EP1592643A2 - Dispositifs micro-mecaniques ou micro-optico electroniques avec depot de materiau de degazage, chauffage integre, et support de production associe - Google Patents

Dispositifs micro-mecaniques ou micro-optico electroniques avec depot de materiau de degazage, chauffage integre, et support de production associe

Info

Publication number
EP1592643A2
EP1592643A2 EP03786227A EP03786227A EP1592643A2 EP 1592643 A2 EP1592643 A2 EP 1592643A2 EP 03786227 A EP03786227 A EP 03786227A EP 03786227 A EP03786227 A EP 03786227A EP 1592643 A2 EP1592643 A2 EP 1592643A2
Authority
EP
European Patent Office
Prior art keywords
getter material
deposit
base
layer
getter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03786227A
Other languages
German (de)
English (en)
Inventor
Marco Amiotti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of EP1592643A2 publication Critical patent/EP1592643A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
    • B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems

Definitions

  • the present invention relates to micromechanical or microoptoelectronic devices comprising a deposit of getter material for the sorption of gases which are detrimental to the operation of said devices and an integrated heater for the activation or reactivation of the getter material during the life of the device itself; the invention also relates to supports particularly suited for the production of these devices.
  • Micromechanical devices are under development for applications such as miniaturized sensors or actuators: typical examples of MMs are the microaccelerometers, used as sensors to activate automobile airbags, micromotors with gears and sprocket wheels having the size of a few microns, or the optic switches, wherein a mirror surface with a size of the order of some tens microns can be moved between two different positions, directing a light beam along two different directions, one of which corresponding to the "on” condition and the other to the "off condition of an optical circuit.
  • microaccelerometers used as sensors to activate automobile airbags
  • micromotors with gears and sprocket wheels having the size of a few microns
  • optic switches wherein a mirror surface with a size of the order of some tens microns can be moved between two different positions, directing a light beam along two different directions, one of which corresponding to the "on” condition and the other to the "off condition of an optical circuit.
  • the microoptoelectronic devices comprise, for example, new generation infrared radiation (IR) sensors which, unlike the traditional ones, do not require cryogenic temperatures for their operation.
  • IR infrared radiation
  • These LR sensors are formed of an array of semiconductor material deposits, for example silicon, arranged in an evacuated chamber. All these devices will be referred to in the following by the general definition of miniaturized devices.
  • the miniaturized devices are generally manufactured through a technology derived from the microelectronic industry, comprising operations of depositing on a planar support layers of materials with different electric (or magnetic) functionality, alternated to selective removals thereof. These devices are generally contained in housings formed, in their turn, with the same techniques.
  • the support which is most commonly used in these productions is a silicon wafer, less than about 1 mm thick and with a diameter of up to 30 cm. On each one of these wafers a very high number of devices are manufactured; then, at the end of the manufacturing process, from these wafers by mechanical or laser cut are separated the single devices in the case of MMs, or parts including an array of some tens of devices in the case of IR sensors.
  • CVD Chemical Vapour Deposition
  • PVD Physical Vapour Deposition
  • selective removals are carried out through chemical or physical etchings with suitable masking, as it is well known in this field.
  • MMs are then incapsulated in metallic or ceramic containers, essentially for mechanical protection reasons, before being inserted in the final destination apparatus (a computer, an automobile, etc.).
  • LR radiation sensors are instead generally comprised in- a chamber, facing one wall thereof, called “window", transparent to the LR radiation.
  • the functionality of the miniaturized devices can be altered by the presence of undesired gases.
  • the mechanical friction between gas molecules and a moving part due to the very small size of the latter, can lead to sensible deviations from the device's ideal operation; moreover, polar molecules such as water can cause phenomena of adhesion between the moving part and other parts, for example the support thereof, thus causing the possible device failure.
  • the gases possibly present in the chamber can sorb, a fraction of the radiation or transport heat by convection from the window to the array of silicon deposits, thus modifying the measurement. Therefore it is fundamental to ensure that the housing of these miniaturized devices is kept under vacuum during the whole life of the device.
  • Getter materials are metals such as zirconium, titanium, vanadium, niobium or tantalum, or alloys thereof with other transition metals, Rare Earths or aluminum.
  • getter materials in MMs are disclosed e.g. in the article "Vacuum packaging for microsensors by glass-silicon anodic bonding" by H. Henmi et al., published on the technical magazine Sensors and Actuators A, vol. 43 (1994), at pages 243-248, and in the patents US 5,155,778, US 5,952,572 and US 6,469,821, while the use of getter materials in LR sensors is disclosed e.g. in the patents US 5,921,461 and US 6,252,229.
  • getter materials both metals and alloys
  • a thermal treatment of initial activation by which a passivating layer (generally formed of oxides, carbides or nitrides of the metals) is removed from the material surface and a fresh "clean" surface is exposed, capable of interacting with gases.
  • this .activation is carried out during the thermal treatment of sealing, wherein two parts (generally of silicon) are welded to each other by heating at about 1000°C in case of direct welding silicon-silicon, or at a -lower temperature in case that a suitable material is interposed between the two parts, such as an eutectic Au-Si composition melting at about 370°C.
  • the materials forming the miniaturized device can release gases which are sorbed by the getter.
  • the consequence is an inefficient getter activation, since the material is continuously exposed to the gases during the whole high temperature treatment, so that at the end of the process its surface will not be formed of metallic atoms only, but it will be still covered with oxides, carbides of nitrides, to a so greater extent as greater is the quantity of gases in the environment of the getter during the thermal treatment.
  • the getter upon sealing the device the getter is practically inactive.
  • the cited patent application US 2003/0138656 describe a wafer in which the getter layer is temporarily protected by a very thin layer of an inert metal, e.g.
  • the patent application US 2002/0149096 proposes a method for manufacturing miniaturized devices operating under vacuum wherein the getter can be heated at will during the life of the device.
  • a getter material deposit is formed, that can be activated when necessary by means of a transistor which is also integrated in the substrate.
  • the activation transistor (or other similar semiconductor device) is formed first on the substrate, possibly as overlapping of various layers, then covered with a layer of dielectric material, this too possibly as overlapping of various layers, wherein openings connecting to the underlying transistor must be formed.
  • a layer of electrically conductive material is then applied, which is connected to the transistor through the above-mentioned openings and in turn leads the activation current to the overlying layer of getter material directly or through an additional layer of electrically resistive material acting as heater.
  • the dielectric layer is in fact necessary to protect the transistor or other semiconductor whose performances are spoiled by temperatures of about 400°C, that can be reached for the getter activation. Furthermore it is also provided the presence of a temperature sensor which is able to send a signal to disactivate the getter heating system when a pre-fixed threshold is exceeded. This obviously implies a further increase of costs and complexity of the device.
  • the use of the same manufacturing tools both for the transistors and for the getter material can result in contamination by zirconium or other heavy metals comprised in the getter film, which can change the features of electric conductivity of other semiconductor layers of different transistors.
  • the object of the present invention is to overcome the above-mentioned drawbacks of * the prior art devices, by providing micromechanical or .microoptoelectronic devices having simple structure in which it is possible to heat the getter material only at any moment of the device life.
  • FIG. 1 shows in cross-section a first embodiment of a miniaturized device according to the invention, representing the case of a MM;
  • - Fig. la shows an enlarged view of the region of the device of Fig. 1 where the getter material is present;
  • - Fig. 2 shows in cross-section a second embodiment of MM according to the invention
  • - Fig. 3 shows in cross-section a third embodiment of the miniaturized device according to the invention, in the case of a miniaturized IR sensor
  • FIG. 4 shows in cross-section a variation that can be applied to the above embodiments of the invention
  • FIG. 5-7 show in cross-section some embodiments of supports for the manufacturing of miniaturized devices according to the invention.
  • a MM comprising a getter material and the integrated heater member for the getter material.
  • MM 10 comprises a first portion 11 (cap) in which a hollow 12 is formed, and a second portion 13 (base), welded to each other along the perimeter 14 thus defining an inner space 15.
  • the mobile portion of MM is housed, being schematically represented in the drawing as member 16; for the sake of clarity there are not shown the electrical contacts for feeding the mobile member 16 or for transmitting outside a signal detected by member 16 when the MM is a sensor (for example a microaccelerometer).
  • a deposit 17 of getter material for removing therefrom gas molecules which would interfere with the correct operation of the MM.
  • MM 20 is formed of a base 21 and a cap 22 welded together along their perimeter, thus defining a space 23; in space 23, on the inner surface of base 21, there is formed the mobile portion 24 of the MM (also in this case the electric contacts to connect this portion to the outside are not shown).
  • a deposit 25 of getter material is formed on the . inner surface of cap 22.
  • the deposit 25 is connected through two holes 26, 26', formed in cap 22, to two electric contacts 27, 27' for its heating by current flow.
  • recourse can be made to the filling of holes 26, 26' with a metal to ensure gas-tightness of space 23.
  • a structure of type 20 can result preferable, as the forming of deposit 25 on a surface free of other structures make easier all the manufacturing steps and also the surface available for deposit 25 is increased as well as its efficiency in gas removal.
  • FIG. 3 shows schematically the use of the invention in case of a microoptoelectronic device, in the exemplified case an IR microsensor.
  • Microsensor 30 is formed of a base 31 and a cap 32 which define an inner space 33 to be kept under vacuum and from which possible gas traces must be removed by the getter material.
  • Cap 32 is transparent to IR radiation, symbolically represented by wavy arrows.
  • On the inner portion of base 31 members 34, 34', ...
  • getter material it is impossible to adopt the configuration of Fig. 2 in order not to affect the features of transparency to TR radiation of cap 32. It is possible anyway to place getter material along a perimetral frame of cap 32 or along the vertical walls of base 31 to leave the whole horizontal surface of base 31 available for the sensor members 34, 34' ... .
  • Fig. 4 shows in cross-section only essential elements of the variation itself.
  • the getter material deposit 40 is not directly formed on base 41 (which can be anyone of elements 11, 13, 21, 22, 31 or 32), but on an additional layer 42 having electric features which are suitable to heating by current flow.
  • Layer 42 is connected to contacts 43, 43' which, by means of throughholes 44, 44', are in turn in contact with external electric connections as described with reference to Fig. 1.
  • an additional layer can be provided which is electrically insulating but thermally conductive (e.g. silicon dioxide) interposed between getter and heater 42.
  • Getter materials which is possible to use in the invention are the most varied and comprise metals such as Zr, Ti, Nb, Ta, V, alloys among these metals, or alloys among these and one or more elements chosen among Cr, Mn, Fe, Co, Ni, Al, Y, La and Rare Earths.
  • binary alloys Ti- V, Zr-V, Zr-Fe and Zr-Ni binary alloys Ti- V, Zr-V, Zr-Fe and Zr-Ni, ternary alloys Zr-Mn-Fe, Zr-V-Fe or Zr-Co-A (wherein A represents mischmetal, a commercial mixture of yttrium, lanthanum and Rare Earths), or mixtures among the previously indicated metals and alloys; 'these mixtures are preferable due to their good mechanical features, with particular regard to the loss of particles.
  • the deposit of getter material can be obtained with various techniques, such as cold rolling, which is possible if the support on which the deposit is formed is not too fragile; electrophoresis, being possible in case the support is an electrical conductor, and possibly confining the deposit through suitable maskings with insulating materials to be removed after the deposit formation; screen printing, by confining the deposit with mechanical maskings; or the sputtering technique, also in this case by confining the deposit in the desired area by means of chemical maskings to be removed after deposition.
  • the preferred technique is sputtering.
  • the getter deposit must be able to be heated by current flow at a temperature between about 200 and 400°C, preferably between about 250 and 350°C.
  • the more compact deposits, such as those obtained by sputtering, can be directly heated at the desired temperatures by current flow.
  • the getter material being deposited on an additional layer of suitable characteristics as shown in Fig.4.
  • the additional layer 42 can be made of metal, such as aluminum, or a semiconductor material, such as polycrystalline silicon.
  • Metallic deposits can be obtained with suitable maskings by means of techniques such as screen printing, evaporation, galvanic technique or sputtering, all widely known in the field of metallic layer formation.
  • the member on which the getter material deposit is formed can be made, depending on the miniaturized device, in various materials, such as metals, ceramics, semiconductors or glass.
  • the preferred material is silicon, as it allows to apply in the field of micromechanical or microoptoelectronic devices the common techniques,. now well-established in the field of microelectronic, consisting in the formation of thin layers on a support and a partial, local removal of these layers, thus obtaining structures of extremely small size in a precise and reproducible manner.
  • the throughholes (19, 19'; 26, 26'; 44, 44') leading the electric supply to the deposit of getter material or the layer 42 can be obtained by a technique which is typical in the field of microelectronic, i.e. the anisotropic etching with solutions generally containing the fluoride ion.
  • the speed at which silicon dissolves in these solutions is very different in the various lattice directions of a single crystal of the element, so that the etching proceeds almost exclusively along the direction of maximum dissolution speed.
  • a second aspect thereof deals with the supports for manufacturing micromechanical or microoptoelectronic devices with an integrated deposit of getter material and members for heating the same.
  • a support according to the invention may be made of metal, ceramic, glass or of a semiconductor material; due to the importance of this latter choice, in the following reference will be made to semiconductor supports.
  • Said support is preferably a wafer of silicon, similar to the supports described in the international patent applications WO 03/009317 and WO 03/009318, but on which there are already provided, in correspondence with the getter material deposit, the throughholes and the electric contacts and possibly a layer of a material that can be heated by flow of electric current in contact with the getter material.
  • the getter material deposit can be temporarily protected and become exposed during the manufacturing of the miniaturized device.
  • Fig. 5 shows in a sectional view a portion of a possible support according to the invention (the dimensional ratios of the various parts, in particular the thickness, are not in scale).
  • Support 50 is formed of a base 51, e.g. of silicon, on which there is deposited a continuous layer 52 of a getter material.
  • a base 51 e.g. of silicon
  • On surface 53 of base 51 a number of holes 54, 54' in pairs are formed, which allow to bring electrical connections into contact with layer 52. Since in this case layer 52 is continuous, tins support can be applied in the configuration previously illustrated with reference to Fig. 2, wherein the getter material is present on a MM portion opposite to that of mobile portion 24.
  • a number of MMs can be formed from support 50 by cutting the same along the broken lines as shown on surface 53.
  • a second possible support is represented in cross-section in Fig. 6.
  • the support 60 is formed of a number of layers of different materials which are in the order: a base 61, e.g. of silicon; a layer 62 of a material that can be easily heated by current flow (e.g., aluminum); a layer 63 of getter material; and a layer 64, for example in silicon oxide, for the temporary protection of layer 63 from the atmospheric gases.
  • pairs of holes 65, 65' are formed, which allow the electric supply of layer 62 for its heating.
  • the broken lines are those along which the support 60 will be cut for producing a plurality of MMs; during the manufacturing the layer 64 will be also removed totally or partially, thus allowing the getter material to be exposed to the inner atmosphere of the MM.
  • the two layers 62 and 64 could not be present together; for example, in the case that the layer of getter material has already features suitable to heating by current flow, the presence of layer 62 can be avoided, or it is possible to have a support with layer 62 but without the protective layer 64.
  • support 70 consists of a base 71 on which a number of local deposits 72, 72', 72", .... of getter material is present; a pair of holes 73, 73' being formed in base 71 is associated with each one of these deposits, for electrically connecting the deposit with the outside. Regions 74, 74', 74", ... of base 71 are kept free for the construction of the active structures of the miniaturized device and the broken lines again indicate the cutting lines of support 70 for the production of a number of miniaturized devices. Also in this case the measures described with reference to Fig.
  • a support of type 70 can be employed in manufacturing MMs, but its use is especially preferable in case of microoptoelectronic devices wherein, as mentioned above, the housing portion opposite to that on which the active structures are obtained must be transparent to radiation and thereby cannot house the deposit of getter material over its own whole surface.
  • Another advantage offered by the invention in case the getter deposit is heated directly through passage of electric current is that, by means of the same electric contacts (e.g., 18, 18' or 27, 27') it is possible to monitor the residual gas sorption capability of the getter material.
  • the electric resistance of deposits of getter materials is known to increase with the amount of oxide, nitride or carbide species formed at the surface of the material; thus, by checking from time to time the value of electric resistance of the getter deposit using the same contacts as probes, and comparing this value with a preset value indicating exhaustion of the getter, it is possible to know when the getter deposit needs reactivation and thus submitting the deposit to a reactivation step only when needed. Possible additions and/or modifications can thereby be made to the device object of the present invention without departing from the protective scope of the invention.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Micromachines (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

L'invention concerne des dispositifs micro-mécaniques (10; 20) ou des dispositifs micro-optico électroniques (30) comprenant un dépôt de matériau de dégazage (17; 25; 35) pour la sorption de gaz qui gênent le fonctionnement de ces dispositifs, et un système intégré (18, 18', 19, 19') servant à chauffer le matériau de dégazage depuis l'extérieur à chaque moment requis au cours de la durée d'utilisation du dispositif. L'invention porte aussi sur plusieurs modes de réalisation d'un support destiné à la fabrication de ces dispositifs.
EP03786227A 2003-01-17 2003-12-24 Dispositifs micro-mecaniques ou micro-optico electroniques avec depot de materiau de degazage, chauffage integre, et support de production associe Withdrawn EP1592643A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI20030069 2003-01-17
IT000069A ITMI20030069A1 (it) 2003-01-17 2003-01-17 Dispositivi micromeccanici o microoptoelettronici con deposito di materiale getter e riscaldatore integrato.
PCT/IT2003/000857 WO2004065289A2 (fr) 2003-01-17 2003-12-24 Dispositifs micro-mecaniques ou micro-optico electroniques avec depot de materiau de degazage, chauffage integre, et support de production associe

Publications (1)

Publication Number Publication Date
EP1592643A2 true EP1592643A2 (fr) 2005-11-09

Family

ID=32750478

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03786227A Withdrawn EP1592643A2 (fr) 2003-01-17 2003-12-24 Dispositifs micro-mecaniques ou micro-optico electroniques avec depot de materiau de degazage, chauffage integre, et support de production associe

Country Status (12)

Country Link
EP (1) EP1592643A2 (fr)
JP (1) JP2006513046A (fr)
KR (1) KR20050092426A (fr)
CN (1) CN100453442C (fr)
AU (1) AU2003295223A1 (fr)
CA (1) CA2511836A1 (fr)
HK (1) HK1087090A1 (fr)
IT (1) ITMI20030069A1 (fr)
MY (1) MY157923A (fr)
NO (1) NO20053804L (fr)
TW (1) TW200500291A (fr)
WO (1) WO2004065289A2 (fr)

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DE102005001449B3 (de) * 2005-01-12 2006-07-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Erzeugen eines vorgegebenen Innendrucks in einem Hohlraum eines Halbleiterbauelements
ITMI20052343A1 (it) * 2005-12-06 2007-06-07 Getters Spa Processo per la produzione di dispositivi micromeccanici contenenti un materiale getter e dispositivi cosi'prodotti
FR2898597B1 (fr) 2006-03-16 2008-09-19 Commissariat Energie Atomique Encapsulation dans une cavite hermetique d'un compose microelectronique, notamment d'un mems
FR2903678B1 (fr) * 2006-07-13 2008-10-24 Commissariat Energie Atomique Microcomposant encapsule equipe d'au moins un getter
US7402905B2 (en) * 2006-08-07 2008-07-22 Honeywell International Inc. Methods of fabrication of wafer-level vacuum packaged devices
ITMI20070301A1 (it) 2007-02-16 2008-08-17 Getters Spa Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel
FR2933389B1 (fr) 2008-07-01 2010-10-29 Commissariat Energie Atomique Structure a base d'un materiau getter suspendu
JP2010251702A (ja) * 2009-03-27 2010-11-04 Kyocera Corp 電子部品、パッケージおよび赤外線センサ
FR2956521B1 (fr) * 2010-02-16 2012-08-17 Thales Sa Dispositif comprenant des composants electriques, electroniques, electromecaniques ou electro-optiques, a sensibilite reduite a faible debit de dose
US9491802B2 (en) 2012-02-17 2016-11-08 Honeywell International Inc. On-chip alkali dispenser
EP2736071B8 (fr) 2012-11-22 2017-04-19 Tronic's Microsystems S.A. Emballage de niveau de tranche avec un dégazeur
US9479138B2 (en) 2013-05-24 2016-10-25 Epcos Ag Microelectromechanical systems device package and method for producing the microelectromechanical systems device package
EP2813465B1 (fr) 2013-06-12 2020-01-15 Tronic's Microsystems Dispositif MEMS avec une couche d'absorption
FR3008965B1 (fr) * 2013-07-26 2017-03-03 Commissariat Energie Atomique Structure d'encapsulation comprenant un capot renforce mecaniquement et a effet getter
CN104743502A (zh) * 2013-12-31 2015-07-01 北京有色金属研究总院 一种具有复合吸气剂层的mems组件及其制备方法
JP2017224704A (ja) 2016-06-15 2017-12-21 セイコーエプソン株式会社 真空パッケージ、電子デバイス、電子機器及び移動体
CN109173690B (zh) * 2018-09-20 2020-10-09 内蒙古科技大学 一种用于金属材料热处理中的空气消耗剂
CN114057156A (zh) * 2021-12-21 2022-02-18 罕王微电子（辽宁）有限公司 一种用于晶圆级mems真空封装的金属扩散吸附系统及工艺

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Also Published As

Publication number Publication date
KR20050092426A (ko) 2005-09-21
TW200500291A (en) 2005-01-01
WO2004065289A2 (fr) 2004-08-05
AU2003295223A1 (en) 2004-08-13
CN100453442C (zh) 2009-01-21
JP2006513046A (ja) 2006-04-20
NO20053804L (no) 2005-08-12
WO2004065289A3 (fr) 2005-01-06
MY157923A (en) 2016-08-15
CA2511836A1 (fr) 2004-08-05
HK1087090A1 (en) 2006-10-06
CN1738765A (zh) 2006-02-22
ITMI20030069A1 (it) 2004-07-18

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