EP1933037A3 - Anordnung mit Vakuumpumpe - Google Patents

Anordnung mit Vakuumpumpe Download PDF

Info

Publication number
EP1933037A3
EP1933037A3 EP07022563.6A EP07022563A EP1933037A3 EP 1933037 A3 EP1933037 A3 EP 1933037A3 EP 07022563 A EP07022563 A EP 07022563A EP 1933037 A3 EP1933037 A3 EP 1933037A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
mounting system
rotor
pump mounting
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07022563.6A
Other languages
English (en)
French (fr)
Other versions
EP1933037A2 (de
EP1933037B1 (de
Inventor
Matthias Mädler
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1933037A2 publication Critical patent/EP1933037A2/de
Publication of EP1933037A3 publication Critical patent/EP1933037A3/de
Application granted granted Critical
Publication of EP1933037B1 publication Critical patent/EP1933037B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H01J2237/1825—Evacuating means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Anordnung mit einer Vakuumkammer, welche einen Kammerflansch aufweist, und einer Vakuumpumpe, welche einen in einem Rotorgehäuse angeordneten, schnelldrehenden Rotor und einen Pumpenflansch aufweist. Um im Falle eines Rotor-Stator-Kontakts freiwerdende Drehmomente sicher aufzufangen, schlägt die Erfindung vor, dass die Anordnung ein drehmomentsicheres Sicherungsmittel aufweist, welches das Rotorgehäuse mit einer Drehmomentsenke verbindet.
EP07022563.6A 2006-12-13 2007-11-21 Anordnung mit Vakuumpumpe Active EP1933037B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006058672.7A DE102006058672B4 (de) 2006-12-13 2006-12-13 Anordnung mit Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1933037A2 EP1933037A2 (de) 2008-06-18
EP1933037A3 true EP1933037A3 (de) 2014-04-23
EP1933037B1 EP1933037B1 (de) 2018-09-05

Family

ID=38820242

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07022563.6A Active EP1933037B1 (de) 2006-12-13 2007-11-21 Anordnung mit Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP1933037B1 (de)
DE (1) DE102006058672B4 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008035972A1 (de) * 2008-07-31 2010-02-04 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
DE102016114709A1 (de) 2016-08-09 2018-02-15 Karlsruher Institut für Technologie Drehmomentabsicherung und Flanschverbindung mit einer solchen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
EP1314892A1 (de) * 2001-11-19 2003-05-28 BOC Edwards Technologies, Limited Vakuumpumpe
EP1341291A2 (de) * 2002-02-28 2003-09-03 Pfeiffer Vacuum GmbH Maschine mit schnelldrehendem Rotor
JP2004143999A (ja) * 2002-10-23 2004-05-20 Boc Edwards Kk 分子ポンプ、及び分子ポンプ用中継部材
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
DE10342907A1 (de) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schnelldrehendem Rotor
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
EP1314892A1 (de) * 2001-11-19 2003-05-28 BOC Edwards Technologies, Limited Vakuumpumpe
EP1341291A2 (de) * 2002-02-28 2003-09-03 Pfeiffer Vacuum GmbH Maschine mit schnelldrehendem Rotor
JP2004143999A (ja) * 2002-10-23 2004-05-20 Boc Edwards Kk 分子ポンプ、及び分子ポンプ用中継部材
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump

Also Published As

Publication number Publication date
DE102006058672A1 (de) 2008-06-19
DE102006058672B4 (de) 2016-09-15
EP1933037A2 (de) 2008-06-18
EP1933037B1 (de) 2018-09-05

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