EP1990293B1 - Dispositif et procédé de séparation - Google Patents

Dispositif et procédé de séparation Download PDF

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Publication number
EP1990293B1
EP1990293B1 EP07009043A EP07009043A EP1990293B1 EP 1990293 B1 EP1990293 B1 EP 1990293B1 EP 07009043 A EP07009043 A EP 07009043A EP 07009043 A EP07009043 A EP 07009043A EP 1990293 B1 EP1990293 B1 EP 1990293B1
Authority
EP
European Patent Office
Prior art keywords
bands
objects
distance
substrates
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP07009043A
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German (de)
English (en)
Other versions
EP1990293A1 (fr
Inventor
Denise Nagel
Octavio Javier Arredondo Hinojosa
Joshua Zindel
Dirk MÜLLER
Christoph Moosmann
Marco Bisconti
Andreas Anderhuber
Norbert BÜRGER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rena Sondermaschinen GmbH
Original Assignee
Rena Sondermaschinen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena Sondermaschinen GmbH filed Critical Rena Sondermaschinen GmbH
Priority to EP07009043A priority Critical patent/EP1990293B1/fr
Priority to DE502007002047T priority patent/DE502007002047D1/de
Priority to AT07009043T priority patent/ATE449021T1/de
Publication of EP1990293A1 publication Critical patent/EP1990293A1/fr
Application granted granted Critical
Publication of EP1990293B1 publication Critical patent/EP1990293B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

Definitions

  • the invention relates to a device for receiving and for fixing and conveying substantially flat objects so that they can be controlled from a stack and separated without damage. Furthermore, the invention relates to a method for singulating such articles using the device according to the invention.
  • the technical field of the invention relates to the processing or handling of thin, fracture-sensitive and disk-shaped objects, as present, for example, in semiconductor and solar technology in the form of so-called wafers.
  • substrate blocks in the present case silicon blocks or silicon columns
  • substrates in the present case thin, break-sensitive disks
  • the substrates produced in this way typically have thicknesses of a few tens to 300 ⁇ m and are generally square or rectangular. You then preferred a respective edge length up to 210 mm.
  • the substrate blocks are usually glued to a holding device for sawing.
  • This holding device typically consists of a metal carrier, on which in turn a glass plate is applied as an intermediate carrier, wherein the substrate block to be processed is glued to the glass plate.
  • a glass plate is applied as an intermediate carrier, wherein the substrate block to be processed is glued to the glass plate.
  • other materials for the formation of the holding device may be provided according to the prior art.
  • each of the substrates produced in this way continues to adhere to the glass plate with its one edge via an adhesive bond, resulting in a comb-like structure which is held together by the holding device.
  • a pre-cleaning in which a part of the sawing, binding and cooling agent formed during sawing Abrasion (the so-called slurry), which is between the individual substrates or is deposited them, is washed out.
  • a problem with conventional techniques is that the substrates drip dry during the treatment, whereby the slurry constituents solidify on the substrate surfaces and can not be removed. Consequently, it must be ensured that the substrates no longer dry after sawing at any time.
  • Another problem relates to the formation of adhesion forces by a two-dimensional contact of two adjacent substrates. This force, which is exacerbated in the case of the presence of slurry residues on the substrate surface, must be overcome in any case in the singulation and represents a considerable risk in terms of the desired integrity of the individual substrates. These adhesion forces also occur when the substrates are in a liquid medium, which is provided according to the invention.
  • the substrates are finally separated from each other, so taken out of the loose stack composite, so that each substrate can be further processed or processed individually.
  • An example of such a step to be carried out on isolated substrates is a final cleaning of the substrates by means of ultrasound.
  • the DE-OS 197 16 123 A1 describes a transport device with three conveyor belts, two of which are arranged laterally and parallel to each other and another horizontal base conveyor belt is provided. According to the technical teaching of this document, the simultaneous use of these three conveyor belts is mandatory. These bands each have incisions for vertical "recording" of the substrates. The device described is used in the dry, which is why the substrates need not be fixed against unintended floating.
  • a robot-like device grips the substrate to be detached via suction devices, wherein the substrate is released from the holding device by an oscillating movement of the device. In this case, oscillating movements are provided in different directions.
  • the gripping of the substrate to be separated takes place with a suction device arranged above the surface of the substrate and attached to the device. To release the substrate, a certain overpressure is generated within the suction device, so that the detached substrate is removable from the device again.
  • a device for detaching individual thin, fragile and disc-like substrates is known.
  • the substrate block with the already sawn substrates is in a container filled with a fluid.
  • the holding device is vertically aligned together with the still fixed to the holding device substrates, so that the substrate to be separated is arranged parallel to the fluid surface.
  • a wedge device ensures that a separation between the glass plate and the substrate to be separated takes place.
  • An arranged in close proximity to the substrate conveyor belt ensures that the detached and floating substrates are removed.
  • a sliding device provides that the holding device is repeatedly brought into the same position and moved horizontally against the wedge device for detachment of the respective substrate.
  • On the other side of the conveyor belt a device is provided with which the separated substrates are automatically inserted into a stand. The aim of the detachment is that the separated, disc-like substrates are stacked after their removal from the holding device and inserted into predetermined facilities or placed directly flat on top of each other.
  • a hand carried out singling involves the risk that the very thin and fragile and disk-shaped substrates break, especially due to the increased adhesive forces.
  • the device according to the invention serves to simultaneously receive and fix and convey a plurality of vertically positioned substantially flat objects, also referred to below as substrates, at a defined distance from each other.
  • the device comprises at least two bands arranged parallel to one another, with which the static friction required for fixing and conveying is exerted on the lateral edges of the objects, the distance between the bands being greater than the width of the flat objects and the bands being drivable in opposite directions ,
  • the device according to the invention comprises means for driving the bands, and means for varying the distance between the at least two bands arranged parallel to one another. These respective means can be provided once or several times.
  • the device according to the invention therefore enables the processing of substrates while maintaining a given between two substrates distance.
  • This distance arises either from the sawing process or by using a suitable means such as a comb and / or brush-type device, which is preferably introduced only temporarily into the substrate block and leads to the desired spacing.
  • the device according to the invention may comprise a suitable means in the form of a flow device, such as a nozzle bar, over which Fluid can be introduced from at least one side in the substrate block.
  • the surface of the strip coming into contact with the substrates may not be smooth, but controlled uneven, for example by providing a suitable nub or groove pattern, the latter being preferably perpendicular, ie in the direction of the substrate edges and most preferably has a groove spacing, which corresponds to the distance of the saw cuts of the substrate stack.
  • a suitable nub or groove pattern the latter being preferably perpendicular, ie in the direction of the substrate edges and most preferably has a groove spacing, which corresponds to the distance of the saw cuts of the substrate stack.
  • a further preferred embodiment of the band comprises brush-like structures on the side of the band facing the substrates, with brush-like structures in the form of a knob or groove pattern being particularly preferred.
  • the width of a band or several bands, which fulfill the function of this one band as a band group, must be such that a secure fixing and conveying of the substrates is ensured.
  • this width corresponds to at least one third and at most four fifths of the substrate height.
  • the width is such that a sufficiently large free space remains, in particular in the region of the holding device, through which, for example, fluid can be introduced for the purpose of cleaning or exits again.
  • the bands must be positionable in relation to the substrate block in such a way that a secure fixing of the substrates is ensured. This means that the static friction required for fixing and conveying can be exerted by the band (s) on the lateral substrate edges.
  • the device according to the invention further comprises a base plate, on, at or below which the means or means for driving the tapes and / or the means for changing their distance are arranged.
  • the base plate is designed in two parts, wherein each part in each case at least one band or a band group is assigned. It may be advantageous to close the gap between the halves of a divided base plate by means of a suitable cover, for example to avoid parts of broken substrates from penetrating into the space between the halves of the base plate.
  • these tape guiding aids can be designed to be self-drivable, wherein both active, self-rotating, as well as passive, co-rotating versions can be realized.
  • fixed tape guide aids can be provided, if at least one of the aids is designed drivable.
  • these tape guide aids are positioned vertically or can be moved to fix the objects in the vertical and are rotated by suitable motors in rotation about their longitudinal axes, if it is an active version.
  • the means for driving In order to drive a band or a band group, the means for driving must be connected to at least one of the (actively or passively) rotatable band guiding aids by means of a suitable device, such as a transmission, such that transmission of the movement to the rotatable band guide aid and thus takes place on the inside of the band located in contact with the substrate edges.
  • a suitable device such as a transmission
  • the bands of both sides of the device according to the invention are driven by only a single means for driving the bands, again using a suitable gear which distributes the movement to both bands.
  • each band side and / or each band guide aid can be associated with a separate means for driving, if desired.
  • the means for driving the tape is completely in the tape guide integrated, for example, by an electric motor with its stator is firmly fixed to the base plate, and the band is placed around the outside of the rotor and driven so.
  • the drive-generating element does not necessarily have to be part of the device according to the invention. It is only necessary to ensure that the means for driving the belts are supplied with the movement required for this purpose, which can be achieved by means of suitable devices for transmission, such as transmission. Screws, shafts, threaded rods, etc. can be realized.
  • the movement-generating element of the device according to the invention would be functionally assigned as an external component. It may be arranged or provided on the preferably inner wall of the surrounding basin or else outside thereof.
  • the device according to the invention preferably further comprises corresponding hydraulic, pneumatic, and / or mechanical interfaces by means of which the drive-generating element can be coupled to the means or means for driving the bands, this coupling occurring, for example, during immersion of the apparatus in a bath, preferably with the aid of self-centering elements.
  • the means for changing the distance of the bands are preferably designed as pneumatic cylinders. Alternatively, however, all the same means may be used, such as electric motors, hydraulic cylinders and / or mechanical drives. In the case of the presence of a base plate, these means are preferably arranged on, at and / or below it.
  • the fixation of the objects by a change in the distance between the two halves and thus the distance of the bands takes place in such a way that the parallelism of their surfaces is maintained at all times substantially.
  • This embodiment thus relates to a device in which the bands are always positioned vertically.
  • the bands are at rest in a horizontal or oblique position. Therefore, the angle between you can be between 0 ° and 180 °, with an angle between 15 ° and 30 ° is particularly preferred.
  • the fixing of the objects according to the invention is always characterized in that they are held by the bands in an upright position laterally with sufficient pressure.
  • both sides can be approached simultaneously or successively to the block.
  • a band side is fixed. In this case, fixing is done by moving up the other side of the belt.
  • the drive means or tape guiding aids are preferably designed as rollers or rollers and arranged so that each one band or a band side of at least two of these rollers or rollers is tensioned.
  • the device according to the invention further comprises means for stabilizing the band or bands.
  • This means for stabilization ensures that the static friction required for fixing and conveying is transmitted as effectively as possible over the entire length of the band or bands and as uniformly as possible on the lateral substrate edges.
  • This means is preferably formed by a substantially dimensionally stable support structure, which is arranged between the tape guide aids.
  • An advantage of this embodiment is that the contact pressure required for the expression of the required static friction can also be provided independently of the belt tension.
  • the means for stabilizing the band is attached to the band guide aids so that it always follows the movements of these aids in the change of the band gap.
  • the means for stabilizing the strip is attached to the base plate or in addition thereto.
  • the means for band stabilization can simultaneously take over the function of the means for changing the band gap, provided that the base plate is designed in two parts and movable and / or rails or equivalent means, over which the means for band stabilization can be moved.
  • the means for stabilizing the strip is preferably designed in one piece with a continuous contact surface, it can also be designed in several parts and have openings.
  • the device according to the invention may comprise a means for producing a spacing of the flat objects insofar as a continuous spacing is still to be produced and has not already been produced by a preceding process step.
  • This means may particularly preferably be a flow device, for example a nozzle strip, with which fluid such as water, glycol and / or cleaning fluid can be introduced from all sides, but preferably laterally into the substrate stack or the substrate block, thereby causing or assisting fanning of the substrates becomes.
  • this means may be a comb and / or brush-like structure which is introduced at least partially and preferably only temporarily into the intermediate spaces of the substrate block predetermined by the sawing process and / or the flow device to produce a uniform distance the desired spacing leads. It may be necessary for the product to be used after its introduction into the substrate stack is moved parallel to the lateral substrate edges.
  • a means for collecting the separated substrates may be provided.
  • This may particularly preferably be funnel-shaped, so that the just-isolated substrate slides into the funnel and is guided by the latter in a direction predetermined by the orientation of the funnel.
  • This direction can point, for example, to a downstream conveyor belt.
  • this direction may also point in a magazine ("carrier"), which is suitable for receiving a plurality of substrates simultaneously.
  • the funnel-shaped tool has the task of guiding the substrate so that it reaches the next free space in the magazine without colliding with a previously inserted substrate in the magazine.
  • the positioning of the magazine and / or the funnel-shaped auxiliary means takes place by means of a suitable feed device.
  • the determination of the location at which the currently singled substrate passes can be done by tilting the funnel-shaped auxiliary means.
  • the device according to the invention may also comprise a means for removing an isolated substrate.
  • the means for removing the substrate may, according to a preferred embodiment, be a conveyor belt, a roller conveyor, or more preferably a system consisting of at least two parallel belts, whereby the respective separated substrate can be picked up and transported away.
  • these means may be arranged for removal rather horizontally or at an angle to the horizontal.
  • the device may also comprise a means for removing the holding device.
  • this means may be attached under or on the base plate or on the or the guide aids.
  • the means for removing the holding device can also be arranged outside the device according to the invention and, for example, a Be component of the surrounding treatment basin, so that it is functionally associated with the device according to the invention.
  • the device according to the invention further comprises a fixing aid for contacting the holding device present in a plurality of flat objects to be processed.
  • This fixing aid is constructively arranged as at least one side releasable connecting element between the holding device and the one or more guide aids and serves to couple the same.
  • the preferably two-part fixing aid can either be attached directly to the guide aids and / or to the base plate. It is only essential that a closed power flow between the holding device, fixing aid and guide aid is produced.
  • the fixation aid is provided by extended guide aids, wherein the position of the ligament (s) is maintained unaltered.
  • This fixing aid according to the invention ensures that the holding device and guide aids, and thus the bands are in a mutually fixed position, which in particular does not change when the device according to the invention is moved together with the holding device to this example of a treatment station for to transport next.
  • This will ensure that the fragile substrates, once in contact with and held by the tapes, are not damaged by the generally high weight of the fixture which would load them without the fixture aid.
  • This weight is instead taken up via the fixation aid, so that damage to the substrates is also possible in the case of jerky movements, e.g. when picking up or discontinuing the held substrate stack, is almost impossible.
  • Embodiments for the fixing aid relate to structures of rods and / or plates, which have a sufficient length to reach from the holding device to the guide or base plate, wherein a coupling of the rods and / or plates with the holding device, for example via holes, screw, clamps , with or without Locking mechanisms can be done, with those variants are to be preferred, which allow a secure coupling on the one hand and a quick and easy decoupling on the other hand.
  • the relief of the substrates can be carried out by a still connected to them holding device such that at least in addition to the substrates, a clamping of the holding device takes place by means of the present invention provided guide aids and tapes.
  • the guide aids and / or the holding device are to be adapted so that when approaching the bands a sufficiently stable clamping and the holding device is made possible with the same.
  • This can be achieved, for example, by positive connections such as projections, recesses, pin connections together with corresponding receptacles.
  • additional means are preferably provided which allow a separate coupling and uncoupling of the holding device, such. movable locks and the like.
  • the fixing aid is designed such that it can also perform the function of the means for removing the holding device.
  • the optionally two-part fixation aid must be made movable, so that the distance between the element or elements of the fixation aid, which serve the contacting of the holding device, and the one or more attachment points of the fixation aid (guide aid and / or base plate) can be changed.
  • the change in distance can be brought about, for example, by means of suitable rails parallel to the central axis of the guide aid (s), or by means of a telescopic design.
  • the fixing aid is provided by the extended guide aids
  • the change in the distance and thus the removal of the holding device by telescopically extending the integrated in the guide aids fixing aid are moved uniformly, it is also conceivable that only one side moves and the other side allows tilting of the one-sided lifted holding device from the substrate upper edges.
  • the device may also be assigned a means for removing the holding device.
  • This means serves to produce a greater distance between detached holding device and substrate stack as the minimum distance necessary for conveying, since this is advantageous or necessary under certain conditions.
  • this means is designed such that with him not only the holding device, but also the fixing aid in contact with it can be removed, provided that the latter is releasably secured.
  • the substrate stack is positioned between the belts.
  • This process of loading can be done manually or automatically, with the movement required for this to be carried out by the substrate stack and / or the belts. That is, the substrate stack or block is placed in the substantially stationary device, or the device is positioned around the substantially stationary substrate stack or block. According to a third variant, the movement required for loading is carried out both by the substrate stack or block and by the device.
  • the substrates are positioned in the space between the two bands or band groups of the device according to the invention so that the bands are each laterally and approximately equidistant from the substrates.
  • the time of loading can be directly after sawing, after the generally subsequent pre-cleaning, or only after the replacement of the holding device. Accordingly, the location of loading within a device may be in the range of sawing, peeling, pre-cleaning or singulation. In this case, it may preferably be in the range of a device which combines some or all of the process steps mentioned above, which are necessary for working up and working up the substrate stack.
  • the fixing of the substrates is effected according to the invention by the continuous reduction of the distance of the strips. This process lasts until the bands abut both sides of the substrate stack and touch the entirety of the lateral substrate edges with a certain force.
  • a suitable choice of material of the band which may preferably be made of elastic material such as rubber or similar synthetic material, and a suitable dosage of influenceable over the distance force is generated between the band and substrate edge stiction, which is greater than the weight of a substrate so that it is safely held between the two belts and is recoverable.
  • An essential feature of the invention is that the static friction acts not only vertically in the direction of gravity, but also horizontally in the direction of the belt.
  • the device according to the invention may comprise a fixing aid with which the retaining device present in the case of a plurality of flat objects to be machined is contacted before the step of conveying.
  • This fixing aid can be used at any time prior to conveying the flat objects and creates a stable connection between the holding device and the guide aids or the base plate.
  • the fixing aid can be used even before the first transport of the sawed substrate stack, it is particularly preferred that it is used during or immediately before the fixing of the substrates, ie when the tapes are approached to the substrate edges.
  • Unlocking the fixation aid can be done according to the invention at any time after coupling the same with the guide aids and / or the base plate. Preferably, however, this decoupling takes place only when the adhesive layer has been dissolved or dissolved and removal of the holding device is imminent.
  • the removal of the holding device is achieved by a suitable movement of those parts of the fixing aid, which are directly related to the holding device, this movement preferably should be evenly away from the now exposed upper edges of the flat objects to prevent damage by tilting.
  • the removal can also be done by a combination of unilateral extension and a rotational, side-folding movement is performed.
  • the fixing aid simultaneously has a possibility for removing the holding device
  • the production of the at least necessary minimum distance for conveying is already effected by the fixing aid, so that a promotion of the flat objects is made possible and a further removal of the holding device is not necessary by a separate means.
  • the present invention desired complete separation requires a minimum spacing of the holding device from the upper edges of the substrates, but not the removal of any remaining adhesive threads.
  • An at least minimal spacing is necessary, since otherwise it can come to a catching unevenness of the sawn glass plate with the detached substrate edges. Such unevennesses may have been present in the glass plate from the very beginning, or may have been formed on the glass plate only by the preceding sawing process, and e.g. in the form of burrs.
  • This minimum distance between the substrate edges and the holding device is two millimeters.
  • the thus detached holding device is then to be removed from the fixed substrate stack in such a way that no damage is caused to it by e.g. Abhyroidde edges in the connection zone to the holding device takes place.
  • this decrease takes place by means of the aforementioned fixing device with simultaneous function of the means for removing the holding device.
  • the removal process can be carried out by means of suitable shaking movements, such as e.g. be supported by ultrasound.
  • the bands are then driven by the method according to the invention in such a way that both bands or groups of bands move at the same speed but in opposite directions. Due to the stiction existing between bands and substrates, the objects are moved with the bands in the tape feed direction.
  • the separation of the separate from the holding device, but fixed with the device according to the invention substrates is done by conveying the individual substrates out of the fixation.
  • a release point which is formed by the fact that the distance of the two bands where its parallelism ends due to the rounded shape of the tape guide aids according to the invention increases again, so that the frictional forces between the tape and substrate are no longer sufficient and the substrate in the direction of Gravity is released.
  • the release point is just on the Plane passing through the two axes of the most downstream belt guide aids.
  • the substrate leaves the device through a funnel-like substrate guiding aid.
  • the substrate is transferred by means of the funnel-like substrate guiding aid into a suitable magazine.
  • the substrate leaves the device such that it is transferred, for example, in a controlled manner to a preferably slightly spaced-apart means for removing the separated substrate.
  • a means may be, for example, a conveyor belt, a roller conveyor, or more preferably a system consisting of at least two parallel belts onto which the substrate falls at a predetermined angle.
  • the collection can also take place in such a way that the separated substrate is transferred into a magazine which particularly preferably holds the next free space by means of a suitable mechanism so that the separated substrate can hold it in a direct way and without can reach unnecessary surface contact with the environment.
  • the magazine according to the invention can furthermore also contain suitable means for spacing the substrates, so that a mutual contact of the substrate surfaces is also avoided here. Such a means for spacing can be achieved, for example, by comb-like structures on the side walls of the magazine according to the invention.
  • the device according to the invention is brought after loading and fixing of the substrates from the initially horizontal position by pivoting in a vertical position, so that the objects are horizontally over or positioned with each other.
  • the end of the device over which the release takes place have up or down. This means that a respective substrate to be released leaves the device upwards or downwards.
  • the method according to the invention may comprise an additional step of removing the separated flat objects.
  • the means set out above can be used.
  • the removal of the upwardly released, floating horizontally on the fluid objects can preferably be done by means of suitable flow aids.
  • FIG. 1 shows the device 1 according to the invention in a three-dimensional view without a substrate block inserted into the space between the belts 7.
  • a band 3 On two opposite sides of a divided base plate 2 is ever a band 3, in which case only the rear is shown.
  • Each band 3 is stretched between two guide aids 4.
  • means for driving the belts 5 and means for varying the distance of the belts 6 are provided.
  • these means 5 and 6 are located on the underside of the base plate 2.
  • the means 6 allow a parallel movement of the bands 3 towards or away from each other by the corresponding movements of both halves of the base plate 2 are executed.
  • FIG. 2 shows schematically the movement of the in FIG. 1 illustrated device in parallel fixing a substrate block.
  • a substrate block 10 which consists of the actual substrates 11 and the holding device 12.
  • FIG. 3 shows the movement when using a variant of the in FIGS. 1 and 2 described basic configuration in which the base plate 2 is not divided, but is integrally formed, and in which the guide means 4 are mounted for tensioning the band 3 movable on the base plate.
  • each guide aid 4 is associated with its own means for changing the distance 6, or whether, for example, each belonging to a band 3 means 4 are moved by a common means 6.
  • FIG. 4 shows the sequence of movement of a further variant of the basic configuration of the device 1.
  • the change in distance is achieved by angling the tape guide aids 4 in the direction 15.
  • the tilting movement takes place about a pivot point 8, which is preferably parallel to the longitudinal axis of the base plate 2.
  • the final position of the straps 3 must be such for the step of fixation that the straps can apply the necessary static friction to the substrates for secure fixing and conveying.
  • FIG. 5 shows the movement of a variant of in FIG. 4 described configuration.
  • the base plate 2 is not divided, but integrally formed, and the respective angling of the guide aid 4 is carried out by pivoting about an attached to its foot pivot 9, as indicated by the arrow 15.
  • the swivel joint 9 can also be located at a different location, wherein only has to be ensured that at no time parts of the tape guide help 4 protrude into the space 7, otherwise a disability during loading of the substrate block 10 would result.
  • FIG. 6 shows the device 1 according to the invention together with two variants of the fixing aid 13, wherein the device 1 is shown only half each.
  • the fixing aid 13 establishes a connection between the holding device 12 and the guide aid 4, so that a relative movement between the holding device 12 and the guide aid 3 is prevented at any time after engagement of the fixing aid 13 in the holding device 12 by means of methods in the direction 14.
  • the variant shown here is particularly suitable in combination with separately movable on the base plate 2 guide aids. 4
  • FIG. 6 shows on the right an alternative embodiment in which the fixing aid 13 is attached to a divided base plate 2. Here is the making an engagement by the movement of the base plate halves toward each other.
  • the fixing aid 13 is movable independently of the guide aid 4 or the base plate 2 in the direction of arrow 14, so that the engagement of the fixing aid 13 does not necessarily have to take place simultaneously with the fixing of the substrates 11.
  • the fixing aid 13 also serves to remove the holding device 12 from the Substrates 11. This can be done for example by a method of standing with the holding device 12 fixing aid 13 in the axial direction of the guide aids 4, so that a distance between the upper edges of the substrates 11 and the holding device 12 is generated. It is clear that this removal can take place only after an adhesion or dissolution of the adhesive. After removal of the holding device 12, this can be taken over by a likewise not shown means for removing the holding device and transported away from the region of the device.
  • FIG. 7 shows a further embodiment of the device according to the invention, which similar to that in FIG. 6 illustrated approach causes a backup of the holding device 12 together with the substrates 11.
  • the guide aids 4 are designed in such a way that they protrude beyond the upper edges of the substrates 11 facing the holding device 12 and project into the region of the side surfaces of the holding device 12. As shown by way of example, there is then a clamping or a release of both the substrates 11 and the holding device 12 from the belts 3 by a movement of the guide aids in the direction 14.
  • FIG. 8 shows the device 1 according to the invention with a means for removing isolated substrates 20, wherein the receiving surface 21 forms an angle of 0 ° ⁇ ⁇ 90 ° and preferably 30 ° ⁇ ⁇ 60 ° with the substrate surface. Accordingly, the substrates 11 separated by the substrate block 10 fixed according to the invention fall a small way in the direction of gravity before they strike the receiving surface 21 and remain there.
  • FIG. 9 shows the device 1 according to the invention in a vertical arrangement, together with a means for transporting 20 separated substrates 11.
  • the means 20 is arranged substantially below the device 1.
  • the receiving surface 21 of the means 20 is aligned substantially parallel to the substrate surface. Again, the scattered substrates 11 fall in the direction of gravity before they lie on the receiving surface 21 and be transported away by appropriate transport movement.
  • FIG. 10 shows the device 1 according to the invention with a means for collecting 22, which is arranged under the location of the substrate separation that the separated substrates 11 slide or fall automatically or with the aid of a funnel-shaped guide 23, for example, in the means for collecting 22.
  • the means for catching 22 can be displaced linearly in the direction of movement 24 so that, regardless of the degree of filling, care can always be taken that no collision of the substrates occurs with one another.

Claims (15)

  1. Appareil pour la réception simultanée, aussi que la fixation et le déplacement, de plusieurs objets plans en substance, positionnés verticalement, avec un espacement défini les uns par rapport aux autres, comprenant :
    - au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre, par lesquelles la friction adhésive nécessaire pour la fixation et le déplacement est exercée sur les arêtes latérales des objets, la distance entre les bandes (3) étant plus grande que la largeur des objets plans (11) et les bandes (3) étant activables en sens opposé ;
    - moyens pour actionner les bandes (5) ;
    - moyens pour modifier la distance (6) entre les au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre.
  2. Appareil selon la revendication 1, comprenant en plus une plaque de base (2), sur laquelle, à laquelle ou sous laquelle sont placés les moyens pour actionner les bandes (5) et/ou les moyens pour modifier leur distance (6).
  3. Appareil selon la revendication 2, dans lequel la plaque de base (2) est composée de deux parties, chaque partie étant affectée à au moins une bande (3).
  4. Appareil selon la revendication 2 ou la revendication 3, comprenant en plus des aides de guidage (4) pour tendre les au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre, ces aides de guidage (4) étant fixées à la plaque de base (2).
  5. Appareil selon la revendication 2, la revendication 3 ou la revendication 4, comprenant en plus une aide de fixation (13) pour créer une liaison stable entre le dispositif de maintien (12) présent lorsque l'on travaille avec plusieurs objets plans (11) et la plaque de base (2), respectivement les aides de guidage (4).
  6. Appareil selon l'une des revendications 1 à 5, dans lequel le ou les moyens pour modifier la distance (6) sont un ou plusieurs cylindres pneumatiques.
  7. Appareil selon l'une des revendications 1 à 6, comprenant de plus un moyen pour recueillir (22) un objet séparé (11), lequel est de préférence en forme d'entonnoir.
  8. Appareil selon l'une des revendications précédentes, comprenant de plus un moyen pour l'évacuation (20) d'un objet séparé (11), le moyen (20) étant de préférence conçu comme une bande de transport qui transporte l'objet à plat.
  9. Procédé pour la séparation de plusieurs objets plans positionnés verticalement en utilisant un appareil avec lequel des objets en substance plans peuvent être reçus en position debout verticale ainsi que être fixés et déplacés en conservant une distance définie les uns par rapport aux autres, l'appareil (1) comprenant les composantes suivantes :
    - au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre, la distance entre les bandes (3) étant plus grande que la largeur des objets plans (11) et les bandes étant activables en sens opposé ;
    - moyens pour actionner les bandes (5) ;
    - moyens pour modifier la distance (6) entre les au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre ;
    en réalisant les étapes suivantes :
    - charger l'appareil (1) avec les objets (11) ;
    - fixer les objets (11) en réduisant la distance entre les au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre ;
    - déplacer les objets (11) fixés dans la direction donnée par les bandes (3) activables en sens opposé ;
    - séparer les objets (11) par le déplacement de ceux-ci hors du domaine de fixation, de telle façon qu'un objet à séparer (11) est libéré de la fixation.
  10. Procédé selon la revendication 9, dans lequel l'appareil (1) utilisé comporte de plus une plaque de base (2) sur laquelle, à laquelle ou sous laquelle sont placés les moyens pour actionner les bandes (5) et/ou les moyens pour modifier leur distance (6).
  11. Procédé selon la revendication 10, dans lequel l'appareil (1) utilisé comporte de plus des aides de guidage (4) pour tendre les au moins deux bandes (3) placées en parallèle l'une par rapport à l'autre, les aides de guidage (4) étant fixées à la plaque de base (2).
  12. Procédé selon la revendication 10 ou la revendication 11, dans lequel l'appareil (1) utilisé comprend de plus une aide de fixation (13) avec laquelle le dispositif de maintien (12) présent lorsque l'on travaille avec plusieurs objets plans (11) est lié de manière stable avec la plaque de base (2), respectivement les aides de guidage (4), avant l'étape de déplacement.
  13. Procédé selon l'une des revendications 9 à 12, dans lequel l'appareil (1) après la fixation des objets (11) est basculé de telle manière que les objets sont positionnés horizontalement au dessus, respectivement au dessous, les uns des autres.
  14. Procédé selon l'une des revendications 9 à 13, comprenant de plus la réception d'un objet (11) séparé et libéré de la fixation en utilisant une aide de guidage de substrat (23) en forme d'entonnoir.
  15. Procédé selon l'une des revendications 9 à 14, comprenant de plus l'évacuation des objets plans séparés (11).
EP07009043A 2007-05-04 2007-05-04 Dispositif et procédé de séparation Not-in-force EP1990293B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP07009043A EP1990293B1 (fr) 2007-05-04 2007-05-04 Dispositif et procédé de séparation
DE502007002047T DE502007002047D1 (de) 2007-05-04 2007-05-04 Vorrichtung und Verfahren zur Vereinzelung
AT07009043T ATE449021T1 (de) 2007-05-04 2007-05-04 Vorrichtung und verfahren zur vereinzelung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07009043A EP1990293B1 (fr) 2007-05-04 2007-05-04 Dispositif et procédé de séparation

Publications (2)

Publication Number Publication Date
EP1990293A1 EP1990293A1 (fr) 2008-11-12
EP1990293B1 true EP1990293B1 (fr) 2009-11-18

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Country Status (3)

Country Link
EP (1) EP1990293B1 (fr)
AT (1) ATE449021T1 (fr)
DE (1) DE502007002047D1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020105818A1 (de) 2020-03-04 2021-09-09 Dietrich GmbH Rollkörperbahn

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008060014A1 (de) * 2008-11-24 2010-05-27 Gebr. Schmid Gmbh & Co. Verfahren und Vorrichtung zur Handhabung eines zersägten Waferblocks
CN114148672B (zh) * 2021-12-10 2022-12-09 广东华工环源环保科技有限公司 一种蛋托堆叠后的分离装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1033503A (fr) * 1951-03-07 1953-07-13 Rampe de glissement à parois mobiles pour machines à encoller
JPS60188205A (ja) * 1984-03-07 1985-09-25 Canon Inc 保管装置
GB8429123D0 (en) * 1984-11-17 1984-12-27 Metal Const Ltd Transfer device
US4854817A (en) * 1987-10-16 1989-08-08 Dorner Mfg. Corp. Apparatus for unstacking articles
US5331874A (en) * 1991-10-16 1994-07-26 Universal Frozen Foods, Inc Cutting apparatus
DE19716123C2 (de) 1997-04-17 2000-01-27 Steag Hamatech Ag Vorrichtung zum Bewegen von Substraten durch eine Substrat-Behandlungseinrichtung
US6119673A (en) * 1998-12-02 2000-09-19 Tokyo Seimitsu Co., Ltd. Wafer retrieval method in multiple slicing wire saw
DE19900671C2 (de) 1999-01-11 2002-04-25 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Vereinzeln von scheibenförmigen Substraten, insbesondere zur Waferherstellung
DE19904834A1 (de) 1999-02-07 2000-08-10 Acr Automation In Cleanroom Vorrichtung zum Ablösen, Vereinzeln und Einlagern von dünnen, bruchempfindlichen scheibenförmigen Substraten
DE19950068B4 (de) 1999-10-16 2006-03-02 Schmid Technology Systems Gmbh Verfahren und Vorrichtung zum Vereinzeln und Ablösen von Substratscheiben
DE10162956B4 (de) * 2001-12-20 2005-11-03 Steag Hama Tech Ag Substratbehandlungsvorrichtung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020105818A1 (de) 2020-03-04 2021-09-09 Dietrich GmbH Rollkörperbahn
DE102020105818B4 (de) 2020-03-04 2022-02-24 Dietrich GmbH Rollkörperbahn

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EP1990293A1 (fr) 2008-11-12
ATE449021T1 (de) 2009-12-15
DE502007002047D1 (de) 2009-12-31

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