EP1745272A1 - Capteur - Google Patents

Capteur

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Publication number
EP1745272A1
EP1745272A1 EP04796952A EP04796952A EP1745272A1 EP 1745272 A1 EP1745272 A1 EP 1745272A1 EP 04796952 A EP04796952 A EP 04796952A EP 04796952 A EP04796952 A EP 04796952A EP 1745272 A1 EP1745272 A1 EP 1745272A1
Authority
EP
European Patent Office
Prior art keywords
sensor
liquid
heating electrode
heating
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04796952A
Other languages
German (de)
English (en)
Inventor
Bernhard Jakoby
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1745272A1 publication Critical patent/EP1745272A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body

Definitions

  • the invention relates to a sensor for measuring the viscosity of a liquid comprising at least one piezoelectric component, preferably designed as a resonator, and at least one first excitation electrode and a second excitation electrode, preferably at least the first excitation electrode on a sensitive surface of the sensor is arranged.
  • the nicosity measurement with microacoustic components is known.
  • mechanical or acoustic vibrations can be excited in this element by applying electrical alternating voltages to electrode configurations which are mounted on a piezoelectric element.
  • piezoelectric crystals e.g. quartz
  • piezoelectric ceramics e.g. quartz
  • shear vibrations are preferably formed on at least one crystal surface when excited with an AC voltage on appropriately attached electrodes.
  • the polarization direction must be selected accordingly.
  • shear vibration denotes oscillating deformations of the surface, which preferably form in the plane of the crystal surface (ie not orthogonal to the surface). If such a vibrating crystal surface is brought into contact with a viscous liquid, a damped acoustic shear wave is excited in the liquid. If the acoustic component is designed as a piezoelectric resonator, this contact with the liquid changes the damping and the resonance frequency of the resonator depending on the density and viscosity of the liquid (see, for example, SJ Marlin, GC Frye, KO Wessendorf, "Sensing Liquid Properties with Thickness-Shear Mode Resonators ", Sens. Act. A, vol. 44.
  • Microacoustic components that use shear polarized surface acoustic waves are based on a similar principle (see, for example, B. Jakoby, MJ Vellekoop, "Properties of Love Waves: Applications in Sensors", Smart Mater. Struct, vol. 6, p. 668-679, 1997). This also excites shear waves in the liquid that change the electrical properties of the component.
  • These components can also be designed as resonators, but alternatively also as delay lines. In this case, the damping and the transit time or phase of the delay line change with the viscosity and density of the liquid.
  • a measuring arrangement for a viscosity measurement of liquids is known from US 2002/0170341 AI (Jakoby et al.).
  • US 2002/0170341 AI describes a piezoelectric sensor device which is completely in the area to be measured Liquid is immersed. A cylindrical sensor with two excitation electrodes is described, the sensor being arranged in a container through which the liquid to be measured flows.
  • VT viscosity-temperature
  • the object of the invention is therefore to provide a sensor of the type mentioned, with which the disadvantages mentioned can be avoided and which shortens the time for measuring the viscosity of a liquid at a predeterminable temperature, which is simple and compact, and which is inexpensive in Manufacture and use.
  • At least one heating electrode is provided for heating the liquid to be measured.
  • the liquid to be measured can be heated to a predetermined temperature in the area of the sensor. Since the liquid is heated directly in the area of the sensor, the entire measurement setup is compact and inexpensive. By heating the liquid in the area of the sensor, the predeterminable temperature is reached quickly, which significantly shortens the total measuring time.
  • the microacoustic measurement has the advantage that one can get by with comparatively small sample quantities, because firstly the depth of penetration of the damped shear wave into the liquid is relatively small (typically in the order of one micron), so that the sensor is covered with a thin film of liquid is sufficient in principle and secondly the component can generally be made very small, typically on the order of a few millimeters).
  • the at least one heating electrode is arranged on or next to the sensitive surface of the sensor. This ensures that the part of the liquid affected by the measurement is heated directly, and not other parts of the liquid that are irrelevant for the measurement.
  • the at least one heating electrode is formed in one piece with the first excitation electrode. This eliminates the need for an additional electrode and ensures that the liquid is heated next to the location of the measurement. This saves additional measuring time.
  • the at least one heating electrode a, a central area preferably, a center, in particular a center-having spans surface and having an over the surface of approximately uniform temperature distribution in the operating temperature range. A uniform temperature of the liquid to be measured can ensure that the measured viscosity actually corresponds to the viscosity of the liquid at this temperature.
  • the at least one heating electrode has a meandering shape.
  • the surface to be heated can be designed in a simple manner in accordance with the requirements with regard to the temperature distribution over the surface.
  • the at least one heating electrode has at least two areas of different resistance per unit length. As a result, at least one area can be heated more or less than another area. In this way, a predefinable temperature distribution over the surface can be achieved.
  • the at least one heating electrode has at least two areas of different cross-section. This allows for a heating electrode, which is made up of a whole a material is made, areas with different resistance per unit length can be realized.
  • a variant of the invention can consist in that the resistance per unit length of the at least one heating electrode is designed depending on its distance from the central region, preferably to the center, in particular to the center.
  • the usually prevailing temperature distribution of heated surfaces which has a substantially higher temperature in the middle of the heated surface, can be compensated for a largely homogeneous temperature distribution, since the resistance per unit length determines the degree of heating of the heating electrode.
  • the resistance per unit length of the at least one heating electrode is designed to increase from the central region, preferably from the center, in particular from the central region, to an edge region.
  • the edge is heated more than the center of the surface, which results in a more homogeneous temperature distribution over the surface than with even heating of the surface.
  • a temperature measuring sensor is provided.
  • the temperature actually prevailing on the liquid can also be determined on the sensor.
  • Another possible embodiment can consist in the temperature measuring sensor comprising the at least one heating electrode.
  • the heating electrode which is present anyway, can also be used for temperature measurement, as a result of which a separate component is omitted.
  • the excitation electrodes and / or the at least one heating electrode is covered with an insulation layer.
  • the liquid can be electrically or galvanically separated from the electrode or electrodes. This is particularly useful for electrically conductive liquids.
  • a non-conductive liquid is a dielectric whose capacitive interactions with the excitation electrodes operated with AC voltage which could influence the measurements.
  • the invention further relates to a device for measuring the viscosity of liquids, a sensor according to the invention being provided. All of the advantages of such a sensor can thus be transferred to a device for measuring the viscosity of liquids.
  • the invention further relates to a method for measuring the viscosity of liquids, in which at least one sensitive surface of a sensor is brought into contact with the liquid to be measured, the sensor is set in vibration by applying an alternating voltage, and preferably from measured values of the electrical parameters Voltage and current, a viscosity value of the liquid is determined.
  • a viscosity value of the liquid is determined.
  • it is customary to determine this as a function of the liquid temperature. It is necessary to heat the liquid to the measuring temperature. Since most liquids have a relatively high heat capacity, this also means a relatively long warm-up time between the individual measurements. Such a measurement procedure is therefore extremely lengthy. In addition, considerable amounts of the liquid to be measured are required.
  • the object of the invention is therefore to provide a method for viscosity measurement in liquids of the type mentioned above, with which the disadvantages mentioned can be avoided and which enables measurements in a significantly shorter time.
  • This is achieved according to the invention in that the liquid is heated by a heating electrode in the region of the sensitive surface.
  • the temperature of the liquid is measured.
  • the temperature values of the measurement that are important for the reference of the measurement are also available.
  • a variant of the invention can consist in that when a predeterminable one is reached
  • Viscosity values of the liquid are determined for a plurality of predeterminable temperatures.
  • Viscosity of the liquid is formed over the temperature.
  • the viscosity values of the liquid can determine the viscosity of the liquid in between
  • Figure 1 shows a first particularly preferred embodiment of a sensor according to the invention with a first embodiment of a heating electrode in an oblique crack.
  • FIG. 2 shows a sensor according to FIG. 1 in plan view
  • FIG. 3 shows a sensor according to FIG. 1 in bottom view
  • FIG. 4 shows a schematic illustration of the activation of a sensor according to FIG. 1;
  • Fig. 5 shows a second embodiment of a sensor according to the invention with a second
  • FIG. 6 shows a third embodiment of a heating electrode
  • FIG. 7 shows a fourth embodiment of a heating electrode
  • Fig. 9 shows a sixth embodiment of a heating electrode.
  • Sensors S for measuring the viscosity of a liquid comprising at least one piezoelectric component 1, preferably designed as a resonator, and at least a first excitation electrode 7 and a second excitation electrode 3, preferably at least the first excitation electrode 7 is arranged on a sensitive surface 8 of the sensor S, and at least one heating electrode 2 is provided for heating the liquid to be measured.
  • the visible surfaces of the first excitation electrode 7, the second excitation electrode 3 and the heating electrode 2 are hatched twice. This serves to better lift the electrodes 2, 3, 7 from the environment.
  • a sensor S according to the invention can be produced using cost-effective methods of microtechnology. Compared to conventional viscometers or the sensors used in them, a sensor S according to the invention can be manufactured comparatively cheaply, in particular in large numbers, and requires only a small amount of sample due to the measuring principle.
  • the heating electrode 2 integrated according to the invention, and preferably the integrated temperature measurement sensor 26, allows the liquid layer relevant to the measurement to be heated quickly and in a controlled manner on the sensitive surface, which results in a shorter overall measurement time compared to conventional methods. As a result, the entire system manages with a significantly lower heating output than conventional devices.
  • Liquid is understood to mean a fluid in the sense of the application.
  • the measurement of the viscosity of substances which are solid and / or gaseous at typical ambient temperatures, for example most metals or gases such as nitrogen, can also be provided in the temperature ranges in which the substance or the material is liquid.
  • Fig. 1 shows an oblique view of a first particularly preferred embodiment of a sensor S according to the invention known AT cut) is executed. According to the invention, however, the sensor S can also have other shapes, for example that of a cuboid with different base areas, such as a square or a rectangle. Conductive structures, e.g. metallizations, are applied to the two surfaces.
  • a sensor S according to the invention has at least a first excitation electrode 7 and a second excitation electrode 3.
  • the excitation electrodes 3, 7 and the heating electrode 2 are arranged on or next to the at least one sensitive surface 8.
  • the first particularly preferred embodiment of a sensor S according to the invention shown in FIG. 1 has a heating electrode 2 which is made in one piece with the first excitation electrode.
  • the heating electrode preferably has a meandering shape. However, as will be explained in the following, other forms of the heating electrode 2 can also be provided.
  • the second excitation electrode 3 is only shown in broken lines in FIG. 1.
  • FIG. 3 shows the second excitation electrode 3, which is circular in the first particularly preferred embodiment of a sensor S.
  • the second excitation electrode 3 is also made in one piece with a heating electrode 2. This can be advantageous if the sensor S is completely enclosed by the liquid to be measured. It can therefore also be provided that the second excitation electrode 3 can have all forms of a heating electrode 2. This can also be provided independently of the one-piece design of the second excitation electrode 3 and a heating electrode 2.
  • the excitation electrodes 3, 7 and / or the heating electrode 2 can comprise any conductive material, preferably metals. Particularly preferred metals for use with excitation electrodes 3, 7 are gold, chromium, copper, silver, rhodium or aluminum. Particularly preferred metals for use in the heating electrode 2 are the aforementioned metals, as well as metals with a high specific resistance, such as manganese, titanium or a resistance alloy according to DL 17471.
  • FIG. 2 shows the meandering shape of the one-piece excitation electrode 7 and the heating electrode 2 of the first particularly preferred embodiment.
  • the excitation electrodes 3, 7 and the heating electrode 2 are contacted via conductive contact surfaces 4, 5, 6.
  • a heating voltage preferably a direct voltage V H
  • V H a heating voltage
  • the corresponding surface 8 of the sensor is then heated.
  • the liquid can optionally only be brought into contact with the directly heated or with both sensor surfaces. In the latter case, provision is preferably made to wait for the entire sensor S to warm up before a measurement is carried out.
  • an alternating voltage V AC is applied on the one hand to the heating electrode 2 or the first excitation electrode 7 (ie the connections 4 and 5) and on the other hand to the second excitation electrode 3 on the other side 6.
  • the heating electrode 2 functions as stated also as a first excitation electrode 7 for excitation of the acoustic vibrations.
  • Capacitors 13, 14 and / or inductors 15, 16 can be used to separate the heating circuit and the AC voltage circuit, as shown in FIG. 4 Exemplary embodiment illustrated.
  • the DC voltage for heating is preferably supplied from a heating voltage source 10, which is used via inductors 15, 16 to decouple the source 10 from the applied AC voltage (these can also be omitted).
  • the AC voltage 11 is preferably supplied via capacitors 13, 14.
  • the impedance defined by the ratio V AC to the current I C is used to record the viscosity, the preferred embodiment of the sensor S being in the mechanical resonance frequency range.
  • the representation of the excitation by an AC voltage source is to be understood as schematic in this context. Provision can preferably be made to use the sensors in circuits (for example oscillators or a control circuit) which automatically adjust to the resonance frequency.
  • 5 shows a second, particularly preferred embodiment of a sensor S according to the invention as a delay line, as can be used for sensor applications in liquids, further explanations of the underlying component can be found, for example, in B.
  • the component is based on a piezoelectric substrate, for example quartz 20, the crystal orientation being selected such that shear waves can be excited electrically.
  • the excitation takes place via so-called interdigital transducers 21, which are realized by corresponding metallizations on the substrate.
  • an interdigital converter is fed by a source 24, while the other serves as a receiver to which, for example, a consumer 25, for example a measuring device, is connected.
  • a waveguide layer 22 can preferably also be applied (for example made of silicon dioxide), which - like an optical waveguide - guides the wave bound to the surface, one speaks here of so-called “love waves” Because of this electrically insulating layer, it is also possible to apply a further electrically conductive layer to this waveguide layer, which electrically shields the interdigital transducers from the liquid (this idea is described in more detail in the above-mentioned publication by Jakoby et. Al.) can be provided according to the invention to implement this shielding as a heating electrode 2, for example by tightly guided conductive filaments 23, so that the shield winding and heating electrode 2 can be functionally combined in one and the same layer.
  • a heating electrode 2 for example by tightly guided conductive filaments 23, so that the shield winding and heating electrode 2 can be functionally combined in one and the same layer.
  • the viscosity of liquids is strongly temperature-dependent. Therefore, in the preferred Off * tuhrungsformen be provided to be integrated into the sensor S has a temperature sensor 26, and / or to be arranged on the surface of the sensor S. As a result, the temperature of the liquid can be detected directly at sensor S or the surface temperature of sensor S.
  • the temperature measurement sensor 26 comprises the at least one heating electrode 2.
  • the heating electrode 2 itself is used for temperature measurement. The temperature can take place, for example, by measuring the resistance of the heating electrode 2 that changes with the heating.
  • any other type of temperature measurement 26 can also be provided, for example by means of a thermocouple.
  • FIGS. 6 to 9 show different embodiments of the heating electrode 2 of sensors S according to the invention. It should be noted at this point that the invention is not limited to the described embodiments of heating electrodes 2. Rather, any advantageous embodiment can be provided.
  • the embodiments shown in FIGS. 6 to 9 only show a small cross section of the possible embodiments. 6 to 9 show only the design of the heating electrode 2 of a sensor S. The other objective details of a sensor S according to the invention were not shown in the corresponding figures.
  • the heating electrode 2 spans a surface 9.
  • This surface 9 is formed, for example in the case of a meandering heating electrode 2, by the envelope of the outer turning points of the individual meanders.
  • the surface 9 is designed such that it completely surrounds the heating electrode 2.
  • the surface 9 can have any shape.
  • Preferred heating electrode arrangements are those which extend over a symmetrical or partially symmetrical surface 9.
  • Such a surface 9 has a central region 17, preferably one Center 18, in particular a center 19. Depending on the specific shape of the surface 9, it will have a center 19 or a central region 17. In the following, only the middle 18 is spoken of for the sake of simplicity.
  • this has an approximately uniform temperature distribution over the surface 9 in the operating temperature range.
  • Uniformly heated or heated surfaces 9 generally have an uneven temperature distribution over the surface 9, the central region 17 in particular having a significantly higher temperature than the edge region 12.
  • Such a temperature distribution over the heated surface 9 leads to falsified or less accurate results in a sensor S for viscosity measurement in liquids.
  • it is provided to heat the edge region 12 more than the center region 17 or the region around the center 18.
  • the resistance per unit length of the at least a heating electrode 2 is formed depending on its distance E from the central region 17, preferably from the center 18, in particular from the center 19. If the increased accuracy of the ascertainable viscosity values is not necessary as a result, the likewise described embodiments can also be provided with an evenly heated sensor S.
  • the heating electrode 2 is heated in accordance with its resistance and thus in accordance with its power loss It can therefore be provided in order to heat individual areas of the sensor S differently from other areas that the heating electrode 2 differentiates at least two areas has resistance per unit length.
  • the resistance of the heating electrode 2 results from the specific resistance of the material from which it is made and from its cross-sectional area.
  • the heating electrode 2 has at least two areas of different cross-section, this change in cross-section being achieved both by a different width of the heating electrode 2 with a constant thickness, by a different thickness of the heating electrode 2 with a constant width, and by a combination of the two possibilities can. Additionally or independently of this, it can be provided that the heating electrode 2 has areas with different specific resistance, hence areas which are made of different materials. These measures make it possible for individual areas of the heating electrode 2 to have a higher or lower temperature than other areas. In the third embodiment of a heating electrode 2 according to FIG.
  • a heating electrode 2 running in a meandering shape over a circular area is located at the edge 12 in the areas which are further away from the center 18 and therefore has a smaller width, as a result of which the The heating electrode 2 has a higher resistance at the edge 12 than in the center 18 and the edge 12 is thus heated more than the center 18. This results in a more homogeneous temperature distribution when viewed in total over the entire surface 9 than with a uniformly heated heating electrode 2.
  • 7 shows a fourth embodiment of a meandering heating electrode 2 inscribed in a circular surface 9. The heating electrode 2 is screwed in in a spiral shape and becomes ever wider towards the center 18. As in the embodiment according to FIG. 6, this embodiment of the heating electrode 2 in the middle 18 also has an increased conductor cross section, thus a reduced resistance per unit length and less heating of the heating electrode 2.
  • FIG. 8 shows a surfed embodiment of a meandering heating electrode 2 inscribed in a circular surface 9.
  • the heating electrode 2 is shown with the same width over the course.
  • designs with changing widths can also be provided, similar to the designs according to FIG. 6 or 7.
  • a change in resistance can be achieved in an embodiment according to FIG. 8, for example and if considered by means of different thicknesses of the heating electrode 2 or by combination of materials with different specifics Resistance can be realized.
  • It can also be provided, with the cross-section and material of a heating electrode 2 remaining the same, to arrange two adjacent heating electrodes 2 in such a way that more is heated on a certain partial area than on another partial area. It can therefore be provided that the heating electrodes are closer together at the edge 12 than in the middle 18.
  • FIG 9 shows a sixth embodiment of a heating electrode 2, the heating electrode 2 spanning a rectangular surface 9 and the heating electrode 2 having different cross sections in some areas. As shown, it can be provided that the cross sections from the center 18, which is formed by the center line in the embodiment, decrease towards the outside.
  • FIGS. 6 to 9 are conceptual and basic illustrations of the invention. These do not place any restrictions regarding the concrete implementation of such heating electrodes 2. Above all, the widths of the heating electrodes 2, but also the distance between the individual areas of a heating electrode 2, are only shown in principle and are in no way restrictive. In all described embodiments of heating electrodes 2 according to the invention, which are only particularly preferred embodiments, all possible and / or described possibilities for changing the resistance per unit length can be combined.
  • a plurality of different heating electrodes 2 can be provided, which can be arranged differently and are heated to different extents.
  • devices for measuring the viscosity of liquids are also provided, a sensor S being provided according to one or more of the above-described embodiments according to the invention.
  • the invention relates to a method for measuring the viscosity of liquids, in which at least one sensitive surface 8 of a sensor S is brought into contact with the liquid to be measured, the sensor 1 is set in vibration by applying an alternating voltage, and from measured values of the electrical Parameters, preferably voltage and current, a viscosity value of the liquid is determined, the liquid being heated by a heating electrode 2 in the area of the sensitive surface 8.
  • the sensor S for viscosity measurement can either be completely immersed in the liquid or can only be covered by the liquid in the area of the sensitive surface 8 or surfaces 8.
  • the heating electrode 2 is heated by applying a corresponding heating voltage, as a result of which it heats the liquid surrounding it.
  • a temperature sensor 26 which is preferably integrated in the sensor S, to measure the temperature of the liquid.
  • provision can be made to interrupt the heating of the liquid when a predeterminable temperature is reached, to measure the electrical parameters and to determine the viscosity value of the liquid. Since it can be provided in many cases that not only the viscosity value of the liquid can be determined at a certain temperature, it can preferably be provided that the viscosity values of the liquid are determined for a plurality of predeterminable temperatures. A course of the viscosity of the liquid over the temperature can be formed from the individual viscosity values of the liquid at the predeterminable temperatures.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Capteur (S) destiné à mesurer la viscosité d'un liquide, qui comporte au moins un composant piézo-électrique (1) conçu de préférence en tant que résonateur et au moins une première électrode d'excitation (7) et une deuxième électrode d'excitation (3), de préférence au moins la première électrode d'excitation (7) étant placée sur une surface sensible (8) du capteur (S). Selon la présente invention, pour réduire le temps de mesure à des températures prédéfinies, ledit capteur comporte au moins une électrode de chauffe (2) pour réchauffer le liquide à mesurer.
EP04796952A 2003-11-26 2004-11-22 Capteur Withdrawn EP1745272A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT18952003 2003-11-26
AT0168804A AT414045B (de) 2003-11-26 2004-10-11 Sensor
PCT/AT2004/000409 WO2005052554A1 (fr) 2003-11-26 2004-11-22 Capteur

Publications (1)

Publication Number Publication Date
EP1745272A1 true EP1745272A1 (fr) 2007-01-24

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EP04796952A Withdrawn EP1745272A1 (fr) 2003-11-26 2004-11-22 Capteur

Country Status (5)

Country Link
US (1) US7694551B2 (fr)
EP (1) EP1745272A1 (fr)
JP (1) JP4291373B2 (fr)
AT (1) AT414045B (fr)
WO (1) WO2005052554A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT503212B1 (de) * 2003-11-26 2008-06-15 Bosch Gmbh Robert Sensor
GB0328054D0 (en) 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
DE102005043037B4 (de) 2005-09-09 2009-04-09 Siemens Ag Vorrichtung mit piezoakustischem Resonatorelement, Verfahren zu dessen Herstellung und Verfahren zur Ausgabe eines Signals in Abhängigkeit einer Resonanzfrequenz
DE102005043039B4 (de) * 2005-09-09 2008-10-30 Siemens Ag Vorrichtung mit piezoakustischem Resonatorelement, Verfahren zu dessen Herstellung und Verfahren zur Ausgabe eines Signals in Abhängigkeit einer Resonanzfrequenz
GB0605273D0 (en) * 2006-03-16 2006-04-26 Council Cent Lab Res Councils Fluid robe
US20080314128A1 (en) * 2007-06-19 2008-12-25 Jesus Carmona Viscosity sensor
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
JP5098817B2 (ja) * 2008-05-29 2012-12-12 ソニー株式会社 物性測定装置及び物性測定方法
US9691544B2 (en) * 2011-08-18 2017-06-27 Winchester Technologies, LLC Electrostatically tunable magnetoelectric inductors with large inductance tunability
CN104350373B (zh) * 2012-06-25 2017-10-03 精工电子有限公司 压电单元、压电装置、压电判定装置及状态判定方法
US11187636B1 (en) * 2018-01-26 2021-11-30 Kelvin Innovations LLC Dielectrostriction measurement with electrical excitation frequency sweep method and rheo-dielectric coefficient for process monitoring, quality examination, and material characterization

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020194906A1 (en) * 2001-03-23 2002-12-26 Anthony Goodwin Fluid property sensors

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5394739A (en) * 1994-06-06 1995-03-07 Computational Systems, Inc. Viscosity tester and method with orbiting object
JP3388060B2 (ja) 1994-11-25 2003-03-17 日本碍子株式会社 流体の特性測定用素子及び流体の特性測定装置
DE19644290C2 (de) * 1996-10-24 1998-09-24 Fraunhofer Ges Forschung Sensorelement zur gleichzeitigen Messung von zwei verschiedenen Eigenschaften einer chemisch sensitiven Substanz in einem Fluid
JPH10142991A (ja) * 1996-11-11 1998-05-29 Bando Chem Ind Ltd 定着用加熱ローラ
DE19734706A1 (de) 1997-08-11 1999-02-18 Fraunhofer Ges Forschung Piezoelektrischer Resonator, Verfahren zur Herstellung des Resonators sowie dessen Einsatz als Sensorelement zum Erfassen der Konzentration eines in einem Fluid enthaltenen Stoffes und/oder der Bestimmung physikalischer Eigenschaften des Fluids
DE19932601B4 (de) 1999-07-13 2004-09-02 Schott Glas Verfahren zur Bestimmung der Temperatur und/oder der Viskosität einer Glasschmelze
US6508106B1 (en) * 1999-10-04 2003-01-21 Murata Manufacturing Co., Ltd Method and apparatus for measuring viscosity of green compact, and computer readable recording medium for storing method for measuring viscosity of green compact
US6939451B2 (en) * 2000-09-19 2005-09-06 Aclara Biosciences, Inc. Microfluidic chip having integrated electrodes
DE10112433A1 (de) 2001-03-15 2002-10-02 Bosch Gmbh Robert Messanordnung für eine Viskositätsmessung von Flüssigkeiten
WO2004036207A2 (fr) * 2002-10-18 2004-04-29 Symyx Technologies, Inc. Systeme et procede de captage d'un fluide contenu dans un systeme de controle de l'environnement
US7043969B2 (en) * 2002-10-18 2006-05-16 Symyx Technologies, Inc. Machine fluid sensor and method
EP1464354A1 (fr) * 2003-03-31 2004-10-06 Toshiba Ceramics Co., Ltd. Générateur de vapeur et mélangeur utilisant ce dernier
US7437912B2 (en) * 2004-07-19 2008-10-21 Integrated Sensing Systems, Inc. Device and method for sensing rheological properties of a fluid
DE602004011549T2 (de) * 2004-12-22 2008-05-21 C.R.F. S.C.P.A. Miniaturisierter Sensor zur Erfassung von Eigenschaften einer Flüssigkeit, insbesondere eines Schmieröls

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020194906A1 (en) * 2001-03-23 2002-12-26 Anthony Goodwin Fluid property sensors

Also Published As

Publication number Publication date
US7694551B2 (en) 2010-04-13
JP2007515626A (ja) 2007-06-14
WO2005052554A1 (fr) 2005-06-09
JP4291373B2 (ja) 2009-07-08
ATA16882004A (de) 2005-11-15
AT414045B (de) 2006-08-15
US20070272002A1 (en) 2007-11-29

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