EP1848973A1 - Capteur piezoelectrique comprenant un capteur thermique et un circuit amplificateur - Google Patents

Capteur piezoelectrique comprenant un capteur thermique et un circuit amplificateur

Info

Publication number
EP1848973A1
EP1848973A1 EP06706942A EP06706942A EP1848973A1 EP 1848973 A1 EP1848973 A1 EP 1848973A1 EP 06706942 A EP06706942 A EP 06706942A EP 06706942 A EP06706942 A EP 06706942A EP 1848973 A1 EP1848973 A1 EP 1848973A1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
piezoelectric sensor
sensor
sensor according
amplifier circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06706942A
Other languages
German (de)
English (en)
Inventor
Bernhard Brunner
Dieter Sporn
Gerhard Domann
Peter Spies
Frank FÖRSTER
Javier Gutierrez Boronat
Ruth Houbertz-Krauss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP1848973A1 publication Critical patent/EP1848973A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G01D3/0365—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves the undesired influence being measured using a separate sensor, which produces an influence related signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention concerne un capteur piézoélectrique constitué d'un transducteur piézoélectrique, d'un circuit amplificateur et d'au moins une connexion pour des lignes externes d'alimentation en courant ou de transmission de signaux, ces éléments étant intégrés sur ou dans une structure support. Ce capteur permet d'effectuer des mesures dans diverses conditions de température. Le capteur piézoélectrique selon l'invention peut être utilisé pour effectuer des mesures d'oscillation, d'accélération ou d'amplitude, en particulier dans le domaine de l'industrie mécanique, de l'industrie aérospatiale ou de l'industrie automobile.
EP06706942A 2005-02-14 2006-02-14 Capteur piezoelectrique comprenant un capteur thermique et un circuit amplificateur Withdrawn EP1848973A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005006666A DE102005006666A1 (de) 2005-02-14 2005-02-14 Piezoelektrischer Sensor und dessen Verwendung
PCT/EP2006/001336 WO2006084767A1 (fr) 2005-02-14 2006-02-14 Capteur piezoelectrique comprenant un capteur thermique et un circuit amplificateur

Publications (1)

Publication Number Publication Date
EP1848973A1 true EP1848973A1 (fr) 2007-10-31

Family

ID=36776051

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06706942A Withdrawn EP1848973A1 (fr) 2005-02-14 2006-02-14 Capteur piezoelectrique comprenant un capteur thermique et un circuit amplificateur

Country Status (4)

Country Link
US (1) US20080127727A1 (fr)
EP (1) EP1848973A1 (fr)
DE (1) DE102005006666A1 (fr)
WO (1) WO2006084767A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006011370A1 (de) * 2006-03-09 2007-09-20 Eppendorf Ag Vorrichtung zum Mischen insbesondere von Laborgefäß-Inhalten mit einem Sensor
DE102006041226B4 (de) * 2006-09-02 2015-05-13 Diehl Ako Stiftung & Co. Kg Drucktastschalter
DE102010044767B4 (de) * 2010-09-08 2017-07-13 Hottinger Baldwin Messtechnik Gmbh Verfahren und Vorrichtung zum Kalibrieren eines Ladungsverstärkers einer piezoelektrischen Messkette
DE102010060906B4 (de) 2010-11-30 2014-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensormodul mit Weckeinrichtung
CN102364879A (zh) * 2011-06-23 2012-02-29 苏州瀚瑞微电子有限公司 电容式触摸按键的电路结构
DE102012222239A1 (de) 2012-12-04 2014-06-05 iNDTact GmbH Messeinrichtung und Bauteil mit darin integrierter Messeinrichtung
US10725202B2 (en) * 2017-07-21 2020-07-28 Baker Hughes, A Ge Company, Llc Downhole electronics package having integrated components formed by layer deposition
RU2666178C1 (ru) * 2017-12-26 2018-09-06 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" Пьезоэлектрический полимерный датчик матричного типа

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1555700A (en) * 1976-11-18 1979-11-14 Birchall D J Lectronic instrument amplifier
US4577510A (en) * 1984-09-06 1986-03-25 The United States Of America As Represented By The Secretary Of The Air Force Dynamic polymer pressure transducer with temperature compensation
DE3640242A1 (de) * 1986-11-25 1988-05-26 Vdo Schindling Schaltungsanordnung fuer einen sensor
EP0374870B1 (fr) * 1988-12-23 1993-04-07 Mitsubishi Denki Kabushiki Kaisha Capteur d'accélération
AT393416B (de) * 1989-04-27 1991-10-25 Avl Verbrennungskraft Messtech Messverfahren zur bestimmung bzw. ueberwachung von mechanischen und/oder physikalischen groessen
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
DE59205962D1 (de) * 1992-01-14 1996-05-15 Siemens Ag Ladungsverstärker
US5808197A (en) * 1995-01-13 1998-09-15 Remec, Inc. Vehicle information and control system
DE19507235C1 (de) * 1995-03-02 1996-08-22 Wolfgang Winter Verfahren und Vorrichtung zur Messung und Nutzung atmosphärischer Störungen beim antriebslosen Flug
FR2739936B1 (fr) * 1995-10-11 1997-11-14 Snecma Amplificateur de charge differentiel pour capteur piezoelectrique
JPH09318653A (ja) * 1996-05-28 1997-12-12 Mitsubishi Electric Corp 半導体センサ及びその出力調整方法
US6435034B1 (en) * 1997-11-18 2002-08-20 Hera Rotterdam B.V. Piezo-electric stretching detector and method for measuring stretching phenomena using such a detector

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006084767A1 *

Also Published As

Publication number Publication date
US20080127727A1 (en) 2008-06-05
WO2006084767A1 (fr) 2006-08-17
DE102005006666A1 (de) 2006-08-24

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Legal Events

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

RIN1 Information on inventor provided before grant (corrected)

Inventor name: BRUNNER, BERNHARD

Inventor name: GUTIERREZ BORONAT, JAVIER

Inventor name: SPIES, PETER

Inventor name: HOUBERTZ-KRAUSS, RUTH

Inventor name: SPORN, DIETER

Inventor name: FOERSTER, FRANK

Inventor name: DOMANN, GERHARD

RIN1 Information on inventor provided before grant (corrected)

Inventor name: DOMANN, GERHARD

Inventor name: BRUNNER, BERNHARD

Inventor name: SPIES, PETER

Inventor name: SPORN, DIETER

Inventor name: GUTIERREZ BORONAT, JAVIER

Inventor name: HOUBERTZ-KRAUSS, RUTH

Inventor name: FOERSTER, FRANK

RIN1 Information on inventor provided before grant (corrected)

Inventor name: SPIES, PETER

Inventor name: FOERSTER, FRANK

Inventor name: BRUNNER, BERNHARD

Inventor name: HOUBERTZ-KRAUSS, RUTH

Inventor name: DOMANN, GERHARD

Inventor name: SPORN, DIETER

Inventor name: GUTIERREZ BORONAT, JAVIER

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