EP1936200B1 - Lubricant sealed rotary slide vacuum pump - Google Patents

Lubricant sealed rotary slide vacuum pump Download PDF

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Publication number
EP1936200B1
EP1936200B1 EP07022562A EP07022562A EP1936200B1 EP 1936200 B1 EP1936200 B1 EP 1936200B1 EP 07022562 A EP07022562 A EP 07022562A EP 07022562 A EP07022562 A EP 07022562A EP 1936200 B1 EP1936200 B1 EP 1936200B1
Authority
EP
European Patent Office
Prior art keywords
lubricant
pump
shaft
vacuum pump
rotary vane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP07022562A
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German (de)
French (fr)
Other versions
EP1936200A3 (en
EP1936200A2 (en
Inventor
Jürgen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1936200A2 publication Critical patent/EP1936200A2/en
Publication of EP1936200A3 publication Critical patent/EP1936200A3/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02Liquid sealing for high-vacuum pumps or for compressors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085Prime movers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06Silencing

Definitions

  • the invention relates to a lubricant-sealed rotary vane vacuum pump with motor, a pump stage housing having pumping stage, safety valve, lubricant pump having inlet and outlet, the pump stage housing at least partially surrounding lubricant reservoir and hydraulic line, wherein the conveyed through the hydraulic line lubricant causes the opening of the safety valve.
  • a rotary vane vacuum pump having the features of the preamble shows the DE-OS 10 2004 024 554 ,
  • the lubricant in this pump is used, among other things, to open a hydraulically operated safety valve.
  • the safety valve is only opened as long as a driven by the shaft of the vacuum pump lubricant pump sets the lubricant supplied to the safety valve under pressure.
  • the lubricant also serves to lubricate the slide, which circulate in a cylindrical pump chamber and thus generate the pumping action. At the same time, the lubricant seals the gap between the slide, shaft and housing of the pump chamber.
  • This housing, the pump stage housing is immersed in a so-called lubricant reservoir, therefore largely surrounded by lubricant. Heat generated within this pump stage housing is dissipated to the surrounding lubricant.
  • the object of the invention is therefore to introduce a rotary vane vacuum pump whose structure prevents overheating of the lubricant.
  • a channel branching between the outlet of the lubricant pump and the safety valve from the hydraulic line allows pressurized lubricant to flow into the lubricant reservoir.
  • This flowing lubricant ensures that the lubricant in the lubricant reservoir does not behave statically but is in motion. In particular, this movement ensures that the pump stage housing contacting lubricant is conveyed away from this and passes to the pump housing surrounding the lubricant reservoir. There it can release the heat absorbed by the pump housing. Overheating of the lubricant is prevented in this way.
  • the arrangement of a lubricant pump on the shaft between the motor and pumping stage according to a first embodiment of the invention shortens the length of the hydraulic line, since the safety valve is usually located in the vicinity of the engine.
  • a lubricant flow resistance is arranged between the lubricant pump and the pumping stage. This reduces the amount of lubricant flowing into the pumping stage while it is under pressure.
  • a sliding bearing for supporting the shaft is arranged between the lubricant pump and the pumping stage.
  • the sliding bearing can be lubricated by emerging from the lubricant pump lubricant. This leaking lubricant is not the lubricant exiting through the actual lubricant pump outlet, but the lubricant leaking through the gaps between the housing and the shaft.
  • Another advantage of this measure is therefore that a less good seal of the lubricant pump is sufficient, whereby their construction is considerably simplified and the réellet be lowered.
  • the outlet of the lubricant pump is located on the side of the shaft facing a footprint of the rotary vane vacuum pump. With respect to the direction of gravity in the intended installation of the pump, this means that the outlet of the lubricant pump is arranged below the shaft centerline. This simplifies the ducting.
  • the branching off of the hydraulic line channel opens at a height between the shaft center axis and a footprint of the rotary vane vacuum pump in the lubricant reservoir.
  • This arrangement causes pressurized lubricant to flow in between the surface of the lubricant reservoir and the bottom. As a result, a turbulence of all areas of the lubricant reservoir is promoted and thus improves the heat exchange.
  • the first figure shows a section along the shaft axis through a lubricant-sealed rotary vane vacuum pump, hereinafter referred to as vacuum pump.
  • Gas enters the vacuum pump via a gas inlet 1, is compressed in its interior and expelled via a gas outlet 2.
  • the safety valve 3 is arranged, which is hydraulically operated: The lubricant of the vacuum pump causes, as soon as it is under pressure, the opening of this safety valve.
  • a gas guide 4 connects the safety valve to the suction chamber 11 of a first pumping stage 17, so that gas can pass from the gas inlet into the suction chamber as soon as the safety valve is opened.
  • the pumping stage is arranged in a pump stage housing 10 which is at least partially surrounded by lubricant located in the lubricant reservoir 30.
  • a slide 13 runs around.
  • the circulation is created by the rotation of an eccentrically passing through the pumping chamber 11 shaft 15.
  • Between slide and pump chamber creates a crescent-shaped space, which is periodically enlarged and reduced by the circulation of the slide, whereby the pumping action arises.
  • the compressed gas is transferred via a transfer line 16 to the second pumping stage 18 and further compressed in the pump chamber 12, in the slide 14, further compressed and finally ejected.
  • the shaft is driven by a motor.
  • this motor comprises arranged on the shaft permanent magnets 8 and stationary coil 7, which generates a rotating magnetic field and thus sets the shaft in rotation.
  • a separator 5 causes hermetic separation of the coils from the shaft.
  • An electronic control unit 6 is connected via electrical lines to the coil and causes their energization.
  • the invention can also be applied to vacuum pumps with other motors, for example asynchronous motors.
  • the shaft is rotatably supported by a sliding bearing 35, which is arranged between the motor and pumping stage 17, and an end-side sliding bearing 36, which is provided at the shaft end, which lies on the side remote from the first pumping stage side of the second pumping stage 18.
  • a lubricant pump is arranged between the engine and the first pumping stage.
  • This comprises a slider 23 circulating in a lubricant scoop space 24, this rotation being effected by the rotation of the shaft 15.
  • the cross section is shown here rectangular. For manufacturing it is advantageous to provide a circular cross-section.
  • a lubricant flow resistance 34 is arranged between lubricant pump and pumping stage.
  • the object of the lubricant flow resistance is to make the flow of pressurized lubricant leaving the lubricant pump in the direction of the pumping stage 17 more difficult. It does not need to be completely stopped because a small flow can be used to lubricate the slide bearing 35.
  • this is formed as a step in the shaft, which is formed by a change in the shaft diameter.
  • structures may be provided on the shaft surface, such as grooves. This idea can advantageously be further developed by providing a groove running around the shaft in such a way that a conveying effect is produced, which is directed counter to the direction of flow of the lubricant.
  • the lubricant reservoir 30 serves to accommodate larger amounts of lubricant.
  • This lubricant forms with that in pump rooms, Slide bearings and safety valve a circuit and is used for its replacement.
  • the horizontal channel part 32a opens at the channel mouth 33 in this lubricant reservoir. From him lubricant exits, which is pressurized by the lubricant pump. By this flow, the lubricant in the lubricant reservoir is set in motion, whereby warm, located near the surface of the pump stage housing 10 lubricant is moved away from there to the pump housing 40. There it gives off the absorbed heat. As a result, the temperature of the lubricant is reduced and increases the life, since less chemical decomposition processes occur.
  • the movement of the lubricant is illustrated by the circular arrow.
  • the second figure shows a section in a plane transverse to the shaft axis and at the level of the lubricant pump.
  • This illustration illustrates the piping system through which the pressurized lubricant is delivered.
  • the shaft 15 has a slot in which a slider 23 is movably mounted and which is pressed at shaft rotation by centrifugal forces from the shaft axis radially outward.
  • the shaft passes through the cylindrical pump chamber 24 eccentrically.
  • the space between the slider and the wall is first increased, whereby lubricant is sucked through the inlet 21 of the lubricant pump.
  • This lubricant is conveyed around the shaft and forced into a hydraulic line 31 via the outlet 22 of the lubricant pump.
  • a channel 32 branches off, so that pressurized lubricant is conveyed both in the hydraulic line and in the channel.
  • the channel 32 communicates with the horizontal channel portion 32 a of illustration 1 in connection.
  • the outlet 22 of the lubricant pump is located on the side of the shaft 9 facing the footprint. This is in terms of gravity below the shaft axis.
  • the channel opens at a height between the shaft center axis and a footprint 9 of the rotary vane vacuum pump into the lubricant reservoir 30, whereby the circulation of the lubricant is improved in the lubricant reservoir.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Description

Die Erfindung betrifft eine schmiermittelgedichtete Drehschiebervakuumpumpe mit Motor, einer ein Pumpstufengehäuse aufweisende Pumpstufe, Sicherheitsventil, Schmiermittelpumpe, welche Einlass und Auslass aufweist, ein das Pumpstufengehäuse wenigstens teilweise umgebendes Schmiermittelreservoir und Hydraulikleitung, wobei das durch die Hydraulikleitung geförderte Schmiermittel das Öffnen des Sicherheitsventils bewirkt.The invention relates to a lubricant-sealed rotary vane vacuum pump with motor, a pump stage housing having pumping stage, safety valve, lubricant pump having inlet and outlet, the pump stage housing at least partially surrounding lubricant reservoir and hydraulic line, wherein the conveyed through the hydraulic line lubricant causes the opening of the safety valve.

Eine Drehschiebervakuumpumpe mit den Merkmalen des Oberbegriffs zeigt die DE-OS 10 2004 024 554 . Das Schmiermittel in dieser Pumpe wird unter anderem dazu benutzt, um ein hydraulisch arbeitendes Sicherheitsventil zu öffnen. Dabei ist das Sicherheitsventil nur solange geöffnet, solange eine von der Welle der Vakuumpumpe angetriebene Schmiermittelpumpe das dem Sicherheitsventil zugeführte Schmiermittel unter Druck setzt.A rotary vane vacuum pump having the features of the preamble shows the DE-OS 10 2004 024 554 , The lubricant in this pump is used, among other things, to open a hydraulically operated safety valve. In this case, the safety valve is only opened as long as a driven by the shaft of the vacuum pump lubricant pump sets the lubricant supplied to the safety valve under pressure.

Das Schmiermittel dient außerdem der Schmierung der Schieber, welche in einem zylindrischen Schöpfraum umlaufen und so die Pumpwirkung erzeugen. Gleichzeitig dichtet das Schmiermittel die Spalte zwischen Schieber, Welle und Gehäuse des Schöpfraumes ab. Dieses Gehäuse, das Pumpstufengehäuse, ist in ein sogenanntes Schmiermittelreservoir eingetaucht, daher zum großen Teil von Schmiermittel umgeben. Wärme, die innerhalb dieses Pumpstufengehäuses entsteht, wird an das umgebende Schmiermittel abgegeben.The lubricant also serves to lubricate the slide, which circulate in a cylindrical pump chamber and thus generate the pumping action. At the same time, the lubricant seals the gap between the slide, shaft and housing of the pump chamber. This housing, the pump stage housing is immersed in a so-called lubricant reservoir, therefore largely surrounded by lubricant. Heat generated within this pump stage housing is dissipated to the surrounding lubricant.

Das Problem dieses Standes der Technik ist nun, dass sich das Schmiermittel zunehmend erwärmt, wodurch es sich chemisch verändert.The problem with this prior art is that the lubricant increasingly heats up, causing it to change chemically.

Aufgabe der Erfindung ist es daher, eine Drehschiebervakuumpumpe vorzustellen, deren Aufbau eine Überhitzung des Schmiermittels verhindert.The object of the invention is therefore to introduce a rotary vane vacuum pump whose structure prevents overheating of the lubricant.

Diese Aufgabe wird gelöst durch eine Drehschiebervakuumpumpe mit den Merkmalen des ersten Anspruchs.This object is achieved by a rotary vane vacuum pump with the features of the first claim.

Ein zwischen Auslass der Schmiermittelpumpe und Sicherheitsventil von der Hydraulikleitung abzweigender Kanal ermöglicht, dass unter Druck stehendes Schmiermittel in das Schmiermittelreservoir strömt. Dieses strömende Schmiermittel sorgt dafür, dass sich das Schmiermittel im Schmiermittelreservoir nicht statisch verhält, sondern in Bewegung ist. Inbesondere wird durch diese Bewegung dafür gesorgt, dass das Pumpstufengehäuse berührendes Schmiermittel von diesem weg gefördert wird und zu dem das Schmiermittelreservoir umgebende Pumpengehäuse gelangt. Dort kann es die am Pumpstufengehäuse aufgenomme Wärme wieder abgeben. Eine Überhitzung des Schmiermittels wird auf diese Art verhindert.A channel branching between the outlet of the lubricant pump and the safety valve from the hydraulic line allows pressurized lubricant to flow into the lubricant reservoir. This flowing lubricant ensures that the lubricant in the lubricant reservoir does not behave statically but is in motion. In particular, this movement ensures that the pump stage housing contacting lubricant is conveyed away from this and passes to the pump housing surrounding the lubricant reservoir. There it can release the heat absorbed by the pump housing. Overheating of the lubricant is prevented in this way.

Die abhängigen Ansprüche 2 bis 6 geben vorteilhafte Weiterbildungen der Erfindung an.The dependent claims 2 to 6 indicate advantageous developments of the invention.

Die Anordnung einer Schmiermittelpumpe auf der Welle zwischen Motor und Pumpstufe gemäß einer ersten Weiterbildung der Erfindung verkürzt die Länge der Hydraulikleitung, da das Sicherheitsventil in der Regel in der Nähe des Motors angeordnet ist.The arrangement of a lubricant pump on the shaft between the motor and pumping stage according to a first embodiment of the invention shortens the length of the hydraulic line, since the safety valve is usually located in the vicinity of the engine.

Gemäß einer zweiten Weiterbildung ist zwischen Schmiermittelpumpe und Pumpstufe ein Schmiermittelströmungswiderstand angeordnet. Dieser verringert die die Menge an in die Pumpstufe strömendes und dabei unter Druck stehendes Schmiermittel.According to a second development, a lubricant flow resistance is arranged between the lubricant pump and the pumping stage. This reduces the amount of lubricant flowing into the pumping stage while it is under pressure.

Gemäß einer dritten Weiterbildung ist zwischen Schmiermittelpumpe und Pumpstufe ein Gleitlager zur Lagerung der Welle angeordnet. Durch diese Maßnahme kann das Gleitlager durch aus der Schmiermittelpumpe austretendes Schmiermittel geschmiert werden. Dieses austretende Schmiermittel ist nicht das durch den eigentlichen Schmiermittelpumpenauslass austretende Schmiermittel, sondern das durch die Spalte zwischen Gehäuse und Welle leckende Schmiermittel. Weiterer Vorteil dieser Maßnahme ist daher, dass eine weniger gute Abdichtung der Schmiermittelpumpe ausreicht, wodurch ihr Aufbau erheblich vereinfacht wird und die Kostent gesenkt werden.According to a third development, a sliding bearing for supporting the shaft is arranged between the lubricant pump and the pumping stage. By this measure, the sliding bearing can be lubricated by emerging from the lubricant pump lubricant. This leaking lubricant is not the lubricant exiting through the actual lubricant pump outlet, but the lubricant leaking through the gaps between the housing and the shaft. Another advantage of this measure is therefore that a less good seal of the lubricant pump is sufficient, whereby their construction is considerably simplified and the Kostent be lowered.

In einer anderen Weiterbildung liegt der Auslass der Schmiermittelpumpe auf der einer Stellfläche der Drehschiebervakuumpumpe zugewandten Seite der Welle. In Bezug auf die Schwerkraftrichtung in der bestimmungsgemäßen Aufstellung der Pumpe bedeutet dies, dass der Auslass der Schmiermittelpumpe unterhalb der Wellenmittelachse angeordnet ist. Dies vereinfacht die Kanalführung.In another development, the outlet of the lubricant pump is located on the side of the shaft facing a footprint of the rotary vane vacuum pump. With respect to the direction of gravity in the intended installation of the pump, this means that the outlet of the lubricant pump is arranged below the shaft centerline. This simplifies the ducting.

In einer Weiterbildung mündet der von der Hydraulikleitung abzweigende Kanal in einer Höhe zwischen dem Wellenmittelachse und einer Stellfläche der Drehschiebervakuumpumpe in das Schmiermittelreservoir. Diese Anordnung sorgt dafür, dass unter Druck stehendes Schmiermittel zwischen der Oberfläche des im Schmiermittelreservoir befindlichen Schmiermittel und dem Boden einströmt. Hierdurch wird eine Verwirbelung aller Bereiche des Schmiermittelreservoir gefördert und damit der Wärmeaustausch verbessert.In a further development, the branching off of the hydraulic line channel opens at a height between the shaft center axis and a footprint of the rotary vane vacuum pump in the lubricant reservoir. This arrangement causes pressurized lubricant to flow in between the surface of the lubricant reservoir and the bottom. As a result, a turbulence of all areas of the lubricant reservoir is promoted and thus improves the heat exchange.

Anhand eines Ausführungsbeispiels soll die Erfindung näher erläutert werden. Weitere Vorteile werden ebenfalls aufgezeigt. Es zeigen:

Fig. 1:
Senkrechter Schnitt durch eine Vakuumpumpe entlang der Wellenachse.
Fig. 2:
Senkrechter Schnitt durch die Vakuumpumpe entlang A-A'.
Reference to an embodiment of the invention will be explained in more detail. Further advantages are also shown. Show it:
Fig. 1:
Vertical section through a vacuum pump along the shaft axis.
Fig. 2:
Vertical section through the vacuum pump along A-A '.

In den nachfolgenden Abbildungen bezeichnen gleiche Ziffern gleiche Teile.In the following figures, like numbers indicate like parts.

Die erste Abbildung zeigt einen Schnitt längs der Wellenachse durch eine schmiermittelgedichtete Drehschiebervakuumpumpe, im folgenden kurz Vakuumpumpe. Über einen Gaseinlass 1 gelangt Gas in die Vakuumpumpe, wird in ihrem Inneren verdichtet und über einen Gasauslass 2 ausgestoßen. Unmittelbar im Gasstrom hinter dem Gaseinlass ist das Sicherheitsventil 3 angeordnet, welches hydraulisch betrieben wird: Das Schmiermittel der Vakuumpumpe bewirkt, sobald es unter Druck steht, das Öffnen dieses Sicherheitsventils. Eine Gasführung 4 verbindet das Sicherheitsventil mit dem Schöpfraum 11 einer ersten Pumpstufe 17, so dass Gas vom Gaseinlass in Schöpfraum gelangen kann, sobald das Sicherheitsventil geöffnet ist. Die Pumpstufe ist in einem Pumpstufengehäuse 10 angeordnet, welches wenigstens teilweise von im Schmiermittelreservoir 30 befindlichen Schmiermittel umgeben ist. Im zylindrischen Schöpfraum läuft ein Schieber 13 um. Der Umlauf entsteht durch die Drehung einer exzentrisch den Schöpfraum 11 durchsetzenden Welle 15. Zwischen Schieber und Schöpfraum entsteht ein sichelförmiger Raum, der durch den Umlauf des Schiebers periodisch vergößert und verkleinert wird, wodurch die Pumpwirkung entsteht. Das verdichtete Gas wird über eine Überleitung 16 an die zweite Pumpstufe 18 übergeben und in deren Schöpfraum 12, in dem Schieber 14 umlaufen, weiter verdichtet und schließlich ausgestoßen.The first figure shows a section along the shaft axis through a lubricant-sealed rotary vane vacuum pump, hereinafter referred to as vacuum pump. Gas enters the vacuum pump via a gas inlet 1, is compressed in its interior and expelled via a gas outlet 2. Immediately in the gas flow behind the gas inlet, the safety valve 3 is arranged, which is hydraulically operated: The lubricant of the vacuum pump causes, as soon as it is under pressure, the opening of this safety valve. A gas guide 4 connects the safety valve to the suction chamber 11 of a first pumping stage 17, so that gas can pass from the gas inlet into the suction chamber as soon as the safety valve is opened. The pumping stage is arranged in a pump stage housing 10 which is at least partially surrounded by lubricant located in the lubricant reservoir 30. In the cylindrical pump chamber, a slide 13 runs around. The circulation is created by the rotation of an eccentrically passing through the pumping chamber 11 shaft 15. Between slide and pump chamber creates a crescent-shaped space, which is periodically enlarged and reduced by the circulation of the slide, whereby the pumping action arises. The compressed gas is transferred via a transfer line 16 to the second pumping stage 18 and further compressed in the pump chamber 12, in the slide 14, further compressed and finally ejected.

Die Welle wird über einen Motor angetrieben. Im Beispiel umfasst dieser Motor auf der Welle angeordnete Permanentmagnete 8 und stehende Spule 7, welche ein umlaufendes Magnetfeld erzeugt und so die Welle in Drehung versetzt. Ein Trennelement 5 bewirkt eine hermetische Abtrennung der Spulen von der Welle. Eine Steuerelektronik 6 ist über elektrische Leitungen mit der Spule verbunden und bewirkt deren Bestromung. Die Erfindung lässt sich auch an Vakuumpumpen mit anderen Motoren einsetzen, beispielsweise Asynchronmotoren.The shaft is driven by a motor. In the example, this motor comprises arranged on the shaft permanent magnets 8 and stationary coil 7, which generates a rotating magnetic field and thus sets the shaft in rotation. A separator 5 causes hermetic separation of the coils from the shaft. An electronic control unit 6 is connected via electrical lines to the coil and causes their energization. The invention can also be applied to vacuum pumps with other motors, for example asynchronous motors.

Drehbar unterstützt wird die Welle von einem Gleitlager 35, welches zwischen Motor und Pumpstufe 17 angeordnet ist, und einem endseitigen Gleitlager 36, welches an dem Wellenende vorgesehen ist, welches auf der von der ersten Pumpstufe abgewandten Seite der zweiten Pumpstufe 18 liegt.The shaft is rotatably supported by a sliding bearing 35, which is arranged between the motor and pumping stage 17, and an end-side sliding bearing 36, which is provided at the shaft end, which lies on the side remote from the first pumping stage side of the second pumping stage 18.

Zwischen Motor und erster Pumpstufe ist eine Schmiermittelpumpe angeordnet. Diese umfasst einen in einem Schmiermittelschöpfraum 24 umlaufenden Schieber 23, wobei dieser Umlauf durch die Drehung der Welle 15 bewirkt wird. Der Querschnitt ist hier rechteckig dargestellt. Für die Fertigung vorteilhaft ist es, einen kreisförmigen Querschnitt vorzusehen.Between the engine and the first pumping stage, a lubricant pump is arranged. This comprises a slider 23 circulating in a lubricant scoop space 24, this rotation being effected by the rotation of the shaft 15. The cross section is shown here rectangular. For manufacturing it is advantageous to provide a circular cross-section.

Zwischen Schmiermittelpumpe und Pumpstufe ist ein Schmiermittelströmungswiderstand 34 angeordnet. Aufgabe des Schmiermittelströmungswiderstandes ist es, den Fluss von unter Druck stehenden und aus der Schmiermittelpumpe austretenden Schmiermittel in Richtung Pumpstufe 17 zu erschweren. Er braucht nicht vollständig unterbunden werden, da ein geringer Fluss genutzt werden kann, das Gleitlager 35 zu schmieren. Im vorliegenden Beispiel ist dieser als Stufe in der Welle ausgebildet, die durch eine Änderung des Wellendurchmessers gebildet wird. Zusätzlich können Strukturen auf der Wellenoberfläche vorgesehen sein, beispielsweise Rillen. Vorteilhaft weiterbilden lässt sich diese Idee, indem eine derart gewinderartig um die Welle herumlaufende Rille vorgesehen wird, dass eine Förderwirkung entsteht, welche der Strömungsrichtung des Schmiermittels entgegengerichtet ist.Between lubricant pump and pumping stage, a lubricant flow resistance 34 is arranged. The object of the lubricant flow resistance is to make the flow of pressurized lubricant leaving the lubricant pump in the direction of the pumping stage 17 more difficult. It does not need to be completely stopped because a small flow can be used to lubricate the slide bearing 35. In the present example this is formed as a step in the shaft, which is formed by a change in the shaft diameter. In addition, structures may be provided on the shaft surface, such as grooves. This idea can advantageously be further developed by providing a groove running around the shaft in such a way that a conveying effect is produced, which is directed counter to the direction of flow of the lubricant.

Das Schmiermittelreservoir 30 dient zur Aufnahme größerer Mengen von Schmiermittel. Dieses Schmiermittel bildet mit demjenigen in Schöpfräumen, Gleitlagern und Sicherheitsventil einen Kreislauf und dient zu dessen Austausch. Der waagrechte Kanalteil 32a mündet an der Kanalmündung 33 in dieses Schmiermittelreservoir. Aus ihm tritt Schmiermittel aus, welches von der Schmiermittelpumpe unter Druck gesetzt wird. Durch diesen Strom wird das im Schmiermittelreservoir befindliche Schmiermittel in Bewegung versetzt, wodurch warmes, nahe der Oberfläche des Pumpstufengehäuses 10 befindliches Schmiermittel von dort weg zum Pumpengehäuse 40 bewegt wird. Dort gibt es die aufgenomme Wärme ab. Hierdurch wird die Temperatur des Schmiermittels herabgesetzt und die Lebensdauer erhöht, da weniger chemische Zersetzungsprozesse ablaufen. Die Bewegung des Schmiermittels ist durch den kreisförmigen Pfeil veranschaulicht.The lubricant reservoir 30 serves to accommodate larger amounts of lubricant. This lubricant forms with that in pump rooms, Slide bearings and safety valve a circuit and is used for its replacement. The horizontal channel part 32a opens at the channel mouth 33 in this lubricant reservoir. From him lubricant exits, which is pressurized by the lubricant pump. By this flow, the lubricant in the lubricant reservoir is set in motion, whereby warm, located near the surface of the pump stage housing 10 lubricant is moved away from there to the pump housing 40. There it gives off the absorbed heat. As a result, the temperature of the lubricant is reduced and increases the life, since less chemical decomposition processes occur. The movement of the lubricant is illustrated by the circular arrow.

Die zweite Abbildung zeigt einen Schnitt in einer Ebene quer zur Wellenachse und auf Höhe der Schmiermittelpumpe. Diese Darstellung veranschaulicht das Leitungssystem, durch welches das unter Druck stehende Schmiermittel gefördert wird. Die Welle 15 weist einen Schlitz auf, in welchem ein Schieber 23 beweglich gelagert ist und welcher bei Wellendrehung durch Fliehkräfte von der Wellenachse radial nach außen gedrückt wird. Die Welle durchsetzt den zylindrischen Schöpfraum 24 exzentrisch. Durch die Drehung der Welle wird der Raum zwischen Schieber und Wandung zunächst vergrößert, wodurch Schmiermittel durch den Einlass 21 der Schmiermittelpumpe angesaugt wird. Dieses Schmiermittel wird um die Welle herum gefördert und über den Auslass 22 der Schmiermittelopumpe in eine Hydraulikleitung 31 gedrückt. Dieser verbindet den Auslass 22 mit dem Sicherheitsventil 3, welches im Gasstrom hinter dem Gaseinlass 1 angeordnet ist. Von der Hydraulikleitung zweigt ein Kanal 32 ab, so dass unter Druck stehendes Schmiermittel sowohl in der Hydraulikleitung als auch im Kanal gefördert wird. Der Kanal 32 steht mit dem waagrechten Kanalteil 32a der Abbildung 1 in Verbindung.The second figure shows a section in a plane transverse to the shaft axis and at the level of the lubricant pump. This illustration illustrates the piping system through which the pressurized lubricant is delivered. The shaft 15 has a slot in which a slider 23 is movably mounted and which is pressed at shaft rotation by centrifugal forces from the shaft axis radially outward. The shaft passes through the cylindrical pump chamber 24 eccentrically. By the rotation of the shaft, the space between the slider and the wall is first increased, whereby lubricant is sucked through the inlet 21 of the lubricant pump. This lubricant is conveyed around the shaft and forced into a hydraulic line 31 via the outlet 22 of the lubricant pump. This connects the outlet 22 with the safety valve 3, which is arranged in the gas flow behind the gas inlet 1. From the hydraulic line, a channel 32 branches off, so that pressurized lubricant is conveyed both in the hydraulic line and in the channel. The channel 32 communicates with the horizontal channel portion 32 a of illustration 1 in connection.

Der Auslass 22 der Schmiermittelpumpe liegt auf der der Stellfläche 9 zugewandten Seite der Welle. Dies ist in Bezug auf die Schwerkraft unterhalb der Wellenachse. Der Kanal mündet in einer Höhe zwischen Wellenmittelachse und einer Stellfläche 9 der Drehschiebervakuumpumpe in das Schmiermittelreservoir 30, wodurch die Umwälzung des Schmiermittels im Schmiermittelreservoir verbessert wird.The outlet 22 of the lubricant pump is located on the side of the shaft 9 facing the footprint. This is in terms of gravity below the shaft axis. The channel opens at a height between the shaft center axis and a footprint 9 of the rotary vane vacuum pump into the lubricant reservoir 30, whereby the circulation of the lubricant is improved in the lubricant reservoir.

Claims (6)

  1. Lubricant-sealed rotary vane vacuum pump with a motor, at least one pump stage (17, 18) having a pump stage housing (10), a safety valve (3) arranged in the gas flow after a gas inlet (1), a lubricant pump, which has an inlet (21) and outlet (22), a lubricant reservoir (30) at least partially surrounding the pump stage housing and a hydraulic line (31), the lubricant conveyed through the hydraulic line effecting the opening of the safety valve, characterised in that a channel (32), through which pressurised lubricant flows into the lubricant reservoir, branches off from the hydraulic line between the outlet of the lubricant pump and the safety valve.
  2. Rotary vane vacuum pump according to claim 1, characterised in that a single-part or multi-part shaft (15) passes through the motor and pump stage (17, 18), and the lubricant pump is arranged on the shaft between the motor and pump stage.
  3. Rotary vane vacuum pump according to claim 1 or 2, characterised in that a lubricant flow resistance (34) is arranged between the lubricant pump and pump stage (17, 18).
  4. Rotary vane vacuum pump according to claim 3, characterised in that a sliding bearing (35) to mount the shaft (15) is arranged between the lubricant pump and pump stage (17, 18).
  5. Rotary vane vacuum pump according to any one of the preceding claims, characterised in that the outlet (22) of the lubricant pump is located on the side of the shaft (15) facing a support surface (9) of the rotary vane vacuum pump.
  6. Rotary vane vacuum pump according to any one of the preceding claims, characterised in that the channel opens into the lubricant reservoir (30) at a height between the shaft centre axis and a support surface (9) of the rotary vane vacuum pump.
EP07022562A 2006-12-13 2007-11-21 Lubricant sealed rotary slide vacuum pump Revoked EP1936200B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006058837.1A DE102006058837C5 (en) 2006-12-13 2006-12-13 Lubricant sealed rotary vane vacuum pump

Publications (3)

Publication Number Publication Date
EP1936200A2 EP1936200A2 (en) 2008-06-25
EP1936200A3 EP1936200A3 (en) 2009-12-16
EP1936200B1 true EP1936200B1 (en) 2012-09-12

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ID=39217919

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Application Number Title Priority Date Filing Date
EP07022562A Revoked EP1936200B1 (en) 2006-12-13 2007-11-21 Lubricant sealed rotary slide vacuum pump

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US (1) US7854601B2 (en)
EP (1) EP1936200B1 (en)
JP (1) JP5106077B2 (en)
DE (1) DE102006058837C5 (en)

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ES2774438T3 (en) * 2014-06-27 2020-07-21 Ateliers Busch S A Pumping method in a vacuum pump system and vacuum pump system
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CN105889071B (en) * 2016-04-15 2018-04-17 浙江飞越机电有限公司 Using the rotary-vane vaccum pump of shield electric machine

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Also Published As

Publication number Publication date
US7854601B2 (en) 2010-12-21
DE102006058837B4 (en) 2020-03-05
JP2008151127A (en) 2008-07-03
EP1936200A3 (en) 2009-12-16
US20080145209A1 (en) 2008-06-19
EP1936200A2 (en) 2008-06-25
DE102006058837C5 (en) 2022-05-05
JP5106077B2 (en) 2012-12-26
DE102006058837A1 (en) 2008-06-19

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