DE68910147T2 - Druckwandler mit Oszillator. - Google Patents
Druckwandler mit Oszillator.Info
- Publication number
- DE68910147T2 DE68910147T2 DE89301555T DE68910147T DE68910147T2 DE 68910147 T2 DE68910147 T2 DE 68910147T2 DE 89301555 T DE89301555 T DE 89301555T DE 68910147 T DE68910147 T DE 68910147T DE 68910147 T2 DE68910147 T2 DE 68910147T2
- Authority
- DE
- Germany
- Prior art keywords
- oscillator
- pressure converter
- converter
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
- G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3598188A JPH01210834A (ja) | 1988-02-18 | 1988-02-18 | 水晶式熱伝導型真空計 |
JP14116188A JPH01311241A (ja) | 1988-06-08 | 1988-06-08 | 水晶式熱伝導型真空計 |
JP14412888A JPH01312438A (ja) | 1988-06-10 | 1988-06-10 | 熱伝導型真空計の水晶圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68910147D1 DE68910147D1 (de) | 1993-12-02 |
DE68910147T2 true DE68910147T2 (de) | 1994-02-17 |
Family
ID=27288939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89301555T Expired - Fee Related DE68910147T2 (de) | 1988-02-18 | 1989-02-17 | Druckwandler mit Oszillator. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4959999A (de) |
EP (1) | EP0330385B1 (de) |
DE (1) | DE68910147T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01313728A (ja) * | 1988-06-13 | 1989-12-19 | Seiko Electronic Components Ltd | 水晶式真空計 |
US5319965A (en) * | 1992-03-02 | 1994-06-14 | Halliburton Company | Multiple channel pressure recorder |
KR100407815B1 (ko) * | 2001-05-04 | 2003-12-01 | 학교법인 포항공과대학교 | 펠티어 효과를 이용한 열전도형 진공 게이지 |
EP2153190B1 (de) * | 2007-06-04 | 2014-02-12 | Nxp B.V. | Druckmesseinrichtung |
JP5888919B2 (ja) * | 2010-11-04 | 2016-03-22 | キヤノン株式会社 | 成膜装置及び成膜方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3079800A (en) * | 1959-01-22 | 1963-03-05 | Borg Warner | Pressure measuring devices and systems employing the same |
SU847099A1 (ru) * | 1979-01-29 | 1981-07-15 | Предприятие П/Я М-5539 | Пьезорезонансный вакуумметр |
JPS6184535A (ja) * | 1984-10-03 | 1986-04-30 | Seiko Instr & Electronics Ltd | 水晶式気体圧力計 |
US4607530A (en) * | 1984-11-01 | 1986-08-26 | Schlumberger Technology Corporation | Temperature compensation for pressure gauges |
-
1989
- 1989-02-15 US US07/311,618 patent/US4959999A/en not_active Expired - Fee Related
- 1989-02-17 EP EP89301555A patent/EP0330385B1/de not_active Expired - Lifetime
- 1989-02-17 DE DE89301555T patent/DE68910147T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US4959999A (en) | 1990-10-02 |
EP0330385A2 (de) | 1989-08-30 |
EP0330385A3 (de) | 1991-06-05 |
EP0330385B1 (de) | 1993-10-27 |
DE68910147D1 (de) | 1993-12-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |