EP1990293B1 - Device and method for singulating - Google Patents

Abstract

The device (1) has two belts that are arranged parallel to each other, where the belts are drivable in opposite direction. Space between the belts is larger than breadth of flat objects (11). A unit is provided for driving the belts. Another unit is provided for varying the space between the belts. The belt driving unit and the space varying unit are arranged on a base plate. A fixing facility is provided for contacting a holding device that is located at to-be-contacted flat objects. A unit (20) for evacuation of an isolated flat object is formed as a transportation belt. An independent claim is also included for a method for separating multiple vertically positioned flat objects under application of a device, which receives flat objects in a vertically standing position, and fixes and conveys the objects in a defined distance from each other.

Description

The invention relates to a device for receiving and for fixing and conveying substantially flat objects so that they can be controlled from a stack and separated without damage. Furthermore, the invention relates to a method for singulating such articles using the device according to the invention.

The technical field of the invention relates to the processing or handling of thin, fracture-sensitive and disk-shaped objects, as present, for example, in semiconductor and solar technology in the form of so-called wafers.

In one of the known production methods for such substrates, silicon blocks or silicon columns (called substrate blocks in the present case) are used, which are sawn into thin, break-sensitive disks (called substrates in the present case). The substrates produced in this way typically have thicknesses of a few tens to 300 μm and are generally square or rectangular. You then preferred a respective edge length up to 210 mm.

The substrate blocks are usually glued to a holding device for sawing. This holding device typically consists of a metal carrier, on which in turn a glass plate is applied as an intermediate carrier, wherein the substrate block to be processed is glued to the glass plate. Alternatively, other materials for the formation of the holding device may be provided according to the prior art.

For the production of the substrates mentioned above, it is necessary to completely saw through the substrate block like a disk, so that the saw cut itself extends beyond the substrate block into the glass plate. After sawing, each of the substrates produced in this way continues to adhere to the glass plate with its one edge via an adhesive bond, resulting in a comb-like structure which is held together by the holding device.

Before the individual substrates, which now have a disk-shaped training, detached from the holding device and then fed to the actual cleaning, usually takes place a pre-cleaning, in which a part of the sawing, binding and cooling agent formed during sawing Abrasion (the so-called slurry), which is between the individual substrates or is deposited them, is washed out.

A problem with conventional techniques is that the substrates drip dry during the treatment, whereby the slurry constituents solidify on the substrate surfaces and can not be removed. Consequently, it must be ensured that the substrates no longer dry after sawing at any time. This is achieved according to the invention in that all processing steps are carried out after sawing until singling takes place in one or different liquids.

Another problem relates to the formation of adhesion forces by a two-dimensional contact of two adjacent substrates. This force, which is exacerbated in the case of the presence of slurry residues on the substrate surface, must be overcome in any case in the singulation and represents a considerable risk in terms of the desired integrity of the individual substrates. These adhesion forces also occur when the substrates are in a liquid medium, which is provided according to the invention.

This is followed by a mostly mechanical separation of the substrates from the holding device, so that a stack of substrates is formed, in which the substrates lie flat against each other or lie against one another and are present in a loose stacked composite.

In a further step, the substrates are finally separated from each other, so taken out of the loose stack composite, so that each substrate can be further processed or processed individually. An example of such a step to be carried out on isolated substrates is a final cleaning of the substrates by means of ultrasound.

The steps of separating and separating are of great importance in that, if handled improperly, damage to the substrates may very easily occur, such as breakage, stick marks due to drying and scratches due to friction. For this reason, various devices and methods are known from the prior art, the aim of a gentle handling of the substrates as possible.

The DE-OS 197 16 123 A1 describes a transport device with three conveyor belts, two of which are arranged laterally and parallel to each other and another horizontal base conveyor belt is provided. According to the technical teaching of this document, the simultaneous use of these three conveyor belts is mandatory. These bands each have incisions for vertical "recording" of the substrates. The device described is used in the dry, which is why the substrates need not be fixed against unintended floating.

In the WO 01/28745 A1 Disclosed are methods and devices for separating disc-shaped substrates from a substrate block. A robot-like device grips the substrate to be detached via suction devices, wherein the substrate is released from the holding device by an oscillating movement of the device. In this case, oscillating movements are provided in different directions. The gripping of the substrate to be separated takes place with a suction device arranged above the surface of the substrate and attached to the device. To release the substrate, a certain overpressure is generated within the suction device, so that the detached substrate is removable from the device again.

From the DE 199 00 671 A1 Methods and devices for detaching disc-shaped substrates, in particular wafers, are known. It is proposed to hold the substrates adhering to one another directly after the sawing process, which are still fastened with their one edge to the holding device, by a targeted fluid jet from each other at a distance. A wedge device ensures that a separation of the substrate to be detached takes place from the holding device. At the same time the isolated substrate taken from the holding device by means of a suction devices having gripper arm-like device.

From the DE 199 04 834 A1 a device for detaching individual thin, fragile and disc-like substrates is known. The substrate block with the already sawn substrates is in a container filled with a fluid. In contrast to the previously described prior art, the holding device is vertically aligned together with the still fixed to the holding device substrates, so that the substrate to be separated is arranged parallel to the fluid surface.

A wedge device ensures that a separation between the glass plate and the substrate to be separated takes place. An arranged in close proximity to the substrate conveyor belt ensures that the detached and floating substrates are removed. A sliding device provides that the holding device is repeatedly brought into the same position and moved horizontally against the wedge device for detachment of the respective substrate. On the other side of the conveyor belt, a device is provided with which the separated substrates are automatically inserted into a stand. The aim of the detachment is that the separated, disc-like substrates are stacked after their removal from the holding device and inserted into predetermined facilities or placed directly flat on top of each other.

For the separation and separation so movements are necessary, which require complex facilities, if you want to do without a risky manual operation. However, since the substrates are very fragile and thin, plate-like shaped articles, they can not be picked up without risk over conventional gripper arm-like systems. For this purpose, it is necessary to provide very precise and sensitive devices, so that damage to the substrates is avoided as possible. The forces acting on the substrate as a whole, in particular the adhesion forces mentioned above and the forces resulting from the use of mechanical separating means and / or grippers, should be so low that the substrate is damaged both when the substrate is separated from the holding device and when the substrate is singulated is excluded at any time.

The above prior art methods, however, require the use of suction means for separating and / or singulating individual substrates, or indeed allowing the sequential singulation of an entire sawn substrate block, but without ensuring that the substrates are maintained at a defined distance from each other during the treatment , The application of these methods also leads to the substrates being exposed to high mechanical stresses.

A hand carried out singling involves the risk that the very thin and fragile and disk-shaped substrates break, especially due to the increased adhesive forces.

Another disadvantage of conventional techniques is that usually only longer cycle times can be realized.

There is therefore a need to provide a device with which a sawn substrate block can be gently and quickly separated into individual substrates without having to overcome adhesion forces between the substrates.

The object is achieved by providing the device according to claim 1 and the method according to claim 9. Particularly preferred embodiments are specified in the respective subclaims.

The device according to the invention serves to simultaneously receive and fix and convey a plurality of vertically positioned substantially flat objects, also referred to below as substrates, at a defined distance from each other. The device comprises at least two bands arranged parallel to one another, with which the static friction required for fixing and conveying is exerted on the lateral edges of the objects, the distance between the bands being greater than the width of the flat objects and the bands being drivable in opposite directions , Furthermore, the device according to the invention comprises means for driving the bands, and means for varying the distance between the at least two bands arranged parallel to one another. These respective means can be provided once or several times.

The device according to the invention therefore enables the processing of substrates while maintaining a given between two substrates distance. This distance arises either from the sawing process or by using a suitable means such as a comb and / or brush-type device, which is preferably introduced only temporarily into the substrate block and leads to the desired spacing. Alternatively or additionally, the device according to the invention may comprise a suitable means in the form of a flow device, such as a nozzle bar, over which Fluid can be introduced from at least one side in the substrate block.

It is clear to the person skilled in the art that the teaching according to the invention can already be carried out with a device which has only two bands arranged parallel to one another. Of course, the function of these bands can also be exercised by a plurality of the same, provided that they can be driven at the same feed rate.

Alternatively or additionally, the surface of the strip coming into contact with the substrates may not be smooth, but controlled uneven, for example by providing a suitable nub or groove pattern, the latter being preferably perpendicular, ie in the direction of the substrate edges and most preferably has a groove spacing, which corresponds to the distance of the saw cuts of the substrate stack. A further preferred embodiment of the band comprises brush-like structures on the side of the band facing the substrates, with brush-like structures in the form of a knob or groove pattern being particularly preferred.

The width of a band or several bands, which fulfill the function of this one band as a band group, must be such that a secure fixing and conveying of the substrates is ensured. Preferably, this width corresponds to at least one third and at most four fifths of the substrate height. Most preferably, the width is such that a sufficiently large free space remains, in particular in the region of the holding device, through which, for example, fluid can be introduced for the purpose of cleaning or exits again.

The bands must be positionable in relation to the substrate block in such a way that a secure fixing of the substrates is ensured. This means that the static friction required for fixing and conveying can be exerted by the band (s) on the lateral substrate edges.

Preferably, the device according to the invention further comprises a base plate, on, at or below which the means or means for driving the tapes and / or the means for changing their distance are arranged.

According to a particularly preferred embodiment, the base plate is designed in two parts, wherein each part in each case at least one band or a band group is assigned. It may be advantageous to close the gap between the halves of a divided base plate by means of a suitable cover, for example to avoid parts of broken substrates from penetrating into the space between the halves of the base plate.

In principle, it is sufficient if the one or more bands of a page can be driven by a single means. However, since the bands are stretched over at least two tape guiding aids, these tape guiding aids can be designed to be self-drivable, wherein both active, self-rotating, as well as passive, co-rotating versions can be realized. Alternatively, fixed tape guide aids can be provided, if at least one of the aids is designed drivable. According to the invention, these tape guide aids are positioned vertically or can be moved to fix the objects in the vertical and are rotated by suitable motors in rotation about their longitudinal axes, if it is an active version.

In order to drive a band or a band group, the means for driving must be connected to at least one of the (actively or passively) rotatable band guiding aids by means of a suitable device, such as a transmission, such that transmission of the movement to the rotatable band guide aid and thus takes place on the inside of the band located in contact with the substrate edges. According to a preferred embodiment, the bands of both sides of the device according to the invention are driven by only a single means for driving the bands, again using a suitable gear which distributes the movement to both bands. Alternatively, of course, each band side and / or each band guide aid can be associated with a separate means for driving, if desired. According to a particularly preferred embodiment, the means for driving the tape is completely in the tape guide integrated, for example, by an electric motor with its stator is firmly fixed to the base plate, and the band is placed around the outside of the rotor and driven so.

It is clear to the person skilled in the art that the drive-generating element does not necessarily have to be part of the device according to the invention. It is only necessary to ensure that the means for driving the belts are supplied with the movement required for this purpose, which can be achieved by means of suitable devices for transmission, such as transmission. Screws, shafts, threaded rods, etc. can be realized. In the context of this embodiment, the movement-generating element of the device according to the invention would be functionally assigned as an external component. It may be arranged or provided on the preferably inner wall of the surrounding basin or else outside thereof. Therefore, the device according to the invention preferably further comprises corresponding hydraulic, pneumatic, and / or mechanical interfaces by means of which the drive-generating element can be coupled to the means or means for driving the bands, this coupling occurring, for example, during immersion of the apparatus in a bath, preferably with the aid of self-centering elements.

Regardless of whether the device according to the invention has the above base plate or not, the means for changing the distance of the bands are preferably designed as pneumatic cylinders. Alternatively, however, all the same means may be used, such as electric motors, hydraulic cylinders and / or mechanical drives. In the case of the presence of a base plate, these means are preferably arranged on, at and / or below it.

According to a preferred embodiment, the fixation of the objects by a change in the distance between the two halves and thus the distance of the bands takes place in such a way that the parallelism of their surfaces is maintained at all times substantially. This embodiment thus relates to a device in which the bands are always positioned vertically.

According to an alternative embodiment, the bands are at rest in a horizontal or oblique position. Therefore, the angle between you can be between 0 ° and 180 °, with an angle between 15 ° and 30 ° is particularly preferred.

The fixing of the objects according to the invention is always characterized in that they are held by the bands in an upright position laterally with sufficient pressure. For this purpose, both sides can be approached simultaneously or successively to the block. Alternatively, a band side is fixed. In this case, fixing is done by moving up the other side of the belt.

It should be noted that instead of a two-part and movable base plate according to the invention, other mechanisms that serve the parallel or angular position change of the bands can be used. This may be, for example, rails mounted on the base plate on which the means for changing the distance are displaceably mounted, or hinges about which these means can tilt.

The drive means or tape guiding aids are preferably designed as rollers or rollers and arranged so that each one band or a band side of at least two of these rollers or rollers is tensioned.

According to a preferred embodiment, the device according to the invention further comprises means for stabilizing the band or bands. This means for stabilization ensures that the static friction required for fixing and conveying is transmitted as effectively as possible over the entire length of the band or bands and as uniformly as possible on the lateral substrate edges. This means is preferably formed by a substantially dimensionally stable support structure, which is arranged between the tape guide aids.

An advantage of this embodiment is that the contact pressure required for the expression of the required static friction can also be provided independently of the belt tension. Particularly preferably, the means for stabilizing the band is attached to the band guide aids so that it always follows the movements of these aids in the change of the band gap.

According to an alternative embodiment, the means for stabilizing the strip is attached to the base plate or in addition thereto.

In this way, the means for band stabilization can simultaneously take over the function of the means for changing the band gap, provided that the base plate is designed in two parts and movable and / or rails or equivalent means, over which the means for band stabilization can be moved.

Although the means for stabilizing the strip is preferably designed in one piece with a continuous contact surface, it can also be designed in several parts and have openings.

According to a preferred embodiment, the device according to the invention may comprise a means for producing a spacing of the flat objects insofar as a continuous spacing is still to be produced and has not already been produced by a preceding process step. This means may particularly preferably be a flow device, for example a nozzle strip, with which fluid such as water, glycol and / or cleaning fluid can be introduced from all sides, but preferably laterally into the substrate stack or the substrate block, thereby causing or assisting fanning of the substrates becomes. In a further variant of the device according to the invention, this means may be a comb and / or brush-like structure which is introduced at least partially and preferably only temporarily into the intermediate spaces of the substrate block predetermined by the sawing process and / or the flow device to produce a uniform distance the desired spacing leads. It may be necessary for the product to be used after its introduction into the substrate stack is moved parallel to the lateral substrate edges.

According to a further preferred embodiment, a means for collecting the separated substrates may be provided. This may particularly preferably be funnel-shaped, so that the just-isolated substrate slides into the funnel and is guided by the latter in a direction predetermined by the orientation of the funnel. This direction can point, for example, to a downstream conveyor belt. Alternatively, this direction may also point in a magazine ("carrier"), which is suitable for receiving a plurality of substrates simultaneously. The funnel-shaped tool has the task of guiding the substrate so that it reaches the next free space in the magazine without colliding with a previously inserted substrate in the magazine. According to a most preferred embodiment, the positioning of the magazine and / or the funnel-shaped auxiliary means takes place by means of a suitable feed device. As an alternative or in addition, the determination of the location at which the currently singled substrate passes can be done by tilting the funnel-shaped auxiliary means.

Finally, according to a particularly preferred embodiment, the device according to the invention may also comprise a means for removing an isolated substrate.

The means for removing the substrate may, according to a preferred embodiment, be a conveyor belt, a roller conveyor, or more preferably a system consisting of at least two parallel belts, whereby the respective separated substrate can be picked up and transported away. Optionally, these means may be arranged for removal rather horizontally or at an angle to the horizontal.

According to a preferred embodiment, the device may also comprise a means for removing the holding device. Particularly preferably, this means may be attached under or on the base plate or on the or the guide aids. Alternatively, the means for removing the holding device can also be arranged outside the device according to the invention and, for example, a Be component of the surrounding treatment basin, so that it is functionally associated with the device according to the invention.

According to a further preferred embodiment, the device according to the invention further comprises a fixing aid for contacting the holding device present in a plurality of flat objects to be processed. This fixing aid is constructively arranged as at least one side releasable connecting element between the holding device and the one or more guide aids and serves to couple the same. The preferably two-part fixing aid can either be attached directly to the guide aids and / or to the base plate. It is only essential that a closed power flow between the holding device, fixing aid and guide aid is produced.

More preferably, the fixation aid is provided by extended guide aids, wherein the position of the ligament (s) is maintained unaltered.

This fixing aid according to the invention ensures that the holding device and guide aids, and thus the bands are in a mutually fixed position, which in particular does not change when the device according to the invention is moved together with the holding device to this example of a treatment station for to transport next. This will ensure that the fragile substrates, once in contact with and held by the tapes, are not damaged by the generally high weight of the fixture which would load them without the fixture aid. This weight is instead taken up via the fixation aid, so that damage to the substrates is also possible in the case of jerky movements, e.g. when picking up or discontinuing the held substrate stack, is almost impossible.

Embodiments for the fixing aid relate to structures of rods and / or plates, which have a sufficient length to reach from the holding device to the guide or base plate, wherein a coupling of the rods and / or plates with the holding device, for example via holes, screw, clamps , with or without Locking mechanisms can be done, with those variants are to be preferred, which allow a secure coupling on the one hand and a quick and easy decoupling on the other hand.

According to an alternative embodiment, the relief of the substrates can be carried out by a still connected to them holding device such that at least in addition to the substrates, a clamping of the holding device takes place by means of the present invention provided guide aids and tapes. In this case, either the guide aids and / or the holding device are to be adapted so that when approaching the bands a sufficiently stable clamping and the holding device is made possible with the same. This can be achieved, for example, by positive connections such as projections, recesses, pin connections together with corresponding receptacles. At the same time, it must be ensured that after dissolving the adhesive layer between the substrates and the holding device, a simple removal of the holding device can take place without a loss of static friction occurring between the strips and the substrates. For this purpose, additional means are preferably provided which allow a separate coupling and uncoupling of the holding device, such. movable locks and the like.

Particularly preferably, the fixing aid is designed such that it can also perform the function of the means for removing the holding device. For this purpose, the optionally two-part fixation aid must be made movable, so that the distance between the element or elements of the fixation aid, which serve the contacting of the holding device, and the one or more attachment points of the fixation aid (guide aid and / or base plate) can be changed. In the preferred case of a linear movement to be performed simultaneously by both parts of the fixing aid, the change in distance can be brought about, for example, by means of suitable rails parallel to the central axis of the guide aid (s), or by means of a telescopic design.

In the context of a particularly preferred embodiment, in which the fixing aid is provided by the extended guide aids, the change in the distance and thus the removal of the holding device by telescopically extending the integrated in the guide aids fixing aid. Although usually both parts of a two-part fixing aid are moved uniformly, it is also conceivable that only one side moves and the other side allows tilting of the one-sided lifted holding device from the substrate upper edges.

If desired, the device may also be assigned a means for removing the holding device. This means serves to produce a greater distance between detached holding device and substrate stack as the minimum distance necessary for conveying, since this is advantageous or necessary under certain conditions. According to a further embodiment, this means is designed such that with him not only the holding device, but also the fixing aid in contact with it can be removed, provided that the latter is releasably secured.

• Beladen der Vorrichtung mit den Gegenständen;
• Fixieren der Gegenstände durch Verringerung des Abstandes der mindestens zwei parallel zueinander angeordneten Bänder;
• Fördern der fixierten Gegenstände in die von den gegenläufig antreibbaren Bändern vorgegebene Richtung;
• Vereinzeln der Gegenstände durch Förderung derselben aus dem Bereich der Fixierung, sodass ein jeweils zu vereinzelnder Gegenstand von der Fixierung freigegeben wird.

The inventive method for separating a plurality of vertically positioned flat objects is carried out using a device with which substantially flat objects can be recorded in vertical positioning and fixed at a defined distance from each other and promoted. This device comprises (1) at least two bands arranged parallel to each other, wherein the distance between the bands is greater than the width of the flat objects and wherein the bands are driven in opposite directions, (2) means for driving the bands, and (3) means for Change in the distance between the at least two mutually parallel bands. In the method according to the invention, the following steps are carried out:

• Loading the device with the objects;
• Fixing the objects by reducing the distance between the at least two mutually parallel bands;
• Conveying the fixed objects in the direction predetermined by the oppositely drivable belts;
• Separating the objects by promoting the same from the field of fixation, so that each one to be separated item is released from the fixation.

The individual phases are explained in more detail below.

By loading the device, the substrate stack is positioned between the belts. This process of loading can be done manually or automatically, with the movement required for this to be carried out by the substrate stack and / or the belts. That is, the substrate stack or block is placed in the substantially stationary device, or the device is positioned around the substantially stationary substrate stack or block. According to a third variant, the movement required for loading is carried out both by the substrate stack or block and by the device. In any case, the substrates are positioned in the space between the two bands or band groups of the device according to the invention so that the bands are each laterally and approximately equidistant from the substrates.

The time of loading can be directly after sawing, after the generally subsequent pre-cleaning, or only after the replacement of the holding device. Accordingly, the location of loading within a device may be in the range of sawing, peeling, pre-cleaning or singulation. In this case, it may preferably be in the range of a device which combines some or all of the process steps mentioned above, which are necessary for working up and working up the substrate stack.

The production of a distance between in each case two adjacent substrates can also take place with the aid of further devices, such as a comb and / or brush-like structure, which preferably engages only temporarily from at least one free side into the intermediate spaces of the substrates and these until they become fixed in keeps a defined distance to each other.

As stated previously in the context of the detailed description of the device according to the invention, the fixing of the substrates is effected according to the invention by the continuous reduction of the distance of the strips. This process lasts until the bands abut both sides of the substrate stack and touch the entirety of the lateral substrate edges with a certain force. With a suitable choice of material of the band, which may preferably be made of elastic material such as rubber or similar synthetic material, and a suitable dosage of influenceable over the distance force is generated between the band and substrate edge stiction, which is greater than the weight of a substrate so that it is safely held between the two belts and is recoverable. An essential feature of the invention is that the static friction acts not only vertically in the direction of gravity, but also horizontally in the direction of the belt.

A distance present before fixing between the surfaces of successive substrates, as typically occurs after sawing and before detachment from the holding device, thus remains. This process control allows handling of the substrates without exerting adverse forces of the type previously described on the surfaces thereof.

In order to avoid weight-related damage to the fragile substrates during transport together with the often heavy holding device, a corresponding securing step can be inserted. For this purpose, the device according to the invention may comprise a fixing aid with which the retaining device present in the case of a plurality of flat objects to be machined is contacted before the step of conveying. This fixing aid can be used at any time prior to conveying the flat objects and creates a stable connection between the holding device and the guide aids or the base plate. Although the fixing aid can be used even before the first transport of the sawed substrate stack, it is particularly preferred that it is used during or immediately before the fixing of the substrates, ie when the tapes are approached to the substrate edges. In this way, the holding device is secured against relative movement with respect to the substrates, whereby the risk of breakage of the substrate edges from the bonding layer of the holding device produced by means of adhesive is largely eliminated. Unlocking the fixation aid can be done according to the invention at any time after coupling the same with the guide aids and / or the base plate. Preferably, however, this decoupling takes place only when the adhesive layer has been dissolved or dissolved and removal of the holding device is imminent.

For the particularly preferred case in which the fixing aid can simultaneously perform the function of the means for removing the holding device, the removal of the holding device is achieved by a suitable movement of those parts of the fixing aid, which are directly related to the holding device, this movement preferably should be evenly away from the now exposed upper edges of the flat objects to prevent damage by tilting. Alternatively, the removal can also be done by a combination of unilateral extension and a rotational, side-folding movement is performed.

According to the particularly preferred embodiment, in which the fixing aid simultaneously has a possibility for removing the holding device, the production of the at least necessary minimum distance for conveying is already effected by the fixing aid, so that a promotion of the flat objects is made possible and a further removal of the holding device is not necessary by a separate means.

If not already done, a complete separation of the substrates from the holding device must take place at the latest by this time, that is, at the latest immediately before the singulation, which is preferably done using the means described above. Since the method according to the invention is carried out completely in liquid medium, it must therefore be ensured that at least the medium in which the substrate block is located before separation is enriched with suitable chemical additives, by means of which the remaining adhesive layer between the substrates and the Glass plate at least on or preferably dissolved.

The present invention desired complete separation requires a minimum spacing of the holding device from the upper edges of the substrates, but not the removal of any remaining adhesive threads. An at least minimal spacing is necessary, since otherwise it can come to a catching unevenness of the sawn glass plate with the detached substrate edges. Such unevennesses may have been present in the glass plate from the very beginning, or may have been formed on the glass plate only by the preceding sawing process, and e.g. in the form of burrs. This minimum distance between the substrate edges and the holding device is two millimeters. The thus detached holding device is then to be removed from the fixed substrate stack in such a way that no damage is caused to it by e.g. Abbrechende edges in the connection zone to the holding device takes place. This can preferably be done automatically by means of a suitable acceptance device. Particularly preferably, this decrease takes place by means of the aforementioned fixing device with simultaneous function of the means for removing the holding device. Particularly preferably, the removal process can be carried out by means of suitable shaking movements, such as e.g. be supported by ultrasound.

To convey the fixed substrates, the bands are then driven by the method according to the invention in such a way that both bands or groups of bands move at the same speed but in opposite directions. Due to the stiction existing between bands and substrates, the objects are moved with the bands in the tape feed direction.

The separation of the separate from the holding device, but fixed with the device according to the invention substrates is done by conveying the individual substrates out of the fixation. There is therefore a release point, which is formed by the fact that the distance of the two bands where its parallelism ends due to the rounded shape of the tape guide aids according to the invention increases again, so that the frictional forces between the tape and substrate are no longer sufficient and the substrate in the direction of Gravity is released. In the case of round or roller-shaped tape guiding aids the release point is just on the Plane passing through the two axes of the most downstream belt guide aids.

According to a preferred embodiment of the method according to the invention, the substrate leaves the device through a funnel-like substrate guiding aid. According to a particularly preferred embodiment, the substrate is transferred by means of the funnel-like substrate guiding aid into a suitable magazine.

According to a further particularly preferred embodiment of the method according to the invention, the substrate leaves the device such that it is transferred, for example, in a controlled manner to a preferably slightly spaced-apart means for removing the separated substrate. Such a means may be, for example, a conveyor belt, a roller conveyor, or more preferably a system consisting of at least two parallel belts onto which the substrate falls at a predetermined angle.

According to a further preferred embodiment of the method according to the invention, the collection can also take place in such a way that the separated substrate is transferred into a magazine which particularly preferably holds the next free space by means of a suitable mechanism so that the separated substrate can hold it in a direct way and without can reach unnecessary surface contact with the environment. The magazine according to the invention can furthermore also contain suitable means for spacing the substrates, so that a mutual contact of the substrate surfaces is also avoided here. Such a means for spacing can be achieved, for example, by comb-like structures on the side walls of the magazine according to the invention.

According to a further preferred embodiment, the device according to the invention is brought after loading and fixing of the substrates from the initially horizontal position by pivoting in a vertical position, so that the objects are horizontally over or positioned with each other. In this case, the end of the device over which the release takes place, have up or down. This means that a respective substrate to be released leaves the device upwards or downwards.

The method according to the invention may comprise an additional step of removing the separated flat objects. For this purpose, the means set out above can be used. The removal of the upwardly released, floating horizontally on the fluid objects can preferably be done by means of suitable flow aids.

The invention will be explained in more detail with reference to the drawings.

The FIG. 1 shows the device 1 according to the invention in a three-dimensional view without a substrate block inserted into the space between the belts 7. On two opposite sides of a divided base plate 2 is ever a band 3, in which case only the rear is shown. Each band 3 is stretched between two guide aids 4. Furthermore, means for driving the belts 5 and means for varying the distance of the belts 6 are provided. In the illustrated embodiment, these means 5 and 6 are located on the underside of the base plate 2. The means 6 allow a parallel movement of the bands 3 towards or away from each other by the corresponding movements of both halves of the base plate 2 are executed. Also shown in each case is a means for stabilizing the band 15, which is fastened between the guide aids 4 on the base plate 2.

The FIG. 2 shows schematically the movement of the in FIG. 1 illustrated device in parallel fixing a substrate block. In the space 7 between the bands 3 is a substrate block 10, which consists of the actual substrates 11 and the holding device 12. By a parallel movement of the two halves of the base plate in the direction of arrow 14, the distance between the bands is changed, since they are firmly connected via the guide aids 4 with the base plate 2.

The FIG. 3 shows the movement when using a variant of the in FIGS. 1 and 2 described basic configuration in which the base plate 2 is not divided, but is integrally formed, and in which the guide means 4 are mounted for tensioning the band 3 movable on the base plate.

Preferably, rails can be used for this purpose, which allow a corresponding linear movement (not shown). It is irrelevant whether each guide aid 4 is associated with its own means for changing the distance 6, or whether, for example, each belonging to a band 3 means 4 are moved by a common means 6.

The FIG. 4 shows the sequence of movement of a further variant of the basic configuration of the device 1. According to this embodiment, the change in distance is achieved by angling the tape guide aids 4 in the direction 15. The tilting movement takes place about a pivot point 8, which is preferably parallel to the longitudinal axis of the base plate 2. The final position of the straps 3 must be such for the step of fixation that the straps can apply the necessary static friction to the substrates for secure fixing and conveying.

The FIG. 5 shows the movement of a variant of in FIG. 4 described configuration. Here, the base plate 2 is not divided, but integrally formed, and the respective angling of the guide aid 4 is carried out by pivoting about an attached to its foot pivot 9, as indicated by the arrow 15. Alternatively, the swivel joint 9 can also be located at a different location, wherein only has to be ensured that at no time parts of the tape guide help 4 protrude into the space 7, otherwise a disability during loading of the substrate block 10 would result.

The FIG. 6 shows the device 1 according to the invention together with two variants of the fixing aid 13, wherein the device 1 is shown only half each. After a in FIG. 6 1, the fixing aid 13 establishes a connection between the holding device 12 and the guide aid 4, so that a relative movement between the holding device 12 and the guide aid 3 is prevented at any time after engagement of the fixing aid 13 in the holding device 12 by means of methods in the direction 14. The variant shown here is particularly suitable in combination with separately movable on the base plate 2 guide aids. 4

Not shown are tools for mechanical coupling of the fixing aid 13 with the guide aid 4 and / or the holding device 12. Die FIG. 6 shows on the right an alternative embodiment in which the fixing aid 13 is attached to a divided base plate 2. Here is the making an engagement by the movement of the base plate halves toward each other. In further variants, not shown, the fixing aid 13 is movable independently of the guide aid 4 or the base plate 2 in the direction of arrow 14, so that the engagement of the fixing aid 13 does not necessarily have to take place simultaneously with the fixing of the substrates 11. This represents a particularly preferred embodiment of the invention, in particular with regard to a simple decoupling of the fixation aid directly before the removal of the then detached holding device 12. According to a further preferred variant of the device according to the invention, the fixing aid 13 also serves to remove the holding device 12 from the Substrates 11. This can be done for example by a method of standing with the holding device 12 fixing aid 13 in the axial direction of the guide aids 4, so that a distance between the upper edges of the substrates 11 and the holding device 12 is generated. It is clear that this removal can take place only after an adhesion or dissolution of the adhesive. After removal of the holding device 12, this can be taken over by a likewise not shown means for removing the holding device and transported away from the region of the device.

The FIG. 7 shows a further embodiment of the device according to the invention, which similar to that in FIG. 6 illustrated approach causes a backup of the holding device 12 together with the substrates 11. For this purpose, the guide aids 4 are designed in such a way that they protrude beyond the upper edges of the substrates 11 facing the holding device 12 and project into the region of the side surfaces of the holding device 12. As shown by way of example, there is then a clamping or a release of both the substrates 11 and the holding device 12 from the belts 3 by a movement of the guide aids in the direction 14.

The FIG. 8 shows the device 1 according to the invention with a means for removing isolated substrates 20, wherein the receiving surface 21 forms an angle of 0 ° <α <90 ° and preferably 30 ° <α <60 ° with the substrate surface. Accordingly, the substrates 11 separated by the substrate block 10 fixed according to the invention fall a small way in the direction of gravity before they strike the receiving surface 21 and remain there.

The FIG. 9 shows the device 1 according to the invention in a vertical arrangement, together with a means for transporting 20 separated substrates 11. The means 20 is arranged substantially below the device 1. The receiving surface 21 of the means 20 is aligned substantially parallel to the substrate surface. Again, the scattered substrates 11 fall in the direction of gravity before they lie on the receiving surface 21 and be transported away by appropriate transport movement.

The FIG. 10 shows the device 1 according to the invention with a means for collecting 22, which is arranged under the location of the substrate separation that the separated substrates 11 slide or fall automatically or with the aid of a funnel-shaped guide 23, for example, in the means for collecting 22. In order to prevent the separated substrates from falling apart, the means for catching 22 can be displaced linearly in the direction of movement 24 so that, regardless of the degree of filling, care can always be taken that no collision of the substrates occurs with one another.

LIST OF REFERENCE NUMBERS

1

contraption

2

baseplate

3

tape

4

Accession assistance

5

Means for driving the tape

6

Means for changing the distance of the bands

7

Space between the tapes

8th

pivot point

9

swivel

10

substrate block

11

Substrate, flat object

12

holder

13

fixing aid

14

Direction with parallel movement

15

Direction with angular motion

16

Means for band stabilization

20

Means for removing isolated substrates

21

receiving surface

22

Means for catching

23

guide

24

movement direction

Claims (15)

1. Apparatus for the simultaneous reception as well as for the fixing and conveying of several vertically positioned substantially flat objects with a defined distance to each other, comprising:

   - at least two bands (3) that are arranged parallel to each other, by which the adhesive friction that is necessary for the fixing and conveying is exerted onto the lateral edges of the objects, wherein the distance between the bands (3) is greater than the width of the flat objects (11), and wherein the bands (3) are drivable in opposite directions;

   - means for the driving of the bands (5);

   - means for the variation of the distance (6) of the at least two bands (3) that are arranged parallel to each other.
2. Apparatus according to claim 1, further comprising a base plate (2), onto, at, or below which the means for the driving of the bands (5) and/or the means for the variation of their distance (6) are arranged.
3. Apparatus according to claim 2, in which the base plate (2) has a two-part design, wherein at least one band (3) is assigned to each respective part.
4. Apparatus according to claim 2 or 3, further comprising guiding aids (4) for tension of the at least two bands (3) arranged parallel to each other, wherein the guiding aids (4) are attached at the base plate (2).
5. Apparatus according to claim 2, 3, or 4, further comprising a fixation aid (13) for the creation of a stable connection between the holding device (12) that is present when a multitude of flat objects (11) is to be treated, and the base plate (2) or the guiding aids (4), respectively.
6. Apparatus according to any of claims 1 to 5, in which the means for the variation of the distance (6) are one or several pneumatic cylinders.
7. Apparatus according to any of claims 1 to 6, further comprising a means for collecting (22) a respectively separated object (11), the means preferably being designed funnel-shaped.
8. Apparatus according to any of the preceding claims, further comprising a means for the carrying-off (20) of a separated object (11), wherein the means (20) is preferably designed as a conveying belt that transports the objects (11) in a flat manner.
9. Method for the separation of several vertically positioned flat objects using an apparatus by the aid of which substantially flat objects in a vertical standing position can be taken up as well as be fixed and conveyed with a defined distance to each other, wherein the apparatus (1) comprises the following components:

   - at least two bands (3) that are arranged parallel to each other, wherein the distance between the bands (3) is greater than the width of the flat objects (11), and wherein the bands (3) are drivable in opposite directions;

   - means for the driving of the bands (5);

   - means for the variation of the distance (6) of the at least two bands (3) that are arranged parallel to each other;
   wherein the following steps are carried out:

   - loading the apparatus (1) with the objects (11);

   - fixing of the objects (11) by reduction of the distance of the at least two bands (3) that are arranged parallel to each other;

   - conveying of the fixed objects (11) into the direction given by the bands (3) that are drivable in opposite directions;

   - separating the objects (11) by conveyance of the same out of the region of the fixation, so that a respective object (11) to be separated is released from the fixation.
10. Method according to claim 9, wherein the apparatus (1) used further has a base plate (2), onto, at, or below which the means for the driving of the bands (5) and/or the means for the variation of their distance (6) are arranged.
11. Method according to claim 10, in which the apparatus used further has guiding aids (4) for tension of the at least two bands (3) that are arranged parallel to each other, wherein the guiding aids (4) are attached at the base plate (2).
12. Method according to claim 10 or 11, in which the apparatus (1) used further comprises a fixation aid (13), by which the holding device (12) that is present when a multitude of flat objects (11) is to be treated is stably connected with the base plate (2) or the guiding aids (4), respectively, prior to the conveying step.
13. Method according to any of claims 9 to 12, in which the apparatus (1) is rotated after the fixing of the objects (11) in such a manner that the objects are positioned horizontally above or below each other, respectively.
14. Method according to any of claims 9 to 13, further comprising the respective collecting of an object (11) that is separated and released from the fixation by using a funnel-shaped substrate guiding aid (23).
15. Method according to any of claims 9 to 14, further comprising the carrying-off of the separated flat objects (11).

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