JPS60188205A - Storage device - Google Patents

Abstract

PURPOSE:To enable a narrow space together with a simple constitution to store boards-like-materials, by setting up a pair of movable belts with many supporting members in the direction of crossing at a right angle to the longitudinal direction respectively, in such a way that respective supporting members can face each other. CONSTITUTION:Both a gear (3a) and a pulley (4a) are coaxially set on the driving shaft of a motor of which rotating speed is controllable, while plural number of gears (3b-3d) are made to engage with the gear (3a) by turns. Further, a pulley (4b) like the above one (4a) is coaxially fixed to the gear (3d). On the other hand, channels (70) which extend in the direction of crossing at a right angle to the longitudinal direction are set up on a pair of belts (7a, 7b), both of which are wound around driving pulleys (6a, 6b) in such a way that the above channels (70) can face each other. And then, transmission belts (5a, 5b) are wound around each of the above pulleys (6a, 6b and 4a, 4b) respectively. In addition, a carrier belt (8) for boards-like-materials is placed horizontally underneath between the above belts (7a, 7b).

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a storage device, and more particularly to a storage device for plate-shaped objects such as wafers and printed circuit boards.

〔Technical field〕

Generally, in a semiconductor manufacturing process, in order to install different devices such as a resist coater and an aligner, or an aligner and a developing device in-line, the wafer is transported by connecting each device using a belt transport method or the like. , Due to differences in the processing time of each device, etc., it is necessary to secure a space to temporarily store sea urchins waiting to be processed.

Therefore, in order to effectively implement in-line processing, a storage device for storing, storing, and unloading wafers is required.

Conventionally, this type of storage device has two methods: one that stores, stores, and takes out two-dimensional yarns, and the other that stores, stores, and takes out three-dimensionally on shelves that move up and down, but the former (well, the equipment space is limited) It is not practical as it has the disadvantage of becoming larger, and in the latter case, in order to carry out the Ueno 1 in the order in which it was stored, the number of actuators such as the air cylinder 1 nonder that pushes out the Ueno \ is increased, and the sequence for driving is also required. It has the disadvantage that it becomes complicated and unnecessary operations have to be performed.Furthermore, if the sequence is simplified by reducing the number of actuators, the order of stored wafers and the order of unloaded wafers will be reversed, which is inconvenient for in-line implementation. In addition, the above-mentioned three-dimensional device can be used to carry in and out at the same time, either by placing the device itself at each location, or by moving the loading and unloading belts in the vertical direction. However, there was a drawback that the throughput capacity was "-7"\℃.

〔the purpose〕

SUMMARY OF THE INVENTION In view of the above-mentioned drawbacks of the prior art, it is an object of the present invention to provide a storage device that can carry in, store, and unload plate-shaped objects using a small device space, a small number of actuators, and a simple sequence.

〔Example〕

The present invention will be described in detail below with reference to the drawings.

FIG. 1 is a front view of an embodiment of the present invention for storing, storing, and carrying out storage in a sea urchin, and FIG. 2 is a sectional view taken along line A--A in FIG. 1.

A gear 3a and a pulley 4a are coaxially fitted into a drive shaft 2 of a motor 1 (FIG. 2) whose rotational speed can be controlled, and a gear 8a.
Gears 3b, 3c, and ad are sequentially meshed with the gears 3b, 3c, and ad.

The gear 3d has a boo IJ 4 similar to the pulley 4a described above.
b is fixed coaxially. The gears (3a to 3d) are rotation transmission gears for rotating the pulleys 4a and 4b at the same speed and in opposite directions.

bell)? a and 7b are directions perpendicular to the longitudinal direction (
It has a groove 70 extending in a direction perpendicular to the drawing in FIG. 1 and a horizontal direction in FIG.
The drive boo 'J6a, 6
It is rolled up on b. Rotation transmission belts 5a and 5b are wound around the driving pulleys 6a and 6b and the pulleys 4a and 4b, respectively.

A carry-in belt 8 movable in the direction of the arrow shown in FIG.
9a to 9e) and a stopper 11 for stopping are arranged. In addition, grooved bell)
If the distance between 7a and 7b is configured to narrow near the terminal end of the carry-in belt 8, the stopper 11 is not necessary.

Above between grooved bells 7a and 7b, air cylinders 14. Sensor 12. A delivery belt 13 is arranged.

Next, the operation of the embodiment having the above configuration will be explained. Wafers to be stored, stored, and carried out (in the figure, stored and stored wafers (9a to 9e) are shown) are carried into grooves 70 by the conveyor belt 8 (grooved bells i, 7a, 7t17). , is stopped by a stopper 11.

The wafer carried in at this time is detected by the sensor 1o, and the motor 1 is driven. The rotation of the motor 1 causes the drive shaft 2. The gears (8a-ad) are rotated and Boo') 4
Transmission belts 5 a and 4 b are respectively transmitted by a and 4 b.
51), the drive pulleys 6a and 6b are rotated,
Therefore, is the grooved belt holding the loaded wafer tB in the groove 70? a and 7b move upward.

Here, the amount of rotation of the motor] is the amount to move one groove of the grooved belts 7a, 71], and by repeating the above operation, the wafers can be stored one after another.

When a certain number of wafers have been stored and the processing equipment in the subsequent process has received all the wafers, the motor 2 is rotated at high speed to raise the stored wafers at high speed.

The wafer that has risen to the height of the carry-out belt 13 is sent to the sensor 1
2, and is pushed out by the air cylinder 14 in the direction of the carry-out belt 13, and carried out by the carry-out belt 13 to a processing device for a subsequent process. In the normal semiconductor manufacturing process, a predetermined number of wafers is treated as 10 tons, so the number of grooves on the grooved bell 7a7b between the conveyor belt 8 and the unloading belt 13 is set to 10 tons or more. be done.

Wafers can be stored in the order in which they were brought in as described above, and they can also be taken out in the order in which they were brought in, making it ideal for in-line processes. It can also be applied to fields where temperature increases, heating, and cooling are performed.

Furthermore, the present invention is not limited to the storage of wafers, but can also be applied to the storage of various plate-like objects such as tubes when transporting the printed circuit board from the electronic component insertion process to the soldering process in the printed circuit board assembly process. can do.

〔effect〕

As explained above, according to the present invention, it is possible to carry in, store, and carry out plate-shaped objects without changing the order of conveyance using a small device space, a small number of actuators, and a simple case. It is possible to do both at the same time.

[Brief explanation of drawings]

FIG. 1 is a front view of one embodiment of the invention, and FIG. 2 is a sectional view taken along line A--A in FIG. ■...Drive motor, 2...Drive shaft. 38-3d...Rotation transmission gears, 4a, 4b...
Pulley. 5a, 5b...transmission belt, 6a, 6b...drive pulley. 7a, 7b...grooved bell), 8. ,,Transportation belt. 9a-9d...Wafer, 10...Sensor. 11...stopper, 12...sensor. 13... Carrying out belt, 14... Air seat IJ
7ri. 70...Groove. Patent applicant Canon Co., Ltd. Figure 1

Claims (1)

[Claims] A storage device comprising two movable belts each having a plurality of carrier members in a direction perpendicular to the longitudinal direction, which are arranged in such a way that the carrier members face each other.