EP1601807A4 - FREE-STANDING DIAMOND STRUCTURES AND METHODS - Google Patents
FREE-STANDING DIAMOND STRUCTURES AND METHODSInfo
- Publication number
- EP1601807A4 EP1601807A4 EP04709095A EP04709095A EP1601807A4 EP 1601807 A4 EP1601807 A4 EP 1601807A4 EP 04709095 A EP04709095 A EP 04709095A EP 04709095 A EP04709095 A EP 04709095A EP 1601807 A4 EP1601807 A4 EP 1601807A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- diamond
- substrate
- layer
- facets
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 83
- 239000010432 diamond Substances 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 238000010899 nucleation Methods 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 5
- 238000003486 chemical etching Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 239000000446 fuel Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims 5
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 description 6
- 230000006911 nucleation Effects 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000002194 synthesizing effect Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004050 hot filament vapor deposition Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
- C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
Definitions
- the present invention relates to free-standing objects having laboratory grown diamond surfaces and methods for fabricating such objects. More particularly s the present invention is directed to such objects and methods wherein the outer surface of the object includes a plurality of intersecting facets having a diamond layer.
- Diamond is one of the most technologically and scientifically Tamable materials found in nature due to its combination of high resistance to thermal shock; extreme hardness, excellent infrared transparency, and excellent semiconductor _ properties.
- Diamond has the highest known isotropic thermal conductivity and a relatively low expansion coefficient thus providing it with desirable resistance to thermal shock. Because of these properties, diamond has found increasing use as a thermal management material in electronic packaging of devices such as high power laser diodes, multichip modules, and other microelectronic devices.
- Diamond is also the hardest known material and has desirable resistance to abrasion. Thus diamond components and coatings have found increasing use as wear resistance elements in various mechanical devices and in cutting and grinding tools. Diamond is also highly resistant to corrosion.
- Diamond is also a good electrical insulator, but can be synthesized to be electrically conducting by the addition of certain elements such as boron to the growth atmosphere. Diamond is also used in many semiconductor devices including high-power transistors, resistors, capacitors, FET's, and integrated circuits.
- Diamond synthesis by CVD has become a well established art. It is known that diamond coatings on various objects may be synthesized, as well as free-standing objects. Typically, the free-standing objects have been fabricated by deposition of diamond on planar substrates or substrates having relatively simple cavities formed therein.
- U.S. Patent No. 6,132,278 discloses forming solid generally pyramidal or conical diamond microchip emitters by plasma enhanced CVD by growing diamond to fill cavities formed in the silicon substrate.
- Figure 1 is an illustration showing the steps of the preferred embodiment of the present invention.
- the present invention is directed to methods of making freestanding, internally-supported, three-dimensional objects having a diamond layer on at least a portion of the outer surface of the object.
- the diamond layer may be formed by any method of synthesizing diamond such as high-pressure, high-temperature (HPHT) methods or CVD.
- HPHT high-pressure, high-temperature
- CVD chemical vapor deposition
- a mixture of hydrogen and carbon-containing gases is activated to obtain a region of gas-phase non- equilibrium adjacent the substrate on which the diamond will be grown.
- the carbon- containing gas may be selected from a large variety of gases including methane, aliphatic and aromatic hydrocarbons, alcohols, ketones, amines, esters, carbon monoxide, carbon dioxide, and halogens. Methane is used according to the preferred embodiment of the invention.
- the mixture of gases is energized to obtain a region of gas-phase non- equilibrium adjacent the substrate on which the diamond will be grown.
- gas- phase activation techniques may be used and these techniques may be categorized as either hot-filament CVD, plasma-assisted CVD, or flame CVD.
- plasma-assisted CVD the plasma may be generated by a number of energy sources including microwave, radio- frequency, or direct current electric fields.
- the substrate may be any material suitable for nucleating and growing diamond such as semiconductor, metal, and insulator materials.
- the nucleation rates are much higher on carbide forming substrates (e.g., Si, Mo, and W) than on substrates that do not form carbides.
- carbide forming substrates e.g., Si, Mo, and W
- silicon substrates are used in view of the desirable nucleation rates and well known fabrication techniques of silicon.
- the surface of the substrate on which the diamond will be grown may be pretreated by various techniques to enhance diamond nucleation and improve the nucleation density of diamond on the surface.
- Such methods may include (i) scratching, abrading, or blasting the surface with diamond particles or paste, (ii) seeding the surface with submicron powders such as diamond, silicon, or cBN, (iii) biasing the substrate, (iv) carburization, (v) pulsed laser irradiation, and (vi) ion implantation.
- a free-standing, internally-supported, three-dimensional object having an outer surface comprising a plurality of intersecting facets wherein at least a sub-set of the intersecting facets have a diamond layer of substantially uniform depth.
- face as used herein, includes a surface or face that is either planar or non-planar.
- Figure 1 illustrates the various steps of the preferred embodiment of the present invention.
- a silicon substrate 10 is fabricated using conventional fabrication techniques to form a mold having an exposed surface 12 defining the sub-set of intersecting facets.
- a diamond layer 14 of generally uniform thickness is grown over the exposed surface 12 of the substrate 10 by any suitable method such as hot- filament CVD or plasma-assisted CVD.
- the exposed surface 12 may be pretreated by any suitable technique to enhance the diamond nucleation and nucleation density on the exposed surface. Typically, the exposed surface is pretreated by seeding the surface with carbon atoms 16. The pretreatment of the exposed surface may be important in order to ensure growth of the diamond in the shape of the sub-set of facets which may be relatively complex.
- a backing layer 18 may be formed over at least portions of the exposed surface of the newly grown diamond layer to provide structural support to the diamond layer when the substrate is removed. Any material that will adhere to the exposed diamond and enhance the rigidity of the diamond layer 14 is suitable for the backing layer 18 (e.g., epoxy, plastic, viscous polymers that harden, glass, etc.).
- the backing layer may be electrically conductive or non-conductive as desired.
- the substrate 10 is removed to expose the surface 20 of the diamond layer 14 grown contiguous to the substrate which has been defined by the mold formed by the substrate.
- the substrate 10 may be removed by any suitable means such as chemical etching.
- the diamond layer 14 may then be treated as desired.
- the free-standing objects made according to the present invention may find utility in a variety of applications such as backward wave oscillators, bi-polar plates for fuel cells, traveling wave tubes, microchannel plates, and a multitude of other devices having a surface comprising a plurality of intersecting facets wherein a sub-set of intersecting facets have a diamond layer of substantially uniform thickness.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US44523703P | 2003-02-06 | 2003-02-06 | |
| US445237P | 2003-02-06 | ||
| US49408903P | 2003-08-12 | 2003-08-12 | |
| US49409503P | 2003-08-12 | 2003-08-12 | |
| US494089P | 2003-08-12 | ||
| US494095P | 2003-08-12 | ||
| PCT/US2004/003518 WO2004072319A2 (en) | 2003-02-06 | 2004-02-06 | Free-standing diamond structures and methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1601807A2 EP1601807A2 (en) | 2005-12-07 |
| EP1601807A4 true EP1601807A4 (en) | 2008-01-23 |
Family
ID=32872752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP04709095A Withdrawn EP1601807A4 (en) | 2003-02-06 | 2004-02-06 | FREE-STANDING DIAMOND STRUCTURES AND METHODS |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1601807A4 (ja) |
| JP (1) | JP2007524554A (ja) |
| KR (1) | KR100700339B1 (ja) |
| AU (1) | AU2004211648B2 (ja) |
| CA (1) | CA2515196A1 (ja) |
| WO (1) | WO2004072319A2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201209424D0 (en) | 2012-05-28 | 2012-07-11 | Element Six Ltd | Free-standing non-planar polycrystalline synthetic diamond components |
| KR101391179B1 (ko) | 2012-10-05 | 2014-05-08 | 한국과학기술연구원 | 나노 결정질 다이아몬드를 이용한 감쇠전반사형 도파로 모드 공진 센서 및 나노 결정질 다이아몬드로 이루어진 도파로의 제조 방법 |
| JP6636239B2 (ja) * | 2014-08-29 | 2020-01-29 | 国立大学法人電気通信大学 | 単結晶ダイヤモンドの製造方法、単結晶ダイヤモンド、単結晶ダイヤモンド基板の製造方法、単結晶ダイヤモンド基板及び半導体デバイス |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5629532A (en) * | 1986-10-09 | 1997-05-13 | Myrick; James J. | Diamond-like carbon optical waveguide |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3549227B2 (ja) * | 1993-05-14 | 2004-08-04 | 株式会社神戸製鋼所 | 高配向性ダイヤモンド薄膜 |
| JPH11209194A (ja) * | 1998-01-23 | 1999-08-03 | Sumitomo Electric Ind Ltd | 複合硬質膜、その膜の形成方法および耐摩耗性部品 |
| US6659161B1 (en) * | 2000-10-13 | 2003-12-09 | Chien-Min Sung | Molding process for making diamond tools |
-
2004
- 2004-02-06 KR KR1020057014525A patent/KR100700339B1/ko not_active IP Right Cessation
- 2004-02-06 CA CA002515196A patent/CA2515196A1/en not_active Abandoned
- 2004-02-06 EP EP04709095A patent/EP1601807A4/en not_active Withdrawn
- 2004-02-06 JP JP2006503393A patent/JP2007524554A/ja active Pending
- 2004-02-06 WO PCT/US2004/003518 patent/WO2004072319A2/en active Search and Examination
- 2004-02-06 AU AU2004211648A patent/AU2004211648B2/en not_active Ceased
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5629532A (en) * | 1986-10-09 | 1997-05-13 | Myrick; James J. | Diamond-like carbon optical waveguide |
Non-Patent Citations (4)
| Title |
|---|
| BORUP R L ET AL: "DESIGN AND TESTING CRITERIA FOR BIPOLAR PLATE MATERIALS FOR PEM FUEL CELL APPLICATIONS", MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, MATERIALS RESEARCH SOCIETY, PITTSBURG, PA, US, vol. 393, 1995, pages 151 - 155, XP008078990, ISSN: 0272-9172 * |
| KANG W P ET AL: "A novel low-field electron-emission polycrystalline diamond microtip array for sensor applications", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE [CH], vol. 54, no. 1-3, June 1996 (1996-06-01), pages 724 - 727, XP004077956, ISSN: 0924-4247 * |
| SHIBATA T ET AL: "Microfabrication of diamond probe for atomic force microscope", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG. [US], vol. 3680, 1999, pages 1125 - 1133, XP002459219, ISSN: 0277-786X * |
| UNNO K ET AL: "Smart nano-machining and measurement system with semiconductive diamond probe", SMART MATERIALS AND STRUCTURES; IOP PUBLISHING LTD., BRISTOL [GB], vol. 10, no. 4, 1 August 2001 (2001-08-01), pages 730 - 735, XP002459220, ISSN: 0964-1726 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2515196A1 (en) | 2004-08-26 |
| WO2004072319A2 (en) | 2004-08-26 |
| EP1601807A2 (en) | 2005-12-07 |
| JP2007524554A (ja) | 2007-08-30 |
| AU2004211648B2 (en) | 2008-10-02 |
| WO2004072319A3 (en) | 2006-08-17 |
| KR100700339B1 (ko) | 2007-03-29 |
| KR20060010718A (ko) | 2006-02-02 |
| AU2004211648A1 (en) | 2004-08-26 |
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