EP1932190A1 - Actionneur piezo-electrique a resistance protectrice - Google Patents

Actionneur piezo-electrique a resistance protectrice

Info

Publication number
EP1932190A1
EP1932190A1 EP06778246A EP06778246A EP1932190A1 EP 1932190 A1 EP1932190 A1 EP 1932190A1 EP 06778246 A EP06778246 A EP 06778246A EP 06778246 A EP06778246 A EP 06778246A EP 1932190 A1 EP1932190 A1 EP 1932190A1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric actuator
layer
electrode
electrodes
actuator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06778246A
Other languages
German (de)
English (en)
Inventor
Thomas Pauer
Friedrich Boecking
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1932190A1 publication Critical patent/EP1932190A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Definitions

  • the invention relates to a piezoelectric actuator, as it can be used, for example, as an adjusting device in injection systems for internal combustion engines.
  • Ceramic piezoactuators are known from the prior art, in which the piezoelectric effect is utilized for the movement of components.
  • the patent DE 199 28 177 C2 shows a piezoelectric actuator, which consists of a ceramic piezoelectric body.
  • the piezoelectric body is composed of a plurality of piezoelectric layers, between each of which a layer electrode is arranged.
  • the layer electrodes are mutually connected to a connection electrode, so that directly adjacent layer electrodes are connected to respectively different connection electrodes. If a direct electrical voltage is applied between the two connection electrodes, an electric field is created between the layer electrodes. This causes the piezo layers to change in thickness, so that overall the length of the piezoelectric actuator changes.
  • the piezoelectric actuator can be used as an actuator, eg in fuel injection systems, depending on the set voltage. Due to the plurality of layer electrodes, which have only a small distance, a very high electric field can be applied without having to use an excessively high electrical voltage. This allows to effect a large stroke of the piezoelectric actuator with a relatively low control voltage. However, the short distance of the layer electrodes from each other, which is usually in the range of 50 to 100 microns, but also represents a weak point of this piezoelectric actuator concept.
  • the layer electrodes are made of a metal, such as silver or silver palladium, and this metal has a certain diffusion mobility within the ceramic piezolayers.
  • connection electrodes are usually electrically insulated from each other, now a very high current flows through this line bridge, which means on the one hand a voltage loss and on the other hand to a strong warming in this
  • the piezoelectric actuator according to the invention has the advantage that it still works even when a short circuit occurs between two layer electrodes. This is achieved by providing protective resistors between at least one of the terminal electrodes and the respective layer electrodes. These are dimensioned so that when a line bridge between two layer electrodes is formed, the now flowing high leakage current can melt through the respective protective resistor.
  • the respective protective resistor is formed within the layer electrode, so that the connection electrodes and the other geometry of the piezoelectric actuator does not need to be changed.
  • the protective resistance is arranged within the layer electrode and is, for example, strip-shaped, wherein the strip is formed relatively close to the connection electrode or at the edge of the layer electrode towards the connection electrode.
  • the strip consists of a material which has a corresponding electrical resistance and thus forms the protective resistor. It can be one or a plurality of
  • the protective resistor can be formed by a granular, piezoactive material, wherein the grains are coated with a metal layer.
  • the electrical conduction comes through within this granular, piezoactive material
  • the size of the resistor is adjustable. If the current through this protective resistor exceeds a certain level, the metal with which the grains are coated melts and becomes flowable so that the electrical resistance is finally interrupted.
  • the metal coating of the grains is preferably made of the same material from which the layer electrodes.
  • the protective resistor within the layer electrode can also be formed by resistance bridges, so that in one strip, one or more resistance bridges are formed, which form the protective resistance. Over the width and length of these resistance bridges, the protective resistance can also be adjusted. It is also possible to form the protective resistors in that metallic resistance bridges are provided between the connection electrodes and the layer electrode, the width of which is chosen such that the electrical resistance lies in the desired range. Such an arrangement is particularly advantageous in cylindrical piezoelectric actuators, in which the connection electrodes run in the interior. Here, radially extending, bar-shaped connections to the layer electrodes can be provided, which form the protective resistor.
  • the terminal electrodes are designed as a helically wound wire, which produce a connection with the layer electrodes in the interior of the piezoelectric actuator.
  • the helically wound wire can have such a punctiform contact with the layer electrodes that a suitable protective resistance is thereby formed.
  • FIG. 1 shows a piezoactuator with a rectangular cross section, as known from the prior art
  • FIG. 2 shows an equivalent circuit diagram for a piezoactuator according to the invention, which has corresponding protective resistors,
  • FIG. 3b show two adjacent layer electrodes of a piezoelectric actuator according to the invention with a rectangular cross-section
  • FIG. 4b likewise shows two adjacent layer electrodes of a rectangular piezoelectric actuator, wherein the protective resistors are designed differently here,
  • FIG. 5 shows an enlarged view of a protective resistor, as may be provided inside the layer electrode,
  • FIG. 6 shows a further exemplary embodiment in which the piezoactuator has a rectangular cross-section, but cylindrical connecting electrodes,
  • FIG. 7 shows a cross section through a piezoelectric actuator according to FIG. 6, FIG.
  • FIG. 8 shows a cylindrical piezoelectric actuator with internal connection electrodes
  • FIG. 9b show two layer electrodes of the cylindrical piezoactuator according to FIG. 8,
  • FIG. 10 shows, as a further exemplary embodiment, a layer electrode, as can be used in a cylindrical piezoactuator,
  • FIG. 11 shows an internal connection electrode, as can be used in a cylindrical piezoactuator
  • FIG. 12 shows a cylindrical piezoactuator with two layer electrodes shown by way of example and a helical connection electrode which is used for such a piezoactuator.
  • FIG. 13 shows the helical connection electrode with a coating
  • FIG. 14 shows a section through the connection electrode according to FIG. 13 along the lines A - A and
  • FIG. 15 shows a further cross section corresponding to the representation according to FIG. 14, in which corresponding protective resistors are provided. Description of the embodiments
  • FIG. 1 shows a piezoactuator 1, as known from the prior art and having a rectangular cross-section, wherein the edges are chamfered.
  • the piezoelectric actuator 1 has a plurality of piezoelectric layers 3, which are made of a piezoactive ceramic material. Between the piezoelectric layers 3, a metallic layer electrode 5, 6 is provided in each case, wherein the respectively adjacent layer electrodes 5, 6 are electrically isolated from each other by the piezoelectric layers 3 lying between them.
  • One half of the layer electrodes 5 is connected to a first connection electrode 8, while the respectively adjacent connection electrodes 6 are connected to a second connection electrode 9.
  • the connection electrodes 8, 9 are in this case applied to the surface of the piezoelectric actuator 1 and electrically conductively connected to the respective layer electrodes 5, 6.
  • connection electrodes 8, 9 have such great flexibility that, despite the change in length of the piezoactuator 1, an electrical connection to the respective layer electrodes 5, 6 always remains.
  • the connection electrodes 8, 9 are connected to electrical terminals 11, 12, with which an electrical voltage can be applied between the connection electrodes 8, 9.
  • connection electrodes 8, 9 produces an electric field between the layer electrodes 5, 6, which passes through the piezoelectric layers 3.
  • the thickness of the piezoelectric layers 3 and thus the entire length of the piezoelectric actuator 1 changes. This allows to move a corresponding actuator very quickly and also very precisely with the piezoactuator 1.
  • the layer electrodes 5, 6 consist of a metal, for example silver or silver palladium, wherein this metal has a certain mobility within the ceramic from which the piezo layers 3 consist.
  • Such a line bridge 14 leads to a short circuit between two adjacent layer electrodes 5, 6, so that now a correspondingly high current flows through the line bridge 14. This leads locally to a strong heating of the piezoelectric actuator 1 and thus to a melting of the metallic layer electrodes 5, 6, which ultimately leads to a destruction of the piezoelectric actuator 1.
  • FIG. 2 shows an equivalent circuit diagram in which the layer electrodes 5, 6 and the connection electrodes 8, 9 are shown. Between the terminal electrode 9 and the layer electrodes 6, a protective resistor 16 is provided which is dimensioned such that it limits the current on the one hand, if between two layer electrodes 5, 6, a line bridge 14 is formed, on the other hand melted at a high current through the line bridge 14 and so interrupts the electrical contact between the defective layer electrode 6 and the connection electrode 9.
  • the interposed piezoelectric layer 3 has due to the lack of electric field no change in thickness more, but at typically 200 piezo layers 3 of the failure of individual piezo layers for the overall function of the piezoelectric actuator 1 without significant importance.
  • FIG. 3 a shows a layer electrode 6 according to the invention, in which the protective resistor 16 is formed as a strip within the layer electrode 6.
  • FIG. 3b shows the adjacent layer electrode 5, which is connected directly to the connection electrode 8 without a protective resistor. Since the protective resistor 16 is integrated here directly into the layer electrode 6, there is no change in the piezoelectric actuator 1 in terms of its geometric dimensions, so that both the terminal electrodes 8, 9 and the installation conditions need not be changed.
  • FIG. 4 a shows an alternative embodiment of the layer electrode 6 with protective resistors 16, which are formed here by resistance bridges 116. These still consist of the granular piezoactive material, with the advantage that over the width of the resistance bridges 116 there is an additional dimensioning possibility for the protective resistor.
  • FIG. 4b shows, in an alternative embodiment of the layer electrode according to FIG. 3a, a protective resistor 16, which is formed here at the edge of the layer electrode 6, is connected directly to the connection electrode 9.
  • the mode of operation of the protective resistor 16 is here identical to the protective resistor as shown in FIG.
  • the protective resistor 16, which is provided as a strip in the layer electrode 6, can be formed, for example, by granular piezoactive material, as shown in FIG. 5 in an enlargement.
  • the individual grains 18 are provided with a metal coating 20, which forms the electrically conductive path within the layer electrode 6. If there is now an excessively high current through this metal coating 20, it melts and the metal moves within the protective resistor 16 so that after a certain time it separates the layer electrode 6 from the connection electrode 9.
  • FIG. 6 shows a further piezoactuator 1, which likewise has a rectangular cross section.
  • the connection electrodes 8 ', 9' are here designed as metal tubes, which protrude into a semicircular recess in the piezoelectric actuator 1.
  • Figure 7 shows a cross section through the piezoelectric actuator according to Figure 6, wherein a layer electrode 6 is shown.
  • the connection electrode 9 ' is connected via protective resistors 16' to the layer electrode 6, which are formed by bar-shaped connections.
  • the layer electrode 6 is here separated electrically from the second connection electrode 8 ', while the above or below Layer electrode 5 is connected to the connection electrode 8 'in the known manner.
  • FIG. 8 shows a piezoactuator 1 which has a circular cross section.
  • the piezoactuator 1 two bores 17, 19 are formed, in each of which a connection electrode 82 ', 9 "is arranged, which are connected in a known manner alternately to the layer electrodes 5, 6, the protective resistor 16" being formed hereby.
  • the connection electrode 9 " is enveloped by a material with a corresponding electrical resistance, by which ultimately the electrical contact between the connection electrode 9" and the layer electrodes 5 comes about.
  • 9a shows a layer electrode 6, which is connected to the connection electrode 9 ",
  • the layer electrode 6 has two recesses 22, 23, so that no electrical connection between the connection electrode 8" and the layer electrode 6 is formed.
  • connection electrode 9 By means of the material surrounding the connection electrode 9 ", a protective resistor 16" is formed, via which the layer electrode 6 is connected to the connection electrode 9 "
  • the material which surrounds the connection electrode 9" can also be, for example, a grain of metal-coated Ceramic grains, as shown in Figure 5. It However, other materials are conceivable that have a correspondingly high resistivity.
  • connection electrode 9b shows the layer electrode 5 located above or below it, which is connected to the connection electrode 8 ", which is not connected to the connection electrode 9" by a correspondingly large-dimensioned recess 23 '.
  • FIG. 10 shows a further exemplary embodiment of a layer electrode 6, as may be provided in a round piezoelectric actuator.
  • the protective resistor 16 ' is formed here by resistance bridges, which are provided within the layer electrode 6 and via which the electrical connection to the connection electrode 9 "is formed, in which case the covering of the connection electrodes 9" is omitted.
  • the correspondingly above or below layer electrode 5 is connected to the connection electrode 8 "and insulated from the connection electrode 9".
  • connection electrode 9 ' here consists of a metallic tube 109 which is surrounded by a metal coating 25 which has radially outwardly pointing web-like protuberances form the protective resistor 16 '.
  • the connection electrode 9 'electrically insulating, preferably ceramic material 27 is provided, so that the metallic tube 109 is finally connected via the protective resistors 16' with the respective layer electrode 5, 6.
  • the circular piezoelectric actuator 1 can thus be constructed in the known manner and connected to the connection electrodes 8, 9, wherein only one of the connection electrodes must be replaced by a connection electrode 9 "according to FIG.
  • FIG. 12 shows a further exemplary embodiment of a piezoactuator 1 with a circular cross section.
  • the piezoelectric actuator 1 has two bores 17, 19, which receive the connection electrodes.
  • two layer electrodes 5, 6 are shown here, which in a known manner are alternately pulled through to the wall of the bores 17, 19 and can thus be contacted at this point.
  • a spring electrode 30 is inserted, which consists of a helically wound wire.
  • the helical spring electrode 30 is coated with a ceramic layer 32, as shown in FIG. In cross-section, as shown in FIG. 14, one can see the ceramic coating 32, which on all sides forms the helical spring. the electrode 30 surrounds.
  • the ceramic coating 32 is removed with a planar polished section 34, so that a blank position of the width D is formed, as shown in FIG.
  • the helical spring electrode 30 contacts the respective layer electrodes 5, 6 in a punctiform manner, which, when appropriately dimensioned, produces a contact resistance which serves as a protective resistor 16.
  • the protective resistors 16 should preferably be dimensioned so that they heat and melt correspondingly in the event of an excessive current, even before the current flowing in the event of a short circuit between two layer electrodes 5, 6 becomes one
  • Destruction of the piezoelectric actuator 1 leads.
  • the protective resistors 16 within the layer electrodes 5, 6 by a granular ceramic material which is metallically coated, it is also possible, for example, to dope the layer electrode 5, 6 in a region in order to obtain a corresponding electrical resistance there ,

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

L'invention concerne un actionneur piézo-électrique présentant une pluralité de couches piézo-électriques (3), entre lesquelles est disposée, dans chaque cas, une électrode à couche (5; 6). Les électrodes à couche (5; 6) sont reliées de manière alternée, dans chaque cas à une électrode de connexion (8; 9; 8'; 9'; 8''; 9''). Il est prévu une résistance protectrice (16; 16'; 16'') entre au moins une électrode de connexion (8; 9; 8'; 9'; 8''; 9'') et les électrodes à couche (5; 6) reliées à cette électrode de connexion (8; 9; 8'; 9'; 8''; 9'').
EP06778246A 2005-09-27 2006-08-15 Actionneur piezo-electrique a resistance protectrice Withdrawn EP1932190A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005046118A DE102005046118A1 (de) 2005-09-27 2005-09-27 Piezoaktor mit Schutzwiderstand
PCT/EP2006/065325 WO2007036392A1 (fr) 2005-09-27 2006-08-15 Actionneur piezo-electrique a resistance protectrice

Publications (1)

Publication Number Publication Date
EP1932190A1 true EP1932190A1 (fr) 2008-06-18

Family

ID=37401086

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06778246A Withdrawn EP1932190A1 (fr) 2005-09-27 2006-08-15 Actionneur piezo-electrique a resistance protectrice

Country Status (5)

Country Link
US (1) US20100148628A1 (fr)
EP (1) EP1932190A1 (fr)
CN (1) CN101273476A (fr)
DE (1) DE102005046118A1 (fr)
WO (1) WO2007036392A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007004874A1 (de) * 2006-10-02 2008-04-03 Robert Bosch Gmbh Piezoaktor, bestehend aus übereinander gestapelten, elektrisch kontaktierten Piezoelementen
US8084614B2 (en) * 2007-04-06 2011-12-27 Neurocrine Biosciences, Inc. Gonadotropin-releasing hormone receptor antagonists and methods relating thereto
DE102008031641B4 (de) * 2008-07-04 2017-11-09 Epcos Ag Piezoaktor in Vielschichtbauweise
US8573750B2 (en) * 2008-10-30 2013-11-05 Fujifilm Corporation Short circuit protection for inkjet printhead
DE102013200243A1 (de) * 2013-01-10 2014-07-10 Robert Bosch Gmbh Piezoelektrisches Bauteil und Verfahren zur Herstellung eines piezoelektrischen Bauteils

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61108182A (ja) * 1984-11-01 1986-05-26 Toshiba Corp 積層形圧電素子装置とその使用方法
US4803763A (en) * 1986-08-28 1989-02-14 Nippon Soken, Inc. Method of making a laminated piezoelectric transducer
DE4228297A1 (de) * 1992-08-26 1994-03-03 Siemens Ag Veränderbarer Hochstromwiderstand, insbes. zur Anwendung als Schutzelement in der Leistungsschalttechnik, und Schaltung unter Verwendung des Hochstromwiderstandes
JP2003086852A (ja) * 2001-09-14 2003-03-20 Toyota Motor Corp 圧電素子およびその製造方法
JP4554232B2 (ja) * 2004-02-17 2010-09-29 株式会社デンソー 圧電スタック及び圧電スタックの製造方法
EP1605527A1 (fr) * 2004-06-07 2005-12-14 Delphi Technologies, Inc. Electrode extérieure à fusible d'un actionneur piézoélectrique en couche mince et actionneur piézoélectrique en couche mince l'utilisant

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2007036392A1 *

Also Published As

Publication number Publication date
WO2007036392A1 (fr) 2007-04-05
DE102005046118A1 (de) 2007-03-29
US20100148628A1 (en) 2010-06-17
CN101273476A (zh) 2008-09-24

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