EP1664684A2 - Transducteur acoustique ou ultrasonique - Google Patents

Transducteur acoustique ou ultrasonique

Info

Publication number
EP1664684A2
EP1664684A2 EP04765412A EP04765412A EP1664684A2 EP 1664684 A2 EP1664684 A2 EP 1664684A2 EP 04765412 A EP04765412 A EP 04765412A EP 04765412 A EP04765412 A EP 04765412A EP 1664684 A2 EP1664684 A2 EP 1664684A2
Authority
EP
European Patent Office
Prior art keywords
ultrasonic transducer
matching layer
acoustic
piezoelectric unit
coupling ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04765412A
Other languages
German (de)
English (en)
Other versions
EP1664684B1 (fr
Inventor
Manfred Eckert
Frank Volz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP1664684A2 publication Critical patent/EP1664684A2/fr
Application granted granted Critical
Publication of EP1664684B1 publication Critical patent/EP1664684B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface

Definitions

  • the invention relates to a sound or ultrasound transducer with a disk-shaped piezo-electric unit, an annular coupling element which surrounds the piezo-electric unit in a form-fitting and non-positive manner, an adaptation layer which faces the piezo-electric in the radiation direction of the sound or ultrasound waves Unit is arranged, and a transmitting / receiving unit, which excites the piezoelectric unit to radial vibrations.
  • the piezoelectric unit is preferably a piezoceramic disk.
  • the ultrasonic transducer is preferably part of a sensor
  • the known transducer is characterized in that, with small dimensions of the piezoceramic disk, it has an operating frequency that is lower than the radial resonance frequency of the piezoceramic disk.
  • a metal ring surrounds the outer surface of the piezoceramic disk in a positive and non-positive manner.
  • the metal ring is preferably connected to the piezoceramic disk by shrinking on.
  • the combination of the piezoceramic disk and the coupling ring behaves like a radial oscillator; in particular, the surface of the radial oscillator formed from both sub-components acts as an emission surface for the sound or ultrasonic waves.
  • the object of the invention is, in particular, to design a sound or ultrasonic transducer designed as a radial oscillator for use in the high-temperature range.
  • the adaptation layer is made of a material which has a heat resistance up to a temperature, which lies above the temperature at the installation site of the sound or ultrasound transducer, that the material-specific expansion coefficient of the material of the adaptation layer is greater than the expansion coefficient of the materials of the piezoelectric unit and / or the coupling ring and that the modulus of elasticity of the material of the adaptation layer is at least one order of magnitude is lower than the modulus of elasticity of the piezoelectric unit and / or the coupling ring.
  • the adaptation layer is preferably made of rigid foam.
  • the PMI rigid foam Rohacell from Röhm can be used as the hard foam with low density.
  • This rigid foam is available with densities between 30 to 200 kg / m 3 .
  • an effective impedance matching to the air or to the atmosphere in which the acoustic AJ ultrasonic transducer is used can be achieved.
  • the matching layer helps to reduce the reverberation of the sound or ultrasound transducer.
  • the matching layer is composed of several layers with at least partially different densities.
  • the position of the adaptation layer with the highest density is arranged in the immediate vicinity of the radial oscillator, while the position of the adaptation layer with the lowest density is at the greatest distance from the radial oscillator.
  • the sound or ultrasonic transducer works evenly over a range from -40 ° C to 150 ° C. Since the material-specific expansion coefficient of the material of the matching layer is greater than the expansion coefficient of the Materials of the piezoelectric unit and / or the coupling ring and since the modulus of elasticity of the material of the matching layer is at least one order of magnitude lower than the modulus of elasticity of the piezoelectric unit and / or the coupling ring, a very good connection between the matching layer and the radial oscillator ensured over a wide temperature range.
  • the coupling ring is made of metal or ceramic. If the coupling ring is made of metal, it is possible to achieve the connection between the outer surface of the piezoceramic disk and the coupling ring using a shrinking process.
  • the required encapsulation is achieved by means of a combination: this consists of the aforementioned metal ring, which is arranged in the outer region of the piezoceramic disk, and a thin protective film which covers the matching layer in the direction of radiation.
  • the protective film is preferably a metal film which is made, for example, of stainless steel.
  • the protective film is preferably glued to the adaptation layer or firmly connected to it in another way and thus simultaneously increases its mechanical strength.
  • An advantageous embodiment of the device according to the invention proposes a housing in which the piezoelectric unit with the coupling ring and the matching layer is arranged. Furthermore, a potting compound is provided, which at least in some areas between the matching layer, the piezoelectric unit, the coupling ring and the inner wall of the
  • the casting compound completely or at least largely fills the rear space of the housing.
  • the Potting compound is, for example, an elastomer potting compound.
  • a diffusion barrier is provided, which is arranged on the sealing compound against the direction of radiation.
  • the diffusion barrier is again preferably a metal foil.
  • FIG. 1 shows a preferred embodiment of the sound or ultrasonic transducer according to the invention in cross section.
  • the acoustic or ultrasonic transducer 1 shown in FIG. 1 consists of a round piezoceramic disk 2, the outer surface of which is enclosed by the coupling ring 3 in a positive and non-positive manner.
  • the coupling ring 3 is, for example, a metal ring made of aluminum, it can be connected to the piezoelectric 2 unit, for example, by shrinking on.
  • the coupling ring 3 is placed around the piezo ceramic disk 2 in the heated state; when it cools, it contracts and encloses the piezoceramic disc 2 in a positive and non-positive manner.
  • the radial oscillator is thus formed from two components.
  • the radial oscillator could also simply be a piezoceramic disk.
  • the thickness of the adaptation layer 4, which is arranged in the radiation direction of the sound or ultrasound on the radial oscillator, formed from the piezoelectric unit 2 and coupling ring 3, is selected so that the sound or ultrasound waves are emitted essentially only in the desired radiation direction.
  • the matching layer 4 is designed such that the sound or ultrasound transducer 1 or the associated sensor is suitable for use in the high temperature range.
  • the adaptation layer 4 is made of a material that has a heat resistance up to a temperature that is above the temperature at the installation site of the sound or ultrasound transducer 1. Furthermore, the material-specific coefficient of expansion of the material of the adaptation layer 4 is greater than the coefficient of expansion of the materials of the piezoelectric unit 2 and / or the coupling ring 3. The modulus of elasticity of the material is also provided.
  • Matching layer 4 is at least one order of magnitude lower than the modulus of elasticity of the piezoelectric unit 2 and / or the coupling ring 3. As already mentioned, the matching layer 4 is preferably made of rigid foam.
  • the radial oscillator with piezoelectric unit 2, coupling ring 3 and matching layer 4 is arranged in a housing 8.
  • the area between the outer surface of the radial vibrator and the inner wall of the housing 8 and the area above the radial vibrator, which is oriented counter to the radiation direction of the sound or ultrasonic waves, is filled with a casting compound 7.
  • the sealing compound 7 has the task of optimizing the decay behavior of the radial oscillator.
  • the potting compound 7 is a silicone potting compound in which ceramic particles and / or air pockets are embedded. The inclusion of air serves to reduce the density of the potting compound 7, which leads to better damping behavior of the radial oscillator.
  • the protective film 5 which is preferably a stainless steel film, serves as a diffusion barrier in the radiation direction of the sound or ultrasonic waves.
  • the radial transducer is encapsulated in all directions and is thus effectively protected against moisture and dirt.
  • the invention is not limited to the shape of the radial oscillator described here, formed from the piezoceramic disk and coupling ring.
  • the matching layer according to the invention can be used in conjunction with any radial oscillator, that is to say, for example, with the sound or ultrasound transducer which is described in DE 25 41 492 B.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

L'invention concerne un transducteur acoustique ou ultrasonique (1) se présentant sous la forme d'un oscillateur radial. L'objectif de cette invention est de pouvoir utiliser ce transducteur acoustique ou ultrasonique à des températures élevées. A cet effet, la couche d'adaptation (4) située entre l'oscillateur radial et l'atmosphère dans laquelle les signaux ultrasonores sont émis est produite à partir d'un matériau non déformable thermiquement jusqu'à une température qui est supérieure à la température régnant au point de montage du transducteur acoustique ou ultrasonique (1). En outre, ladite couche d'adaptation est sélectionnée de façon que le coefficient de dilatation spécifique au matériau qui la constitue soit supérieur au coefficient de dilatation des matériaux qui forment l'unité piézoélectrique (2) et/ou la bague de couplage, et de manière que le module d'élasticité du matériau de la couche d'adaptation (4) soit inférieur au module d'élasticité de l'unité piézoélectrique et/ou de la bague de couplage (3), d'au moins un ordre de grandeur.
EP04765412A 2003-09-25 2004-09-20 Transducteur acoustique ou ultrasonique Expired - Lifetime EP1664684B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10344741A DE10344741A1 (de) 2003-09-25 2003-09-25 Schall- oder Ultraschallwandler
PCT/EP2004/010526 WO2005031274A2 (fr) 2003-09-25 2004-09-20 Transducteur acoustique ou ultrasonique

Publications (2)

Publication Number Publication Date
EP1664684A2 true EP1664684A2 (fr) 2006-06-07
EP1664684B1 EP1664684B1 (fr) 2010-02-17

Family

ID=34306089

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04765412A Expired - Lifetime EP1664684B1 (fr) 2003-09-25 2004-09-20 Transducteur acoustique ou ultrasonique

Country Status (5)

Country Link
US (1) US7411335B2 (fr)
EP (1) EP1664684B1 (fr)
AT (1) ATE458181T1 (fr)
DE (2) DE10344741A1 (fr)
WO (1) WO2005031274A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102265332B (zh) * 2008-12-23 2013-08-21 罗伯特·博世有限公司 用于在流体介质中使用的超声波换能器

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7775110B2 (en) * 2006-09-22 2010-08-17 Denso Corporation Ultrasonic sensor
JP4635996B2 (ja) * 2006-09-26 2011-02-23 株式会社デンソー 超音波センサ
JP4835366B2 (ja) * 2006-10-04 2011-12-14 株式会社デンソー 超音波センサ
JP4857296B2 (ja) * 2008-03-07 2012-01-18 パナソニック株式会社 音響整合体
DE102008055123B3 (de) 2008-12-23 2010-07-22 Robert Bosch Gmbh Ultraschallwandler zum Einsatz in einem fluiden Medium
DE102010024205A1 (de) * 2010-06-17 2011-12-22 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor und Fahrzeug mit einem derartigen Ultraschallsensor
JP6032512B1 (ja) * 2016-06-09 2016-11-30 パナソニックIpマネジメント株式会社 積層体、超音波送受波器および超音波流量計
WO2017212511A1 (fr) * 2016-06-09 2017-12-14 パナソニックIpマネジメント株式会社 Stratifié, transducteur ultrasonore, et débitmètre à ultrasons
CN111659597B (zh) * 2020-07-16 2024-11-26 寿光市飞田电子有限公司 一种新型气体超声换能器
DE102021107559A1 (de) 2021-03-25 2022-09-29 Endress+Hauser Conducta Gmbh+Co. Kg Verfahren zur Qualitätsprüfung von Ultraschallwandlern

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2537788C3 (de) * 1975-08-25 1980-04-10 Siemens Ag, 1000 Berlin Und 8000 Muenchen Ultraschallwandler
DE2541492C3 (de) * 1975-09-17 1980-10-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Ultraschallwandler
DE3301848C2 (de) * 1983-01-20 1984-11-08 Siemens AG, 1000 Berlin und 8000 München Ultraschallwandler
DE3430161A1 (de) * 1984-08-16 1986-02-27 Siemens AG, 1000 Berlin und 8000 München Poroese anpassungsschicht in einem ultraschallapplikator
JPH06101879B2 (ja) * 1988-01-25 1994-12-12 株式会社村田製作所 空中超音波トランスジューサ
JP2599222B2 (ja) * 1990-04-25 1997-04-09 新田ゼラチン 株式会社 接着剤組成物
US5195373A (en) * 1991-04-17 1993-03-23 Southwest Research Institute Ultrasonic transducer for extreme temperature environments
DE4233256C1 (de) 1992-10-02 1993-12-02 Endress Hauser Gmbh Co Schall- oder Ultraschallwandler
DE4311963C2 (de) * 1993-04-10 1996-10-24 Endress Hauser Gmbh Co Füllstandsmeßgerät
GB9513267D0 (en) * 1995-06-29 1995-09-06 Whitaker Corp Ultrasonic liquid level detector
EP0766071B1 (fr) * 1995-09-28 2002-04-10 Endress + Hauser Gmbh + Co. Sonde ultrasonique
DE19538696C2 (de) * 1995-10-17 1997-09-25 Endress Hauser Gmbh Co Anordnung zur Überwachung eines vorbestimmten Füllstands einer Flüssigkeit in einem Behälter
DE19820419A1 (de) * 1998-05-07 1999-11-18 Fraunhofer Ges Forschung Ultraschallwandler
DE59814061D1 (de) * 1998-09-09 2007-08-30 Endress & Hauser Gmbh & Co Kg Vorrichtung zur Feststellung und/oder Überwachung eines vorbestimmten Füllstandes in einem Behälter
WO2001045081A1 (fr) * 1999-12-17 2001-06-21 Siemens Aktiengesellschaft Transducteur a ultrasons piezoelectrique comportant un boitier et une couche isolante
DE20303461U1 (de) * 2003-02-07 2003-07-24 Jäger, Frank-Michael, 04416 Markkleeberg Vorrichtung zur Feststellung einer Phase oder/eines Phasengemisches

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2005031274A3 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102265332B (zh) * 2008-12-23 2013-08-21 罗伯特·博世有限公司 用于在流体介质中使用的超声波换能器

Also Published As

Publication number Publication date
ATE458181T1 (de) 2010-03-15
DE502004010778D1 (de) 2010-04-01
WO2005031274A3 (fr) 2005-05-12
DE10344741A1 (de) 2005-04-14
US20070273249A1 (en) 2007-11-29
WO2005031274A2 (fr) 2005-04-07
EP1664684B1 (fr) 2010-02-17
US7411335B2 (en) 2008-08-12

Similar Documents

Publication Publication Date Title
EP1664684A2 (fr) Transducteur acoustique ou ultrasonique
EP0507892B1 (fr) Transducteur ultrasonore
DE102008027974A1 (de) Ultraschallsensor
EP1282174B1 (fr) Transducteur de vibrations avec élément piézoélectrique
DE102006055168A1 (de) Hinderniserfassungsvorrichtung
DE102007008560B4 (de) Ultraschallsensor mit einer an einem Substrat angebrachten Vibrationseinrichtung
DE19601656B4 (de) Bedämpfter Ultraschallwandler
EP1911530A1 (fr) Transducteur à ultrasons doté d'une adaptation d'impédance acoustique
DE102009022187A1 (de) Ultraschallsensor und/oder Ultraschallwandler in einem geschlossenen Gehäuse und ein Herstellungsverfahren
DE3032221A1 (de) Schallwandler
DE3441684A1 (de) Elektroakustischer wandler
DE102008017067A1 (de) Elektroakustischer Wandler und elektroakustische Wandleranordnung
EP0927987B1 (fr) Dispositif transducteur sonore
EP3010653B1 (fr) Convertisseur électroacoustique
DE29916826U1 (de) Vorrichtung zum Messen der spezifischen Dichte eines gasförmigen oder flüssigen Mediums
DE4215271A1 (de) Ultraschallwandler
EP3933356A1 (fr) Transducteur ultrasonique piézoélectrique intégré dans des structures en béton
DE202007007135U1 (de) Piezoelektrischer Ultraschallwandler
EP2131353B1 (fr) Transducteur ultrasonique
EP1902789B1 (fr) Transducteur à ultrasons et capteur à ultrasons
EP0340624B1 (fr) Transducteur électro-acoustique
DE102005044880C5 (de) Ultraschalllwandler für einen Einsatz bei hohen und/oder tiefen Temperaturen
EP0664531A1 (fr) Transducteur sonique pour détecter une effraction
EP0384949A2 (fr) Dispositif de mesure à ultrasons
DE19809206C2 (de) Ultraschallwandlereinrichtung mit Zentrier-Formteil

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20060220

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REF Corresponds to:

Ref document number: 502004010778

Country of ref document: DE

Date of ref document: 20100401

Kind code of ref document: P

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20100217

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100617

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100528

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100518

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100517

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

REG Reference to a national code

Ref country code: HU

Ref legal event code: AG4A

Ref document number: E008612

Country of ref document: HU

26N No opposition filed

Effective date: 20101118

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

BERE Be: lapsed

Owner name: ENDRESS + HAUSER G.M.B.H. + CO.

Effective date: 20100930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100920

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100920

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100217

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20150922

Year of fee payment: 12

Ref country code: GB

Payment date: 20150917

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: HU

Payment date: 20150918

Year of fee payment: 12

Ref country code: FR

Payment date: 20150922

Year of fee payment: 12

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502004010778

Country of ref document: DE

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20160920

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20170531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160920

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170401

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160921