EP1400778A3 - Positionsmesseinrichtung - Google Patents
Positionsmesseinrichtung Download PDFInfo
- Publication number
- EP1400778A3 EP1400778A3 EP03017023A EP03017023A EP1400778A3 EP 1400778 A3 EP1400778 A3 EP 1400778A3 EP 03017023 A EP03017023 A EP 03017023A EP 03017023 A EP03017023 A EP 03017023A EP 1400778 A3 EP1400778 A3 EP 1400778A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- graduation
- measuring device
- position measuring
- evaluation unit
- reference mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011156 evaluation Methods 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10244234 | 2002-09-23 | ||
DE10244234A DE10244234A1 (de) | 2002-09-23 | 2002-09-23 | Positionsmesseinrichtung |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1400778A2 EP1400778A2 (de) | 2004-03-24 |
EP1400778A3 true EP1400778A3 (de) | 2007-08-22 |
EP1400778B1 EP1400778B1 (de) | 2014-03-05 |
Family
ID=31896314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03017023.7A Expired - Lifetime EP1400778B1 (de) | 2002-09-23 | 2003-07-26 | Positionsmesseinrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US7164120B2 (de) |
EP (1) | EP1400778B1 (de) |
JP (1) | JP4402922B2 (de) |
CN (1) | CN1281927C (de) |
DE (1) | DE10244234A1 (de) |
ES (1) | ES2452592T3 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10244547B4 (de) * | 2002-09-25 | 2010-11-11 | Dr. Johannes Heidenhain Gmbh | Verfahren und Positionsmesseinrichtung zur Bestimmung einer absoluten Position |
DE102006007184A1 (de) | 2006-02-15 | 2007-08-16 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP4953653B2 (ja) * | 2006-02-15 | 2012-06-13 | 株式会社ミツトヨ | 光電式エンコーダ |
US20070241269A1 (en) * | 2006-04-14 | 2007-10-18 | Saidan Saiful B | Optical encoders having improved resolution |
DE102007024593A1 (de) | 2007-05-25 | 2008-11-27 | Dr. Johannes Heidenhain Gmbh | Maßstab für eine Positionsmesseinrichtung und Positionsmesseinrichtung |
KR101496654B1 (ko) | 2007-06-27 | 2015-02-27 | 브룩스 오토메이션 인코퍼레이티드 | 리프트 능력 및 감소된 코깅 특성들을 가지는 전동기 고정자 |
WO2009003187A1 (en) * | 2007-06-27 | 2008-12-31 | Brooks Automation, Inc. | Sensor for position and gap measurement |
US8823294B2 (en) * | 2007-06-27 | 2014-09-02 | Brooks Automation, Inc. | Commutation of an electromagnetic propulsion and guidance system |
US7834618B2 (en) | 2007-06-27 | 2010-11-16 | Brooks Automation, Inc. | Position sensor system |
US8283813B2 (en) | 2007-06-27 | 2012-10-09 | Brooks Automation, Inc. | Robot drive with magnetic spindle bearings |
US9752615B2 (en) | 2007-06-27 | 2017-09-05 | Brooks Automation, Inc. | Reduced-complexity self-bearing brushless DC motor |
JP5663304B2 (ja) | 2007-06-27 | 2015-02-04 | ブルックス オートメーション インコーポレイテッド | 多次元位置センサ |
DE102007031976A1 (de) * | 2007-07-10 | 2009-01-15 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
KR20100056468A (ko) | 2007-07-17 | 2010-05-27 | 브룩스 오토메이션 인코퍼레이티드 | 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치 |
DE102007036542A1 (de) * | 2007-08-02 | 2009-02-05 | Dr. Johannes Heidenhain Gmbh | Positionsmessgerät und Verfahren zur Übertragung einer Bewegungsinformation |
DE102007045362A1 (de) * | 2007-09-22 | 2009-04-02 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102009028859A1 (de) * | 2009-08-25 | 2011-03-03 | Zf Friedrichshafen Ag | Vorrichtung zum Erfassen von zumindest einer Nulllage |
DE102009046773A1 (de) * | 2009-11-17 | 2011-05-19 | Dr. Johannes Heidenhain Gmbh | Abtasteinheit einer Positionsmesseinrichtung |
JP5479255B2 (ja) | 2010-07-20 | 2014-04-23 | キヤノン株式会社 | 光学式エンコーダ |
WO2012022004A1 (de) * | 2010-08-19 | 2012-02-23 | Elesta Relays Gmbh | Positionsmessvorrichtung |
JP5574899B2 (ja) * | 2010-09-24 | 2014-08-20 | キヤノン株式会社 | ロータリーエンコーダ及びこれを備えた光学機器 |
US9651412B2 (en) * | 2011-01-31 | 2017-05-16 | Sage Vision Inc. | Bottle dispenser having a digital volume display |
JP5765968B2 (ja) | 2011-02-28 | 2015-08-19 | キヤノン株式会社 | 光学式エンコーダ |
US20140002642A1 (en) | 2012-06-15 | 2014-01-02 | Elmar SWIEGOT | Absolute position detection |
DE102012212767A1 (de) * | 2012-07-20 | 2014-01-23 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102014209004A1 (de) * | 2014-05-13 | 2015-11-19 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102014010759B4 (de) | 2014-07-17 | 2020-06-04 | Nils Remmers | Verfahren zur Bestimmung einer Position |
EP3021088B1 (de) * | 2014-11-12 | 2018-03-07 | Balluff GmbH | Inkrementales Längenmesssystem und Verfahren zu seinem Betrieb |
CN104515534B (zh) * | 2014-12-17 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | 绝对位置测量方法 |
DE102015224589A1 (de) * | 2015-12-08 | 2017-06-08 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
DE102015122829A1 (de) * | 2015-12-23 | 2017-06-29 | Balluff Gmbh | Absolut messendes Längenmesssystem |
JP6732487B2 (ja) * | 2016-03-17 | 2020-07-29 | 株式会社東京精密 | リニア・スケールを有するエンコーダ及びその原点決定方法 |
DE102017009331A1 (de) | 2016-10-21 | 2018-04-26 | Sew-Eurodrive Gmbh & Co Kg | System mit einer vorzugsweise binären Codierung und einem Mobilteil mit Lesekopf zur Positionsbestimmung |
US9887781B1 (en) * | 2016-10-24 | 2018-02-06 | Tt Electronics Plc | High resolution interpolator for optical encoder |
US10094685B2 (en) * | 2016-12-27 | 2018-10-09 | Mitutoyo Corporation | Displacement encoder |
CN109443402B (zh) * | 2018-12-12 | 2024-04-05 | 珠海格力电器股份有限公司 | 一种码盘及编码器 |
CN112683163B (zh) * | 2020-12-03 | 2022-06-28 | 中国科学院光电技术研究所 | 一种适用于视觉测量相机的绝对位姿测量精度评估方法 |
DE102021130751A1 (de) | 2021-11-24 | 2023-05-25 | ASMPT GmbH & Co. KG | Fertigungsvorrichtung mit segmentiertem Encoderstreifen |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5568048A (en) * | 1994-12-14 | 1996-10-22 | General Motors Corporation | Three sensor rotational position and displacement detection apparatus with common mode noise rejection |
US6140636A (en) * | 1998-03-23 | 2000-10-31 | Hewlett-Packard Company | Single track encoder for providing absolute position information |
EP1180665A2 (de) * | 2000-08-11 | 2002-02-20 | Takata-Petri AG | Lenkwinkelsensor für Kraftfahrzeuge |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3035012C2 (de) * | 1980-09-17 | 1982-08-12 | Fa. Carl Zeiss, 7920 Heidenheim | Einrichtung zur Winkelmessung |
JPS5829093A (ja) * | 1981-08-13 | 1983-02-21 | 株式会社トプコン | アブソリユ−トエンコ−ダ |
US4691101A (en) * | 1985-06-19 | 1987-09-01 | Hewlett-Packard Company | Optical positional encoder comprising immediately adjacent detectors |
JP2754422B2 (ja) | 1990-07-18 | 1998-05-20 | 株式会社ニコン | アブソリュート・エンコーダ |
US5260568A (en) * | 1990-07-18 | 1993-11-09 | Okuma Corporation | Absolute position detector with diffraction grating windows and spot position detection |
JPH10132612A (ja) * | 1996-10-28 | 1998-05-22 | Mitsutoyo Corp | 光学式変位検出装置 |
AT410485B (de) * | 1997-07-30 | 2003-05-26 | Rsf Elektronik Gmbh | Positionsmesseinrichtung |
DE19830925A1 (de) * | 1997-08-07 | 1999-02-11 | Heidenhain Gmbh Dr Johannes | Abtasteinheit für eine optische Positionsmeßeinrichtung |
DE19754595B4 (de) * | 1997-12-10 | 2011-06-01 | Dr. Johannes Heidenhain Gmbh | Lichtelektrische Positionsmeßeinrichtung |
JPH11258362A (ja) * | 1998-03-16 | 1999-09-24 | Seiko Epson Corp | 情報処理装置 |
US6355927B1 (en) * | 1999-08-20 | 2002-03-12 | Agilent Technologies, Inc. | Interpolation methods and circuits for increasing the resolution of optical encoders |
US6590201B2 (en) * | 1999-12-22 | 2003-07-08 | Rohm Co., Ltd. | Optical encoder incorporating linear light controlling member |
DE19962278A1 (de) * | 1999-12-23 | 2001-08-02 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
JP2001194185A (ja) * | 2000-01-14 | 2001-07-19 | Fuji Electric Co Ltd | 光学式絶対値エンコーダ |
DE10132521A1 (de) * | 2001-07-09 | 2003-01-30 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung |
US6867412B2 (en) * | 2002-11-12 | 2005-03-15 | Mitutoyo Corporation | Scale structures and methods usable in an absolute position transducer |
US7026604B2 (en) * | 2003-07-09 | 2006-04-11 | Chong Chee Keong | Vernier-scaled high-resolution encoder |
US6816091B1 (en) * | 2003-12-18 | 2004-11-09 | Agilent Technologies, Inc. | Interpolator |
-
2002
- 2002-09-23 DE DE10244234A patent/DE10244234A1/de not_active Withdrawn
-
2003
- 2003-07-26 ES ES03017023.7T patent/ES2452592T3/es not_active Expired - Lifetime
- 2003-07-26 EP EP03017023.7A patent/EP1400778B1/de not_active Expired - Lifetime
- 2003-09-04 JP JP2003312140A patent/JP4402922B2/ja not_active Expired - Lifetime
- 2003-09-22 CN CNB031587410A patent/CN1281927C/zh not_active Expired - Fee Related
- 2003-09-23 US US10/669,149 patent/US7164120B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5568048A (en) * | 1994-12-14 | 1996-10-22 | General Motors Corporation | Three sensor rotational position and displacement detection apparatus with common mode noise rejection |
US6140636A (en) * | 1998-03-23 | 2000-10-31 | Hewlett-Packard Company | Single track encoder for providing absolute position information |
EP1180665A2 (de) * | 2000-08-11 | 2002-02-20 | Takata-Petri AG | Lenkwinkelsensor für Kraftfahrzeuge |
Also Published As
Publication number | Publication date |
---|---|
CN1493852A (zh) | 2004-05-05 |
EP1400778B1 (de) | 2014-03-05 |
US7164120B2 (en) | 2007-01-16 |
DE10244234A1 (de) | 2004-03-25 |
EP1400778A2 (de) | 2004-03-24 |
US20040129870A1 (en) | 2004-07-08 |
JP2004132972A (ja) | 2004-04-30 |
ES2452592T3 (es) | 2014-04-02 |
JP4402922B2 (ja) | 2010-01-20 |
CN1281927C (zh) | 2006-10-25 |
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