EP1794852A4 - Retroaction optique a partir d'un circuit d'accord a selection de mode - Google Patents

Retroaction optique a partir d'un circuit d'accord a selection de mode

Info

Publication number
EP1794852A4
EP1794852A4 EP05798916A EP05798916A EP1794852A4 EP 1794852 A4 EP1794852 A4 EP 1794852A4 EP 05798916 A EP05798916 A EP 05798916A EP 05798916 A EP05798916 A EP 05798916A EP 1794852 A4 EP1794852 A4 EP 1794852A4
Authority
EP
European Patent Office
Prior art keywords
mode
optical feedback
selective tuner
tuner
selective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05798916A
Other languages
German (de)
English (en)
Other versions
EP1794852B1 (fr
EP1794852A2 (fr
Inventor
Thomas J Dunn
Nestor O Farmiga
Andrew W Kulawiec
Joseph C Marron
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP1794852A2 publication Critical patent/EP1794852A2/fr
Publication of EP1794852A4 publication Critical patent/EP1794852A4/fr
Application granted granted Critical
Publication of EP1794852B1 publication Critical patent/EP1794852B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687—Stabilising the frequency of the laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/028—Types
    • G01J2009/0292—Fizeau; Wedge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/0014—Measuring characteristics or properties thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • H01S5/142—External cavity lasers using a wavelength selective device, e.g. a grating or etalon which comprises an additional resonator
EP05798916.2A 2004-09-22 2005-09-20 Retroaction optique a partir d'un circuit d'accord a selection de mode Expired - Fee Related EP1794852B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/946,691 US7259860B2 (en) 2004-09-22 2004-09-22 Optical feedback from mode-selective tuner
PCT/US2005/033909 WO2006036717A2 (fr) 2004-09-22 2005-09-20 Retroaction optique a partir d'un circuit d'accord a selection de mode

Publications (3)

Publication Number Publication Date
EP1794852A2 EP1794852A2 (fr) 2007-06-13
EP1794852A4 true EP1794852A4 (fr) 2010-05-05
EP1794852B1 EP1794852B1 (fr) 2018-09-05

Family

ID=36073907

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05798916.2A Expired - Fee Related EP1794852B1 (fr) 2004-09-22 2005-09-20 Retroaction optique a partir d'un circuit d'accord a selection de mode

Country Status (6)

Country Link
US (1) US7259860B2 (fr)
EP (1) EP1794852B1 (fr)
JP (1) JP5265918B2 (fr)
KR (1) KR101177592B1 (fr)
CN (1) CN101023567B (fr)
WO (1) WO2006036717A2 (fr)

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US7333210B2 (en) * 2003-09-26 2008-02-19 Fizeau Electro-Optic Systems, Llc Method and apparatus for feedback control of tunable laser wavelength
EP1870030A1 (fr) 2006-06-23 2007-12-26 OPTOPOL Technology Spolka z o.o. Appareil et procédé pour la tomographie en cohérence optique dans le domaine de fréquence
EP1870028A1 (fr) 2006-06-23 2007-12-26 OPTOPOL Technology Spolka z o.o. Appareil et procédé pour la tomographie en cohérence optique dans le domaine de fréquence
EP2120686A2 (fr) 2006-06-23 2009-11-25 OPTOPOL Technology Spolka Akcyjna Appareil de tomographie dans le domaine des fréquences optiques muni d'un système de réglage, système de réglage pour appareil de tomographie dans le domaine des fréquences optiques, procédé de réglage d'un appareil de tomographie dans le domaine des fréquences optique
US8917396B2 (en) 2008-07-25 2014-12-23 Centre National de la Recherche Scientifique—CNRS Fourier transform spectrometer with a frequency comb light source
US9618369B2 (en) * 2008-08-26 2017-04-11 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
US7916763B2 (en) * 2008-11-26 2011-03-29 Corning Incorporated Current driven frequency-stepped radiation source and methods thereof
US7986414B2 (en) * 2009-01-30 2011-07-26 Corning Incorporated Measurement of multiple surface test objects with frequency scanning interferometer
EP2425506A2 (fr) * 2009-04-29 2012-03-07 Montana State University Laser modulé en fréquence à large bande précise
US8675205B2 (en) * 2009-06-15 2014-03-18 Artur G. Olszak Optical coherence tomography using spectrally controlled interferometry
US8422026B2 (en) * 2009-06-15 2013-04-16 Artur G. Olszak Spectrally controllable light sources in interferometry
US8045175B2 (en) * 2009-06-19 2011-10-25 Zygo Corporation Equal-path interferometer
EP2384692B1 (fr) * 2010-05-07 2020-09-09 Rowiak GmbH Appareil et procédé destinés à l'interférométrie
US8531677B2 (en) 2010-05-27 2013-09-10 Corning Incorporated Frequency-shifting interferometer with selective data processing
GB201013896D0 (en) 2010-08-19 2010-10-06 Isis Innovation Apparatus and method for measuring distance
CN103292891B (zh) * 2013-06-26 2014-11-05 中国航空工业集团公司北京长城计量测试技术研究所 光纤式同步可调谐面振动测量系统
CN104266584B (zh) * 2014-10-16 2017-03-29 北京理工大学 用于激光自混合干涉系统的反馈光强度自动调节装置
DE102014226973B4 (de) * 2014-12-23 2021-03-18 Menlo Systems Gmbh Optische Resonatoranordnung und Verfahren zum Einstellen einer Umlaufzeit in einem Resonator
WO2017003983A1 (fr) 2015-06-30 2017-01-05 Corning Incorporated Mesure d'atténuation interférométrique à l'aide d'un réseau de franges statique
CN107678189B (zh) * 2017-11-14 2019-12-20 山西大学 一种可快速精确调节两光学腔输出信号光干涉的装置
US11428786B2 (en) * 2017-12-03 2022-08-30 Munro Design & Technologies, Llc Dual waveforms for three-dimensional imaging systems and methods thereof
DE102018118501A1 (de) * 2018-07-31 2020-02-06 Precitec Gmbh & Co. Kg Messvorrichtung zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück
CN110375640B (zh) * 2019-06-06 2020-12-29 杭州电子科技大学 一种测量透明物体的旋转式相移干涉仪及测量方法

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EP0144510A1 (fr) * 1983-07-20 1985-06-19 Zygo Corporation Mesure par interférométrie de fronts d'ondes
US5124994A (en) * 1989-03-21 1992-06-23 Werner Tabarelli Light generating device
US6621580B2 (en) * 2001-05-08 2003-09-16 Precision Photonics Corporation Single etalon wavelength locker

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JPH03118404A (ja) * 1989-09-29 1991-05-21 Yokogawa Electric Corp 光センサー
JPH03255903A (ja) * 1990-03-06 1991-11-14 Yokogawa Electric Corp アブソリュート測長器の干渉信号処理方法
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JPH05272911A (ja) * 1992-03-24 1993-10-22 Japan Radio Co Ltd 光路長変動測定装置
US5502566A (en) 1993-07-23 1996-03-26 Wyko Corporation Method and apparatus for absolute optical measurement of entire surfaces of flats
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US5471300A (en) * 1994-04-12 1995-11-28 Northrop Grumman Corporation Apparatus and method for providing a feedback measurement in a laser system
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US6894788B2 (en) * 2000-11-20 2005-05-17 Zygo Corporation Interferometric system for automated radius of curvature measurements
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US6959024B2 (en) * 2002-02-28 2005-10-25 Picarro, Inc. Laser Tuning by spectrally dependent spatial filtering
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Publication number Priority date Publication date Assignee Title
EP0144510A1 (fr) * 1983-07-20 1985-06-19 Zygo Corporation Mesure par interférométrie de fronts d'ondes
US5124994A (en) * 1989-03-21 1992-06-23 Werner Tabarelli Light generating device
US6621580B2 (en) * 2001-05-08 2003-09-16 Precision Photonics Corporation Single etalon wavelength locker

Non-Patent Citations (2)

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JONES R A ET AL: "AN AUTOMATED INTERFEROGRAM ANALYSIS TECHNIQUE", APPLIED OPTICS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, vol. 7, no. 8, 1 August 1968 (1968-08-01), pages 1477 - 1482, XP001092710, ISSN: 0003-6935 *
See also references of WO2006036717A2 *

Also Published As

Publication number Publication date
CN101023567A (zh) 2007-08-22
WO2006036717A2 (fr) 2006-04-06
CN101023567B (zh) 2010-06-09
WO2006036717A3 (fr) 2007-01-25
JP2008513804A (ja) 2008-05-01
US20060062260A1 (en) 2006-03-23
EP1794852B1 (fr) 2018-09-05
KR101177592B1 (ko) 2012-08-27
JP5265918B2 (ja) 2013-08-14
US7259860B2 (en) 2007-08-21
KR20070062572A (ko) 2007-06-15
EP1794852A2 (fr) 2007-06-13

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