EP1669608A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1669608A2
EP1669608A2 EP05024152A EP05024152A EP1669608A2 EP 1669608 A2 EP1669608 A2 EP 1669608A2 EP 05024152 A EP05024152 A EP 05024152A EP 05024152 A EP05024152 A EP 05024152A EP 1669608 A2 EP1669608 A2 EP 1669608A2
Authority
EP
European Patent Office
Prior art keywords
protection according
splinter protection
vacuum pump
pump
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05024152A
Other languages
German (de)
English (en)
Other versions
EP1669608A3 (fr
EP1669608B1 (fr
Inventor
Frank Klabunde
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1669608A2 publication Critical patent/EP1669608A2/fr
Publication of EP1669608A3 publication Critical patent/EP1669608A3/fr
Application granted granted Critical
Publication of EP1669608B1 publication Critical patent/EP1669608B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/507—Magnetic properties

Definitions

  • the invention relates to a shatter protection for use with a vacuum pump with fast rotating rotor.
  • Vacuum pumps with high-speed rotors are very successful in the generation of high and ultra-high vacuum.
  • a very common design is the turbomolecular pump, also called turbopump. In them are provided with blades rotor and stator discs alternately, the rotor usually moves at speeds between 100 Hz and 1000 Hz. If such vacuum pumps are used in environments with high magnetic fields, eddy currents occur in the rotor. This effect, on the one hand, a heating of the rotor and thus a longitudinal expansion. This is critical in the required small gaps of the pump, it can come to a touch of rotor and stator. On the other hand, the eddy currents cause a deceleration of the rotor and thus a higher power consumption of the drive.
  • the reverse case is also problematic:
  • the fast rotating rotors of vacuum pumps are often stored magnetically, ie magnetic forces support the rotor without mechanical contact.
  • the magnetic fields generated in these magnetic bearings are not limited in their spatial extent to the space of the bearing itself. Magnetic field lines can emerge through the suction opening of the pump and thus cause disturbances to the devices in front of it.
  • Such devices can be, for example, electron microscopes in which the stray fields of the magnetic bearing can lead to a deflection of the electron beam and thus to a loss of resolution. Due to the ever higher sensitivity and required better resolution, this beam deflection is tolerable to a lesser extent.
  • the solutions proposed in the prior art have several disadvantages:
  • the solution of the housing shield leads to insufficient results, the additional shielding of the rotor shaft turns out to be difficult to manufacture.
  • the proposed choice of material is extremely expensive and unsuitable for a wide application in large numbers.
  • the task of the inventor was to achieve a greatly improved magnetic decoupling of the interior of the pump from its surroundings, without having to take expensive measures and thus to remain overall cost-effective.
  • the object is achieved by the characterizing features of the first claim.
  • the features of the dependent claims 2 to 11 represent advantageous developments of the invention.
  • the splinter protection according to the invention serves not only to protect the pump from foreign bodies by the choice of the material, but also shields the pump from magnetic fields that enter through the intake, and on the other hand prevents the emergence of stray fields from the pump, which can be generated for example by magnetic bearings , This makes it possible to completely shield the fast rotating rotor of the vacuum pump in interaction with the pump housing from magnetic fields and to suppress the formation of eddy currents in it as far as possible. Through the hit Measure makes it possible to shield an existing pump, so even after their preparation to make the adjustment to a location with high magnetic fields.
  • the splinter protection according to the invention it is also possible to prevent leakage of magnetic stray fields generated by the magnetic bearings from the pump. Since only a small amount of material is necessary to cover the suction opening of the vacuum pump, this solution is relatively inexpensive, especially compared to the production of a complete rotor made of special material.
  • the effectiveness of the magnetic separation of the interior spaces of the vacuum pump and vacuum chamber can be improved, in particular, if the splinter protection additionally has a layer of electrically highly conductive material. This increases the separation effect for dynamic, ie temporally variable, magnetic fields.
  • FIG. 2 shows a very simple embodiment of the splinter protection, wherein only the region indicated by dashed lines in FIG. 1 is shown in the vicinity of the flange 5 of the vacuum pump.
  • the reticulated component 4 is designed so that it can be inserted into the opening of the vacuum pump and thus covers it. This reduces the number of components required and avoids the need for additional space between the vacuum pump and the vacuum chamber.
  • the net-like component also has a layer (20) which is electrically conductive. This can be, for example, copper. This results in a better separation of the time-varying magnetic fields (dynamic fields).
  • This structure is produced for example by a sandwich construction of mu-metal and copper foil. After joining these layers, the hole structures are introduced.
  • the shielding properties against magnetic fields depend on the thickness of the material and its relative permeability ⁇ r .
  • a material with a high relative permeability ⁇ r is used according to the invention.
  • the component can be made thinner than with material such as steel.
  • a further reduction in component thickness can be achieved by using a material with a ⁇ r greater than 10,000.
  • the component 4 is made of a material having a relative permeability ⁇ r , of more than 25,000. This high permeability makes it possible to produce the component 4 with low axial strength and thus to keep conductance losses for the gas to be pumped low.
  • the metal known under the trade name "Mu-Metal” is used.
  • the name Mu derives from “magnetic field impermeable”. This metal is based on an alloy of nickel and iron.
  • nickel-iron alloys can be used, wherein the proportion of nickel is at least 70% and the proportion of iron is at least 10%.
  • the surfaces 7, 8 and 16 which come into contact with the vacuum pump 2 when splinter protection 1 is connected, have a defined and constant coefficient of friction. This makes it possible, even after repeated assembly and disassembly to ensure a secure connection of the splinter protection with the vacuum pump.
  • surfaces (7, 8, 16) may be provided with a coating which has a defined and constant coefficient of friction.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP20050024152 2004-11-24 2005-11-05 Pompe à vide Not-in-force EP1669608B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004056512 2004-11-24

Publications (3)

Publication Number Publication Date
EP1669608A2 true EP1669608A2 (fr) 2006-06-14
EP1669608A3 EP1669608A3 (fr) 2007-01-24
EP1669608B1 EP1669608B1 (fr) 2015-05-06

Family

ID=35614301

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20050024152 Not-in-force EP1669608B1 (fr) 2004-11-24 2005-11-05 Pompe à vide

Country Status (3)

Country Link
US (1) US8398383B2 (fr)
EP (1) EP1669608B1 (fr)
JP (1) JP2006144783A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103201520A (zh) * 2010-11-24 2013-07-10 埃地沃兹日本有限公司 真空泵用的保护网和具备其的真空泵
EP3034881A1 (fr) * 2014-12-18 2016-06-22 Pfeiffer Vacuum GmbH Pompe à vide
EP3051145A1 (fr) * 2015-01-28 2016-08-03 Pfeiffer Vacuum Gmbh Pompe à vide
EP3640481A1 (fr) 2018-10-15 2020-04-22 Pfeiffer Vacuum Gmbh Pompe à vide

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6882623B2 (ja) * 2017-03-21 2021-06-02 株式会社島津製作所 センターリングおよび真空ポンプ
EP3561306B1 (fr) * 2018-07-20 2021-06-09 Pfeiffer Vacuum Gmbh Pompe à vide
US11512707B2 (en) 2020-05-28 2022-11-29 Halliburton Energy Services, Inc. Hybrid magnetic thrust bearing in an electric submersible pump (ESP) assembly
US11739617B2 (en) 2020-05-28 2023-08-29 Halliburton Energy Services, Inc. Shielding for a magnetic bearing in an electric submersible pump (ESP) assembly
US11460038B2 (en) 2020-05-28 2022-10-04 Halliburton Energy Services, Inc. Hybrid magnetic radial bearing in an electric submersible pump (ESP) assembly

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3531942C2 (fr) 1984-09-17 1989-04-06 Japan Atomic Energy Research Institute, Tokio/Tokyo, Jp

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
DE965231C (de) 1954-07-09 1957-06-06 Basf Ag Verfahren zur Gewinnung reiner Terephthalsaeure
US3278857A (en) * 1964-04-06 1966-10-11 Varian Associates Atomic resonance device using composite vacuum envelope and pump apparatus
US3512946A (en) * 1967-04-17 1970-05-19 Lash Mfg Inc Composite material for shielding electrical and magnetic energy
DE2028288C3 (de) * 1970-06-03 1980-09-11 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Magnetische Abschirmung von Eisenteilen elektrischer Maschinen gegen Streufelder
US4647714A (en) * 1984-12-28 1987-03-03 Sohwa Laminate Printing Co., Ltd. Composite sheet material for magnetic and electronic shielding and product obtained therefrom
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JPH0622692B2 (ja) * 1988-04-22 1994-03-30 井関農機株式会社 脱▲ふ▼ロール間隙制御装置
JP2662341B2 (ja) * 1992-05-20 1997-10-08 浜松ホトニクス株式会社 電子増倍管
US5580429A (en) * 1992-08-25 1996-12-03 Northeastern University Method for the deposition and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation
JP3046533B2 (ja) * 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット
JPH1187989A (ja) * 1997-09-05 1999-03-30 Hitachi Metals Ltd シールド部材
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
DE10211304A1 (de) 2001-03-13 2003-01-09 Schulz Uwe Magnetfeldschirmung
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
DE10208795A1 (de) * 2002-02-28 2003-09-04 Pfeiffer Vacuum Gmbh Maschine mit schnelldrehendem Rotor
DE10342907A1 (de) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schnelldrehendem Rotor
JP4451111B2 (ja) * 2003-10-20 2010-04-14 株式会社荏原製作所 渦電流センサ
JP2005256796A (ja) * 2004-03-15 2005-09-22 Sharp Corp リニア圧縮機およびスターリング冷凍機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3531942C2 (fr) 1984-09-17 1989-04-06 Japan Atomic Energy Research Institute, Tokio/Tokyo, Jp

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Z. VAKUUM-TECHNIK, vol. 1, pages 6 - 8

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103201520A (zh) * 2010-11-24 2013-07-10 埃地沃兹日本有限公司 真空泵用的保护网和具备其的真空泵
CN103201520B (zh) * 2010-11-24 2017-02-08 埃地沃兹日本有限公司 真空泵用的保护网和具备其的真空泵
US9816530B2 (en) 2010-11-24 2017-11-14 Edwards Japan Limited Splinter shield for vacuum pump, and vacuum pump with the splinter shield
EP3034881A1 (fr) * 2014-12-18 2016-06-22 Pfeiffer Vacuum GmbH Pompe à vide
EP3051145A1 (fr) * 2015-01-28 2016-08-03 Pfeiffer Vacuum Gmbh Pompe à vide
EP3640481A1 (fr) 2018-10-15 2020-04-22 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
US8398383B2 (en) 2013-03-19
JP2006144783A (ja) 2006-06-08
EP1669608A3 (fr) 2007-01-24
US20060110271A1 (en) 2006-05-25
EP1669608B1 (fr) 2015-05-06

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