EP1394123A1 - Procédé de moulage de lentilles en verre utilisant un moule traité par implantation ionique - Google Patents

Procédé de moulage de lentilles en verre utilisant un moule traité par implantation ionique Download PDF

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EP1394123A1
EP1394123A1 EP03077597A EP03077597A EP1394123A1 EP 1394123 A1 EP1394123 A1 EP 1394123A1 EP 03077597 A EP03077597 A EP 03077597A EP 03077597 A EP03077597 A EP 03077597A EP 1394123 A1 EP1394123 A1 EP 1394123A1
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Prior art keywords
molding
mold
glass
preform
recited
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English (en)
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Mary K. Eastman Kodak Company Winters
Carlos F. Eastman Kodak Company Alonzo
Paul O. Eastman Kodak Company McLaughlin
John C. Eastman Kodak Company Pulver
Anna L. Eastman Kodak Company Hrycin
Donald A. Eastman Kodak Company Stephenson
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Eastman Kodak Co
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Eastman Kodak Co
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/10—Die base materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/10—Die base materials
    • C03B2215/11—Metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/10—Die base materials
    • C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/16—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/20—Oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/38—Mixed or graded material layers or zones
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00939—Uses not provided for elsewhere in C04B2111/00 for the fabrication of moulds or cores

Definitions

  • the present invention relates generally to the compression molding of glass lenses and, more particularly, to methods and apparatus for molding environmentally friendly glass (eco-glass) lenses using metal ion implanted mold tools.
  • Suitable materials for the construction of the mold tools included glasslike or vitreous carbon, silicon carbide, silicon nitride, tungsten carbide, a mixture of silicon carbide and carbon, and glasses such as YAS-6.
  • a glass preform is inserted into a mold cavity with the mold tools residing in an open position.
  • the mold tools reside within a chamber that is maintained in a non-oxidizing atmosphere during the molding process.
  • the preform and the mold tools are then heat softened to bring the viscosity of the preform into the range from 10 10 P to 10 6 P.
  • the mold tools are then moved to a closed position thereby pressing the preform to conform to the shape of the mold cavity.
  • the mold and preform are then allowed to cool below the glass transition temperature of the glass.
  • the pressure on the mold tools is then relieved and the temperature is lowered further so that the finished molded lens can be removed from the mold tools.
  • a glass preform with a precision polished surface must be pressed between the upper and lower mold halves (or tools) of a mold. If, for example, a double positive lens (convex-convex lens) is to be molded, a spherical or oblate spheroid glass preform of the proper volume is placed between the mold halves. The preform is heated until the glass has a viscosity in the range of 10 6 -10 10 Poise, and is compressed until the mold is closed. Then, preferably, mold halves and the preform are cooled to a temperature below the annealing point and the preform is removed from the mold cavity.
  • FIG. 1 Such an arrangement is depicted in Figure 1.
  • the upper and lower mold halves 10, 12 compress a spherical glass preform 14 there between.
  • the radius of the spherical glass preform 14 should be less than the radius of both of the concave mold surfaces 16, 18.
  • the glass preform 14 As the glass preform 14 is compressed, the glass flows generally radially outwardly from the center of the mold cavity thereby expelling any gas from the mold cavity. This results in the production of a double convex lens free from distortion due to trapped gas.
  • Such molded lenses typically have accurate and repeatable surface replication relative to the mold.
  • FIGs 2 through 4 depict prior art arrangements for molding plano-convex, concave-convex, and concave-concave lens elements, respectively.
  • the upper mold half 20 includes a plano mold surface 22 and the lower mold half 24 includes a concave mold surface 26.
  • a spherical preform 28 is compression molded to produce a plano-convex optical element.
  • the upper mold half 30 includes a convex mold surface 32 and the lower mold half 34 includes a concave mold surface 36.
  • a plano-convex preform 38 to produce a concave-convex optical element.
  • the radius of the convex surface of preform 38 should be less than the radius of concave mold surface 36. This ensures first contact between concave mold surface 36 and preform 38 substantially at the cylindrical axis or centerline of the mold halves 30,34 thereby causing the preform 38 to flow generally radially outwardly to prevent the trapping of gases.
  • the first contact between convex mold surface 32 and the plano surface of preform 38 is substantially at the cylindrical axis or centerline of the mold halves 30, 34 thereby also causing the preform 38 to flow generally radially outwardly to prevent the trapping of gases.
  • FIG 4 there is depicted another prior art arrangement wherein the upper mold half 42 includes a convex mold surface 44 and the lower mold half 46 includes a convex mold surface 48.
  • a plano-plano preform 50 to produce a double concave optical element.
  • the plano-plano preform 50 ensures first contact between the mold surfaces 44, 48 and preform 50 substantially at the cylindrical axis or centerline of the mold halves 42, 46 thereby causing the preform to flow generally radially outwardly to prevent the trapping of gases. Examples of such practices are cited in U.S. Patent Nos. 5,662,951 and 4,797,144.
  • oxide glasses Although a wide variety of glasses have been used in precision glass molding, there remains a fundamental problem with the molding of oxide glasses. Some of the oxide glasses used for optical elements contain significant amounts of toxic heavy metals, such as lead. These glasses are fairly well behaved in the process and have long-been preferred for their high index of refraction and moldability among other factors. However, national and international regulations are being developed to limit or ban the use of products containing toxic substances such as lead, even in the form of lead oxide. For example, the Directive of the European Parliament and of the Council on Waste Electrical and Electronic Equipment (WEEE, Brussels 6/13/2002), does not allow the use of certain hazardous materials (including lead) in electronic devices that may be land filled at the end of their useful life.
  • WEEE European Parliament and of the Council on Waste Electrical and Electronic Equipment
  • Ion implantation technology is well known and has been used extensively in the microelectronics industry. Ion implantation was applied in the fabrication of microelectronics sometime in the mid-1960s when semiconductor companies realized that P-N junctions and buried layers were possible using ion implantation. Numerous surveys reported that ion beams were used in significant numbers in the industrial sector by the 1970s. Early applications of ion beams were directed to the removal of material (now called etching) and deposition using non-reactive beams.
  • Ion implantation of metal surfaces could improve their wear, friction and corrosion properties.
  • Ion implantation of specific tools is now preferred over other types of coating technologies because the ion implanted layer does not delaminate, does not require high processing temperatures to produce, and does not add more material on the surface (which would change the size of critical components).
  • Ion implantation is now used regularly to implant specific tools and equipment (e.g. score dies for aluminum can pop-tops and artificial knee and hip joints).
  • knock-in implantation is a method for production of ultra-shallow profiles in semiconductors.
  • implantation is performed through an oxide to thereby knock oxygen atoms into a substrate, typically silicon crystals.
  • the oxygen atoms that recoil build a layer in the crystalline silicon that is occupied by oxygen within a few lattice distances.
  • Knock-in effect is introduced usually in the 100 ⁇ range.
  • Ion implantation technology has not been used for the purpose of modifying the surface of mold tool surfaces to be used in the molding glass optical elements such as lenses. Further, the prior art fails to teach the use of a temporary solid thin film layer, like hard amorphous carbon, to partially attenuate the kinetic energy of the ion implanting species prior to impact and thereby control the depth of implantation.
  • Yet another feature of the present invention is to provide a method for molding optical elements from eco-glasses such as titania at high temperatures without generating adverse surface chemistry effects in the molded element.
  • Still another feature of the present invention is to provide a method for fabricating molding tools which can be used to mold optical elements from eco-glasses such as titania at high temperatures without generating adverse surface chemistry effects in the molded element.
  • the implanted molding tool can be used to mold preforms of environmentally friendly glasses such as titania based glasses to form optical elements.
  • optical elements include lenses such as, for example, plano-convex lenses, plano-concave lenses, convex-convex lenses, concave-convex lenses, concave-concave lenses, and lenses with aspheric, anamorphic, and diffractive features.
  • optical elements as may be molded with the method and tools of the present invention also include gratings and diffractive phase plates (Damman gratings).
  • the first and second mold halves or tools with the metal ion implanted molding surfaces and the glass preform are heated to at least the glass transition temperature of the glass preform.
  • the glass preform is then pressed between the first and second mold halves to thereby form an optical glass element, optical element being a positive of the predetermined negative optical surface features of the mold halves.
  • the optical element is subsequently cooled to below the glass transition temperature thereof and removed from the first and second mold halves.
  • Figure 1 is a side elevational view of a prior art molding apparatus for compression molding a convex-convex glass lens from a spherical or ball preform.
  • Figure 2 is a side elevational view of a prior art molding apparatus for compression molding a plano-convex glass lens from a spherical or ball preform.
  • Figure 3 is a side elevational view of a prior art molding apparatus for compression molding a concave-convex glass lens from a plano-positive preform.
  • Figure 4 is a side elevational view of a prior art molding apparatus for compression molding a concave-concave glass lens from a plano preform.
  • Figure 5 is a representation of a top plan view of an exemplary plano-plano molded lens.
  • Figure 6 is a side elevational view of the exemplary plano-plano molded lens of Figure 5.
  • Figures 7, 8 and 9 all depict top plan views of exemplary plano-plano molded lenses all molded from an eco-glass preform using the prior art method of molding and showing the types of surface defects generated thereby.
  • Figure 10 is a phase diagram for a SiO 2 ⁇ TiO 2 system.
  • Figure 11 is a cross-sectional schematic of a molding apparatus (in an open position) used to practice the method of the present invention.
  • Figure 12 is a cross-sectional schematic of the molding apparatus of Figure 11 in a closed or molding position.
  • Figure 13 is a partially sectioned, side elevational view of a molding tool of the present invention.
  • Figure 14 is an enlarged view of the region within circle A of Figure 13.
  • Figure 15 is a simplified Ellingham diagram describing the thermodynamic behavior of a metal with respect to the partial pressure of oxygen present at a given temperature.
  • Figure 16 is a basic schematic of an ion implantation system.
  • Figure 17 is a graph plotting implantation titanium ion implantation depth ( ⁇ ) versus titanium concentration (ions/nm 3 ) showing the effect of implanting ions into a molding surface with and without an attenuating layer present.
  • the attenuating layer in each case was an amorphous hard carbon.
  • Figure 18 is a graph of a typical ion concentration profile with respect to depth, made on any given plano mold.
  • Figures 19 is a partially sectioned, side elevational view of a molding tool of the present invention after the mold surface has been coated with an attenuating layer of carbon but prior to ion implantation.
  • Figure 20 is an enlarged view of the region within circle B of Figure 19.
  • Figure 21 is a partially sectioned, side elevational view the molding tool of Figure 19 after the mold has been ion implanted with titanium ions through the attenuating layer of carbon.
  • Figure 22 is an enlarged view of the region within circle C of Figure 21.
  • FIG. 5 and 6 there is presented a representation of a top plan view and a side elevational view of an exemplary plano-plano molded lens 60 having an optical surface 62 that is free of defects.
  • Figures 7, 8 and 9 all depict exemplary plano-plano molded lenses 64, 66, and 68 all molded from an eco-glass such as STIH-53 (Ohara Corporation, Collinso Santa Margarita, CA) using the prior art method of molding.
  • Each lens 64, 66, 68 molded from an eco-glass has a respective optical surface 70, 72, 74 that has defects therein which appear as bubbles 76.
  • FIG. 11 there is shown a cross-sectional schematic of an apparatus 80 used to practice the method of the present invention.
  • the apparatus 80 of the present invention includes an upper mold fixture 82 and the lower mold fixture 84.
  • the upper mold fixture 82 has mounted therein an upper mold half or tool 86.
  • Upper mold tool 86 is depicted as having a molding surface 88 that is plano.
  • molding surface 88 may have other surface figures or shapes such as concave (see Figure 1) or convex (see Figure 4).
  • Lower mold fixture 84 has mounted therein a lower mold half or tool 90.
  • Lower mold tool 90 is depicted as having an exemplary molding surface 92 that is plano.
  • molding surface 92 like molding surface 88 may also have other surface figures or shapes.
  • Both mold surfaces 88, 92 are metal ion implanted.
  • Mounting of upper mold half or tool 86 within upper mold fixture 82 is accomplished with support member 94 residing in bore 96.
  • mounting of lower mold half or tool 90 within lower mold fixture 84 is accomplished with support member 98 residing in bore 100.
  • a mold or lens cavity is formed between upper mold half or tool 86 and lower mold half or tool 90 when upper mold fixture 82 and/or lower mold fixture 84 are moved to a closed or molding position (see Figure 12). This relative movement may be accomplished by moving upper mold fixture 82 toward lower mold fixture 84, or by moving lower mold fixture 84 toward upper mold fixture 82, or by moving both upper mold fixture 82 and lower mold fixture 84 toward each other.
  • a heating apparatus Surrounding upper and lower mold fixtures 82, 84 is a heating apparatus, preferably an induction-heating coil (not shown).
  • a preform 102 such as STIH53 titania glass (Ohara Corporation) is placed on mold surface 92, and through actuation of induction heating coil, the temperature of the upper and lower mold fixtures 82, 84, mold tools 86, 90, and preform 102 is raised to at least the glass transition temperature of the preform 102. Then the perform 102 is pressed between the upper and lower mold fixtures 82, 84 causing the preform 102 to deform and flow generally radially outwardly in the mold cavity. As the preform 102 flows radially outwardly, it substantially fills the mold cavity.
  • upper and lower mold fixtures 82, 84 are not necessarily directly heated by induction. Rather, upper and lower mold fixtures 82, 84 preferably reside in a mold body (not shown) fabricated from a conductive material such as graphite or molybdenum. The mold body is heated by the induction field and the upper and lower mold fixtures 82, 84 are heated indirectly by conduction and radiant heat transfer.
  • mold tool 104 having a concave mold surface 106 is shown in Figure 13.
  • the mold surface 106 (see Figure 14) has a metal ion implanted subsurface layer 108, with a metal such as titanium to a depth ranging from 0 to 200 ⁇ .
  • Mold tool 104 is preferably formed from silicon carbide.
  • mold tool 104 may be fabricated from other materials including glasslike or vitreous carbon, tungsten carbide, refractory metals and their oxides, carbides or nitrides (e.g. W, Mo, Rh, Ir), silicon nitride, glass, such as YAS-6 (MO-SCI Corporation, Rolla, Missouri), fused silica, and a mixture of silicon.
  • Lenses molded from eco-glasses using the method of the present invention are free from surface figure distortion that can be caused by the formation of bubbles at the interface between the mold surfaces and the glass preform during the molding operation.
  • STIH53 titania glasses Ohara Corporation
  • the mold fixtures 82, 84 were brought together compressing each glass preform 102 into a final molded shape.
  • the viscosity of the preform 102 was less than 10 10 P during the compression step.
  • the glass perform 102 was compressed between the mold tools 86, 90, the glass flowed generally radially outwardly and across the surface of the mold tools 86, 90 thereby substantially filling the lens cavity expelling nitrogen therefrom.
  • a force of 75 lbf. was applied to successfully mold optical elements (lenses).
  • the viscosity, molding force, compression rate, lens mold geometry, location of the lens cavities relative to the initial location of the perform, and the sag of the lens mold will affect the propensity for void formation by stagnation, that is, the trapping of gas in the mold cavity.
  • a release coating is applied to the mold surfaces, the preform, or both.
  • the release coating is traditionally some variant of a hard carbon coating.
  • the heater described is an induction-type heater. Heating could also be performed using other types of heaters such as, for example, radiant heaters, resistance heaters, infrared heaters, halogen heaters, etc.
  • mold tools 86, 90, ion implantation species, and release coating are made in relation to the particular eco-glass from which preform 102 is made.
  • the ion species is chosen according to the kinetics and thermodynamics of the mold-glass interface interactions.
  • One key to successful molding is choosing an ion implantation process that prevents the formation of a gaseous substance trapped between the mold-glass interface in the molding operation.
  • an alternate embodiment to the present invention could use a tungsten carbide mold tool implanted with zirconium, hafnium (e. g. Group 4 elements from the Chemical Periodic Table) or other reducing element.
  • Reducing substances or elements are those substances or elements that, under certain environmental conditions, will react with oxygen thereby causing adjacent substances of interest to reduce their oxidation state, in some cases to their neutral or ground state.
  • equation 1 the formation of a compound by means of a solid-gas reaction can be described by equation 1 and can be plotted as shown in Figure 15.
  • ⁇ G ° RT ln( p o 2 ) 1 2
  • ⁇ G o the Gibb's Free Energy of Formation for any substance
  • R is the gas constant
  • T temperature in degrees Kelvin
  • p O2 is the partial pressure of oxygen at equilibrium.
  • Equation 1 an element such as Ti or Zr, which have much larger negative free energies than Si or C, which will allow for the formation of the solid oxides of Ti and Zr rather than CO 2 .
  • Equation 1 there are limitations on the use of Equation 1 and it can only be used as a starting point for the selection of a candidate ion implantation species because equation 1 and the Ellingham diagram are only true when the reactions have reached equilibrium and the elements are pure.
  • the ion species form a solid oxide, soluble in the glass of interest to prevent the formation of a gas.
  • the materials chosen have met the conditions for solid-solution equilibrium at the interface, they must not create disturbances in the other physical and chemical properties of the glass of interest for preform 102.
  • an ion implantation system comprises an ion source 110, which in a preferred embodiment of the present invention would be a titanium source.
  • an ion beam is generated and is accelerated and extracted through an extraction mechanism 112 and then filtered in an ion analyzing mechanism 114 dedicated to filtering the desired mass of the ion beam.
  • the ion beam then passes through a second ion analyzing mechanism 116 that filters for the desired energy of the ion beam.
  • the ion beam finally passes through a scanning station 117 that directs the beam to the substrate 118, which in the case of the present invention is a mold tool surface for molding of glass optical elements.
  • An exemplary ion implantation system that is suitable for use in the practice of the method of the present invention is the Eaton Nova 10-160 High Current Ion Implanter as sold by Eaton Semiconductor of Beverly, MA.
  • the resulting ion implantation profile for a given substrate is typically presented in atoms or ions/cm 3 versus depth in the substrate as seen in Figure 17. These profiles can be estimated by using Equations 2 and 3 to calculate the mean projected range, R p , and the straggle, ⁇ R p .
  • the mean projected range is a measure of the average penetration depth of the ions, and is defined as: where N is the number of ions, and x i is the perpendicular distance from the surface to the end of each ion track.
  • Straggling is a measure of the width of the distribution and is given by:
  • the objective of modeling efforts with regard to ion implantation is to predict the distribution of implanted ions for a given combination of ion species, ion energy and target species. To accomplish this task requires a detailed knowledge of how the ions lose energy during collisions.
  • plano silicon carbide tools were implanted with titanium ions and energy ranging from 85 keV to 175 keV.
  • the samples were implanted with a constant titanium dose of 1x 10 15 ions/cm 3 (10 ions/nm 2 ).
  • ions/cm 3 10 ions/nm 2
  • Annealing experiments were performed and the migration of the peak ion concentration R p with respect to depth was found to be insignificant.
  • Actual measurements of the ion concentration with respect to depth were made on plano mold tools to verify the ion implantation profiles and to assess the effect of using the carbon coating.
  • Figures 19 and 20 show an exemplary mold tool 120 after the mold surface 122 has coated with an attenuating layer 124 of carbon.
  • Figures 21 and 22 show the exemplary mold tool 120 after the mold surface 122 has been ion implanted with titanium ions through the attenuating layer 124 of carbon.
  • the implanted region 126 extends to a depth of 1500 ⁇ , depending on the thickness of the carbon coating 124.
  • the carbon coating 124 is burned off the mold tool 120 yield the structure previously described with reference to Figures 13 and 14.
  • Carbon readily oxidizes or burns forming carbon dioxide when subjected to air at temperatures greater than 300 °C.
  • the remaining mold tool 120 is left with a high titanium ion concentration near the mold surface 122 without any changes in the surface geometry required for molding glass lenses.

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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Physical Vapour Deposition (AREA)
EP03077597A 2002-08-29 2003-08-18 Procédé de moulage de lentilles en verre utilisant un moule traité par implantation ionique Withdrawn EP1394123A1 (fr)

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US230908 2002-08-29
US10/230,908 US20040050108A1 (en) 2002-08-29 2002-08-29 Mechanism to mold glass lenses using an implanted precision glass molding tool

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EP1394123A1 true EP1394123A1 (fr) 2004-03-03

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US (2) US20040050108A1 (fr)
EP (1) EP1394123A1 (fr)
JP (1) JP2004091322A (fr)
KR (1) KR20040020810A (fr)
TW (1) TW200413259A (fr)

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US7013676B2 (en) * 2001-08-10 2006-03-21 Hoya Corporation Press molding apparatus
JP2003063832A (ja) * 2001-08-28 2003-03-05 Fuji Photo Optical Co Ltd 光学素子成形用型
KR101005527B1 (ko) * 2008-08-11 2011-01-04 주식회사 블루아이 열선을 이용한 차량용 디엠비 수신 안테나 장치
WO2011163397A1 (fr) * 2010-06-22 2011-12-29 The Regents Of The University Of California Ouverture de foucault passe-haut micro-usinée pour microscopie électronique
JP6218536B2 (ja) * 2013-09-30 2017-10-25 Hoya株式会社 光学素子およびその製造方法
TWI774854B (zh) * 2017-10-13 2022-08-21 美商康寧公司 用於壓製玻璃或玻璃陶瓷預製件以形成成形板的方法與設備、製造液體透鏡的方法及液體透鏡
EP3953087A1 (fr) * 2019-04-09 2022-02-16 Corning Incorporated Articles façonnés, procédés et appareil de formation de ceux-ci, et lentilles liquides les comprenant

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KR20040020810A (ko) 2004-03-09
JP2004091322A (ja) 2004-03-25
US20050126226A1 (en) 2005-06-16
TW200413259A (en) 2004-08-01

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