EP1826411A1 - Rotary pump, hydrodynamic mixer with a rotary pump and use of the rotary pump to process fluids - Google Patents

Abstract

Rotary pump (1) comprises a rotor arranged in a closed pump housing that is in operative connection with a drive for pumping a fluid (4). The pump housing has an inlet opening (6) for the intake of the fluid into the pump housing and an outlet opening (7) for conveying the fluid out of the pump housing into a storage container (8) that is partially filled with the fluid. The outlet opening is arranged in a way that the fluid can be supplied from the pump housing through the outlet opening to the storage container directly and free of ducting. Independent claims are included for: (1) hydrodynamic mixer (100) comprising a storage container for receiving a fluid to be mixed, and the rotary pump; and (2) use of the rotary pump for the processing of fluids, e.g. suspensions or slurry in a chemical mechanical polishing (CMP) process in a wafer production or in the production of a computer hard drive, for the circulation, mixing and/or pumping of the suspension in a storage container, for dissolving and/or mixing of a powder with a fluid, for the manufacture of emulsions, and/or for through mixing and/or aerating of a bioreactor.

Description

The invention relates to a rotary pump, a hydrodynamic mixer with such a rotary pump, and the use of the rotary pump for processing suspensions according to the preamble of the independent claim of the respective category.

In many industrial processes, such as in semiconductor and chip manufacturing, there is a need to mix suspensions in a controlled manner and dispense them via nozzles or similar devices. As an important example here chemical-mechanical polishing processes (CMP, chemical-mechanical planerization) are called, as used for example in the semiconductor industry. In such processes, a suspension, typically referred to as a slurry, of typically very fine solid particles and a liquid is applied to a rotating wafer and serves there for polishing or lapping the very fine semiconductor structures. Another example is the application of photoresist to the wafer, or the roughening of surfaces of computer hard disks, to prevent sticking of the read / write heads by adhesion forces, for example by van der Waals forces.

A suitable in principle for this purpose and known from the prior art dispensing device is illustrated in Fig. 1. In order to distinguish the prior art from the embodiments of the present invention, in the figures, those features that relate to features of prior art devices are provided with one or two apostrophes, while the features of examples according to the invention are not provided with an apostrophe are provided.

The known dispensing device 1 'of Fig. 1 comprises a reservoir 2', with the fluid, for. B. slurry, is filled. The reservoir 2 'has an outlet 4', to which a pressure line 5 'is connected, which extends via a recirculation pump R' up to an inlet 6 'on the reservoir 2'. Downstream of the recirculation pump R 'a plurality of removal points 7' in the pressure line 5 'are provided, which lead to nozzles or other - usually referred to as a tool - apparatuses with which the fluid, for example. is applied to the wafer. Each removal point 7 'is provided with a valve 8' in order to open or close the flow connection to the respective apparatus. If all removal points 7 'are closed, then the recirculation pump R' causes a mere circulation of the fluid, and thus a slight, in the reservoir 2 'locally limited mixing of the fluid.

The desired pressure with which the fluid is conveyed through the pressure line 5 'and the open removal points 7' to the apparatus and provided there can be generated or influenced by pressurization of the fluid in the reservoir 2 '. For this purpose, an inlet 10 'is provided on the storage container 2' through which a pressure medium can be introduced into the storage container via a pressure regulating valve 11 ', as symbolically represented by the arrow G. As a pressure medium is usually a gas, for. As nitrogen, used with the reservoir 2 'an overpressure of, for example, 0.5 bar is maintained.

However, such a device has disadvantages. In order to generate the overpressure in the storage container 2 ', it must be made gas-tight, which is quite complex in terms of apparatus. Moreover, it is not easy to fill new fluid in the reservoir 2 'when the level is too low. Also, a change in the pressure in the reservoir 2 'and thus a change in the delivery pressure is cumbersome and time-consuming. Further, it is possible that the pressure medium (gas) penetrates into the fluid or in the fluid goes into solution, which can lead to undesirable changes in the composition of the fluid.

However, a much bigger problem is, especially with suspensions such as e.g. Slurry, or for fluids that tend to separations or clumps, to see that the circulation caused by the recirculation pump R 'is usually far too low and uneven, around everywhere in the reservoir 2' sufficient for a continuous mixing fluid movement guarantee. Therefore, additional measures are often necessary to ensure sufficient movement or mixing of the fluid in the reservoir 2 'permanently.

In contrast, in the EP 1 318 306 B1 proposed and shown in Fig. 2 apparatus for mixing and dispensing a fluid already represents a significant advance.

The in the EP 1 318 306 B1 2 can be used, for example, in a CMP process in the semiconductor industry In these processes, a suspension of fine solid particles referred to as slurry in a liquid is applied to a rotating wafer and serves there for lapping or polishing In this example, the fluid F "is the suspension referred to as slurry. The apparatuses or tools not shown in FIG. 2 include, for example, in each case a nozzle or some other means with which the fluid F "can be applied to the wafer.

With rotary pumps, which are also referred to as centrifugal pumps, are meant in the context of this application, all those pumping devices having a rotor or an impeller, by the rotation of which a momentum transfer takes place on the fluid to be delivered. The term rotary pump includes in particular centrifugal pumps, axial pumps and Side channel pumps. Typically, in a rotary pump, the inlet and outlet are in continuous flow communication. For example, no valves are provided between the pump inlet and the outlet.

2, the rotor 31 "for mixing the fluid F" is arranged directly in the outlet of the storage container 2 ".The rotor 31" protrudes at least partially into the storage container 2 for thorough mixing of the fluid F " "into it.

That is, it is a rotary pump with an open pump housing and not a rotary pump with a closed pump housing.

Thus, the rotary pump 3 is "not only the pumping of the fluid F", but above all as an agitator, which mixes the fluid F "in the reservoir 2". For this purpose, the rotor 31 "a plurality of wings 311", which are designed significantly larger than in known rotary pumps of comparable dimensions. The wings 311 "extend into the reservoir 2" and provide (upon rotation of the rotor 3 ") for a certain circulation of the fluid F", as indicated by the arrows Z ".

The rotor 31 "is arranged in a rotor housing 312" which forms part of the wall of the storage container 2 "." The open, non-closed rotor housing 312 "is an integral part of the storage container 2" here be.

The rotary pump 3 "further includes a stator 32" having a stator winding 322 "for electrically driving the rotor 31". The stator 32 "surrounds the rotor housing 312" and the stator 32 "is configured as a stator of a so-called temple motor, that is, the stator 32" has a plurality of stator teeth connected by a conclusion, wherein each stator tooth L-shaped with a shorter and a longer legs is formed. The longer leg extends parallel to each The axis of rotation of the rotor and the shorter leg extends radially inwardly toward the axis of rotation. The longer legs carry the stator winding 322 ".

The apparatus of Fig. 2 further comprises a pressure line 41 ", through which the fluid F" can be pumped to the above-mentioned and not shown in Fig. 2 apparatus or tools, with which the fluid F "eg applied to a wafer is

In order to achieve a noticeable thorough mixing of the fluid F "in the device of FIG. 2, it is essential that additionally fixed vanes 21" are provided in the reservoir, permitting thorough mixing of the fluid F "in the operating state.

The reason for this becomes readily apparent when looking at a device according to FIG. 2a which has no vanes 21 "in the reservoir 2". Such a device is shown in simplified form in Fig. 2a in a schematic manner.

The device of Fig. 2a also comprises a reservoir 2 "for a fluid F". At the bottom of the reservoir 2 "there is provided a rotary pump 3" with a rotor 31 ".The rotor 311" rotates in the direction of the arrow 3000 "in the tank 2". For reasons of clarity, the illustration of the pressure line 41 "was omitted.

The only significant difference of the device of Fig. 2a to that shown in Fig. 2 is thus that the wings 21 "are missing.

The absence of the vanes 21 "in the device of Figure 2a has massive consequences in terms of the intermixability of the fluid F" in the container 2 "of Figure 2a, since thorough mixing of the fluid in the reservoir 2" of Figure 2a is practical not at all.

This is because the fluid F "in the reservoir 2" coupled to the rotation of the rotor 31 ", and the fluid F" according to the arrow P "in the same direction with the rotation direction 3000 "of the rotor 31" is set in rotation so that a vortex V "is formed in the container with a funnel-shaped liquid surface V", also called vortex V. "At least in the vicinity of the rotor 31" or in the vicinity of the center of the reservoir 2 "the rotating vortex V" approximately the rotational speed of the rotor 31 assumes "take place in the fluid F" virtually no turbulence more and thus also substantially no mixing of the fluid F ".

Thus, if a good mixing of the fluid F ", which is preferably a suspension F", such as a slurry F "is to be ensured, it is essential to provide wings 21", as shown in FIG prevent stable vortex V ", ie break the rotating fluid flow.

The disadvantages of the known from the prior art solution for a mixer according to Figure 2 are obvious. The construction is complicated and inflexible, because the wings 21 "in the reservoir 2" are imperative. This not only means a higher design effort, but also an increased effort in maintenance, because, for example, when working on the engine, the wings must be removed consuming and used again. The cleaning of the system is correspondingly difficult and the construction is not least expensive, both in terms of purchase as well as what repair and maintenance work.

A far more serious disadvantage, however, is the design-related inflexibility of the devices known from the prior art. The essential parameters which determine the mixing process, and if a pressure line 41 "is provided, are essentially determined by the geometry of the device or the parts constituting it, for example, the intensity or quality of mixing Fluids F "and 7 or the pump power of the rotor 31", if anything, only affect the number of revolutions of the rotor 31 "within certain limits. In particular, the hydrodynamics of mixing can hardly be adjusted, that is, the distribution, size and Geometry of the vortex in the storage container 2 "is essentially determined by the geometry of the vanes 21", their size and arrangement in the storage container 2 "and its further components and components.

An adaptation of the device according to FIG. 2 to the requirements, the different fluids F "or different mixing conditions, such as temperature, viscosity of the fluid F", etc. to the mixing process, is not possible without significant structural changes.

In addition, the pumping process and the mixing process are strictly coupled to each other and can not be adapted without structural changes.

Starting from the prior art, it is therefore an object of the invention to provide a rotary pump and a hydrodynamic mixer with a rotary pump, which do not have the disadvantages mentioned. The dispenser should be flexible and easy to use and in particular allow adequate mixing of the fluid.

The objects of the invention solving these objects are characterized by the features of the independent claim of the respective category.

The respective dependent claims relate to particularly advantageous embodiments of the invention.

The invention thus relates to a rotary pump comprising a rotor arranged in a closed pump housing, which is operatively connected to a drive for conveying a fluid, wherein on the pump housing an inlet opening for the inlet of the fluid into the pump housing, and on the pump housing an outlet opening for conveying the fluid from the pump housing in one with the fluid at least partially filled Reservoir is provided. According to the invention, the outlet opening is arranged and configured on the pump housing such that the fluid can be supplied from the pump housing through the outlet opening to the storage container directly and without lines.

Essential for the invention is thus that the pump pumps the fluid through the outlet openings in the reservoir, whereby a turbulence or a very good mixing of the fluid, which may be in particular a suspension, such as a slurry. It is understood that the fluid may also be an emulsion or a mixture of two liquids, in particular two liquids which are difficult to mix and which can be optimally mixed with the rotary pump according to the invention in the storage container.

In particular, since the mixing is not carried out by a rotating mixer, which is provided on or in the reservoir, there is no stable vortex or vortex in the reservoir, which prevents good mixing of the fluid or at least massively deteriorated. Rather, the direct and line-free direct pumping of the fluid into the reservoir through the one or more outlet openings optimum mixing achieved because on the one hand the reservoir is optimally mixed in the entire volume through the flowing out of the outlet openings in the reservoir fluid and on the other hand not the outlet openings are connected to an external conveyor circuit for conveying the fluid from the reservoir addition, but directly, without connection with an external line open directly into the storage tank and thus can only accomplish the function of mixing the fluid in the reservoir.

The outlet openings according to the present invention thus basically open directly into the reservoir. That is, the fluid is passed from the interior of the pump housing through the outlet openings, which may be formed simply as bores, nozzles or small tubular extensions in the pump housing, directly into the reservoir for mixing the fluid in the reservoir, without that on the way of the fluid from the interior of the pump housing via the outlet openings in the reservoir another use of the fluid flow is possible. Thus, the fluid flow from the interior of the pump housing through the outlet openings in the reservoir is basically only the mixing of the fluid in the reservoir.

It has been found that rotary pumps are crucial to the present invention because they are constant, i. deliver stationary pressure conditions.

This is especially important because e.g. in the semiconductor industry with increasingly finer suspensions, i. with suspensions that include particles with sizes down to the nanometer range, worked, which are particularly difficult to mix, or in which a continuously consistent mixing can be maintained very difficult. Especially here, but not only here, it is of particular importance that constant, i. E. stationary pressure conditions can be realized, as provided by rotary pumps.

The advantages over a known from the prior art device, as shown for example in Fig. 1, are obvious. In the example shown in Fig. 1, the mixing of the fluid in the reservoir by the reflux of the medium is negligible and also coupled directly with the intensity of the use of the fluid between the pump outlet and the return point in the reservoir. For example, if there is much fluid between the outlet of the pump and the reservoir for use, e.g. taken in a polishing process, the backflow of the fluid into the reservoir is small, whereby the already poor mixing is reduced even further.

But even in the extreme case, when no fluid is withdrawn between the outlet of the pump in the device of FIG. 2 and the return point into the storage tank, for example because no use of the fluid takes place, the mixing of the fluid in the storage tank through the Reflux of the fluid still unusable bad, because the whole geometry of the arrangement is of course designed for optimal delivery of the sampling points with fluid between the outlet of the pump and the return flow into the storage tank and not on optimal mixing in the storage tank. The return flow of the fluid into the storage tank just serves to return unused fluid back to the storage tank so that it is not lost but is available for further use.

However, the outlet openings of the rotary pump according to the invention are used exclusively for optimal mixing of the fluid in the storage tank, because they directly convey the fluid directly from the interior of the closed pump housing back into the storage tank, so that the quality of the mixing in the tank is always ensured consistent, even if, as will be explained below, in addition to the outlet openings on the pump housing or a delivery opening for conveying a portion of the fluid is provided in a delivery line. This means that the delivery of the fluid through the outlet openings into the storage tank takes place independently of the fact that the rotary pump according to the invention fulfills additional tasks in special embodiments, for example the simultaneous delivery of the fluid into an external pumping circuit for the use of the fluid in a particular application, for Example for polishing a wafer.

In a preferred embodiment, a feed opening connectable to a pressure line for conveying the fluid into the pressure line is provided on the pump housing. It is essential that the delivery opening in no case is identical to the outlet opening on the pump housing, since the transport of the fluid through the outlet opening in the reservoir in each case by the flow of fluid through another opening of the pump housing, for example, the promotion of the fluid in the pressure line, is decoupled in the sense that the entire amount of fluid that is transported from the pump housing via the outlet opening into the reservoir also directly, that is, leads into the reservoir without wires. It is therefore at the outlet opening and the delivery opening in in each case by two different, separate opening in the pump housing.

In a specific embodiment, the inlet opening and / or the outlet opening is provided in a cover of the pump housing, in particular in a removable cover of the pump housing and may e.g. simply by holes and / or short tubular attachments that extend into the reservoir, be formed.

In particular, the inlet opening and / or the outlet opening have a circular cross-section and / or an oval cross-section and / or an extended cross-section, in particular a rectangular and / or a ring-shaped cross-section and / or another cross-section and / or a cross-sectional area of the outlet opening is between 10% and 100%, preferably between 30% and 70%, in particular between 50% and 60% of a cross-sectional area of the inlet opening. In other words, the cross-sectional area of the outlet opening is preferably smaller than the cross-sectional area of the inlet opening. This can ensure that enough fluid can be sucked through the inlet opening at any time in order to simultaneously supply a plurality of outlet openings with sufficient fluid, so that a uniform and adequate mixing of the fluid in the storage container is always ensured. In addition, a relatively small diameter of the outlet openings can cause the fluid due to a nozzle effect leaves the outlet openings at an increased speed, whereby a good mixing in the reservoir is further promoted.

In this case, a regulating means may be provided in special cases at the inlet opening and / or at the outlet opening, with which the cross section of the inlet opening and / or the outlet opening is variable, so that the flow of the fluid through the inlet opening and / or the outlet opening by the regulating means is adjustable. The regulating means may be provided, for example, as a valve, orifice, shutter or other regulating means at or in the inlet opening and / or the outlet opening.

A further optimization of the mixing in the storage container can also be achieved, for example, by tilting the inlet opening and / or the outlet opening at a predeterminable angle with respect to an axis of the pump housing and / or the inlet opening as an inlet connection piece directed outwards relative to the pump housing which may for example be formed as a short tubular extension, and / or the outlet opening as outwardly directed with respect to the pump housing outlet nozzle, which may also be formed, for example, as a short tubular extension be executed.

In a preferred embodiment, the rotary pump has a stator for driving the rotor, wherein the rotor is mechanically and / or magnetically, in particular non-contact magnetically mounted with respect to the stator and / or the rotary pump is designed as a bearingless motor and / or the rotor designed as an integral rotor is and / or the rotor is permanently magnetic.

The invention further relates to a hydrodynamic mixer with a reservoir for receiving a fluid to be mixed, wherein an above described inventive rotary pump is provided.

In a specific embodiment, the rotary pump is disposed within the reservoir, in particular completely within the reservoir in the reservoir of fluid. That is, in particular, the rotary pump need not be fixed or rigidly connected to the reservoir to form a novel hydrodynamic mixer.

In another embodiment, the inlet opening of the rotary pump is connected via a supply line to a supply tank, so that the rotary pump from the supply tank, the fluid is supplied and / or the reservoir from an additional container, an additive can be supplied. That is, the inlet opening of the rotary pump can be connected to a further, externally arranged supply tank, from which for example by means of gravity Fluid in the inlet opening of the rotary pump can be supplied, so that the fluid through the outlet opening to the reservoir for mixing and refilling of the reservoir can be fed.

Preferably, but not necessary, the inlet opening and / or the outlet opening is provided in a hydrodynamic mixer according to the invention in a cover of the pump housing, in particular in a removable cover of the pump housing, and / or the lid of the pump housing is on a wall of the reservoir, in particular on one Bottom surface of the reservoir, wherein in particular the lid forms a part of the wall, preferably a part of the bottom surface of the reservoir.

In another embodiment, in a hydrodynamic mixer, the fluid can be conveyed via the pressure line to a removal point and / or it is a means for controlling and / or regulating a fluid flow, in particular for controlling and / or regulating a fill level in the reservoir and / or a means provided for controlling and / or regulating an amount of additive, wherein preferably the control and / or regulation by a programmable data processing system can be supported or made.

The rotary pump according to the invention and / or the hydrodynamic mixer according to the invention is preferred for processing suspensions, in particular of slurry, especially in a CMP process in a wafer production or the production of a computer hard disk, and / or for circulating and / or mixing and / or pumping a suspension in a storage container and / or for dissolving and / or mixing a powder with a fluid, and / or for producing emulsions, and / or for mixing and / or aerating a bioreactor used.

In this case, the rotary pump according to the invention can be used especially advantageously in cases where the fluid, for example a suspension such as slurry, tends to agglomerate and therefore has to be constantly kept in motion. The inventive rotary pump prevents in particular the formation of dead zones in the reservoir, thus preventing the formation of areas in which the fluid is practically not in motion, whereby it, as mentioned, is particularly suitable for use in suspending clumping suspensions.

Fig. 1

eine Mischvorrichtung aus dem Stand der Technik;

Fig. 2

eine bekannte Mischvorrichtung mit Flügeln zur Strömungsbrechung;

Fig. 2a

eine Mischvorrichtung gemäss Fig. 2 ohne Flügel zur Strömungsbrechung;

Fig. 3a

ein erfindungsgemässer hydrodynamischer Mischer;

Fig. 3b

ein Mischer gemäss Fig. 3a mit lagerlosem Motor;

Fig. 3c

ein Mischer gemäss Fig. 3a mit Druckleitung

Fig. 3d

ein Mischer gemäss Fig. 3c mit lagerlosem Motor;

Fig. 4

ein Vorratsbehälter mit einer erfindungsgemässen Rotationspumpe;

Fig. 5a - e

fünf verschiedene Ausführungsvarianten eines Deckels eines Pumpengehäuses;

Fig. 6

eine Abgabevorrichtung mit einer erfindungsgemässen Rotationspumpe.

In the following the invention will be explained in more detail with reference to the drawing. In a schematic representation:

Fig. 1

a mixing device of the prior art;

Fig. 2

a known mixing device with wings for flow refraction;

Fig. 2a

a mixing device according to Figure 2 without wings for flow refraction.

Fig. 3a

a hydrodynamic mixer according to the invention;

Fig. 3b

a mixer according to Fig. 3a with bearingless motor;

Fig. 3c

a mixer according to Fig. 3a with pressure line

Fig. 3d

a mixer according to Figure 3c with bearingless motor.

Fig. 4

a storage container with a rotary pump according to the invention;

Fig. 5a - e

five different embodiments of a lid of a pump housing;

Fig. 6

a dispensing device with a rotary pump according to the invention.

1, 2 and 2a relate to the prior art and have already been discussed in detail at the beginning, so that at this point a further description of these figures is unnecessary.

Fig. 3a shows schematically a simple first embodiment of an inventive hydrodynamic mixer.

In the embodiment of Fig. 3a is a pure hydrodynamic mixer 100, which serves only to mix the fluid and not for the simultaneous generation of an additional pump power, for example in an external supply circuit. The hydrodynamic mixer 100 comprises a reservoir 8 for receiving a fluid 4, for example a slurry 4. The reservoir 8 is mounted on a pump housing 2 of a rotary pump 1, so that the lid 11 of the pump housing 2 forms a bottom plate of the reservoir 8.

As indicated by the dashed arrows 611, the fluid 4 is introduced into the pump housing 2 in the operating state through the inlet opening 6 and pumped back through the rotary pump 1 through the outlet openings 7, as shown by the arrows 711, in the reservoir 8, whereby a very good Mixing of the fluid 4 in the reservoir 8 can be reached.

It has thus been found, as already mentioned, that rotary pumps are crucial to the present invention, since they are constant, ie. deliver stationary pressure conditions. This is especially important because e.g. in the semiconductor industry with increasingly finer suspensions, i. with suspensions that include particles with sizes down to the nanometer range, worked, which are particularly difficult to mix, or in which a continuously consistent mixing can be maintained very difficult. Especially here, but not only here, it is of particular importance that constant, i. E. stationary pressure conditions can be realized, as provided by rotary pumps.

Fig. 3b shows a mixer 100 according to Fig. 3a, which is equipped with a bearingless motor. In this particular embodiment, in known per se, the rotary pump 1, a stator 12 for driving the rotor 3, wherein the rotor 3 with respect to the stator 12 is mechanically and / or magnetically, in particular magnetically non-contact. That is, the rotary pump 1 is preferably designed as a bearingless motor 13, wherein in particular the rotor 3 may be configured as an integral rotor 3 and is preferably permanent magnetic. Such a rotary pump 1, which includes a non-contact magnetically mounted rotor 3 as a drive, is always particularly advantageous when mechanically aggressive fluids must be pumped, so suspensions with mechanically aggressive particles, which in ordinary, mechanically stored pumps very quickly to destroy the mechanical Bearings and other components of the pump can lead. But even if highly pure liquids or highly sensitive fluids or fluids from the chemical, pharmaceutical, medical, eg blood or other sensitive and / or high purity substances must be promoted, the use of a bearingless motor according to FIG. 3b or according to FIG 3d in a special way.

FIGS. 3c and 3d show a further exemplary embodiment of a hydrodynamic mixer according to the invention. 3a, wherein in the embodiments of FIGS. 3c and 3d additionally a delivery opening 10 is provided, which is connectable to a pressure line 9, so that by the rotary pump 1 in addition an external tool can be supplied with fluid. For example, the external tool may be a polishing station used to polish wafers or any other device to which the well-mixed fluid 4 must be supplied. The example of FIG. 3d is merely a special embodiment according to FIG. 3c which, as a rotary pump 1, comprises a rotary pump 1 with a bearingless motor, as already described under FIG. 3b. It is essential to emphasize once again that the delivery opening 10 and the outlet opening 7 are by no means identical, that they are not in umittelbarer connection, such as eg in the known from the prior art embodiment of FIG. 1 is the case, but the fluid 4 only indirectly, for example via the pump housing 2, from the outlet opening 7 to the delivery opening 10, or vice versa, can pass.

It must also be emphasized once again that all the rotary pumps 1 according to the invention are rotary pumps 1 with a substantially closed pump housing 2, which differs substantially from the prior art, as illustrated, for example, in FIG. 2.

FIG. 4 shows a further exemplary embodiment of a hydrodynamic mixer 100 according to the invention with a rotary pump 1, in which the rotary pump 1 is placed completely inside the storage container 8. The rotary pump 1 can in this case on the reservoir 8 with not shown in Fig. 4 fixing means, e.g. be fixed with screws, or simply without being fixed to the reservoir 8, simply stored in the reservoir. In the specific embodiment of FIG. 4, the mixer 100 additionally comprises a delivery opening 10 connected to a pressure line 9, so that in addition to the mixing of the fluid 4, which is symbolically represented again analogously to FIGS. 3a-3d by the arrows 611 and 711 , with the rotary pump 1 at the same time fluid 4 for further processing via the pressure line 9 from the reservoir 8 is conveyed out.

It is understood that in another embodiment according to FIG. 4, a rotary pump 1 can be placed in the reservoir 8, which has no additional delivery opening 10 and thus only the mixing of the fluid 4 is used.

In addition, it is possible that, as shown schematically in Figure 4, also radial inlet openings 6 and / or radial outlet openings 7 are provided may be, which can significantly improve the mixing of the fluid s4 in the reservoir 8 in certain cases.

Of course, a particular advantage of the embodiment according to FIG. 4 lies in the extraordinary flexibility of the arrangement. The rotary pump 1 can be placed in a particularly simple manner in the reservoir 8 or removed therefrom again, without expensive assembly work being necessary, so that in particular the replacement of the rotary pump 1 or the repair or maintenance of such a system is particularly simple and inexpensive feasible ,

In FIGS. 5a-5e, by way of example, five different embodiments of a cover 11 of a pump housing 2 are shown diagrammatically, which according to requirements, i. depending on the nature or characteristic of the fluid 4, the ability to mix the fluid 4, the size or geometry of the storage container 8, or depending on whether or not the associated rotary pump 1 must additionally supply pumping power to an external circuit via a delivery opening 10, etc. , have special advantages.

The inlet opening 6 and the outlet opening 7 can, as shown for example in FIGS. 5a, 5b and 5c, have a circular cross-section 61, 71, or the outlet opening 7 can, according to FIG. 5e, have an oval, ring-shaped or elongated cross-section 63, 73, in particular according to FIG Fig. 5d have a rectangular cross section 63, 73. Of course, all possible suitable combinations of the shapes shown, both at the inlet openings 6 and at the inlet openings 7 are possible. In particular, more than one inlet opening 6 and more or less than 4 outlet openings 7, in each case in all possible variations and combinations, especially but not exclusively, of the specific embodiments of cross-sectional surfaces 61, 71 and / or shown in FIGS. 5a-5e Inlet stub 6 and / or outlet nozzle 7 can be used advantageously. It is understood that the inlet nozzle 6 and / or the outlet nozzle 7 can also extend significantly into the reservoir 8, so that an even better mixing of the fluid 4 can be achieved. Thus, the inlet nozzle 6 and / or the outlet nozzle 7 may be extended, for example, by hoses and / or pipes, the hoses or pipes may be distributed in the reservoir 8 in a certain way, so that the mixing is further optimized.

Preferably, a cross-sectional area 71, 72, 73 of the outlet opening 7 between 10% and 100%, preferably between 30% and 70% in particular between 50% and 60% of a cross-sectional area 61, 62, 63 of the inlet opening 6 and / or at the Inlet opening 6 and / or at the outlet opening 7 a in Fig. 5a - 5e not shown regulating means provided with which the cross-section 61, 62, 63 of the inlet opening 6 and / or the cross section 71, 72, 73 of the outlet opening 7 is variable, so that the flow of the fluid 4 through an inlet opening 6 and / or through an outlet opening 7 is adjustable, or is adjustable to a predetermined value.

Of course, it is also possible that e.g. the angle α, under which the outlet nozzle 700 and / or an inlet nozzle 600 can be inclined against an axis A of the pump housing 2, can be varied by suitable means, or can be set to a predeterminable value, whereby, for example, the mixing of the fluid 4 in Reservoir 8 can be further optimized.

Finally, FIG. 6 schematically shows a complete dispensing device 1000 with a hydraulic mixer 100 according to the invention with a rotary pump 1.

The dispenser 1000 of Fig. 6 comprises a storage tank 8 of e.g. contains a fluid 4 in the form of a slurry 4, which serves for example for polishing a wafer to be polished in a polishing device, not shown, which communicates with the discharge point 13 for supplying the fluid 4. For this purpose, the slurry 4 is pumped by the erfindungemässe rotary pump 1 from the reservoir 8 via the delivery opening 10 in the pressure line 9, which is formed in the present case as a ring line 90, so that fluid 4, which was not removed at one of the sampling points 13 to further use of the ring line 90 and the return port 80 in the reservoir 8 can be traced.

According to the present invention, the fluid 4 in the storage container 8 is simultaneously optimally mixed by the rotary pump 1, as described above in detail, via the inlet 6, according to the arrow 611, fluid 4 into the pump housing 2 of the Roationspumpe 1 is introduced and is returned through the outlet openings 7 for mixing the fluid 4 back into the tank.

It is understood that all embodiments of the invention described above are to be understood as exemplary only or by way of example, and the invention particularly, but not exclusively, includes all suitable combinations of the described exemplary embodiments.

Claims (13)

A rotary pump comprising a rotor (3) arranged in a closed pump housing (2) which is operatively connected to a drive (5) for conveying a fluid (4), wherein on the pump housing (2) an inlet opening (6) for the inlet of the fluid (4) in the pump housing (2) is provided, and on the pump housing (2) has an outlet opening (7) for conveying the fluid (4) from the pump housing (2) into a with the fluid (4) at least partially filled reservoir (8 ) is provided, characterized in that the outlet opening (7) is arranged and configured on the pump housing (2) that the fluid (4) from the pump housing (2) through the outlet opening (7) the reservoir (8) directly and without wires can be fed. Rotary pump according to claim 1, wherein on the pump housing (2) with a pressure line (9) connectable delivery opening (10) for conveying the fluid (4) in the pressure line (9) is provided. Rotary pump according to one of claims 1 or 2, wherein the inlet opening (6) and / or the outlet opening (7) in a cover (11) of the pump housing (2), in particular in a removable cover (11) of the pump housing (2) are provided , Rotary pump according to one of the preceding claims, wherein the inlet opening (6) and / or the outlet opening (7) has a circular cross section (61, 71) and / or an oval cross section (62, 72) and / or an extended cross section (63, 73 ), in particular a rectangular and / or a ring-shaped cross-section (63, 73) and / or another cross-section and / or a cross-sectional area (71, 72, 73) of the outlet opening (7) between 10% and 100%, preferably between 30 % and 70% in particular between 50% and 60% of a cross-sectional area (61, 62, 63) of the inlet opening (6) and / or at the inlet opening (6) and / or at the outlet opening (7) is provided a regulating means, with which the cross-section (61, 62, 63) of the inlet opening (6) and / or the cross-section (71, 72, 73) of the outlet opening (7) is variable. Rotary pump according to one of the preceding claims, wherein the inlet opening (6) and / or the outlet opening (7) with respect to an axis (A) of the pump housing (2) at a predeterminable angle (α) is inclined. Rotary pump according to one of the preceding claims, wherein the inlet opening (6) as in relation to the pump housing (2) outwardly directed inlet nozzle (600) and / or the outlet opening (7) as in relation to the pump housing (2) outwardly directed outlet nozzle (700) is formed. Rotary pump according to one of the preceding claims, wherein the rotary pump has a stator (12) for driving the rotor (3), wherein the rotor (3) with respect to the stator (12) is mechanically and / or magnetically, in particular contact-free magnetically mounted and / or the rotary pump is designed as a bearingless motor (13) and / or the rotor (3) is designed as an integral rotor (3) and / or the rotor (3) is permanently magnetic. Hydrodynamic mixer with a reservoir (8) for receiving a fluid to be mixed (4), characterized in that a rotary pump (1) according to one of claims 1 to 7 is provided. Hydrodynamic mixer according to claim 8, wherein the rotary pump (1) within the storage container (8), in particular completely within the reservoir (8) located supply of fluid (4) is arranged. Hydrodynamic mixer according to one of claims 8 or 9, wherein the inlet opening (6) of the rotary pump (1) via a supply line to a supply tank is connected, so that the rotary pump (1) from the supply tank, the fluid (4) can be fed is and / or the reservoir (8) from an additional container an additive is supplied. Hydrodynamic mixer according to one of claims 8 to 10, wherein the inlet opening (6) and / or the outlet opening (7) in a cover (11) of the pump housing (2), in particular in a removable cover (11) of the pump housing (2) is, and / or the lid (11) of the pump housing (2) on a wall (800) of the reservoir (8), in particular on a bottom surface (800) of the reservoir (8) is arranged, in particular the lid (11) a part of the wall (800), preferably forms a part of the bottom surface (800) of the reservoir (8). Hydrodynamic mixer according to one of claims 8 to 11, wherein the fluid (4) via the pressure line (9) to a removal point (13) is conveyed and / or means for controlling and / or regulating a fluid flow, in particular for controlling and / or regulating a level in the reservoir (8) and / or a means for controlling and / or regulating an amount of additive is provided. Use of a rotary pump (1) according to any one of claims 1 to 7 and / or a hydrodynamic mixer (100) according to any one of claims 8 to 12 for processing fluids, in particular suspensions (4), in particular of slurry (4), especially in a CMP process in a wafer production or the production of a computer hard disk, and / or for circulating and / or mixing and / or pumping a suspension (4) in a storage container (8) and / or for dissolving and / or mixing a powder with a Fluid (4), and / or for the preparation of emulsions (4), and / or for mixing and / or aerating a bioreactor.

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