EP1335641A1 - Plasmadüse - Google Patents
Plasmadüse Download PDFInfo
- Publication number
- EP1335641A1 EP1335641A1 EP02002927A EP02002927A EP1335641A1 EP 1335641 A1 EP1335641 A1 EP 1335641A1 EP 02002927 A EP02002927 A EP 02002927A EP 02002927 A EP02002927 A EP 02002927A EP 1335641 A1 EP1335641 A1 EP 1335641A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrode
- nozzle
- nozzle tube
- plasma
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3468—Vortex generators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3478—Geometrical details
Definitions
- the invention relates to a plasma nozzle for generating a jet of an atmospheric Plasma, with a nozzle tube through which a working gas flows, an electrode arranged coaxially in the nozzle tube, a high-frequency generator for applying a voltage between the electrode and the Nozzle tube and a swirl device for the swirled introduction of the working gas in an annular space between the electrode and the nozzle tube.
- a plasma nozzle of this type is known from US-A-5 837 958 and serves in particular for surface pretreatment, for example for hydrophilizing of workpieces, but can also be used for other purposes, for example for plasma polymerization or plasma coating.
- the high frequency generator generates a voltage of, for example, 500 kV or more a frequency of 1 kHz or more between the electrode and the nozzle pipe. This results in an arc discharge, but its discharge arc is carried away by the swirled flow of the working gas. The working gas forms a vortex that rotates around the axis of the nozzle tube.
- the arc is channeled in the vortex core on the axis of the nozzle tube, so that it branches and opens only at the mouth of the nozzle tube the nozzle tube overturns. Due to the rapid rotation of the working gas in the The vortex core is intimate along the entire length of the arc Contact of the working gas with the arc. This makes one more proportionate cool but highly reactive secondary plasma, which is then called Jet emerges from the mouth of the nozzle tube.
- the inside of the nozzle tube is lined with a ceramic tube, which is a dielectric forms and has the purpose of igniting and forming the arc to control. Specifically, there is one when the voltage is switched on Corona discharge in the annular space between the electrode and the dielectric, and only through this corona discharge is the actual arc discharge ignited so that the arc forms in the desired manner.
- the object of the invention is a simple and compact plasma nozzle to create, in which the geometry of the plasma beam control better leaves.
- This object is achieved in that the annular space along the length of the electrode is limited to the outside by the conductive surface of the nozzle tube.
- the plasma nozzle does not function impaired but on the contrary is improved if you look at the No dielectric at all.
- the ignition then occurs suddenly by skipping of the arc between the electrode and the wall of the nozzle tube.
- the swirled flow of the working gas is sufficient, the arc to blow out of the annulus so that it is like the conventional nozzle is channeled in the vortex core.
- the structure of the plasma nozzle is simplified and the manufacturing costs are reduced.
- the diameter and the axial length of the Reduce the plasma nozzle without negatively affecting the geometry of the plasma jet.
- the nozzle tube tapers conically towards the mouth.
- a ceramic tube with such a rejuvenation it is difficult to manufacture a transition point between the ceramic tube in the conventional plasma nozzle and give the conductive surface of the nozzle tube. Through this transition point the flow of the working gas in the nozzle pipe was disturbed.
- these problems are avoided, and the inner surface of the nozzle tube can be designed with a high degree of design freedom depending on the application Design so that the plasma jet has the desired shape and length receives.
- the swirl device is preferably formed by a wall made of metal with a spiral shape arranged holes formed electrically opposite the electrode is insulated and is at the potential as the nozzle tube. Due to the Flow and pressure conditions in the annulus will cause the arc to die Flow of the working gas is sucked in and carried away, so that it is reliable too a shift of the base point of the arc to the tip of the electrode comes.
- the plasma nozzle 10 shown in FIG. 1 has a nozzle tube 12 made of metal, which tapers conically to an outlet opening 14. At the outlet opening 14 opposite end, the nozzle tube 12 has an inlet 16 for a working gas on, for example for compressed air.
- An intermediate wall 18 of the nozzle tube 12 has a ring of bores 20 made obliquely in the circumferential direction and thus forms a swirl device for the working gas.
- the downstream one Conical tapered part of the nozzle tube is therefore from the working gas in the Form flows through a vortex 22, the core of which on the longitudinal axis of the nozzle tube runs.
- An electrode 24 is arranged centrally on the underside of the intermediate wall 18, which projects coaxially into the tapered section of the nozzle tube.
- the electrode 24 is rounded off by a rotationally symmetrical one Pin formed, for example of copper, which is electrically isolated by an insulator 26 insulated from the intermediate wall 18 and the other parts of the nozzle tube is.
- a high frequency is applied to the electrode 24 via an insulated shaft 28 AC voltage applied by a high frequency transformer 30 is generated.
- the voltage can be regulated variably and is, for example 500 V or more, preferably 2 - 5 kV.
- the frequency is, for example, in the Order of magnitude from 1 to 20 kHz and is preferably also adjustable.
- the Shaft 28 is connected to high-frequency transformer 30 via a flexible high-voltage cable 32 connected.
- the inlet 16 is via a not shown Hose connected to a variable flow compressed air source, preferably combined with the high-frequency generator 30 to form a supply unit is.
- the plasma nozzle 10 can be effortlessly by hand or with the help of a robot arm.
- the nozzle tube 12 and the intermediate wall 18 are grounded.
- FIG. 2 shows a plasma nozzle 10 'according to a modified embodiment.
- the electrode 24 is separated from the intermediate wall 18 designed and suspended on thin, radial webs 38, the wall of the nozzle tube 12 on electrically insulating bushings Enforce 40.
- the voltage supply to the electrode 24 takes place via the webs 38.
- This embodiment has the advantage of greater freedom in terms of the design of the electrode 24.
- this electrode have a streamlined shape so that the swirling flow of the working gas is further optimized in the nozzle tube. Since also the partition 18 here does not act as a heat sink for the electrode, the electrode 24 can be on a higher temperature, so that the work function for the electrons is smaller.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Geometry (AREA)
- Plasma Technology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Arc Welding In General (AREA)
Abstract
Description
- Fig. 1
- einen schematischen Schnitt durch eine Plasmadüse; und
- Fig.2
- einen Schnitt durch eine Plasmadüse gemäß einer abgewandelten Ausführungsform.
Claims (5)
- Plasmadüse zur Erzeugung eines Strahls (36) eines atmosphärischen Plasmas, mit einem von einem Arbeitsgas durchströmten Düsenrohr (12), einer koaxial in dem Düsenrohr angeordneten Elektrode (24), einem Hochfrequenzgenerator (30) zum Anlegen einer Spannung zwischen der Elektrode (24) und dem Düsenrohr (12) und einer Dralleinrichtung (18) zur verdrallten Einleitung des Abeitsgases in einen Ringraum zwischen der Elektrode (24) und dem Düsenrohr (12), dadurch gekennzeichnet, daß der Ringraum auf der Länge der Elektrode (24) nach außen durch die leitende Oberfläche des Düsenrohres (12) begrenzt wird.
- Plasmadüse nach Anspruch 1, dadurch gekennzeichnet, daß die Dralleinrichtung (18) elektrisch mit dem Düsenrohr (12) verbunden und gegenüber der Elektrode (24) isoliert ist.
- Plasmadüse nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß sich das Düsenrohr (12) zu seiner Auslaßöffnung (14) verjüngt.
- Plasmadüse nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, daß die Elektrode (24) räumlich getrennt von der Dralleinrichtung (18) ausgebildet und mit radialen Stegen (38) schwebend im Düsenrohr (12) gehalten ist.
- Plasmadüse nach Anspruch 4, dadurch gekennzeichnet, daß die Elektrode (24) ein stromlinienförmiger Körper ist.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT02002927T ATE274787T1 (de) | 2002-02-09 | 2002-02-09 | Plasmadüse |
DE50200894T DE50200894D1 (de) | 2002-02-09 | 2002-02-09 | Plasmadüse |
EP02002927A EP1335641B1 (de) | 2002-02-09 | 2002-02-09 | Plasmadüse |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02002927A EP1335641B1 (de) | 2002-02-09 | 2002-02-09 | Plasmadüse |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1335641A1 true EP1335641A1 (de) | 2003-08-13 |
EP1335641B1 EP1335641B1 (de) | 2004-08-25 |
Family
ID=27589098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02002927A Expired - Lifetime EP1335641B1 (de) | 2002-02-09 | 2002-02-09 | Plasmadüse |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1335641B1 (de) |
AT (1) | ATE274787T1 (de) |
DE (1) | DE50200894D1 (de) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006117324A1 (de) * | 2005-04-29 | 2006-11-09 | Basf Aktiengesellschaft | Verbundelement, insbesondere fensterscheibe |
WO2006117325A1 (de) * | 2005-04-29 | 2006-11-09 | Basf Aktiengesellschaft | Verbundelement, insbesondere fensterscheibe |
WO2006136467A1 (de) | 2005-04-22 | 2006-12-28 | Plasmatreat Gmbh | Verfahren und vorrichtung zur charakterisierung einer oberfläche eines werkstückes |
DE202007018327U1 (de) | 2006-11-23 | 2008-08-07 | Plasmatreat Gmbh | Vorrichtung zum Erzeugen eines Plasmas |
DE102007011235A1 (de) | 2007-03-06 | 2008-09-11 | Plasma Treat Gmbh | Verfahren und Vorrichtung zur Behandlung einer Oberfläche eines Werkstückes |
EP1990387A1 (de) | 2007-05-11 | 2008-11-12 | Sika Technology AG | Über Polyurethan-Heissschmelzklebstoff verbundene Schichtbundkörper sowie Verfahren zum Verkleben von Weichmacher enthaltenden Kunststoffen |
DE102008029681A1 (de) | 2008-06-23 | 2009-12-24 | Plasma Treat Gmbh | Verfahren und Vorrichtung zum Aufbringen einer Schicht, insbesondere einer selbstreinigend und/oder antimikrobiell wirkenden photokatalytischen Schicht, auf eine Oberfläche |
DE102008058783A1 (de) | 2008-11-24 | 2010-05-27 | Plasmatreat Gmbh | Verfahren zur atmosphärischen Beschichtung von Nanooberflächen |
WO2011107510A1 (de) | 2010-03-02 | 2011-09-09 | Plasmatreat Gmbh | Verfahren zur herstellung einer verpackung |
WO2011113848A1 (de) | 2010-03-16 | 2011-09-22 | Christian Buske | Vorrichtung zur plasmabehandlung von lebendem gewebe |
WO2012072401A1 (de) * | 2010-12-03 | 2012-06-07 | Evonik Degussa Gmbh | Verfahren zum konvertieren von halbleiterschichten |
WO2012152715A1 (de) | 2011-05-06 | 2012-11-15 | Tesa Se | Verfahren zur erhöhung der adhäsiven eigenschaften von haftklebemassen auf untergründen mittels plasmabehandlung |
DE102012102721A1 (de) | 2012-03-29 | 2013-10-02 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren zum Passivieren einer Metalloberfläche |
EP2644739A1 (de) | 2012-03-29 | 2013-10-02 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren zum Passivieren einer Metalloberfläche und Haushaltsgerät, insbesondere Haushaltsgeschirrspülmaschine mit einem Wandungsteil |
DE102012206081A1 (de) | 2012-04-13 | 2013-10-17 | Krones Ag | Beschichtung von Behältern mit Plasmadüsen |
US8702892B2 (en) | 2005-02-11 | 2014-04-22 | Sika Technology Ag | Bonding of air-plasma treated thermoplastics |
DE102012220286A1 (de) | 2012-11-07 | 2014-05-08 | Tesa Se | Verfahren zur Erhöhung der adhäsiven Eigenschaften von Haftklebemassen auf Untergründen mittels Plasmabehandlung |
DE102015009764A1 (de) | 2015-07-31 | 2017-02-02 | Tesa Se | Reaktives Klebstofffilm-System zur Verklebung unpolarer Oberflächen |
DE102016201565A1 (de) | 2015-11-25 | 2017-06-01 | Tesa Se | Verklebung mit verbesserter Feucht-Wärme-Beständigkeit |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007010996A1 (de) | 2007-03-05 | 2008-09-11 | Arcoron Gmbh | Plasmadüse |
DE202008017836U1 (de) | 2008-03-05 | 2010-08-12 | Arcoron Gmbh | Plasmadüse |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1350055A (fr) * | 1962-12-11 | 1964-01-24 | Centre Nat Rech Scient | Perfectionnements à l'injection des gaz dans les chalumeaux à plasma |
EP0639041A1 (de) * | 1993-08-11 | 1995-02-15 | Miller Thermal, Inc. | Plasmaspritzpistole und deren Anode |
WO1995018521A1 (fr) * | 1993-12-24 | 1995-07-06 | Komatsu Ltd. | Chalumeau a plasma |
WO2001043512A1 (de) * | 1999-12-09 | 2001-06-14 | Agrodyn Hochspannungstechnik Gmbh | Plasmadüse |
-
2002
- 2002-02-09 DE DE50200894T patent/DE50200894D1/de not_active Expired - Lifetime
- 2002-02-09 AT AT02002927T patent/ATE274787T1/de not_active IP Right Cessation
- 2002-02-09 EP EP02002927A patent/EP1335641B1/de not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1350055A (fr) * | 1962-12-11 | 1964-01-24 | Centre Nat Rech Scient | Perfectionnements à l'injection des gaz dans les chalumeaux à plasma |
EP0639041A1 (de) * | 1993-08-11 | 1995-02-15 | Miller Thermal, Inc. | Plasmaspritzpistole und deren Anode |
WO1995018521A1 (fr) * | 1993-12-24 | 1995-07-06 | Komatsu Ltd. | Chalumeau a plasma |
WO2001043512A1 (de) * | 1999-12-09 | 2001-06-14 | Agrodyn Hochspannungstechnik Gmbh | Plasmadüse |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8702892B2 (en) | 2005-02-11 | 2014-04-22 | Sika Technology Ag | Bonding of air-plasma treated thermoplastics |
WO2006136467A1 (de) | 2005-04-22 | 2006-12-28 | Plasmatreat Gmbh | Verfahren und vorrichtung zur charakterisierung einer oberfläche eines werkstückes |
WO2006117324A1 (de) * | 2005-04-29 | 2006-11-09 | Basf Aktiengesellschaft | Verbundelement, insbesondere fensterscheibe |
WO2006117325A1 (de) * | 2005-04-29 | 2006-11-09 | Basf Aktiengesellschaft | Verbundelement, insbesondere fensterscheibe |
US7771829B2 (en) | 2005-04-29 | 2010-08-10 | Basf Aktiengesellschaft | Composite element, especially a window pane |
DE202007018327U1 (de) | 2006-11-23 | 2008-08-07 | Plasmatreat Gmbh | Vorrichtung zum Erzeugen eines Plasmas |
DE102007011235A1 (de) | 2007-03-06 | 2008-09-11 | Plasma Treat Gmbh | Verfahren und Vorrichtung zur Behandlung einer Oberfläche eines Werkstückes |
EP1990387A1 (de) | 2007-05-11 | 2008-11-12 | Sika Technology AG | Über Polyurethan-Heissschmelzklebstoff verbundene Schichtbundkörper sowie Verfahren zum Verkleben von Weichmacher enthaltenden Kunststoffen |
US8932721B2 (en) | 2007-05-11 | 2015-01-13 | Sika Technology Ag | Laminates joined by polyurethane hot-melt adhesive and process for bonding plasticizer-containing plastics |
DE102008029681A1 (de) | 2008-06-23 | 2009-12-24 | Plasma Treat Gmbh | Verfahren und Vorrichtung zum Aufbringen einer Schicht, insbesondere einer selbstreinigend und/oder antimikrobiell wirkenden photokatalytischen Schicht, auf eine Oberfläche |
DE102008058783A1 (de) | 2008-11-24 | 2010-05-27 | Plasmatreat Gmbh | Verfahren zur atmosphärischen Beschichtung von Nanooberflächen |
DE102010055532A1 (de) | 2010-03-02 | 2011-12-15 | Plasma Treat Gmbh | Verfahren zur Herstellung eines mehrschichtigen Verpackungsmaterials und Verfahren zum Auftragen eines Klebers sowie Vorrichtung dazu |
WO2011107510A1 (de) | 2010-03-02 | 2011-09-09 | Plasmatreat Gmbh | Verfahren zur herstellung einer verpackung |
WO2011113848A1 (de) | 2010-03-16 | 2011-09-22 | Christian Buske | Vorrichtung zur plasmabehandlung von lebendem gewebe |
DE102010011643B4 (de) | 2010-03-16 | 2024-05-29 | Christian Buske | Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe |
DE102010011643A1 (de) | 2010-03-16 | 2011-09-22 | Christian Buske | Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe |
WO2012072401A1 (de) * | 2010-12-03 | 2012-06-07 | Evonik Degussa Gmbh | Verfahren zum konvertieren von halbleiterschichten |
CN103229602A (zh) * | 2010-12-03 | 2013-07-31 | 赢创德固赛有限公司 | 用于转换半导体层的方法 |
WO2012152715A1 (de) | 2011-05-06 | 2012-11-15 | Tesa Se | Verfahren zur erhöhung der adhäsiven eigenschaften von haftklebemassen auf untergründen mittels plasmabehandlung |
WO2012152714A1 (de) | 2011-05-06 | 2012-11-15 | Tesa Se | Verfahren zur erhöhung der adhäsiven eigenschaften von haftklebemassen auf untergründen mittels plasmabehandlung |
EP2644739A1 (de) | 2012-03-29 | 2013-10-02 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren zum Passivieren einer Metalloberfläche und Haushaltsgerät, insbesondere Haushaltsgeschirrspülmaschine mit einem Wandungsteil |
US9771652B2 (en) | 2012-03-29 | 2017-09-26 | Plasmatreat Gmbh | Method for passivating a metal surface |
DE102012102721A1 (de) | 2012-03-29 | 2013-10-02 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren zum Passivieren einer Metalloberfläche |
DE102012206081A1 (de) | 2012-04-13 | 2013-10-17 | Krones Ag | Beschichtung von Behältern mit Plasmadüsen |
DE102012220286A1 (de) | 2012-11-07 | 2014-05-08 | Tesa Se | Verfahren zur Erhöhung der adhäsiven Eigenschaften von Haftklebemassen auf Untergründen mittels Plasmabehandlung |
DE102015009764A1 (de) | 2015-07-31 | 2017-02-02 | Tesa Se | Reaktives Klebstofffilm-System zur Verklebung unpolarer Oberflächen |
DE102016201565A1 (de) | 2015-11-25 | 2017-06-01 | Tesa Se | Verklebung mit verbesserter Feucht-Wärme-Beständigkeit |
Also Published As
Publication number | Publication date |
---|---|
DE50200894D1 (de) | 2004-09-30 |
EP1335641B1 (de) | 2004-08-25 |
ATE274787T1 (de) | 2004-09-15 |
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