EP1854120A1 - Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source - Google Patents
Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle sourceInfo
- Publication number
- EP1854120A1 EP1854120A1 EP06709515A EP06709515A EP1854120A1 EP 1854120 A1 EP1854120 A1 EP 1854120A1 EP 06709515 A EP06709515 A EP 06709515A EP 06709515 A EP06709515 A EP 06709515A EP 1854120 A1 EP1854120 A1 EP 1854120A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- atoms
- target
- monochromatic
- ray source
- source according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
- H01J35/106—Active cooling, e.g. fluid flow, heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/083—Bonding or fixing with the support or substrate
- H01J2235/084—Target-substrate interlayers or structures, e.g. to control or prevent diffusion or improve adhesion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/088—Laminated targets, e.g. plurality of emitting layers of unique or differing materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1229—Cooling characterised by method employing layers with high emissivity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1229—Cooling characterised by method employing layers with high emissivity
- H01J2235/1233—Cooling characterised by method employing layers with high emissivity characterised by the material
- H01J2235/1237—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1258—Placing objects in close proximity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1262—Circulating fluids
Definitions
- the present invention relates to so-called "soft" X-ray sources, in particular the sources used to form images by X-ray microscopy.
- X-ray microscopy is especially used for imaging in the fields of analysis or biological research, because it allows to form images with better spatial resolution than the images formed in visible or ultraviolet light, because of the lower radiation wavelength.
- K carbon at 284 eV and threshold K oxygen at 543 eV which corresponds to wavelengths between 4.4 nm and 2.3 nm.
- this range of energy is a preferential area for biological analysis, since organic materials, of which carbon is the predominant element, are ten to twenty times more absorbent than water, which is often the major part of the samples. studied.
- the brightness necessary for a high image resolution would be rather of the order of 5.10 10 photons / s. ⁇ m 2 .sr in a relatively narrow spectral band, that is to say having a ratio of the length of d central wave on the wavelength ⁇ L of the order of 300 to 500 (ie a spectral width of 1 to 1.8 eV). Therefore, the necessary spectral brightness is of the order of:
- the senor consisting for example of 1 million pixels, should receive about 1,000 photons / pixel; it takes 1 billion photons detected per image.
- the sensor consisting for example of 1 million pixels, should receive about 1,000 photons / pixel; it takes 1 billion photons detected per image.
- the efficiency of the objective is 10%
- the transmission of X-rays through the object is 10%
- the quantum efficiency of the detector conversion of photons into electrical charges
- the present invention therefore relates to an X-ray source having very good performance in terms of power, brightness, spectral finesse, low cost, easy to implement and not producing debris.
- the subject of the invention is therefore a monochromatic source of X-rays, comprising a target composed in particular of a material integrating emitting atoms consisting of a type of element (belonging to the Periodic Table of the Elements), said atoms being excited by bombardment.
- electronics essentially electrons located on the K layer of said elements.
- this material is generally in the solid state and its cohesion is ensured by means of structuring atoms bonded to the emitting atoms.
- said structuring atoms have an absorption coefficient of photon energy less than or equal to a determined threshold. This threshold is defined in such a way that a transmission of at least 10% of the outgoing radiation emitted by the deepest transmitting atoms (located about 1 ⁇ m from the surface of the target) reached by the beam of radiation is substantially observed. electrons.
- the invention resides in an X-ray source, the target of which comprises a solid-state material composed of atoms of at least two elements, the emitting atoms and the structuring atoms, the structuring atoms not being of a nature to filter too strongly X-rays emitted by the emitting atoms.
- the threshold of absorption capacity defined above is at most 10%.
- at least 10% of the x-rays emitted come out of the target and can be exploited.
- Lambert-Beer Act this amounts to implementing structural atoms whose absorption coefficient is less than or equal to 2.3 microns "1 .
- the transmission according to this law corresponds to the expression:
- ⁇ is the absorption coefficient and 1 is the depth in the target.
- the atomic numbers of the structuring atoms are lower than the atomic number of the emitting atoms. In this way, the structuring atoms do not filter the X-rays emitted by the emitting atoms.
- the emitting atoms are oxygen atoms, so the material is present in whole or in part in an oxidized form.
- the structuring atoms are beryllium atoms, in oxidized form, and especially beryllium monoxide (BeO).
- BeO beryllium monoxide
- the proportion of X-rays absorbed by the structural atoms of beryllium is low.
- the emitting atoms are nitrogen atoms, so the material constituting the target is wholly or partly in nitride form.
- the structuring atoms are boron atoms, forming a target in nitride form defined by boron nitride (BN).
- the emitting atoms are oxygen atoms and the structuring atoms are magnesium atoms and aluminum atoms, forming a target in oxidized form defined by magnesium aluminate (MgAl 2 O 4 ), or are chromium or manganese atoms.
- the structuring atoms are magnesium atoms and aluminum atoms, forming a target in oxidized form defined by magnesium aluminate (MgAl 2 O 4 ), or are chromium or manganese atoms.
- the target is totally or partially covered with a material with a high radiation coefficient, so as to allow the evacuation by radiation of the heat produced during said electron bombardment of the target.
- the radiation coefficient of the material with a high radiation coefficient is greater than or equal to 0.7 for the emission of wavelength radiations comprised between 1 and 10 ⁇ m.
- the high radiation coefficient material employed is nickel black.
- the target is totally or partially located opposite thermal conductors, which are covered in all or part of high radiation coefficient material, so as to capture the radiation from the target.
- a fluid circulates inside said conductors so as to cool them by convection.
- the electron beam is focused and inclined relative to the normal at the point of impact of the beam on the target.
- the angle of inclination of the electron bombardment beam with respect to the normal at its point of impact on the target is between 40 ° and 70 °.
- the part of the target likely to be exposed to the beam is covered with a surface layer of a refractory material, electrically conductive and having a low energy absorption of emitted X-rays or bombardment electrons.
- the refractory material has an energy absorption coefficient of emitted X-rays of less than or equal to 2.3 ⁇ m -1 .
- this refractory material is chosen from the group comprising chromium, nickel, cobalt or one of their oxides, especially chromium (III) oxide of formula Cr 2 O 3 .
- the source further comprises a reserve of this refractory material located near the target, the reserve being capable of being exposed to the incident beam so as to cause the sublimation of a part of the refractory material which constitutes the target, of to restore the surface layer.
- the target has a symmetry of revolution and is rotated relative to its axis of revolution and with respect to the bombardment beam.
- the thickness of the target varies globally decreasing with increasing distance to the axis of revolution of the target.
- the target is assembled by brazing on a material with a coefficient of expansion and Poisson's ratio close to those of the material making up the target.
- the invention also relates to a microscope equipped with at least one X-ray source as defined above.
- Figure 1 is a schematic representation of the anode of an X-ray source according to a first particular embodiment of the invention.
- Figure 2 is a schematic representation of the anode of an X-ray source according to another particular embodiment of the invention.
- FIG. 1 represents an X-ray source whose target (1) is composed in particular of a material (3) in the solid state, comprising emitting atoms bonded to structuring atoms.
- the structuring atoms represent a single element of the periodic table and are of atomic number less than that of said transmitting atoms.
- the material (3) of the target (1) is a ceramic made of beryllium monoxide (BeO), in which the oxygen atoms constitute the emitting atoms within the meaning of the invention, whereas the atoms of beryllium play the role of structuring atoms.
- BeO beryllium monoxide
- the material (3) could also consist of a composite ceramic of beryllium and beryllium oxide (Be-BeO), or composed of boron oxide (B 2 O 3 ), where the atoms of oxygen constitute the emitting atoms, while the boron atoms constitute the structuring atoms.
- Be-BeO beryllium and beryllium oxide
- B 2 O 3 boron oxide
- the target (1) constitutes the anode of the X-ray source.
- the target (1) is bombarded by an electron beam (2).
- the energy of the bombardment beam (2) is sufficient to excite the electrons located on the K layers of the emitting atoms of the material making up the target (1).
- the emitting atoms are therefore mainly located at the area reached by the beam (2).
- the current and voltage of the cathode of the X-ray source may for example be respectively 3 to 50 kV and 10 to 50 mA.
- a voltage of high acceleration increases the penetration of the beam (2), thereby to distribute more in the volume of the target (1) the heat given off during the bombardment.
- the experiment shows that the absorption of the X-rays emitted increases globally with the increase of the atomic number (s) of the elements chosen to constitute the structuring atoms.
- s the atomic number
- the source according to the invention emits X-rays in the oxygen line K with an energy of 525 eV and a width of 1.2 eV (a spectral finesse of A 452), which corresponds to the natural width of the K line.
- the permissible beam power (2) is 300 W for a source according to the invention, while it is only 0.6 W for a water jet source; the brightness obtained with beryllium monoxide (3) reaches 5.10 10 photons / s. ⁇ m 2 .sr, ie about one hundred times the brightness accessible with a water jet source (5.10 8 photons / s. ⁇ m 2 .sr) . That is a spectral brightness of 10 10 photons / s. ⁇ m 2 .sr.O, 1% BW.
- the bombardment by the beam (2) causes the target (1) to be heated, in particular in the impact zone (5).
- the target (1) must not be heated beyond the melting temperature of the materials that compose it. Therefore, the target (1), symmetrical of revolution, is rotated along the arrow R relative to its axis of revolution (6), as is frequently the case for X-ray sources, qualified then from "rotating anode” sources.
- the impact zone (5) is constantly renewed and cooled between two consecutive exposures to the beam (2), so that the impact zone (5) can not reach its melting temperature.
- the minimum rotational speed is determined experimentally or by calculation so as to comply with the limit temperature condition mentioned above. For example, for a beam (2) of 100 W of energy focused on a surface of about
- the rotational speed depending on the diameter of the rotating anode for example a rotational speed of 400 revolutions / s for a diameter of 150 mm.
- the target (1) is covered over a large part of its surface with a layer of emissive material (7a), constituted, in the example described, by nickel black, with a high radiation coefficient, greater than 0.7, here the coefficient ⁇ is 0.9.
- the layer of emissive material may be directly in contact with the target (1) or indirectly via a layer of another material, intended to ensure the attachment of the emissive material.
- heat exchangers (8, 9) As shown in FIG. 1, it is possible to improve the evacuation of the heat from the part (3) by mounting opposite and around it heat exchangers (8, 9) also covered with a layer of emissive material (7b, 7c) also good thermal conductors.
- the optimal geometry and positioning of these heat exchangers can be determined by those skilled in the art empirically or by calculation.
- a criterion for defining the geometry and the positioning of these heat exchangers (8, 9) is that the radiation of the greatest possible number of points of the target (1) is collected by the heat exchangers at a solid angle close to 2 ⁇ . sr. This optimizes the radiation heat exchange between the facing surfaces, and thus, evacuate a significant thermal energy.
- FIG. 2 illustrates another conceivable construction for cooling by convection, by means of a coolant (112) flowing in a volume (108) provided for this purpose, the cryogenic target (101) rotating beryllium oxide (103).
- the fluid (112) employed in this example is liquid nitrogen, which flows gravity through an axial tube (109) into the central volume (108) of the target (101).
- the liquid nitrogen (112) accumulates thereon against a target core (116) made of a material with a high heat capacity, such as aluminum, and then circulates along the outer walls of the axial tube (109) during the rotation of the target (101).
- the equilibrium temperature of the assembly consisting of the target (101) and the axial tube (109) can reach 77 K.
- a source according to the invention instead of a rotating target source, one could consider a source according to the invention and having a cryogenic fixed target, cooled to very low temperature (77 K). However, dissipating a thermal power between 100 W and 300 W for a surface of 20 to 30 microns in diameter would require that the target has a thickness of the order of a few microns, which would make it fragile.
- the target (1; 101) and the surrounding parts are placed under vacuum to allow the propagation of the bombardment electrons (2; 102) and the X-rays consequently emitted. (14; 114).
- an X-ray source is traversed by electronic currents at the impact zone (5; 105) of the beam (2; 102). It is then necessary to evacuate these currents. Therefore, the source according to the invention is covered at the level of the impact zone (5; 105) of a layer of refractory material and conductive so as to evacuate these currents.
- This layer is therefore in the form of a ribbon at least 40 microns wide and extending over the entire circle of the target (1, 101).
- the thickness and the absorption coefficient (which is proportional to the atomic number) of this layer must be sufficiently small so as not to absorb too much the X-rays emitted.
- the chromium layer has a thickness of between 20 and 40 nm.
- the composite material (Be-BeO) is electrically conductive, a target made of this material makes it unnecessary to add the chromium layer.
- This composite is also good thermal conductor, but its maximum operating temperature is around 1,200 K, against 2,200 K for beryllium monoxide. In addition, its content in emitting atoms (here oxygen atoms) is lower than that of beryllium monoxide.
- the emissive material (7a) covering most of the surface of the target (1) is also conductive and drains the charges to earth via the rotation shaft (15). .
- this thin layer of electrically conductive material can be deteriorated by local evaporation under the effect of heat generated during operation.
- a reserve (17; 117) of this material is attached to the target (1) near the point of impact (5; 105) where the electron beam ( 2; 102) bombards the target (1).
- the resist (17, 117) can be bombarded by the electron beam (2; 102) weakly deviated from its usual path.
- the resist (17; 117) is thus sublimated when it is exposed long enough to the beam (2; 102) and it contributes to restoring the continuity of the layer of conductive material.
- the parameters of the restoration process are not detailed further here because they fall within the general knowledge of those skilled in the art.
- the rotational speed to be achieved is about 400 revolutions / s, given the peripheral speed of 200 m / s indicated above. This is why it is necessary to ensure that the target (1) is able to withstand the mechanical stresses associated with such a rotational speed and, as far as possible, to minimize them.
- this criterion guides the choice of the material making up the target (1).
- beryllium monoxide just like the composite material (Be-BeO)
- Be-BeO composite material
- the limit at break of beryllium monoxide is 100 MPa at a temperature of 500 K and the target according to the invention then supports power densities of the electron beam far exceeding 100 kW / mm 2 .
- boron nitride which emits in the line K nitrogen with an energy of 392 eV, which has good thermal properties (limit temperature of use at 2,500 K, conductivity of 30 W / mK), as well as good mechanical properties (rupture limit of 100 MPa at a temperature of 500 K).
- magnesium oxide MgO
- MgO magnesium oxide
- other materials still make it possible to produce a source according to the invention, which, however, have thermal and / or mechanical properties less suitable for application to a rotating anode.
- boron (III) oxide, of formula B 2 O 3 lithium oxide (I), of formula Li 2 O, or lithium borates, of general formula LiB x Oy.
- the target (1; 101) can be machined in a geometry to reduce the constraints due to rotation.
- the target has a thickness, measured according to the section of the target (1; 101) by a radial plane, which varies from globally decreasing with increasing distance to the axis of revolution of the target (1; 101).
- the variation of the thickness of the target may be linear, as is apparent from FIG. 1, or quadratic, or else be defined by another mathematical function.
- the variation can be continuous or discontinuous, insofar as it remains globally decreasing with the increase of the distance to the axis of revolution (6; 106) of the target (1; 101), that is to say the thickness measured at the periphery of the ring or disc forming the target (1; 101) is less than the thickness measured near its axis (6; 106).
- the target (1) can be provided in several parts, made of different materials, to the extent that they are able to withstand the mechanical and thermal stresses previously mentioned. It is thus desirable to provide the axis and the support (16) of the ceramic (3) of a material having suitable thermal and mechanical properties. Indeed, experience shows that the temperature of the target (1) decreases as one "approaches" the axis.
- the material of the support (16) must be chosen so as to have a Poisson's ratio and a coefficient of expansion close to those of the ceramic (3) to ensure good cohesion of the assembly, even under high mechanical and thermal stresses and hence, a good transmission of these constraints.
- Titanium and some of its alloys are able to constitute the support (16), because they have the desired thermal and mechanical properties as well as Poisson and expansion coefficients (v ⁇ 0.32; k ⁇ 9 ⁇ m / mK) close at the temperatures considered, those of beryllium monoxide (v ⁇ 0.30, k ⁇ 8 ⁇ m / mK).
- the assembly of the beryllium monoxide ceramic (3) on the titanium support (16) is performed by brazing, that is to say without fusion of the assembled materials.
- the rotation shaft (15) is hollow so as to increase its thermal resistance, which promotes the evacuation of heat radiation and avoids the transmission of thermal stresses to the parts imparting the rotational movement (no -retationées).
- the target (1) must be machined carefully, then dynamically balanced so as to avoid, as far as possible, the inertial stresses, and therefore the vibrations, related to geometrical irregularities.
- the rotation drive must be performed with great precision.
- the support (116) is also made of an alloy chosen for its thermal and mechanical properties, in particular for its Poisson and expansion coefficients (v ⁇ 0.32; k ⁇ 9 ⁇ m / mK ) at temperatures close to those of beryllium monoxide (v ⁇ 0.30, k ⁇ 8 ⁇ m / mK).
- a ferro-fluid seal (118) known per se, intended, on the one hand, to seal the enclosure of the target (101) so as to maintain a suitable vacuum, and on the other hand, to drive parasitic electronic currents.
- the structuring atoms are also capable of emitting X-rays in their own K lines. But these rays, less energetic than those emitted by the emitting atoms, can be filtered by a device known per se installed. for example at a collimator (4) located on the X-ray path between the target (1) and the object to be analyzed (not shown). Thus, these "parasitic" rays are not likely to degrade the image of the object and / or expose it to a dose of ionizing radiation unnecessarily high.
- beryllium monoxide for its use as a target lies in the fact that it emits few braking X-rays (also called “Bremsstrahlung"), in particular because of the low atomic numbers of its components. Indeed, the conversion of the energy of the electrons into braking radiation has a yield proportional to the atomic number, to the acceleration voltage and according to the geometry of the target. The emission of braking radiation is therefore lower as the atomic number of the bombarded elements is small.
- the de-excitation of the electrons of the K layers of the emitting atoms is accompanied by the emission of X photons.
- the X-rays thus emitted by the target (1) are included in the "window of water". They have an energy between the threshold K of carbon at 284 eV and the threshold K of oxygen at 543 eV, wavelengths between 4.4 nm and 2.3 nm. This range of energy is an area perfectly suited to biological analysis, because it allows to form images of organic materials well contrasted, because of the high difference of absorption (factor 10 to 20) of the radii by the carbon and by water, which constitute the bulk of the organic materials and samples studied respectively.
- beryllium monoxide must be handled according to appropriate safety measures, because it is very toxic. Nevertheless, for the application envisaged here, the risks of exposure, and therefore of intoxication, are limited to the machining phase of the target (1). Indeed, subsequently, this material is in the form of a stable ceramic and vacuum insulated, which reduces the risk of intoxication.
- the example developed here deals with an X-ray source emitting at energy levels included in the water window.
- the object of the invention as it appears from claim 1 for example, also relates to sources of X-rays emitting at other energy levels.
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- X-Ray Techniques (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0550548A FR2882886B1 (fr) | 2005-03-02 | 2005-03-02 | Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source |
PCT/FR2006/050136 WO2006092518A1 (fr) | 2005-03-02 | 2006-02-14 | Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source |
Publications (1)
Publication Number | Publication Date |
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EP1854120A1 true EP1854120A1 (fr) | 2007-11-14 |
Family
ID=34954757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP06709515A Ceased EP1854120A1 (fr) | 2005-03-02 | 2006-02-14 | Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080019481A1 (fr) |
EP (1) | EP1854120A1 (fr) |
JP (1) | JP2008536255A (fr) |
FR (1) | FR2882886B1 (fr) |
WO (1) | WO2006092518A1 (fr) |
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US7508916B2 (en) * | 2006-12-08 | 2009-03-24 | General Electric Company | Convectively cooled x-ray tube target and method of making same |
KR101477472B1 (ko) * | 2007-09-07 | 2014-12-30 | 코닌클리케 필립스 엔.브이. | 가스 방전 소스를 위한 전극 장치 및 이 전극 장치를 갖는 가스 방전 소스를 동작시키는 방법 |
US20100128848A1 (en) * | 2008-11-21 | 2010-05-27 | General Electric Company | X-ray tube having liquid lubricated bearings and liquid cooled target |
CN104350572B (zh) | 2012-06-14 | 2016-10-19 | 西门子公司 | X射线辐射源和用于产生x射线辐射的方法 |
US10475619B2 (en) * | 2016-06-30 | 2019-11-12 | General Electric Company | Multilayer X-ray source target |
US10692685B2 (en) | 2016-06-30 | 2020-06-23 | General Electric Company | Multi-layer X-ray source target |
EP3336875A1 (fr) * | 2016-12-16 | 2018-06-20 | Excillum AB | Cible à semi-conducteurs à rayons x |
CN109243947B (zh) * | 2017-07-11 | 2023-05-02 | Fei 公司 | 用于x射线生成的薄片状靶 |
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JP2000306533A (ja) * | 1999-02-19 | 2000-11-02 | Toshiba Corp | 透過放射型x線管およびその製造方法 |
US6303411B1 (en) * | 1999-05-03 | 2001-10-16 | Vortek Industries Ltd. | Spatially resolved temperature measurement and irradiance control |
WO2001046962A1 (fr) * | 1999-12-20 | 2001-06-28 | Philips Electron Optics B.V. | 'microscopes aux rayons x comprenant une source de rayons x pour rayons x mous |
US6390875B1 (en) * | 2000-03-24 | 2002-05-21 | General Electric Company | Method for enhancing thermal radiation transfer in X-ray tube components |
JP4374727B2 (ja) * | 2000-05-12 | 2009-12-02 | 株式会社島津製作所 | X線管及びx線発生装置 |
US6477231B2 (en) * | 2000-12-29 | 2002-11-05 | General Electric Company | Thermal energy transfer device and x-ray tubes and x-ray systems incorporating same |
AU2002363962A1 (en) * | 2001-12-04 | 2003-06-17 | X-Ray Optical Systems, Inc. | X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
US7209546B1 (en) * | 2002-04-15 | 2007-04-24 | Varian Medical Systems Technologies, Inc. | Apparatus and method for applying an absorptive coating to an x-ray tube |
JP3905050B2 (ja) * | 2003-03-26 | 2007-04-18 | 独立行政法人科学技術振興機構 | X線管ターゲット及びそのx線管ターゲットの製造方法 |
FR2895831B1 (fr) * | 2006-01-03 | 2009-06-12 | Alcatel Sa | Source compacte a faisceau de rayons x de tres grande brillance |
-
2005
- 2005-03-02 FR FR0550548A patent/FR2882886B1/fr not_active Expired - Fee Related
-
2006
- 2006-02-14 EP EP06709515A patent/EP1854120A1/fr not_active Ceased
- 2006-02-14 WO PCT/FR2006/050136 patent/WO2006092518A1/fr not_active Application Discontinuation
- 2006-02-14 JP JP2007557548A patent/JP2008536255A/ja not_active Withdrawn
-
2007
- 2007-08-24 US US11/844,699 patent/US20080019481A1/en not_active Abandoned
Non-Patent Citations (1)
Title |
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See references of WO2006092518A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2008536255A (ja) | 2008-09-04 |
FR2882886B1 (fr) | 2007-11-23 |
US20080019481A1 (en) | 2008-01-24 |
FR2882886A1 (fr) | 2006-09-08 |
WO2006092518A1 (fr) | 2006-09-08 |
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