND METHOD FOR PRODUCING DEVICES - Google Patents

OPTICAL PROJECTION SYSTEM, EXPOSURE DEVICE AND METHOD FOR PRODUCING DEVICES

Info

Publication number
EP2000840A4
EP2000840A4 EP07737991A EP07737991A EP2000840A4 EP 2000840 A4 EP2000840 A4 EP 2000840A4 EP 07737991 A EP07737991 A EP 07737991A EP 07737991 A EP07737991 A EP 07737991A EP 2000840 A4 EP2000840 A4 EP 2000840A4
Authority
EP
European Patent Office
Prior art keywords
reflection mirror
optical system
plane
imaging optical
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07737991A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2000840A2 (en
EP2000840A9 (en
Inventor
Tomowaki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of EP2000840A2 publication Critical patent/EP2000840A2/en
Publication of EP2000840A9 publication Critical patent/EP2000840A9/en
Publication of EP2000840A4 publication Critical patent/EP2000840A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • G02B27/0043—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements in projection exposure systems, e.g. microlithographic systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

　例えば０．４５以上の比較的大きな像側開口数を有し、且つ反射面の面形状誤差を所要の精度で検査することのできる投影光学系。第１面（４）からの光に基づいて第１面の中間像を形成する第１反射結像光学系Ｇ１と、中間像からの光に基づいて縮小像を第２面（７）上に形成する第２反射結像光学系Ｇ２とを備えている。第１反射結像光学系Ｇ１は、第１凹面反射鏡Ｍ１と、第２凸面反射鏡Ｍ２と、第３反射鏡Ｍ３と、第４凹面反射鏡Ｍ４とを有する。第２反射結像光学系Ｇ２は、第５凹面反射鏡Ｍ５と、第６反射鏡Ｍ６と、第７凸面反射鏡Ｍ７と、第８凹面反射鏡Ｍ８とを有する。第２反射鏡Ｍ２の反射面の中心曲率半径の絶対値をＲＭ２とし、第１面における最大物体高をＨ０とするとき、１＜ＲＭ２／Ｈ０＜６の条件を満足する。
EP07737991A 2006-03-24 2007-03-08 OPTICAL PROJECTION SYSTEM, EXPOSURE DEVICE AND METHOD FOR PRODUCING DEVICES Withdrawn EP2000840A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006081856 2006-03-24
PCT/JP2007/054500 WO2007111104A1 (ja) 2006-03-24 2007-03-08 投影光学系、露光装置、およびデバイス製造方法

Publications (3)

Publication Number Publication Date
EP2000840A2 EP2000840A2 (en) 2008-12-10
EP2000840A9 EP2000840A9 (en) 2009-03-18
EP2000840A4 true EP2000840A4 (en) 2009-07-29

Family

ID=38533102

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07737991A Withdrawn EP2000840A4 (en) 2006-03-24 2007-03-08 OPTICAL PROJECTION SYSTEM, EXPOSURE DEVICE AND METHOD FOR PRODUCING DEVICES

Country Status (6)

Country Link
US (1) US7470033B2 (ja)
EP (1) EP2000840A4 (ja)
JP (1) JP5067674B2 (ja)
KR (1) KR20080103507A (ja)
TW (1) TWI413852B (ja)
WO (1) WO2007111104A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008258461A (ja) * 2007-04-06 2008-10-23 Canon Inc 反射型縮小投影光学系、露光装置及びデバイスの製造方法
US9075322B2 (en) * 2010-09-10 2015-07-07 Nikon Corporation Reflective imaging optical system, exposure apparatus, and method for producing device
JP5782336B2 (ja) * 2011-08-24 2015-09-24 キヤノン株式会社 投影光学系、露光装置及びデバイス製造方法
CN103499877B (zh) * 2013-10-10 2016-04-27 中国科学院光电技术研究所 一种大数值孔径的投影光学系统
US9897560B2 (en) * 2014-12-15 2018-02-20 Raytheon Company Screening of electronic components for detection of counterfeit articles using automated inspection system
US10586318B2 (en) 2016-10-07 2020-03-10 Raytheon Company Automated model-based inspection system for screening electronic components
JP6635904B2 (ja) * 2016-10-14 2020-01-29 キヤノン株式会社 投影光学系、露光装置及び物品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315918A (ja) * 2004-04-27 2005-11-10 Nikon Corp 反射型投影光学系および該反射型投影光学系を備えた露光装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686728A (en) * 1996-05-01 1997-11-11 Lucent Technologies Inc Projection lithography system and method using all-reflective optical elements
US6213610B1 (en) * 1998-09-21 2001-04-10 Nikon Corporation Catoptric reduction projection optical system and exposure apparatus and method using same
US6109756A (en) * 1998-09-21 2000-08-29 Nikon Corporation Catoptric reduction projection optical system
JP2000100694A (ja) * 1998-09-22 2000-04-07 Nikon Corp 反射縮小投影光学系、該光学系を備えた投影露光装置および該装置を用いた露光方法
JP2002116382A (ja) 2000-10-05 2002-04-19 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
DE10052289A1 (de) 2000-10-20 2002-04-25 Zeiss Carl 8-Spiegel-Mikrolithographie-Projektionsobjektiv
TW573234B (en) * 2000-11-07 2004-01-21 Asml Netherlands Bv Lithographic projection apparatus and integrated circuit device manufacturing method
JP2002162566A (ja) * 2000-11-27 2002-06-07 Nikon Corp 光学系の設計方法，光学系および投影露光装置
JP2003015040A (ja) * 2001-07-04 2003-01-15 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP4134544B2 (ja) * 2001-10-01 2008-08-20 株式会社ニコン 結像光学系および露光装置
JP2004138926A (ja) * 2002-10-21 2004-05-13 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP3938040B2 (ja) * 2002-12-27 2007-06-27 キヤノン株式会社 反射型投影光学系、露光装置及びデバイス製造方法
JP2005141158A (ja) * 2003-11-10 2005-06-02 Canon Inc 照明光学系及び露光装置
JP2005189248A (ja) 2003-12-24 2005-07-14 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP2005189247A (ja) 2003-12-24 2005-07-14 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
TW200622304A (en) * 2004-11-05 2006-07-01 Nikon Corp Projection optical system and exposure device with it
KR101332494B1 (ko) * 2005-02-15 2013-11-26 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 디바이스의 제조 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315918A (ja) * 2004-04-27 2005-11-10 Nikon Corp 反射型投影光学系および該反射型投影光学系を備えた露光装置

Also Published As

Publication number Publication date
JP5067674B2 (ja) 2012-11-07
EP2000840A2 (en) 2008-12-10
KR20080103507A (ko) 2008-11-27
TWI413852B (zh) 2013-11-01
JPWO2007111104A1 (ja) 2009-08-06
WO2007111104A1 (ja) 2007-10-04
EP2000840A9 (en) 2009-03-18
US7470033B2 (en) 2008-12-30
TW200741325A (en) 2007-11-01
US20070223119A1 (en) 2007-09-27

Similar Documents

Publication Publication Date Title
EP2000840A4 (en) OPTICAL PROJECTION SYSTEM, EXPOSURE DEVICE AND METHOD FOR PRODUCING DEVICES
EP2960709B1 (en) Projection device and projection system
CN101416117B (zh) 微光刻投影光学系统、工具及其制造方法
CN106030415B (zh) 用于投射光刻的照明光学单元
US20140320838A1 (en) Imaging optical system
JP5842302B2 (ja) マイクロリソグラフィのための投影光学系
WO2002031570A1 (fr) Procede d'evaluation de la qualite d'images
EP1811327A4 (en) OPTICAL PROJECTION SYSTEM OF THE REFLECTION TYPE AND EXPANSION DEVICES EQUIPPED WITH SUCH OPTICAL PROJECTION SYSTEM OF THE REFLECTION TYPE
WO2008081903A1 (ja) 撮像装置および情報コード読取装置
JP2011517786A5 (ja)
JP2005301074A (ja) 投影光学系
EP1983362A4 (en) catadioptric imaging system, exposure device, and device manufacturing method
US7001031B2 (en) Image-forming optical system, projection type image display apparatus and image pickup apparatus
EP1980890A4 (en) CATADIOPTRIC IMAGING SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
EP1860477A4 (en) OPTICAL PROJECTION SYSTEM, EXPOSURE EQUIPMENT, AND DEVICE MANUFACTURING METHOD
EP1413908A3 (en) Projection optical system and exposure apparatus equipped with the projection optical system
TW201625913A (zh) 非球面鏡、非球面鏡之光軸對準裝置、非球面透鏡、非球面透鏡之光軸對準裝置及卡士格冉望遠鏡
HK1097048A1 (en) Projection optical system and exposure apparatus with the same
WO2010055688A1 (ja) 測距装置
JP2005234452A (ja) 投影光学系
WO2008087827A1 (ja) 結像光学系、露光装置、およびデバイス製造方法
TWI701458B (zh) 反射折射光學系統、照明光學系統、曝光裝置及物品製造方法
JP2009267064A (ja) 測定方法および露光装置
WO2007023665A1 (ja) 投影光学系、露光装置、およびデバイスの製造方法
CN107918186A (zh) 六非球面透镜

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20080826

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

PUAB Information related to the publication of an a document modified or deleted

Free format text: ORIGINAL CODE: 0009199EPPU

REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1120615

Country of ref document: HK

A4 Supplementary search report drawn up and despatched

Effective date: 20090629

RIC1 Information provided on ipc code assigned before grant

Ipc: H01L 21/027 20060101ALI20071119BHEP

Ipc: G03F 7/20 20060101ALI20071119BHEP

Ipc: G02B 17/06 20060101AFI20090623BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20090901

REG Reference to a national code

Ref country code: HK

Ref legal event code: WD

Ref document number: 1120615

Country of ref document: HK