EP1497558A1 - Pompe a vide - Google Patents

Pompe a vide

Info

Publication number
EP1497558A1
EP1497558A1 EP03746827A EP03746827A EP1497558A1 EP 1497558 A1 EP1497558 A1 EP 1497558A1 EP 03746827 A EP03746827 A EP 03746827A EP 03746827 A EP03746827 A EP 03746827A EP 1497558 A1 EP1497558 A1 EP 1497558A1
Authority
EP
European Patent Office
Prior art keywords
unit
pump
pump unit
control
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03746827A
Other languages
German (de)
English (en)
Other versions
EP1497558B1 (fr
Inventor
Christian Beyer
Christian Harig
Rainer Hölzer
Alois Greven
Hermann Boy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1497558A1 publication Critical patent/EP1497558A1/fr
Application granted granted Critical
Publication of EP1497558B1 publication Critical patent/EP1497558B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention relates to a vacuum pump with a pump unit and an operating unit located spatially distant therefrom and a method for controlling a vacuum pump.
  • the pump unit having a pump unit and the operating unit for operating the pump unit are arranged spatially separate from one another. Examples of this are flat glass coating systems, clean room systems, glass fiber production systems, picture tube production systems, elementary particle accelerators etc.
  • the connection between the control unit and the pump unit consists of electrical data and control lines through which the control and control signals between the pump unit and the Control unit can be transferred.
  • the electrical data lines are particularly susceptible to induced interference pulses with a long line length. Also require tax and Data lines, if necessary, lead-throughs through walls that are difficult to seal. With moving pumps, the signals must be transmitted via long trailing lines and / or sliding contacts.
  • the object of the invention is to improve the transmission of control and control signals between the control unit and the pump unit in a vacuum pump.
  • the pump unit and the operating unit each have a transceiver module for the wireless continuous transmission and reception of control and operating data in both directions.
  • the pump unit and the control unit are only connected to each other wirelessly, i.e. there is no longer an electrical control line between the control unit and the pump unit. No lines need to be laid when installing the vacuum pump. By eliminating the lines, the induction of interference signals is practically excluded. Wall openings for the passage of cables are also eliminated. This considerably simplifies the installation of the vacuum pump. Furthermore, the susceptibility to interference of the data connection between the operating unit and the pump unit is reduced.
  • the pump unit has a pump control and a monitoring module for the continuous monitoring of the pump unit transceiver module.
  • the pump control switches the pump set to a safety operating state if the monitoring module has one Interruption of the continuous reception of a control signal continuously sent by the pump unit to the operating unit.
  • the pump control unit switches the pump unit into a safety operating state. In this way, the pump unit is immediately brought into a safe operating state in the event of faults in the wireless transmission, in which there is no danger to persons or a connected production system, or the pump unit can be prevented from being destroyed.
  • the monitoring of the wireless transmit / receive operation is continuous, i.e. in a tight time grid of a maximum of a few seconds.
  • the control unit preferably also has a monitoring module which continuously monitors the reception of the transceiver module and continuously initiates the transmission of a control signal as long as error-free reception is determined. If the monitoring module of the pump set does not receive a correct control signal, it sends a safety operating status signal to the pump control. In this way it is ensured that the control signal can be received in the pump unit and that the pump unit runs in normal operation only when there is an uninterrupted transmission between the pump unit and the control unit and between the control unit and the pump unit. As soon as the transmission is interrupted at any point, the control unit no longer receives a control signal, whereupon the pump unit is immediately switched to a safety operating state.
  • the transceiver modules are designed as radio modules through which there is a wireless radio connection between the pump unit and the operating unit.
  • the advantage of the wireless radio connection is that it can also be made through walls and / or over large distances. In this way, several vacuum pumps can be controlled and controlled independently of each other in a large area.
  • the transceiver modules can also be designed as wireless infrared modules, by means of which the wireless data connection is implemented.
  • Such optical data transmissions are completely insensitive to interference from induced signals, as can occur in the system in question at high working currents with steep current and voltage edges.
  • the pump unit or the control unit preferably has a radio telephone module.
  • the radio telephone module makes it possible to control the pumps and / or the control unit from a remote maintenance center. In this way, fault analysis can be carried out by the maintenance center, new parameters for controlling the vacuum pump or operating commands for controlling the vacuum pump can be transmitted.
  • the pump unit or the operating unit has a location determination module.
  • a GPS module is a receiver that receives the radio signals from various geostationary navigation satellites and evaluates them to determine its own position.
  • the location determination module provides information signals about its exact location. By reading out the location signals the respective position of the control unit or the pump unit can be determined.
  • the method according to the invention has the following method steps:
  • the figure shows a vacuum pump which has a pump unit and an operating unit.
  • a vacuum pump 10 which essentially consists of a pump unit 14 with a pump unit 16 and an operating unit 12.
  • the control unit 12 and the pump unit 14 are arranged spatially separated from one another, for example the control unit in a control center and the pump unit at the production site or place of use.
  • the pump unit 14 has, in addition to the pump unit 16, a control module 18, by means of which the pump unit 16 and the other modules are controlled.
  • the pump unit 14 has a transceiver module 20 which is designed as a radio module.
  • the pump unit 14 also has a plug 24 connected to the control module 18 via control lines. In the event of a failure of the radio control, the pump unit 14 can also be controlled and maintained via the plug 24 via an operating device (not shown) connected to a control line.
  • the control unit 12 has a display 32 for displaying control and operating data.
  • the control unit 12 also has a control module 28, by which all modules and units of the control unit 12 are controlled.
  • the control unit 12 has control buttons 30, by means of which corresponding data entries can be made manually.
  • the control unit 12 has a transceiver module 22, which is designed as a radio module and operates at the same frequency as the transceiver module 20 of the pump unit 14.
  • the two transceiver modules 20, 22 operate according to the BlueTooth or the wireless LAN IEEE 802.11 standard or another standard.
  • control unit 12 has a radio telephone module 34, which is also connected to the control module 28.
  • the radio telephone module 34 works according to the GSM standard, but can also work according to HDCSD, GPRS, UMTS or another radio telephone standard.
  • the pump unit 14 has a location determination module 26 that continuously or on request the location of the module 26 and thus the location of the pump unit 14 to the Control module 18 reports.
  • the location determination module 26 is designed as a GPS receiver, but can also determine the location in other ways.
  • the two transmit / receive modules 20, 22 wirelessly control and monitor the pump unit 14 by the control unit 12.
  • Operating data determined in the pump unit 14 are sent to the control unit 12 via the control module 18 and the transceiver module 20, and corresponding control or request signals are sent from the control module 28 of the control unit 12 to the pump unit 14 via the transceiver module 22 ,
  • the radio telephone module 34 can be called from a maintenance center (not shown) in order to receive or send corresponding maintenance and control data from the operating unit 12 or to the operating unit 12, which may transmit these to the pump unit 14.
  • the wireless connection between the control unit 12 and the pump unit 14 is continuous in both directions, i.e. checked in a maximum of a few seconds. This also takes place when no control or operating data are exchanged between the pump unit 14 and the operating unit 12.
  • the operating unit 12 has in its control module 28 a monitoring module 44 which is connected to the transmit / receive module 22 of the operating unit 12.
  • the pump unit 14 in turn also has a monitoring module 42 and a pump controller 40 in its control module.
  • the monitoring module 42 of the pump unit 14 regularly initiates the transmit / receive module 22 of the pump unit 14 would take a few seconds at most to send out a presence signal.
  • This presence signal is received by the transmit / receive module 22 of the operating unit 12 and transmitted to the monitoring module 44.
  • the monitoring module 44 evaluates the received presence signal and causes the transceiver module 22 to send a control signal.
  • This control signal is received by the transmit / receive module 22 of the pump unit and transferred to the monitoring module 42 for evaluation.
  • the control signal is evaluated in the monitoring module 42. If the control signal has arrived within a defined time window, a new presence signal is issued.
  • the monitoring module 42 sends a corresponding signal to the pump controller 40, which immediately brings the pump unit 16 into a safety operating state, i.e. as a rule, the pump unit 16 lowers to a low speed or switches off completely.
  • the continuous checking of the wireless connection between the operating unit 12 and the pump unit 14 in both directions ensures that in the event of malfunctions in the transmission, a malfunction of the pump unit is prevented by immediately bringing the pump unit into the safety operating state.
  • vacuum pumps this is particularly useful because vacuum pumps are generally used in sensitive processes, for example in the production of vacuum in chip production, in the evacuation of picture tubes or in other production processes and experiments taking place in a vacuum.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à vide (10) comprenant une unité de pompage (14) et une unité de commande (12) qui est reliée à l'unité de pompage (14) à des fins de commande et est spatialement éloignée de ladite unité de pompage (14). Cette unité de pompage (14) et l'unité de commande (12) comprennent respectivement un module émetteur-récepteur (20, 22) conçu pour une émission et une réception bidirectionnelles sans fil de données de commande et de fonctionnement. L'unité de pompage (14) et l'unité de commande (12) sont exclusivement reliées l'une à l'autre sans fil.
EP03746827A 2002-04-20 2003-04-15 Pompe a vide Expired - Lifetime EP1497558B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE20206267U DE20206267U1 (de) 2002-04-20 2002-04-20 Vakuumpumpe
DE20206267U 2002-04-20
PCT/EP2003/003891 WO2003089791A1 (fr) 2002-04-20 2003-04-15 Pompe a vide

Publications (2)

Publication Number Publication Date
EP1497558A1 true EP1497558A1 (fr) 2005-01-19
EP1497558B1 EP1497558B1 (fr) 2011-06-15

Family

ID=27798392

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03746827A Expired - Lifetime EP1497558B1 (fr) 2002-04-20 2003-04-15 Pompe a vide

Country Status (7)

Country Link
US (1) US7544046B2 (fr)
EP (1) EP1497558B1 (fr)
JP (1) JP4478462B2 (fr)
AU (1) AU2003226808A1 (fr)
DE (1) DE20206267U1 (fr)
TW (1) TWI311609B (fr)
WO (1) WO2003089791A1 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1577559B2 (fr) * 2004-03-15 2016-11-16 Agilent Technologies, Inc. Dispositif de pompage à vide
DE102004047853A1 (de) * 2004-10-01 2006-04-20 Festo Ag & Co. Steuereinrichtung für wenigstens ein Saugelement
DE102005041500A1 (de) * 2005-09-01 2007-03-08 Leybold Vacuum Gmbh Vakuumpumpe
DE102005047385B4 (de) * 2005-09-28 2008-04-03 J. Schmalz Gmbh Unterdrucksystem
DE102006034478A1 (de) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
DE102006045024A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät
DE102007016385A1 (de) * 2007-04-03 2008-10-09 Knf Neuberger Gmbh Pumpstand
US8686733B2 (en) * 2007-12-19 2014-04-01 Brooks Automation, Inc. Ionization gauge having electron multiplier cold emission source
JP5318890B2 (ja) 2008-01-22 2013-10-16 ブルックス オートメーション インコーポレイテッド クライオポンプのネットワーク
DE102012104214A1 (de) * 2012-05-15 2013-11-21 Xylem Ip Holdings Llc Pumpaggregat, Pumpaggregat-Konfigurationssystem und Verfahren
EP2818718B1 (fr) 2013-06-24 2017-11-15 Vacuubrand Gmbh + Co Kg Support de pompe à vide avec unité de commande sans fil
DE102014209157A1 (de) * 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zur Steuerung eines Pumpensystems sowie Pumpensystem
DE102014209155A1 (de) * 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zum Betrieb eines Pumpensystems sowie Pumpensystem
WO2016086986A1 (fr) * 2014-12-03 2016-06-09 Grundfos Holding A/S Ensemble convertisseur électronique à des fins de montage en rattrapage sur une partie externe d'un boîtier d'une unité de pompage
US10711788B2 (en) 2015-12-17 2020-07-14 Wayne/Scott Fetzer Company Integrated sump pump controller with status notifications
CN109074056B (zh) * 2016-04-15 2022-03-18 贝利莫控股公司 用于在hvac系统的设备上进行紧固的控制适配器
USD893552S1 (en) 2017-06-21 2020-08-18 Wayne/Scott Fetzer Company Pump components
USD890211S1 (en) 2018-01-11 2020-07-14 Wayne/Scott Fetzer Company Pump components
US11780664B2 (en) * 2019-08-14 2023-10-10 Steven D. Cabouli Wireless controlled locking jar with integrated vacuum pump

Family Cites Families (10)

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US5491831A (en) * 1993-05-10 1996-02-13 Motorola Cellular motor control network
DE9400955U1 (de) 1994-01-21 1994-03-03 Grundfos A/S, Bjerringbro Pumpenaggregat
DE19605132C2 (de) 1996-02-13 1998-02-05 Kostal Leopold Gmbh & Co Kg Verfahren zum Kommunikationsaufbau zwischen einer Fernwirkeinrichtung und zugeordneten Aggregaten
US5772403A (en) * 1996-03-27 1998-06-30 Butterworth Jetting Systems, Inc. Programmable pump monitoring and shutdown system
KR100321964B1 (ko) * 1998-01-05 2002-02-02 인터내셔널 렉터파이어 코퍼레이션 전집적 안정기 집적회로
DE19826169A1 (de) * 1998-06-13 1999-12-16 Kaeser Kompressoren Gmbh Elektronische Steuerung für Anlagen der Druckluft- und Vakuumerzeugung
US6533168B1 (en) * 1999-05-27 2003-03-18 Peter N. Ching Method and apparatus for computer-readable purchase receipts using multi-dimensional bar codes
US6211632B1 (en) 1999-09-08 2001-04-03 Rhine Electronic Co., Ltd. Direction control device for a ceiling fan
DE29922736U1 (de) * 1999-12-24 2001-05-03 B. Braun Melsungen Ag, 34212 Melsungen Infusionsvorrichtung mit mehreren Infusionspumpen
DE10018866A1 (de) * 2000-04-14 2001-10-25 Grundfos As Pumpenaggregat

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See references of WO03089791A1 *

Also Published As

Publication number Publication date
JP2005523401A (ja) 2005-08-04
EP1497558B1 (fr) 2011-06-15
WO2003089791A1 (fr) 2003-10-30
TWI311609B (en) 2009-07-01
TW200307786A (en) 2003-12-16
US20050129535A1 (en) 2005-06-16
DE20206267U1 (de) 2003-08-28
WO2003089791A8 (fr) 2004-04-01
JP4478462B2 (ja) 2010-06-09
AU2003226808A1 (en) 2003-11-03
US7544046B2 (en) 2009-06-09

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