EP1368894A1 - Structure de transducteur fonctionnant avec des ondes acoustiques - Google Patents

Structure de transducteur fonctionnant avec des ondes acoustiques

Info

Publication number
EP1368894A1
EP1368894A1 EP02721986A EP02721986A EP1368894A1 EP 1368894 A1 EP1368894 A1 EP 1368894A1 EP 02721986 A EP02721986 A EP 02721986A EP 02721986 A EP02721986 A EP 02721986A EP 1368894 A1 EP1368894 A1 EP 1368894A1
Authority
EP
European Patent Office
Prior art keywords
transducer
structure according
finger
idt
interdigital
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02721986A
Other languages
German (de)
English (en)
Inventor
Thomas Bauer
Martin BÜNNER
Andreas Detlefsen
Dietmar Ritter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Publication of EP1368894A1 publication Critical patent/EP1368894A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14555—Chirped transducers

Definitions

  • the invention relates to a transducer structure working with acoustic waves, in particular for a surface wave filter (SAW or SAW filter) or an S-BAR filter (bulk acoustic wave resonator).
  • a surface wave filter SAW or SAW filter
  • S-BAR filter bulk acoustic wave resonator
  • transducer structures for example SAW resonators
  • SAW resonators are used as impedance elements with acoustic waves.
  • Such a resonator is constructed from metallic electrode structures on the surface of a piezoelectric substrate and has an interdigital transducer with at least two connections, which is generally arranged between two reflectors.
  • Known resonators have interdigital transducers which are characterized by a finger period and finger width which are homogeneous over the entire transducer. Each resonator has a so-called resonance and an anti-resonance frequency. The frequency position and the intensity of resonance and anti-resonance can be influenced by varying the apertures, the number of fingers and the finger period. The frequency spacing between the resonance and anti-resonance frequencies and their shape is retained.
  • the resonators are used as impedance elements and connected to form a ladder-like arrangement.
  • resonators are arranged in a serial and at least one, but preferably a plurality of parallel branches.
  • the resonance frequency of a resonator in the serial branch is set so that it approximately corresponds to the anti-resonance frequency of a resonator in the parallel branch.
  • More complex filters with a plurality of parallel branches and serial resonators arranged in between can be constructed from a plurality of basic elements, each comprising a parallel and a serial resonator.
  • the interaction of the resonances of the individual resonators produces a desired band-pass retention of the filter.
  • the resonance frequencies of the individual resonators and the intensity of the resonances are suitably set.
  • finger periods, number of fingers and apertures of the individual resonators are the known degrees of freedom.
  • An ideal filter has good electrical adaptation, good damping behavior in the stop band and the lowest possible insertion loss in the pass band. It is disadvantageous, however, that the properties mentioned cannot usually be optimized at the same time, so that only a suitable combination of properties can always be obtained, but not an optimal filter in all properties.
  • broadband filters that have a relative bandwidth of more than 2% or with filters that are built on substrates with low electro-acoustic coupling, for example on LiTaC> 3 in conjunction with a small layer thickness or on quartz, optimization only at a non-optimal level Filters with unsatisfactory properties.
  • the object of the present invention is to provide a transducer structure which operates with acoustic waves and which has at least one further degree of freedom in the
  • a transducer structure has one or more between
  • Interdigital transducers arranged on reflectors. These in turn include electrode fingers connected to bus bars, that mesh like a comb.
  • the filter can be a DMS, a TCF or a reactance filter.
  • the reflection at the input or output of the filter can be minimized with a transducer structure with a varying finger period.
  • the standing wave ratio can be reduced in the case of a reactance filter used in the high frequency range.
  • the resonators according to the invention can be used to construct reactance filters which have an improved passband and in particular an improved insertion loss.
  • the finger spacing can be varied in such a way that the concrete values for the finger spacing (finger periods) plotted over the length of the interdigital transducer come to lie on a curve corresponding to a continuous function.
  • the concrete values for the finger spacing at a point x thus correspond to those scanned at point x
  • a quasi-continuous function is preferably selected. Such a function shows no jumps.
  • a further advantageous variation of the finger spacing is obtained if the said distribution of the finger spacing over the length of the transducer follows a function which is symmetrical about an axis perpendicular to the direction of wave propagation, the axis preferably being in the vicinity of the center of the transducer.
  • a function is preferably selected which has a maximum at the mirror axis.
  • a simple variation of the finger spacing over the length of the interdigital transducer follows a linear function in which the finger spacing increases or decreases linearly in one direction.
  • the distribution of the finger distances can be such that the increase takes place from one end to the other end of the interdigital transducer, or that the increase or decrease takes place up to the mirror axis in order to then decrease or increase again.
  • the finger distances are varied by a mean value up to a maximum of +/- 2.5%, so that there is a maximum difference of 5% between two finger distances.
  • interdigital converters according to the invention have maximum differences of 2 to 3%, for example of 3%.
  • Advantageous improvements in reactance filters are already achieved with fewer differences than, for example, strain gauge filters. The latter can take full advantage of the specified range of variation and have a difference of up to 5%.
  • a resonator according to the invention results from an additional variation in the finger widths of the electrode fingers over the length of the interdigital transducer.
  • This variation also preferably follows a continuous function.
  • the finger widths can be varied so that the metallization ratio remains constant over the length of the transducer.
  • the metallization ratio increases or decreases continuously over the length of the transducer or in which the metallization ratio of the corresponding distribution
  • ⁇ ⁇ ⁇ H- 3 0 ⁇ P- ⁇ P- p. s: Di Di P- SD rr ⁇ p- 3 rr Q tr H- LQ 3 LQ ⁇ ⁇ tn 0
  • resonators according to the invention or filters made from them are constructed in the case of poor electro-acoustic coupling, for example on lithium tantalate with a small layer thickness. Under such conditions, better electrical adaptation is achieved through improved electroacoustic behavior.
  • Figure 1 shows a known resonator.
  • Figure 2 shows a known structure for a reactance filter.
  • Figure 3 shows a resonator according to the invention.
  • FIGS. 4 to 6 show functions according to the invention for distributing the finger widths over the length of the transducer.
  • FIG. 7 compares the standing wave ratio of known reactance filters according to the invention.
  • FIG. 8 compares the transmission behavior of a reactance filter according to the invention with that of a known reactance filter.
  • FIG. 1 A resonator operating with acoustic waves is shown in FIG. 1.
  • the metallic electrode structures which consist for example of aluminum, an aluminum alloy or a multilayer structure comprising aluminum layers, are applied to a piezoelectric substrate.
  • the resonator consists of one
  • Interdigital transducer IDT which is arranged between two reflectors Ref. Each interdigital converter IDT consists of )> tt P 1 H in o in o in o in
  • the finger distances P are plotted over the number of fingers n on a preferably continuous function, in FIG. on a straight line.
  • the finger distance P falls from a maximum finger distance Pmax to a minimum finger distance Pmin over the length of the transducer.
  • distributions of the finger spacings are also possible, as are shown, for example, in FIGS. 5 and 6.
  • a linear distribution over the length of the transducer is also shown in FIG. 5, the overall distribution function being composed of two linear subfunctions which a mirror axis lying in the area of a central electrode finger Nm and vertically to the wave propagation direction X are arranged symmetrically to one another.
  • FIG. 6 shows a distribution of the finger distances P, which corresponds to a parabolic function, the maximum of which is located in the region of the center of the converter.
  • Resonator which has an interdigital transducer IDT V shown in Figure 3 with linearly varying finger spacing, used to produce a reactance filter.
  • resonators are interconnected to form a reactance filter as shown in FIG.
  • ⁇ P SU tr ⁇ P LQ rr LQ M ⁇ P 3 0 ⁇ • d ⁇ P- N ⁇ ⁇ P P- d
  • SD CD ra ⁇ P- P- rr ra 2 ⁇ d " ⁇ ⁇ 3 ⁇ ⁇ tr ⁇ ⁇ ⁇ 3 ⁇ P P-
  • CD CD SD P- tr P- P- CO 3 ⁇ ⁇ - 3 ⁇ Di P "ra rr ⁇ P 1 SD P P- N rr er 3 LQ su ra 3 ⁇ P- rr SU P ⁇ CD SD ⁇ ö ⁇ rr er CD Mi t rr

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'objectif de l'invention est d'améliorer l'adaptation d'un filtre fonctionnant avec des ondes acoustiques. A cet effet, on fait appel à une structure de transducteur dans laquelle les écarts entre respectivement deux doigts d'électrode adjacents d'un transducteur interdigité (IDTV) varient sur la longueur du transducteur. Cette variation suit de préférence une fonction de répartition continue. Des filtres à réactance équipés de tels résonateurs dans la branche en série présentent une adaptation électrique améliorée dans la bande passante.
EP02721986A 2001-03-13 2002-03-01 Structure de transducteur fonctionnant avec des ondes acoustiques Withdrawn EP1368894A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10111959.3A DE10111959B4 (de) 2001-03-13 2001-03-13 Mit akustischen Wellen arbeitende Wandlerstruktur
DE10111959 2001-03-13
PCT/DE2002/000755 WO2002073800A1 (fr) 2001-03-13 2002-03-01 Structure de transducteur fonctionnant avec des ondes acoustiques

Publications (1)

Publication Number Publication Date
EP1368894A1 true EP1368894A1 (fr) 2003-12-10

Family

ID=7677235

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02721986A Withdrawn EP1368894A1 (fr) 2001-03-13 2002-03-01 Structure de transducteur fonctionnant avec des ondes acoustiques

Country Status (5)

Country Link
US (1) US7042132B2 (fr)
EP (1) EP1368894A1 (fr)
JP (1) JP4017984B2 (fr)
DE (1) DE10111959B4 (fr)
WO (1) WO2002073800A1 (fr)

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DE102004048715B4 (de) * 2004-10-06 2014-05-22 Epcos Ag SAW-Filter mit Impedanz-Transformation
DE102005051852B4 (de) 2005-10-28 2021-05-20 Snaptrack, Inc. SAW Filter mit breitbandiger Bandsperre
DE102008037091A1 (de) * 2008-08-08 2010-02-11 Epcos Ag SAW-Bauelement
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US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
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Also Published As

Publication number Publication date
US20040090145A1 (en) 2004-05-13
DE10111959B4 (de) 2014-11-20
JP4017984B2 (ja) 2007-12-05
DE10111959A1 (de) 2002-09-19
JP2004523179A (ja) 2004-07-29
WO2002073800A1 (fr) 2002-09-19
US7042132B2 (en) 2006-05-09

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