EP1989818A2 - Prozess zum herstellen von enthaltenen schichten und damit hergestellte einrichtungen - Google Patents
Prozess zum herstellen von enthaltenen schichten und damit hergestellte einrichtungenInfo
- Publication number
- EP1989818A2 EP1989818A2 EP06749552A EP06749552A EP1989818A2 EP 1989818 A2 EP1989818 A2 EP 1989818A2 EP 06749552 A EP06749552 A EP 06749552A EP 06749552 A EP06749552 A EP 06749552A EP 1989818 A2 EP1989818 A2 EP 1989818A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- rsa
- radiation
- organic
- organic active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L9/00—Cryptographic mechanisms or cryptographic arrangements for secret or secure communications; Network security protocols
- H04L9/30—Public key, i.e. encryption algorithm being computationally infeasible to invert or user's encryption keys not requiring secrecy
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
Definitions
- This disclosure relates in general to a process for making an electronic device. It further relates to the device made by the process. Description of the Related Art
- Organic active materials are present in many different kinds of electronic equipment. In such devices, an organic active layer is sandwiched between two electrodes.
- One type of electronic device is an organic light emitting diode
- the RSA consists essentially of a material which, when exposed to radiation, softens, or becomes more soluble, swellable, or dispersible in a liquid medium, or becomes more tacky or absorbable.
- the RSA consists essentially of at least one polymer which undergoes backbone degradation when exposed to deep UV radiation, having a wavelength in the range of 200-300 nm. Examples of polymers undergoing such degradation include, but are not limited to, polyacrylates, polymethacrylates, polyketones, polysulfones, copolymers thereof, and mixtures thereof.
- the exposure of the RSA to visible or UV radiation results in a reaction which decreases the volatility of the RSA in exposed areas.
- a thermal development treatment involves heating to a temperature above the volatilization or sublimation temperature of the unexposed material and below the temperature at which the material is thermally reactive.
- the material would be heated at a temperature above the sublimation temperature and below the thermal polymerization temperature.
- the treated first organic active layer is exposed to radiation.
- the type of radiation used will depend upon the sensitivity of the RSA as discussed above.
- the exposure can be a blanket, overall exposure, or the exposure can be patternwise.
- optional layer 150 examples include, but are not limited to, metal-chelated oxinoid compounds (e.g., Akt ⁇ or the like); phenanthroline- based compounds (e.g., 2,9-dimethyl-4,7-diphenyl-1 ,10-phenanthroline ("DDPA"), 4,7-diphenyl-1 ,10-phenanthroline (“DPA”), or the like); azole compounds (e.g., 2 ⁇ (4-biphenylyl)-5-(4-t-butylphenyl)-1 ,3,4-oxadiazole (“PBD” or the like), 3-(4-biphenylyl)-4-phenyl-5-(4-t-butylphenyl)-1 ,2,4- triazole (“TAZ” or the like); other similar compounds; or any one or more combinations thereof.
- optional layer 150 may be inorganic and comprise BaO, LiF, U2O, or the like.
- Example 5 demonstrates an RSA treatment that is subsequent to the formation of the first layer.
- Coatings of Material A were prepared and thermally cured as described above. These were then overcoated with RSA coatings of Zonyl® TA-N as described above. The RSA coatings received blanket exposures up to about 4 J/cm ⁇ 2. The coatings were washed in trifluorotoluene after exposure, and contact angles were measured with anisole. The anisole contact angle was modulated from about 9 degrees (Material A surface) to 40-45 degrees. No significant difference was observed if the exposures were performed in air or an inert atmosphere.
- Example 6 demonstrates an RSA treatment that is subsequent to the formation of the first layer, where removal of unexposed region is accomplished via sublimation.
- Coatings of Material A were prepared and thermally cured as described above. These were then overcoated with RSA coatings of heneicosafluorododecylacrylate by spin coating from a 3% wt/vol solution in perfluorooctance.
- One of the RSA coatings received a blanket UV exposure of about 1.5 J/cm 2 ; the other coating did not receive a UV exposure.
- the two coatings were baked at 195 C for 20 minutes on a hot plate in air, and contact angles were measured with anisole. The anisole contact angle was about 55 degrees on the RSA coating that had been exposed to UV radiation. The anisole contact angle was 10 degrees on the coating that had not been exposed to UV radiation.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computing Systems (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Computer Security & Cryptography (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Thin Film Transistor (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75154906P | 2006-03-02 | 2006-03-02 | |
PCT/US2006/013118 WO2007106101A2 (en) | 2006-03-02 | 2006-04-10 | Process for making contained layers and devices made with same |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1989818A2 true EP1989818A2 (de) | 2008-11-12 |
EP1989818A4 EP1989818A4 (de) | 2011-05-18 |
Family
ID=38470737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06749552A Withdrawn EP1989818A4 (de) | 2006-03-02 | 2006-04-10 | Prozess zum herstellen von enthaltenen schichten und damit hergestellte einrichtungen |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1989818A4 (de) |
JP (2) | JP2009528663A (de) |
KR (1) | KR20080108100A (de) |
CN (1) | CN101507177B (de) |
TW (1) | TW200735435A (de) |
WO (1) | WO2007106101A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110057170A1 (en) * | 2007-10-15 | 2011-03-10 | E.I. Du Pont De Nemours And Company | Solution processed electronic devices |
KR20100094475A (ko) * | 2007-10-26 | 2010-08-26 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 격납된 층을 제조하기 위한 방법 및 재료, 및 이를 사용하여 제조된 소자 |
US8772774B2 (en) | 2007-12-14 | 2014-07-08 | E. I. Du Pont De Nemours And Company | Backplane structures for organic light emitting electronic devices using a TFT substrate |
KR20180108917A (ko) * | 2013-10-31 | 2018-10-04 | 카티바, 인크. | 잉크젯 인쇄를 위한 폴리티오펜-포함 잉크 조성물 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5922481A (en) * | 1995-01-13 | 1999-07-13 | Basf Aktiengesellschaft | Electroluminescent arrangement |
US20030017360A1 (en) * | 2001-07-20 | 2003-01-23 | Elizabeth Tai | Structure-defining material for OLEDs |
US20030129321A1 (en) * | 2001-12-12 | 2003-07-10 | Daigo Aoki | Process for manufacturing pattern forming body |
US20030222250A1 (en) * | 2002-02-28 | 2003-12-04 | Che-Hsiung Hsu | Polymer buffer layers and their use in light-emitting diodes |
WO2004042474A1 (ja) * | 2002-11-06 | 2004-05-21 | Asahi Glass Company, Limited | ネガ型感光性樹脂組成物 |
US20050236614A1 (en) * | 2004-04-22 | 2005-10-27 | Parker Ian D | Processes for forming organic layers, organic electronic devices, and transistors |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5416203A (en) * | 1977-07-07 | 1979-02-06 | Nippon Paint Co Ltd | Dry making method of photosensitive resin plate |
US5435887A (en) * | 1993-11-03 | 1995-07-25 | Massachusetts Institute Of Technology | Methods for the fabrication of microstructure arrays |
US5392980A (en) * | 1993-12-29 | 1995-02-28 | Dell Usa, L.P. | Method and apparatus for reworking ball grid array packages to allow reuse of functional devices |
JPH09203803A (ja) * | 1996-01-25 | 1997-08-05 | Asahi Glass Co Ltd | カラーフィルタの製造方法及びそれを用いた液晶表示素子 |
JP4413035B2 (ja) * | 1997-08-08 | 2010-02-10 | 大日本印刷株式会社 | パターン形成体およびパターン形成方法 |
JP2001237069A (ja) * | 2000-02-23 | 2001-08-31 | Dainippon Printing Co Ltd | El素子およびその製造方法 |
KR20010085420A (ko) * | 2000-02-23 | 2001-09-07 | 기타지마 요시토시 | 전계발광소자와 그 제조방법 |
EP1411088B1 (de) * | 2001-07-26 | 2013-08-21 | Nissan Chemical Industries, Ltd. | Polyamidsäureharzzusammensetzung |
JP4092261B2 (ja) * | 2002-08-02 | 2008-05-28 | 三星エスディアイ株式会社 | 基板の製造方法及び有機エレクトロルミネッセンス素子の製造方法 |
JP2004177793A (ja) * | 2002-11-28 | 2004-06-24 | Seiko Epson Corp | 微細構造物の製造方法およびこの微細構造物の製造方法を用いて製造された自発光素子、光学素子、デバイス並びにこのデバイスを備えた電子機器 |
JP2004234901A (ja) * | 2003-01-28 | 2004-08-19 | Seiko Epson Corp | ディスプレイ基板、有機el表示装置、ディスプレイ基板の製造方法および電子機器 |
JPWO2004070836A1 (ja) * | 2003-02-06 | 2006-06-01 | 株式会社Neomaxマテリアル | 気密封止用キャップおよびその製造方法 |
JP4632193B2 (ja) * | 2003-09-18 | 2011-02-16 | 大日本印刷株式会社 | パターニング用基板の製造方法 |
-
2006
- 2006-04-10 KR KR1020087022342A patent/KR20080108100A/ko active Search and Examination
- 2006-04-10 WO PCT/US2006/013118 patent/WO2007106101A2/en active Application Filing
- 2006-04-10 JP JP2008557249A patent/JP2009528663A/ja active Pending
- 2006-04-10 EP EP06749552A patent/EP1989818A4/de not_active Withdrawn
- 2006-04-10 CN CN200680053669.0A patent/CN101507177B/zh not_active Expired - Fee Related
- 2006-04-11 TW TW095112893A patent/TW200735435A/zh unknown
-
2012
- 2012-12-03 JP JP2012264562A patent/JP2013048118A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5922481A (en) * | 1995-01-13 | 1999-07-13 | Basf Aktiengesellschaft | Electroluminescent arrangement |
US20030017360A1 (en) * | 2001-07-20 | 2003-01-23 | Elizabeth Tai | Structure-defining material for OLEDs |
US20030129321A1 (en) * | 2001-12-12 | 2003-07-10 | Daigo Aoki | Process for manufacturing pattern forming body |
US20030222250A1 (en) * | 2002-02-28 | 2003-12-04 | Che-Hsiung Hsu | Polymer buffer layers and their use in light-emitting diodes |
WO2004042474A1 (ja) * | 2002-11-06 | 2004-05-21 | Asahi Glass Company, Limited | ネガ型感光性樹脂組成物 |
US20050236614A1 (en) * | 2004-04-22 | 2005-10-27 | Parker Ian D | Processes for forming organic layers, organic electronic devices, and transistors |
Non-Patent Citations (2)
Title |
---|
H. SUGIMURA ET AL.: "Micropatterning of Alkyl- and Fluoroalkylsilane Self-Assembled Monolayers Using Vacuum Ultraviolet Light", LANGMUIR, vol. 16, 1 June 2000 (2000-06-01), pages 885-888, XP002629628, * |
See also references of WO2007106101A2 * |
Also Published As
Publication number | Publication date |
---|---|
EP1989818A4 (de) | 2011-05-18 |
TW200735435A (en) | 2007-09-16 |
CN101507177A (zh) | 2009-08-12 |
JP2009528663A (ja) | 2009-08-06 |
JP2013048118A (ja) | 2013-03-07 |
WO2007106101A3 (en) | 2009-04-16 |
CN101507177B (zh) | 2014-08-13 |
KR20080108100A (ko) | 2008-12-11 |
WO2007106101A2 (en) | 2007-09-20 |
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Legal Events
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R17D | Deferred search report published (corrected) |
Effective date: 20090416 |
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DAX | Request for extension of the european patent (deleted) | ||
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB |
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REG | Reference to a national code |
Ref country code: DE Ref legal event code: R079 Free format text: PREVIOUS MAIN CLASS: H04L0009300000 Ipc: H01L0051000000 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 21/00 20060101ALI20071005BHEP Ipc: H01L 51/00 20060101AFI20110330BHEP |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20110418 |
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17Q | First examination report despatched |
Effective date: 20120928 |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: E. I. DU PONT DE NEMOURS AND COMPANY |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20160518 |