EP1398829A3 - Substrat und Herstellungsverfahren dafür - Google Patents

Substrat und Herstellungsverfahren dafür Download PDF

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Publication number
EP1398829A3
EP1398829A3 EP03020005A EP03020005A EP1398829A3 EP 1398829 A3 EP1398829 A3 EP 1398829A3 EP 03020005 A EP03020005 A EP 03020005A EP 03020005 A EP03020005 A EP 03020005A EP 1398829 A3 EP1398829 A3 EP 1398829A3
Authority
EP
European Patent Office
Prior art keywords
substrate
layer
manufacturing
insulating layer
partial insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03020005A
Other languages
English (en)
French (fr)
Other versions
EP1398829A2 (de
Inventor
Kiyofumi Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP1398829A2 publication Critical patent/EP1398829A2/de
Publication of EP1398829A3 publication Critical patent/EP1398829A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/907—Continuous processing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
EP03020005A 2002-09-10 2003-09-03 Substrat und Herstellungsverfahren dafür Withdrawn EP1398829A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002264188A JP2004103855A (ja) 2002-09-10 2002-09-10 基板及びその製造方法
JP2002264188 2002-09-10

Publications (2)

Publication Number Publication Date
EP1398829A2 EP1398829A2 (de) 2004-03-17
EP1398829A3 true EP1398829A3 (de) 2005-01-12

Family

ID=31884749

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03020005A Withdrawn EP1398829A3 (de) 2002-09-10 2003-09-03 Substrat und Herstellungsverfahren dafür

Country Status (4)

Country Link
US (1) US6946354B2 (de)
EP (1) EP1398829A3 (de)
JP (1) JP2004103855A (de)
TW (1) TWI291711B (de)

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WO2002015244A2 (en) * 2000-08-16 2002-02-21 Massachusetts Institute Of Technology Process for producing semiconductor article using graded expitaxial growth
US6940089B2 (en) * 2001-04-04 2005-09-06 Massachusetts Institute Of Technology Semiconductor device structure
WO2003079415A2 (en) * 2002-03-14 2003-09-25 Amberwave Systems Corporation Methods for fabricating strained layers on semiconductor substrates
US6995430B2 (en) * 2002-06-07 2006-02-07 Amberwave Systems Corporation Strained-semiconductor-on-insulator device structures
US7335545B2 (en) * 2002-06-07 2008-02-26 Amberwave Systems Corporation Control of strain in device layers by prevention of relaxation
US7074623B2 (en) * 2002-06-07 2006-07-11 Amberwave Systems Corporation Methods of forming strained-semiconductor-on-insulator finFET device structures
US7307273B2 (en) * 2002-06-07 2007-12-11 Amberwave Systems Corporation Control of strain in device layers by selective relaxation
US20030227057A1 (en) * 2002-06-07 2003-12-11 Lochtefeld Anthony J. Strained-semiconductor-on-insulator device structures
EP1396883A3 (de) 2002-09-04 2005-11-30 Canon Kabushiki Kaisha Substrat und Herstellungsverfahren dafür
JP2004103600A (ja) * 2002-09-04 2004-04-02 Canon Inc 基板及びその製造方法
JP2004103946A (ja) * 2002-09-11 2004-04-02 Canon Inc 基板及びその製造方法
US6982210B2 (en) 2003-07-10 2006-01-03 S.O.I.Tec Silicon On Insulator Technologies S.A. Method for manufacturing a multilayer semiconductor structure that includes an irregular layer
JP4701085B2 (ja) * 2003-12-16 2011-06-15 インターナショナル・ビジネス・マシーンズ・コーポレーション シリコン・オン・インシュレータ・ウェハを製造するための方法
FR2876220B1 (fr) 2004-10-06 2007-09-28 Commissariat Energie Atomique Procede d'elaboration de structures empilees mixtes, a zones isolantes diverses et/ou zones de conduction electrique verticale localisees.
US20060113603A1 (en) * 2004-12-01 2006-06-01 Amberwave Systems Corporation Hybrid semiconductor-on-insulator structures and related methods
US7393733B2 (en) 2004-12-01 2008-07-01 Amberwave Systems Corporation Methods of forming hybrid fin field-effect transistor structures
JP2006278632A (ja) * 2005-03-29 2006-10-12 Seiko Epson Corp 半導体基板、半導体装置、半導体基板の製造方法および半導体装置の製造方法
DE102005052357A1 (de) 2005-09-01 2007-03-15 Osram Opto Semiconductors Gmbh Verfahren zum lateralen Zertrennen eines Halbleiterwafers und optoelektronisches Bauelement
FR2897982B1 (fr) 2006-02-27 2008-07-11 Tracit Technologies Sa Procede de fabrication des structures de type partiellement soi, comportant des zones reliant une couche superficielle et un substrat
FR2906078B1 (fr) * 2006-09-19 2009-02-13 Commissariat Energie Atomique Procede de fabrication d'une structure micro-technologique mixte et une structure ainsi obtenue
JP5496540B2 (ja) * 2008-04-24 2014-05-21 株式会社半導体エネルギー研究所 半導体基板の作製方法
US7947523B2 (en) * 2008-04-25 2011-05-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing photoelectric conversion device
FR2942674B1 (fr) * 2009-02-27 2011-12-16 Commissariat Energie Atomique Procede d'elaboration d'un substrat hybride par recristallisation partielle d'une couche mixte
SG10201503877UA (en) 2009-10-29 2015-06-29 Semiconductor Energy Lab Semiconductor device
WO2012002186A1 (en) 2010-07-02 2012-01-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
GB2485346A (en) 2010-11-08 2012-05-16 Nanogan Ltd High quality devices growth on pixelated patent templates
US10011920B2 (en) * 2011-02-23 2018-07-03 International Business Machines Corporation Low-temperature selective epitaxial growth of silicon for device integration
US9773787B2 (en) 2015-11-03 2017-09-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, memory device, electronic device, or method for driving the semiconductor device
KR102204732B1 (ko) * 2019-11-11 2021-01-19 (주)더숨 Soi 기판 제조 방법

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US5298449A (en) * 1992-03-06 1994-03-29 Nec Corporation Semiconductor substrate having a silicon-on-insulator structure and method of fabricating the same
FR2774511A1 (fr) * 1998-01-30 1999-08-06 Commissariat Energie Atomique Substrat compliant en particulier pour un depot par hetero-epitaxie
US20010025991A1 (en) * 2000-03-30 2001-10-04 Samsung Electronics Co., Ltd. Silicon-on-insulator (SOI) substrate, method for fabricating SOI substrate and SOI mosfet using the SOI substrate

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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963505A (en) * 1987-10-27 1990-10-16 Nippondenso Co., Ltd. Semiconductor device and method of manufacturing same
US5298449A (en) * 1992-03-06 1994-03-29 Nec Corporation Semiconductor substrate having a silicon-on-insulator structure and method of fabricating the same
FR2774511A1 (fr) * 1998-01-30 1999-08-06 Commissariat Energie Atomique Substrat compliant en particulier pour un depot par hetero-epitaxie
US20010025991A1 (en) * 2000-03-30 2001-10-04 Samsung Electronics Co., Ltd. Silicon-on-insulator (SOI) substrate, method for fabricating SOI substrate and SOI mosfet using the SOI substrate

Also Published As

Publication number Publication date
TWI291711B (en) 2007-12-21
EP1398829A2 (de) 2004-03-17
US6946354B2 (en) 2005-09-20
TW200405409A (en) 2004-04-01
JP2004103855A (ja) 2004-04-02
US20040048454A1 (en) 2004-03-11

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