EP1576209B1 - Verfahren zur regeneration eines elektrolysebades zur herstellung einer i-iii-vi2 verbindung als dünnschicht - Google Patents
Verfahren zur regeneration eines elektrolysebades zur herstellung einer i-iii-vi2 verbindung als dünnschicht Download PDFInfo
- Publication number
- EP1576209B1 EP1576209B1 EP03796179.4A EP03796179A EP1576209B1 EP 1576209 B1 EP1576209 B1 EP 1576209B1 EP 03796179 A EP03796179 A EP 03796179A EP 1576209 B1 EP1576209 B1 EP 1576209B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- selenium
- bath
- iii
- concentration
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005868 electrolysis reaction Methods 0.000 title claims description 28
- 238000000034 method Methods 0.000 title claims description 22
- 150000001875 compounds Chemical class 0.000 title claims description 10
- 230000008929 regeneration Effects 0.000 title description 14
- 238000011069 regeneration method Methods 0.000 title description 14
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000011669 selenium Substances 0.000 claims description 71
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 44
- 229910052711 selenium Inorganic materials 0.000 claims description 44
- 239000010949 copper Substances 0.000 claims description 18
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical group OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 13
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000000084 colloidal system Substances 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 239000007800 oxidant agent Substances 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 230000003647 oxidation Effects 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 230000001172 regenerating effect Effects 0.000 claims description 6
- 150000004679 hydroxides Chemical class 0.000 claims description 5
- 230000005518 electrochemistry Effects 0.000 claims description 3
- 230000005012 migration Effects 0.000 claims description 3
- 238000013508 migration Methods 0.000 claims description 3
- JJLJMEJHUUYSSY-UHFFFAOYSA-L copper(II) hydroxide Inorganic materials [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 claims 1
- AEJIMXVJZFYIHN-UHFFFAOYSA-N copper;dihydrate Chemical compound O.O.[Cu] AEJIMXVJZFYIHN-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 38
- 239000000203 mixture Substances 0.000 description 15
- 229910052738 indium Inorganic materials 0.000 description 12
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 238000005755 formation reaction Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000002243 precursor Substances 0.000 description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000004070 electrodeposition Methods 0.000 description 5
- 230000001464 adherent effect Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical class [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- JPJALAQPGMAKDF-UHFFFAOYSA-N selenium dioxide Chemical compound O=[Se]=O JPJALAQPGMAKDF-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910003597 H2SeO3 Inorganic materials 0.000 description 1
- 239000007832 Na2SO4 Substances 0.000 description 1
- -1 NaOH Chemical compound 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- PHPKKGYKGPCPMV-UHFFFAOYSA-N [SeH-]=[Se].[In+3].[SeH-]=[Se].[SeH-]=[Se] Chemical compound [SeH-]=[Se].[In+3].[SeH-]=[Se].[SeH-]=[Se] PHPKKGYKGPCPMV-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000010835 comparative analysis Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 229910000366 copper(II) sulfate Inorganic materials 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000002659 electrodeposit Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002471 indium Chemical class 0.000 description 1
- 229910000337 indium(III) sulfate Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- MINVSWONZWKMDC-UHFFFAOYSA-L mercuriooxysulfonyloxymercury Chemical compound [Hg+].[Hg+].[O-]S([O-])(=O)=O MINVSWONZWKMDC-UHFFFAOYSA-L 0.000 description 1
- 229910000371 mercury(I) sulfate Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 1
- 150000003342 selenium Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/16—Regeneration of process solutions
- C25D21/18—Regeneration of process solutions of electrolytes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D9/00—Electrolytic coating other than with metals
- C25D9/04—Electrolytic coating other than with metals with inorganic materials
- C25D9/08—Electrolytic coating other than with metals with inorganic materials by cathodic processes
Definitions
- the present invention relates to the manufacture of type I-III-VI 2 semiconductors in thin layers, in particular for the design of solar cells.
- the compounds I-III-VI 2 of the CuIn x Ga (1-x) Se y S (2-y) type (where x is substantially between 0 and 1 and y is substantially between 0 and 2) are considered to be very low. promising and could be the next generation of thin-film photovoltaic cells. These compounds have a direct bandwidth of between 1.05 and 1.6 eV which allows a strong absorption of solar radiation in the visible.
- An object of the present invention is to provide a method of manufacturing thin layers of a compound I-III-VI y (where y is close to 2) by electrolysis, which ensures the stabilization and reproducibility of the deposition conditions.
- An underlying purpose is to be able to perform over large areas a large number of successive deposits of thin layers having the desired morphology and composition.
- Another object of the present invention is to provide a process for the manufacture of thin layers of the compound I-III-VI y , which ensures a satisfactory life of the electrolysis bath, as well as an efficient regeneration of the raw materials consumed during electrolysis.
- Another object of the present invention is to provide a process for manufacturing thin layers of the compound I-III-VI y , which ensures a regeneration of the raw materials consumed during the electrolysis, without unbalancing the composition of the electrolysis bath. and then reduce its life.
- the process in the sense of the invention further comprises a step c) regeneration of selenium in active form in said bath, to increase a lifetime of said electrolysis bath.
- the regeneration of the active selenium bath is first carried out before regenerating it into element I (such as copper) and / or element III (such as indium or gallium).
- element I such as copper
- element III such as indium or gallium
- step c at least one new thin layer of I-III-VI y is formed .
- step c) selenium is added to the bath to form an excess of active selenium in the bath.
- step c) a selenium oxidant is introduced into the bath to regenerate selenium in active form.
- the electrolysis bath as it ages during deposition, exhibits selenium colloids.
- This selenium in the form of colloids has a degree of oxidation 0 and, in the context of the present invention, is not likely to combine with the elements I and III.
- the aforementioned oxidant is capable of regenerating the selenium in the form of colloids, into selenium in the active form.
- selenium in active form is understood to mean selenium at the oxidation state IV, which can be reduced to the ionic electrode Se 2- and to naturally combine with the elements I and III. to form the thin films of I-III-VI y , and differing from the selenium of oxidation state 0, for example in the form of colloids in the bath solution, which does not combine with elements I and III.
- said oxidant is oxygenated water, preferably in concentration in the bath of an order of magnitude corresponding substantially to at least five times the initial concentration of selenium in the bath.
- step c of regeneration of the electrolysis bath by introduction of oxides and / or of hydroxides of elements I and III.
- precursor layer is intended to mean a thin layer of overall composition close to CuInSe 2 and directly obtained after electrolysis deposition, without any subsequent treatment.
- Electrodeposition is carried out from an acid bath B ( figure 2 ), stirred by M blades, containing an indium salt, a copper salt and dissolved selenium oxide.
- concentrations of these precursor elements are between 10 -4 and 10 -2 M.
- the pH of the solution is set between 1 and 4.
- the electric potential difference applied to the molybdenum electrode is between -0.8 and -1.2 V relative to the REF reference electrode.
- Thickness layers between 1 and 4 microns are obtained, with current densities of between 0.5 and 10 mA / cm 2 .
- the precursors are deposited by an imposed voltage cathode reaction at -1 V relative to the REF electrode.
- the current density is -1 mA / cm 2 .
- the Cu, In and Se elements are recharged on the basis of the number of coulombs indicated by a detection cell (not shown), which thus counts the number of ions that have interacted in the bath solution.
- This refill makes it possible to keep constant the concentration of the elements during the successive electrodeposits.
- the pH can also be readjusted by addition of sodium hydroxide (such as NaOH, for a concentration such as 1M) but this measure is not systematically necessary here, as will be seen later.
- this detachment disappears by regeneration of the selenium bath, even before regenerating the elements Cu and In.
- Se (IV) active selenium of degree of oxidation IV
- Se (0) active selenium of degree of oxidation 0
- the active selenium Se (IV) is the only one capable of being reduced to the Ca electrode in the Se 2 ion form and of combining, in this form, with the elements Cu and In to form the CuInSe thin layers. 2 .
- an excess regeneration of Se (IV) is carried out in the bath.
- dissolved selenium oxide is added to the electrolysis bath to retard the aging of the bath.
- 1.8 ⁇ 10 -4 M of [H 2 SeO 3 ] it is theoretically necessary to add 1.8 ⁇ 10 -4 M of [H 2 SeO 3 ] to the solution to recover an initial selenium concentration of 1.7 ⁇ 10 -3 M
- a double addition of this quantity ie 3.6 ⁇ 10 -4 M and therefore an excess of 1.8 ⁇ 10 -4 M of [H 2 SeO 3 ]
- These thin layers have the composition (Table I) and the desired morphology. Overregeneration of 3.6 ⁇ 10 -4 M thus makes it possible to obtain a cycle of 4 to 5 layers of satisfactory adhesion before observing new debonding problems. After each peeling cycle, the renewal of this operation makes it possible to obtain adherent layers.
- an oxidizer is used to re-oxidize the selenium in the form Se (0), to obtain selenium in the form Se (IV).
- hydrogen peroxide H 2 O 2 is preferably used, by bringing a large excess of H 2 O 2 into the solution (concentration of the order of 10 -2 M, preferably close to 4.10 -2 M). The layers become adherent for 4 to 5 successive deposits of thin layers, then come off again. The renewal of this operation also makes it possible to obtain adherent layers again.
- the addition of hydrogen peroxide also makes it possible to obtain thin layers of relatively more smooth morphology.
- oxides or hydroxides of copper and / or indium are added to regenerate the CuInSe 2 electrolysis bath in copper and / or indium.
- the electrodeposited precursor layer contains the composition elements close to the stoichiometry I-III-VI 2 .
- the compositions and the morphology are controlled during the electrolysis. These agents (excess of Se (IV) or H 2 O 2 ) can easily be used for any type of electrolysis bath allowing the electrodeposition of I-III-VI systems such as Cu-In-Ga-Al-Se- S.
- the elements I and III initially introduced into the solution in the form of CuSO 4 and In 2 (SO 4 ) 3 may advantageously be introduced in the form of oxides or hydroxides of copper and indium for limit the pollution of the bath.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Metals (AREA)
- Electrodes For Compound Or Non-Metal Manufacture (AREA)
- Photovoltaic Devices (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Manufacture And Refinement Of Metals (AREA)
Claims (10)
- Verfahren zur Herstellung einer Verbindung I-III-VIy in Dünnschichten für Elektrochemie, worin y ähnlich 2 ist und VI ein Selen umfassendes Element darstellt, das die folgenden Schritte umfasst:a) Vorsehen eines Elektrolysebades, das aktives Selen der Oxidationsstufe IV umfasst sowie mindestens zwei Elektroden undb) Anlegen einer Potentialdifferenz zwischen den zwei Elektroden, um eine Bewegung des aktiven Selens in Richtung einer der Elektroden merklich zu fördern und so die Bildung zumindest einer Dünnschicht von I-III-VIy in Gang zu setzen,
dadurch gekennzeichnet, dass es weiterhin einen Schrittc) er Regeneration des Selens in aktiver Form in dem Bad aufweist, um die Lebensdauer des Elektrolysebades zu erhöhen. - Verfahren gemäß Anspruch 1, dadurch gekennzeichnet, dass man in Schritt c) in das Bad ein Oxidationsmittel für Selen (Se(0)) einträgt, um das Selen in seiner aktiven Form (Se(IV)) zu regenerieren.
- Verfahren gemäß Anspruch 2, dadurch gekennzeichnet, dass das Bad Selen (Se(0)) in kolloidaler Form in Schritt b) umfasst, wobei das Oxidationsmittel zum Regenerieren des Selens (Se(0)) in kolloidaler Form zu Selen (Se(IV)) in aktiver Form eingerichtet ist.
- Verfahren gemäß einem der Ansprüche 2 und 3, dadurch gekennzeichnet, dass das Oxidationsmittel Wasserstoffperoxid (H2O2) darstellt.
- Verfahren gemäß Anspruch 4, dadurch gekennzeichnet, dass die Konzentration des in das Bad gegebenen Wasserstoffperoxids in der Größenordnung ist, die etwa wenigstens 5 mal der Anfangskonzentration des Selens in dem Bad entspricht.
- Verfahren gemäß einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass man in Schritt c) Selen in das Bad zum Bilden eines Überschusses an aktivem Selen in dem Bad hinzufügt.
- Verfahren gemäß Anspruch 6, dadurch gekennzeichnet, dass man für etwa ein Zehntel der Konzentration des in Schritt a) verbrauchten Selens zur Herstellung wenigstens einer Dünnschicht in Schritt b) in Schritt c) etwa das doppelte der verbrauchten Konzentration in das Bad gibt.
- Verfahren gemäß einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass man nach Schritt c) zumindest eine neue Dünnschicht I-III-VIy bildet.
- Verfahren gemäß einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass für die Herstellung der Dünnschicht CuInSey das Bad in Schritt a) für eine Konzentrationseinheit Kupfer in dem Bad ungefähr 1,7 Konzentrationseinheiten aktiven Selens umfasst.
- Verfahren gemäß einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass es einen weiteren Schritt nach Schritt c) zur Regeneration des Elektrolysebades durch Einführen von Oxiden und/oder Hydroxiden der Elemente I (CuO; Cu(OH)2) und III (In2O3; In(OH)3) aufweist.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CY20131100569T CY1114335T1 (el) | 2002-12-26 | 2013-07-05 | Μεθοδος αναγενησης ενος λουτρου ηλεκτρολυσης για την κατασκευη μιας ενωσης ι-ιιι-vi2 σε λεπτες στοιβαδες |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0216712A FR2849450B1 (fr) | 2002-12-26 | 2002-12-26 | Procede de regeneration d'un bain d'electrolyse pour la fabrication d'un compose i-iii-vi2 en couches minces |
FR0216712 | 2002-12-26 | ||
PCT/FR2003/003608 WO2004067809A1 (fr) | 2002-12-26 | 2003-12-05 | Procede de regeneration d'un bain d'electrolyse pour la fabrication d'un compose i-iii-vi2 en couches minces |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1576209A1 EP1576209A1 (de) | 2005-09-21 |
EP1576209B1 true EP1576209B1 (de) | 2013-05-29 |
Family
ID=32480206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03796179.4A Expired - Lifetime EP1576209B1 (de) | 2002-12-26 | 2003-12-05 | Verfahren zur regeneration eines elektrolysebades zur herstellung einer i-iii-vi2 verbindung als dünnschicht |
Country Status (11)
Country | Link |
---|---|
US (1) | US7273539B2 (de) |
EP (1) | EP1576209B1 (de) |
JP (1) | JP4418370B2 (de) |
AU (1) | AU2003298431B2 (de) |
CA (1) | CA2516166C (de) |
CY (1) | CY1114335T1 (de) |
DK (1) | DK1576209T3 (de) |
ES (1) | ES2420179T3 (de) |
FR (1) | FR2849450B1 (de) |
PT (1) | PT1576209E (de) |
WO (1) | WO2004067809A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2886460B1 (fr) * | 2005-05-25 | 2007-08-24 | Electricite De France | Sulfurisation et selenisation de couches de cigs electrodepose par recuit thermique |
CN100465351C (zh) * | 2006-03-02 | 2009-03-04 | 桂林工学院 | 一种太阳能电池薄膜材料的电化学沉积制备工艺 |
US8414961B1 (en) | 2006-12-13 | 2013-04-09 | Nanosolar, Inc. | Solution deposited transparent conductors |
FR2951022B1 (fr) * | 2009-10-07 | 2012-07-27 | Nexcis | Fabrication de couches minces a proprietes photovoltaiques, a base d'un alliage de type i-iii-vi2, par electro-depots successifs et post-traitement thermique. |
FR2957365B1 (fr) * | 2010-03-11 | 2012-04-27 | Electricite De France | Procede de preparation d'une couche mince d'absorbeur pour cellules photovoltaiques |
KR101129194B1 (ko) * | 2010-07-20 | 2012-03-26 | 한국에너지기술연구원 | 고밀도를 갖는 태양전지용 cis계 화합물 박막의 제조방법 및 상기 cis계 화합물 박막을 이용한 박막 태양전지의 제조방법 |
US20140158021A1 (en) * | 2012-12-11 | 2014-06-12 | Wei Pan | Electrochemical Synthesis of Selenium Nanoparticles |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4253919A (en) * | 1980-01-21 | 1981-03-03 | The International Nickel Company, Inc. | Electrodeposition of cadmium-selenium semiconducting photoelectrodes from an acid citrate bath |
US4687559A (en) * | 1984-03-16 | 1987-08-18 | Helsco Metals Inc. | Treatment of residues for metal recovery |
US5071568A (en) * | 1990-10-31 | 1991-12-10 | Union Oil Company Of California | Selenium removal process |
US5510040A (en) * | 1994-11-21 | 1996-04-23 | Nalco Chemical Company | Removal of selenium from water by complexation with polymeric dithiocarbamates |
-
2002
- 2002-12-26 FR FR0216712A patent/FR2849450B1/fr not_active Expired - Fee Related
-
2003
- 2003-12-05 AU AU2003298431A patent/AU2003298431B2/en not_active Ceased
- 2003-12-05 CA CA2516166A patent/CA2516166C/fr not_active Expired - Fee Related
- 2003-12-05 WO PCT/FR2003/003608 patent/WO2004067809A1/fr active Application Filing
- 2003-12-05 ES ES03796179T patent/ES2420179T3/es not_active Expired - Lifetime
- 2003-12-05 EP EP03796179.4A patent/EP1576209B1/de not_active Expired - Lifetime
- 2003-12-05 PT PT37961794T patent/PT1576209E/pt unknown
- 2003-12-05 US US10/540,731 patent/US7273539B2/en not_active Expired - Fee Related
- 2003-12-05 JP JP2004567354A patent/JP4418370B2/ja not_active Expired - Fee Related
- 2003-12-05 DK DK03796179.4T patent/DK1576209T3/da active
-
2013
- 2013-07-05 CY CY20131100569T patent/CY1114335T1/el unknown
Also Published As
Publication number | Publication date |
---|---|
JP4418370B2 (ja) | 2010-02-17 |
JP2006512483A (ja) | 2006-04-13 |
US20060084196A1 (en) | 2006-04-20 |
US7273539B2 (en) | 2007-09-25 |
CA2516166C (fr) | 2011-11-15 |
CY1114335T1 (el) | 2016-08-31 |
DK1576209T3 (da) | 2013-07-08 |
PT1576209E (pt) | 2013-07-12 |
AU2003298431A8 (en) | 2004-08-23 |
AU2003298431B2 (en) | 2009-10-08 |
EP1576209A1 (de) | 2005-09-21 |
FR2849450A1 (fr) | 2004-07-02 |
AU2003298431A1 (en) | 2004-08-23 |
CA2516166A1 (fr) | 2004-08-12 |
ES2420179T3 (es) | 2013-08-22 |
FR2849450B1 (fr) | 2005-03-11 |
WO2004067809A1 (fr) | 2004-08-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1576660B1 (de) | Verfahren zur herstellung einer i-iii-vi verbindung in dünnschicht form, das die einbringung von elementen der iii gruppe in der dünnschicht erleichtert | |
Gregory et al. | Electrochemical atomic layer epitaxy (ECALE) | |
US7507321B2 (en) | Efficient gallium thin film electroplating methods and chemistries | |
EP2318572B1 (de) | Bildung eines transparenten leitfähigen oxidfilms zur verwendung in einer photovoltaikstruktur | |
FR2638764A1 (fr) | Element composite comportant une couche en chalcogenure ou oxychalcogenure de titane, utilisable en particulier comme electrode positive dans une cellule electrochimique en couches minces | |
US20100140098A1 (en) | Selenium containing electrodeposition solution and methods | |
US20130112564A1 (en) | Electroplating Solutions and Methods For Deposition of Group IIIA-VIA Films | |
EP1576209B1 (de) | Verfahren zur regeneration eines elektrolysebades zur herstellung einer i-iii-vi2 verbindung als dünnschicht | |
KR20140031190A (ko) | I-iii-vi2 재료층과 몰리브덴 기판 간의 향상된 인터페이스 | |
US20110146795A1 (en) | Structure and preparation of cigs-based solar cells using an anodized substrate with an alkali metal precursor | |
US20100200050A1 (en) | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films | |
EP3523828B1 (de) | Verbesserte kontakte für eine fotovoltaische zelle mit zwei aktiven flächen | |
EP2545209B1 (de) | Verfahren zur vorbereitung einer dünnen absorptionsschicht für photovoltaische zellen | |
WO2012143632A1 (fr) | Integration d'une couche 2d cristalline a base de zno sur un substrat plastique conducteur | |
JP3097805B2 (ja) | 太陽電池とその製造方法並びにめっき方法 | |
KR20220075884A (ko) | Cis계 박막의 평탄화 방법, 이를 이용하여 제조된 cis계 박막 및 상기 cis계 박막을 포함하는 태양전지 | |
Darkowski et al. | Performance and properties of CdTe electrodeposited from phosphine telluride solution | |
FR2529713A1 (fr) | Cellule solaire a base de mos et mercure vif argent | |
WO2011086327A1 (fr) | Fabrication d'une structure multicouche pour des applications photovoltaïques à partir de conditions d'électrolyse perfectionnées | |
FR2494911A1 (fr) | Pile photovoltaique et procede pour sa preparation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20050601 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: GUIMARD, DENIS Inventor name: GUILLEMOLES, JEAN-FRANCOIS Inventor name: LINCOT, DANIEL Inventor name: TAUNIER, STEPHANE Inventor name: GRAND, PIERRE-PHILIPPE |
|
DAX | Request for extension of the european patent (deleted) | ||
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: REF Ref document number: 614466 Country of ref document: AT Kind code of ref document: T Effective date: 20130615 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D Free format text: LANGUAGE OF EP DOCUMENT: FRENCH |
|
REG | Reference to a national code |
Ref country code: DK Ref legal event code: T3 |
|
REG | Reference to a national code |
Ref country code: PT Ref legal event code: SC4A Free format text: AVAILABILITY OF NATIONAL TRANSLATION Effective date: 20130704 |
|
REG | Reference to a national code |
Ref country code: SE Ref legal event code: TRGR |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 60344186 Country of ref document: DE Effective date: 20130725 |
|
REG | Reference to a national code |
Ref country code: ES Ref legal event code: FG2A Ref document number: 2420179 Country of ref document: ES Kind code of ref document: T3 Effective date: 20130822 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: T3 |
|
REG | Reference to a national code |
Ref country code: GR Ref legal event code: EP Ref document number: 20130401535 Country of ref document: GR Effective date: 20130829 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DK Payment date: 20131120 Year of fee payment: 11 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 20131212 Year of fee payment: 11 Ref country code: PT Payment date: 20131126 Year of fee payment: 11 Ref country code: BG Payment date: 20131129 Year of fee payment: 11 Ref country code: AT Payment date: 20131119 Year of fee payment: 11 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GR Payment date: 20131119 Year of fee payment: 11 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20140303 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 60344186 Country of ref document: DE Effective date: 20140303 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20131205 Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CY Payment date: 20131128 Year of fee payment: 11 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20131231 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20131231 Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20131205 |
|
REG | Reference to a national code |
Ref country code: PT Ref legal event code: MM4A Free format text: LAPSE DUE TO NON-PAYMENT OF FEES Effective date: 20150605 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130529 |
|
REG | Reference to a national code |
Ref country code: DK Ref legal event code: EBP Effective date: 20141231 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO Effective date: 20031205 Ref country code: CY Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141205 Ref country code: PT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150605 Ref country code: SE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141206 |
|
REG | Reference to a national code |
Ref country code: SE Ref legal event code: EUG |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MM01 Ref document number: 614466 Country of ref document: AT Kind code of ref document: T Effective date: 20141205 |
|
REG | Reference to a national code |
Ref country code: GR Ref legal event code: ML Ref document number: 20130401535 Country of ref document: GR Effective date: 20150722 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150930 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141205 Ref country code: GR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150722 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: PLFP Year of fee payment: 13 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DK Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141231 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20151209 Year of fee payment: 13 Ref country code: GB Payment date: 20151218 Year of fee payment: 13 Ref country code: IT Payment date: 20151215 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CZ Payment date: 20151123 Year of fee payment: 13 Ref country code: BE Payment date: 20151214 Year of fee payment: 13 Ref country code: NL Payment date: 20151116 Year of fee payment: 13 Ref country code: ES Payment date: 20151218 Year of fee payment: 13 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: PLFP Year of fee payment: 14 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161231 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 60344186 Country of ref document: DE |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CZ Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161205 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: MM Effective date: 20170101 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20161205 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20170101 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161205 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20170701 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161205 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: PLFP Year of fee payment: 15 |
|
REG | Reference to a national code |
Ref country code: BE Ref legal event code: MM Effective date: 20161231 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161206 |
|
REG | Reference to a national code |
Ref country code: ES Ref legal event code: FD2A Effective date: 20181119 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20221121 Year of fee payment: 20 |