EP1675152B1 - Tube à rayons X avec une anode rotative - Google Patents

Tube à rayons X avec une anode rotative Download PDF

Info

Publication number
EP1675152B1
EP1675152B1 EP05027757A EP05027757A EP1675152B1 EP 1675152 B1 EP1675152 B1 EP 1675152B1 EP 05027757 A EP05027757 A EP 05027757A EP 05027757 A EP05027757 A EP 05027757A EP 1675152 B1 EP1675152 B1 EP 1675152B1
Authority
EP
European Patent Office
Prior art keywords
rotating anode
separator
millimeters
coolant
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP05027757A
Other languages
German (de)
English (en)
Other versions
EP1675152A3 (fr
EP1675152A2 (fr
Inventor
Masataka Rigaku Corporation Sakata
Tomohiro Chaki
Masaru Kuribayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of EP1675152A2 publication Critical patent/EP1675152A2/fr
Publication of EP1675152A3 publication Critical patent/EP1675152A3/fr
Application granted granted Critical
Publication of EP1675152B1 publication Critical patent/EP1675152B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H01J2235/127—Control of flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H01J2235/1283—Circulating fluids in conjunction with extended surfaces (e.g. fins or ridges)

Definitions

  • the present invention relates to a rotating anode X-ray tube having an improved separator which is disposed within a coolant passage inside a rotating anode.
  • a rotating anode X-ray tube has a rotating anode within which a coolant passage is formed. Coolant flows through the coolant passage to cool the rotating anode.
  • Fig. 13 is a longitudinal sectional view of the conventional rotating anode X-ray tube, taken along a cutting plane including an axis of rotation.
  • a rotating anode 10 is formed, in its inside, with a coolant passage 12 within which a separator 14 is disposed. The separator 14 remains stationary during rotation of the rotating anode 10.
  • the rotating anode 10 has an outer periphery which consists of a target made of an X-ray generating material.
  • an X-ray emits from an electron beam irradiation region 18.
  • the backside of the electron beam irradiation region 18 must be best cooled, the backside being referred to hereinafter as a must-cooled surface 20.
  • a proximal surface 22 a part facing the must-cooled surface 20 is referred to hereinafter as a proximal surface 22.
  • the distance between the inner surface of the rotating anode 10 and the outer surface of the separator 14 becomes narrowest at a space between the must-cooled surface 20 and the proximal surface 22, the space being referred to hereinafter as a proximal passage.
  • a proximal distance G Defining the distance between the inner surface of the rotating anode 10 and the outer surface of the separator 14, i.e., the distance at the proximal passage, as a proximal distance G, it is set to be about 1.5 millimeters.
  • the thus narrowed proximal distance G can provide a high cooling performance for the must-cooled surface 20.
  • an axial length L1 of the cross section of the electron beam 16 i.e., a length in a direction of an axis of rotation of the rotating anode 10 is about ten millimeters for instance.
  • a circumferential length of the electron beam 16 is about one millimeter for instance, the length being measured in a circumferential direction of the outer periphery of the rotating anode 10, i.e., a length in a direction perpendicular to the drawing sheet of Fig. 13 .
  • the sectional size of the electron beam 16 is about ten millimeters times one millimeter, this size being equal to the size of the electron beam irradiation region 18.
  • the axial length L2 of the proximal surface 22 is set longer than the length L1.
  • the length L2 is about fifteen millimeters.
  • the rotating anode with such values is used typically with a revolving speed of about 6,000 rpm.
  • the rotating anode having such a separator is disclosed in Japanese patent publication No. 2000-251810 A .
  • a small focus size called as the fine focus is sometimes used for the conventional rotating anode shown in Fig. 13 .
  • Fig. 14 is a longitudinal sectional view, similar to Fig. 13 , of the rotating anode with the fine focus.
  • the electron beam 16 becomes narrower and its section size is about one millimeter times 0.1 millimeter for instance.
  • the cross section of the electron beam 16 has an axial length L1 of about one millimeter and a circumferential length of about 0.1 millimeter.
  • the axial length of the electron beam irradiation region 18 is equal to L1 too, i.e., one millimeter.
  • the same separator has been used for the fine focus as for the normal focus.
  • Fig. 14 it is necessary to make the energy of the electron beam 16 higher for obtaining a high-intensity X-ray beam with the fine focus.
  • the X-ray generating power is increased, it is necessary to strongly cool the electron beam irradiation region 18.
  • One method of enhancing the cooling performance is to raise the revolving speed of the rotating anode.
  • an irradiation time becomes shorter, the irradiation time being defined by a time with which the same region on the outer periphery of the rotating anode is kept on receiving irradiation of the electron beam continually, so that a high-temperature region successfully comes out of the electron beam before the electron beam irradiation region melts at a high temperature.
  • the present invention is concerned with raising the revolving speed to increase an X-ray beam intensity with the fine focus.
  • the proximal distance G is set small as 1.5 millimeters and the axial length L2 of the proximal surface 22 is set long as about 15 millimeters, the increase in the revolving speed will lead to the increase in the load of rotation at this region, becoming problem.
  • the revolving speed is increased, it is necessary to make the input power to the electric motor higher, the electric motor being a rotary driving source. Further, it would be required to replace the capacity of the motor driver with a larger one.
  • a rotating anode X-ray tube comprises a rotating anode, a coolant passage and a separator.
  • the rotating anode includes a cylindrical target which is made of an X-ray generating material and has au outer periphery.
  • the outer periphery has an axial length in a range between 20 and 100 millimeters, preferably between 30 and 100 millimeters. That is, the present invention is applied not to a rotating anode having a very short axial length exclusive to the fine focus but to a rotating anode having a relatively long axial length capable of making the normal focus too.
  • the coolant passage is formed inside the rotating anode so that coolant can flow along a must-cooled surface which is positioned at a backside of an electron beam irradiation region on the outer periphery of the target.
  • the coolant may be typically cooling water, but may be another cooling liquid.
  • the separator is arranged stationary within the coolant passage. The separator has a proximal surface facing the must-cooled surface so that the coolant passage is divided into an inflow passage and an outflow passage. In the inflow passage, the coolant flows toward a proximal passage which is bounded between the must-cooled surface and the proximal surface. In the outflow passage, the coolant flows away from the proximal passage.
  • the proximal surface of the separator is positioned at a distance, from the must-cooled surface, in a range between 0.1 and 3.0 millimeters. If the distance becomes over 3.0 millimeters, the cooling performance would come down. On the other hand, if the distance is under 0.1 millimeter, the stationary separator would be in increased danger of getting contact with the rotating anode.
  • the axial length of the proximal surface is not greater than five millimeters, and is preferably not greater than three millimeters. Considering the electron beam irradiation region of the fine focus, the cooling performance would be good even when the axial length of the proximal surface is five millimeters or under, a length longer than such a value being of no use.
  • a shorter axial length of the proximal surface leads to not so large load on the rotary driving source even under a high-speed revolution of the rotating anode.
  • a rotating anode X-ray tube according to the present invention is better suited to generate a high-intensity X-ray beam with the fine focus.
  • the electron beam irradiation region with the fine focus preferably has a size up to three millimeters times 0.3 millimeter, that is, its axial length is not larger than three millimeters. More preferably, the size of the electron beam irradiation region with the fine focus may be one millimeter times 0.1 millimeter or less (i.e., 0.7 millimeter times 0.07 millimeter, for instance), its axial length being not larger than one millimeter.
  • the separator may have a disc part and an inclined part connected to an outer periphery of the disc part.
  • the inclined part may have a shape of a frustum of a cone.
  • the inclined part has an outer peripheral surface at its radially outer end, the outer peripheral surface becoming the proximal surface.
  • the present invention is also directed to an X-ray generator including a rotating anode X-ray tube as described above.
  • the X-ray generator includes a coolant supply unit for supplying coolant to the coolant passage of the rotating anode X-ray tube, and a high-voltage power supply for supplying a tube voltage and a tube current to the rotating anode X-ray tube.
  • Fig. 1 is a sectional view of the principal part of one embodiment of a rotating anode X-ray tube according to the present invention, taken along a sectional plane including an axis of rotation of the rotating anode.
  • the rotating anode X-ray tube has a vacuum vessel 24 and a combination of a rotating anode 10 and an electron gun 26 both housed in the vacuum vessel 24.
  • a high voltage is supplied, from a high-voltage power supply, to a circuit between the electron gun 26 and the rotating anode 10, so that an electron beam 16 emits from the electron gun 26.
  • the electron beam 16 irradiates an outer periphery of the cylindrical rotating anode 10 which is a target member, so that an X-ray generates.
  • the rotating anode 10 belongs to an anode assembly 28, which is mounted on the vacuum vessel 24 so that the rotating anode 10 is arranged at a predetermined position inside the vacuum vessel 24.
  • the anode assembly 28 has a casing 30 whose flange 32 can be secured airtightly to the vacuum vessel 24.
  • the rotating anode 10 is fixed to a rotary shaft 34.
  • a magnetic fluid sealing device 36 for rotary vacuum sealing Between an outer periphery of the rotary shaft 34 and an inner wall of the casing 30 are arranged a magnetic fluid sealing device 36 for rotary vacuum sealing, ball bearings 38 and 40 for rotary support of the rotary shaft 34, an electric brush 42 for passing an electric current from the rotary shaft 34 into the casing 30, and a mechanical seal 44 for rotary sealing of cooling water.
  • a stator 46 of a direct motor is fixed to the inner wall of the casing 30.
  • a rotor 48 of the direct motor is fixed to the outer periphery of the rotary shaft 34. The direct motor drives the rotary shaft 34 so that the rotating anode 10 rotates.
  • Fig. 2 is an enlarged sectional view showing a part of the rotating anode 10.
  • the first coolant passage 50 which is divided, by a separator 52, into the first inflow passage 56 and the first outflow passage 54.
  • the second coolant passage 58 which is also divided, by a partition pipe 60, into the outer, second inflow passage 64 and the inner, second outflow passage 62.
  • the separator 52 is fixed to the partition pipe 60 whose root, i.e., the right end in Fig. 1 , is fixed to the casing 30.
  • the rotating anode 10 and the rotary shaft 34 can be rotated, while the separator 14 and the partition pipe 60 inside them remain stationary.
  • the first inflow passage 56 communicates with the second inflow passage 64
  • the first outflow passage 54 communicates with the second outflow passage 62.
  • the casing 30 is formed with a coolant inlet 68 and a coolant outlet 66.
  • An inlet piping nipple 72 is secured to the coolant inlet 68
  • an outlet piping nipple 70 is secured to the coolant outlet 66.
  • the cooling water enters into the coolant inlet 68, and then passes through the second inflow passage 64 (see Fig. 2 ), and further enters into the first inflow passage 56 to cool the inner surface of the rotating anode 10.
  • the returning cooling water passes through the first outflow passage 54 and then the second outflow passage 62 (see Fig. 2 ), and flows out of the coolant outlet 66.
  • the separator 52 is comprised of a disc part 74, an inclined part 76 and blades 78.
  • Fig. 3 is a front view of the separator 52
  • Fig. 4 is a perspective view of the separator 52, a part of which is cut away.
  • the disc part 74 has a center which is formed with a through hole 80 through which the cooling water can pass. In the vicinity of the through hole 80, the disc part 74 is fixed to the partition pipe 60.
  • the disc part 74 has an outer periphery which is connected to the inclined part 76, which has a shape of a frustum of a cone, as clearly shown in Fig. 4 .
  • the inclined part 76 is inclined, as shown in Fig. 2 , by an angle ⁇ with respect to the axial direction of the rotating anode.
  • the angle ⁇ is 30 degrees in this embodiment.
  • the inclined part 76 has an outer peripheral surface at its radially outer end, the outer peripheral surface becoming the proximal surface 82.
  • the proximal surface 82 is a cylindrical surface which is two millimeters in axial length L2.
  • Four blades 78 are arranged radially, as shown in Fig. 3 , and fixed to the disc part 74.
  • the rotating anode 10 is comprised of the cup-shaped first member 84 and the second member 86 which is formed integral with the rotary shaft 34.
  • the first member 84 is entirely made of a target member, for example, cupper.
  • the first member 84 is connected with the second member 86 through a threaded part 88.
  • the region of connection between the first member 84 and the second member 86 has an O-ring 90 which seals the cooling water.
  • a combination of the first member 84 and the second member 86 forms the first coolant passage 50.
  • the outer periphery of the first member 84 is irradiated with the fine-focus electron beam 16, whose sectional size is about one millimeter times 0.1 millimeter.
  • the axial length of the electron beam 16 is about one millimeter, while the circumferential length is about 0.1 millimeter. Then, the axial length L1 of the electron beam irradiation region 18 becomes about one millimeter.
  • a focus size is used and an X-ray beam is taken out with six degrees in take-off angle in a leftward direction in Fig. 2 , a point-focus X-ray source is obtained with a focus size of about 0.1 millimeter times 0.1 millimeter.
  • the rotating anode 10 is a hundred millimeters in outer diameter and about 43 millimeters in axial length L3.
  • the rotating anode 10 is capable of acting also as a rotating anode with the normal focus after altering the separator. Therefore, the axial length L3 of the rotating anode is selected to be long, at the same level as that in the usual rotating anode, as compared with that in a special rotating anode exclusive to the fine focus.
  • Fig. 5 is a sectional view showing a vicinity of a proximal surface 82 of the separator 52.
  • the cooling water 94 flows toward the proximal passage 93.
  • the cooling water 94 flows away from the proximal passage 93.
  • the proximal passage 93 provides a narrow way for the cooling water, so that the flow rate becomes higher at this region to cool the must-cooled surface 92 with a sufficient cooling performance.
  • the axial length of the proximal surface 82 is selected to be short as two millimeters, the rotary load caused by the viscous resistance of the cooling water at the proximal passage 93 is smaller than that in the case of using the conventional separator.
  • Fig. 6 is a sectional view, similar to Fig. 5 , of the first modification of the separator
  • Fig. 7 is a perspective view, similar to Fig. 4 , of the separator shown in Fig. 6 .
  • a separator 52a of this modification has a disc part 74 whose outer periphery is connected to a cylindrical part 96.
  • the cylindrical part 96 has an axial end which is formed with a protrusion 98 which projects radially outwardly.
  • the outer peripheral surface of the protrusion 98 becomes a proximal surface 82a which is two millimeters in axial length L2.
  • the proximal distance G at a proximal passage 93a is about 1.5 millimeters.
  • the projecting amount of the proximal surface 82a with respect to the cylindrical part 96 is about two millimeters.
  • Fig. 8 is a perspective view, similar to Fig. 4 , of the second modification of the separator.
  • a separator 52b of this modification would be similar to that in Fig. 6 when viewed in the cross section, but has a special shape in which a proximal surface 82b has triangle concavo-convex surfaces repeating circumferentially.
  • the distance between the top of the peak of the proximal surface 82b and the must-cooled surface is about 1.5 millimeters.
  • a height measured radially from the top of the peak to the bottom of the trough is about two millimeters.
  • Fig. 9 is a sectional view, similar to Fig. 5 , of the third modification of the separator
  • Fig. 10 is a perspective view, similar to Fig. 4 , of the separator shown in Fig. 9 .
  • a separator 52c of this modification has a disc part 74 whose outer periphery is connected to a cylindrical part 96.
  • the cylindrical part 96 has an axial end which is formed with a protrusion 100, triangle in cross section, which projects radially outwardly.
  • the distance between the top of the triangle protrusion 100 and the must-cooled surface 92 is about 1.5 millimeters.
  • the radial height of the triangle protrusion 100 is about two millimeters.
  • the axial length L2 of the protrusion 100 is two millimeters.
  • Fig. 11 is a graph of the experimental results regarding a motor load about the rotating anode X-ray tube having the separator 52 shown in Fig. 2 (i.e., the present invention), and about the rotating anode X-ray tube having the separator 14 shown in Fig. 14 (i.e., the prior art), noting that both of the separators are used with blades 78 (see Fig. 4 ) taken off.
  • a revolving speed of the rotating anode is in abscissa, while a current passing through the motor coil of the direct motor, which is directly connected to the rotary shaft 34, is in ordinate.
  • the revolving speed is raised up to 9,000 rpm, so that an X-ray intensity of the X-ray beam with the fine focus can be increased.
  • 13.1 amperes in motor current was required in the prior art, while 9.3 amperes was required in the present invention.
  • the electric power is about 800 watts for the motor used in the experiment.
  • Fig. 12 is a graph of a water pressure of the cooling water in the case of obtaining the experimental data shown in Fig. 11 for the present invention. Such an extent of the supply pressure shown in the graph would be used in the real rotating anode X-ray tube.
  • the rotating anode X-ray tube according to the present invention is assumed to be irradiated with an electron beam with the fine focus, it also may be irradiated with an electron beam with the normal focus, for example, about ten millimeters times one millimeter in focus size, after exchanging the separator for one shown in Fig. 14 .
  • the rotating anode X-ray tube may be used in the normal focus even with the separator which remains as shown in Fig. 2 , depending on the supply power for X-ray generation. The reason for it is as follows. Since an electron beam energy per unit area is not so large in the normal focus, the proximal surface even shorter than the axial length of the electron beam irradiation region often provides a sufficient cooling performance.
  • Fig. 15 illustrates component parts of an X-ray generator including the rotating anode X-ray tube according to the present invention.
  • the X-ray generator includes a rotating anode X-ray tube 102, a high-voltage power supply 104 and a coolant supply unit 106.
  • the high-voltage power supply 104 supplies a tube voltage E to circulate a tube current I between a cathode filament 108 of an electron gun of the rotating anode X-ray tube 102 and the rotating anode 10 electrically connected to ground.
  • a negative high voltage, minus 60 kV for instance is applied to the cathode filament 108 with respect to the rotating anode 10.
  • An electron beam 16 emits from the cathode filament 108 and irradiates the outer periphery of the rotating anode 10 to generate an X-ray 110.
  • the coolant supply unit 106 supplies cooling water 112 to the inlet piping nipple 72 of the rotating anode X-ray tube 102.
  • the cooling water 114 having returned after cooling of the rotating anode 10, with an increased temperature, flows out of the outlet piping nipple 70.
  • the returned cooling water 114 may be drained as it is or may be recycled again after being cooled in the coolant supply unit 106.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)

Claims (10)

  1. Tube à rayons X à anode rotative comprenant :
    (a) une anode rotative (10) comprenant une cible cylindrique (84) qui est faite d'un matériau de génération de rayons X et comporte une périphérie externe ;
    (b) un passage de fluide de refroidissement (50) formé à l'intérieur de l'anode rotative (10) de telle sorte qu'un fluide de refroidissement (94) peut circuler le long d'une surface devant être refroidie (92) qui est positionnée au niveau d'un côté arrière d'une région de rayonnement de faisceau d'électrons (18) sur la périphérie externe de la cible ; et
    (c) un séparateur (52) qui est monté fixe dans le passage de fluide de refroidissement (50) et comporte une surface proximale (82) en face de la surface devant être refroidie (92) de sorte que le passage de fluide de refroidissement (50) est divisé en un passage de flux entrant (56), dans lequel le fluide de refroidissement (94) circule en direction d'un passage proximal (93) délimité entre la surface devant être refroidie (92) et la surface proximale (82), et un passage de flux sortant (54) dans lequel le fluide de refroidissement circule en s'éloignant du passage proximal (93),
    caractérisé en ce que :
    la périphérie externe de la cible cylindrique a une longueur axiale (L3) comprise entre 20 et 100 millimètres ; et
    la surface proximale (82) du séparateur (52) est placée à une distance (G), par rapport à la surface devant être refroidie (92), comprise entre 0,1 et 3,0 millimètres et a une longueur axiale (L2) pas supérieure à cinq millimètres.
  2. Tube à rayons X à anode rotative selon la revendication 1, caractérisé en ce que la longueur axiale (L2) de la surface proximale (82) n'est pas supérieure à 3 millimètres.
  3. Tube à rayons X à anode rotative selon la revendication 1, caractérisé en ce que la région de rayonnement de faisceau d'électrons (18) prévue sur la périphérie externe de la cible à une longueur axiale (L1) pas supérieure à 3 millimètres.
  4. Tube à rayons X à anode rotative selon la revendication 3, caractérisé en ce que la longueur axiale (L1) de la région de rayonnement de faisceau d'électrons (18) n'est pas supérieure à un millimètre.
  5. Tube à rayons X à anode rotative selon l'une quelconque des revendications 1 à 4, caractérisé en ce que :
    le séparateur (52) comporte une partie de disque (74) et une partie inclinée (76) connectée à une périphérie externe de la partie de disque (74) ;
    la partie inclinée (76) a la forme d'un tronc de cône ; et
    la partie inclinée (76) comporte une surface périphérique externe au niveau de son extrémité externe radialement, la surface périphérique externe devenant la surface proximale (82).
  6. Générateur de rayons X comprenant :
    (a) un tube à rayons X à anode rotative (102) selon la revendication 1 ;
    (b) un module d'alimentation en fluide de refroidissement (106) pour fournir le fluide de refroidissement (94) au passage de fluide de refroidissement (50) du tube à rayons X à anode rotative (102) ; et
    (c) une alimentation à haute tension (104) pour fournir une tension de tube et un courant de tube au tube à rayons X à anode rotative (102).
  7. Générateur de rayons X selon la revendication 6, caractérisé en ce que la longueur axiale (L2) de la surface proximale (82) n'est pas supérieure à trois millimètres.
  8. Générateur de rayons X selon la revendication 6, caractérisé en ce que la région de rayonnement de faisceau d'électrons (18) prévue sur la périphérie externe de la cible a une longueur axiale (L1) pas supérieure à trois millimètres.
  9. Générateur de rayons X selon la revendication 8, caractérisé en ce que la longueur axiale (L1) de la région de rayonnement de faisceau d'électrons (18) n'est pas supérieure à un millimètre.
  10. Générateur de rayons X selon l'une quelconque des revendications 6 à 9, caractérisé en ce que :
    le séparateur (52) comporte une partie de disque (74) et une partie inclinée (76) connectée à une périphérie externe de la partie de disque (74) ;
    la partie inclinée (76) a la forme d'un tronc de cône ; et
    la partie inclinée (76) comporte une surface périphérique externe au niveau de son extrémité externe radialement, la surface périphérique externe devenant la surface proximale (82) .
EP05027757A 2004-12-21 2005-12-19 Tube à rayons X avec une anode rotative Active EP1675152B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004369816A JP4210645B2 (ja) 2004-12-21 2004-12-21 回転対陰極ｘ線管およびｘ線発生装置

Publications (3)

Publication Number Publication Date
EP1675152A2 EP1675152A2 (fr) 2006-06-28
EP1675152A3 EP1675152A3 (fr) 2008-05-21
EP1675152B1 true EP1675152B1 (fr) 2009-07-08

Family

ID=35632344

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05027757A Active EP1675152B1 (fr) 2004-12-21 2005-12-19 Tube à rayons X avec une anode rotative

Country Status (3)

Country Link
EP (1) EP1675152B1 (fr)
JP (1) JP4210645B2 (fr)
DE (1) DE602005015284D1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4814744B2 (ja) * 2006-09-26 2011-11-16 ブルカー・エイエックスエス株式会社 回転対陰極ｘ線管及びｘ線発生装置
US7508916B2 (en) * 2006-12-08 2009-03-24 General Electric Company Convectively cooled x-ray tube target and method of making same
JP4629739B2 (ja) * 2008-01-15 2011-02-09 株式会社リガク 回転対陰極ｘ線管の使用方法
ITBO20080147A1 (it) * 2008-03-05 2009-09-06 Micronica S R L Apparecchiatura radiologica
JP6863834B2 (ja) * 2017-06-26 2021-04-21 キヤノン電子管デバイス株式会社 Ｘ線管装置
JP6960153B2 (ja) 2017-09-05 2021-11-05 株式会社リガク Ｘ線発生装置
WO2020232253A1 (fr) * 2019-05-15 2020-11-19 Zamenhof Robert G Technologie de mammographie à contraste amélioré
CN111243924B (zh) * 2020-01-14 2022-10-25 中国电子科技集团公司第三十八研究所 一种用于射线源的转动靶机构
JP2022050211A (ja) * 2020-09-17 2022-03-30 東京エレクトロン株式会社 回転機構および基板処理装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622687A (en) * 1981-04-02 1986-11-11 Arthur H. Iversen Liquid cooled anode x-ray tubes
US4523327A (en) * 1983-01-05 1985-06-11 The United States Of America As Represented By The Secretary Of The Air Force Multi-color X-ray line source
JPS61259446A (ja) * 1985-05-13 1986-11-17 Fujitsu Ltd 回転陽極ｘ線発生装置
US4945562A (en) * 1989-04-24 1990-07-31 General Electric Company X-ray target cooling
JPH03171541A (ja) * 1989-11-29 1991-07-25 Rigaku Corp Ｘ線発生装置のターゲット冷却方法および装置
JP3659508B2 (ja) * 1994-01-28 2005-06-15 株式会社リガク 回転対陰極型ｘ線発生装置
JPH08106870A (ja) * 1994-09-30 1996-04-23 Rigaku Corp Ｘ線管の回転対陰極組立体
JP2000251810A (ja) * 1999-03-02 2000-09-14 Rigaku Corp Ｘ線管ターゲット

Also Published As

Publication number Publication date
JP4210645B2 (ja) 2009-01-21
EP1675152A3 (fr) 2008-05-21
EP1675152A2 (fr) 2006-06-28
DE602005015284D1 (de) 2009-08-20
JP2006179240A (ja) 2006-07-06

Similar Documents

Publication Publication Date Title
EP1675152B1 (fr) Tube à rayons X avec une anode rotative
US7697665B2 (en) Rotating anode X-ray tube
EP1906713A2 (fr) Ensemble de tube à rayons X dont l'anode tournante est integrée dans une gaine évacuée et tournante
US6327340B1 (en) Cooled x-ray tube and method of operation
JP2000040479A (ja) Ｘ線管及びその軸受体を冷却する方法
US4995065A (en) X-ray tube cooling devices
US6426998B1 (en) X-ray radiator with rotating bulb tube with exteriorly profiled anode to improve cooling
JP2004519083A (ja) Ｘ線発生装置
US8009806B2 (en) Apparatus and method of cooling a liquid metal bearing in an x-ray tube
US8428222B2 (en) X-ray tube target and method of repairing a damaged x-ray tube target
JP2010262784A (ja) Ｘ線管及びｘ線管装置
EP3926656B1 (fr) Sources de rayons x avec cible rotative en métal liquide
JP4629739B2 (ja) 回転対陰極ｘ線管の使用方法
JP5022072B2 (ja) Ｘ線管用冷却アセンブリ
CN110199373B (zh) 大功率x射线源与操作方法
US7668298B2 (en) System and method for collecting backscattered electrons in an x-ray tube
US10892134B2 (en) X-ray generator
JP2012238506A (ja) 回転陽極型ｘ線管装置
JP4195542B2 (ja) 回転対陰極
JP2013142466A (ja) 磁性流体シール装置
JP2010277822A (ja) Ｘ線管装置
JP2008084605A (ja) 回転対陰極ｘ線管及びｘ線発生装置
WO2003043050A1 (fr) Diagramme de temperature destine a des tubes a rayons x
US6453011B1 (en) X-ray tube with rotating anode core
JPS62251017A (ja) 切断加工装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

17P Request for examination filed

Effective date: 20080828

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

AKX Designation fees paid

Designated state(s): DE

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE

REF Corresponds to:

Ref document number: 602005015284

Country of ref document: DE

Date of ref document: 20090820

Kind code of ref document: P

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20100409

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20231214

Year of fee payment: 19