EP1299649B1 - Dispositif pour creer le vide - Google Patents

Dispositif pour creer le vide Download PDF

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Publication number
EP1299649B1
EP1299649B1 EP01949425A EP01949425A EP1299649B1 EP 1299649 B1 EP1299649 B1 EP 1299649B1 EP 01949425 A EP01949425 A EP 01949425A EP 01949425 A EP01949425 A EP 01949425A EP 1299649 B1 EP1299649 B1 EP 1299649B1
Authority
EP
European Patent Office
Prior art keywords
suction nozzle
nozzle unit
vacuum
main
vacuum generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01949425A
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German (de)
English (en)
Other versions
EP1299649A1 (fr
Inventor
Jürgen Schnatterer
Günter Gebauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP1299649A1 publication Critical patent/EP1299649A1/fr
Application granted granted Critical
Publication of EP1299649B1 publication Critical patent/EP1299649B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S137/00—Fluid handling
    • Y10S137/907—Vacuum-actuated valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2202—By movable element
    • Y10T137/2218—Means [e.g., valve] in control input
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

Definitions

  • the invention relates to a vacuum generating device, comprising a main suction nozzle unit, which can be supplied via a main inflow channel with a pressure medium under a predetermined operating pressure, which when passing through the main suction nozzle unit in a subsequent to a main suction port, with a connected to be evacuated space or connectable main suction channel causes a suction effect, wherein in the main inflow a depending on the currently prevailing in the evacuated space vacuum actuable shut-off valve is turned on, upon reaching a predetermined target negative pressure interruption of the pressure medium supply of the main Suction nozzle unit can cause, wherein one of the main suction nozzle unit operatively connected in parallel additional suction nozzle unit is provided, which in the operation of the device constantly under an operating pressure and standing by an additional outflow again is supplied from the outflowing pressure medium and which has a connected to the main suction channel of the main suction nozzle unit in fluid connection additional suction opening, wherein in the main suction channel between the two suction openings opposite to the suction
  • One from the German utility model no. 299 03 330 Outgoing vacuum generator device is used for example in handling technology to workpieces or other handling technology used to workpieces or other To transport objects without risk of damage.
  • the vacuum generating device is equipped with an air saving device which is intended to interrupt the pressure medium supply when the desired negative pressure is reached in the space to be evacuated. If the volume to be evacuated is relatively small, the desired effect will actually occur.
  • the volume to be evacuated is relatively large and accordingly only a gradual build-up of the negative pressure takes place, this, together with the gradually closing shut-off valve and the friction forces occurring in the valve, may cause the flow rate supplied to the main suction nozzle unit to decrease so sharply the desired negative pressure build-up is no longer possible.
  • the system then settles in a state in which the prevailing in the evacuated space vacuum is less than the desired desired negative pressure.
  • the exhaust performance suffers, and due to the never completely closing shut-off valve continues to result in a constant air consumption to a certain extent.
  • the suction power of the main suction nozzle unit is limited, carried by the still in operation located additional suction nozzle unit a residual evacuation to the desired target negative pressure, which is then able to Close the shut-off valve completely.
  • the invention provides that the shut-off valve is designed as a 2/2-way valve and the additional discharge channel of the additional suction nozzle unit communicates directly with the atmosphere.
  • Another advantage of the vacuum generator device according to the invention is that usually no Abschimpuls circuit is required to cancel the vacuum present in the space to be evacuated for the purpose of depositing an adherend article. It is usually sufficient to interrupt the pressure medium supply to the additional suction nozzle unit, so that the space to be evacuated is vented via the communicating with the environment outflow channel of the additional suction nozzle unit.
  • the additional suction nozzle unit is designed for a lower compared to the main suction nozzle unit maximum pressure medium flow rate of the injected pressure medium. So it has the main suction nozzle unit on high flow and the additional suction nozzle unit on lower flow, but at the same time designed high vacuum generator performance. Thus, the saving effect can be further optimized.
  • the additional suction nozzle unit is designed in such a way that the suction flow rate that can be generated by it when the operating pressure is applied is in the region of the leakage which is likely to occur in the space to be evacuated.
  • shut-off valve is conveniently a 2/2-way valve is used, which has a steady or continuous control behavior.
  • the shut-off valve required for its operation vacuum signal is expediently connected by the fact that a standing with the valve member of the shut-off valve in operative connection Beauftschungs character is provided, which one supplies the prevailing in the evacuated space vacuum.
  • further counter-acting means are provided which act on the valve member with one of the negative pressure caused by the actuating force counteracting counteracting force.
  • desired specification of the opposing force can be specifically intended to specify the desired vacuum in the room to be evacuated.
  • the counteracting means may have a counteracting force causing and preferably adjustable spring means, which may be a gas spring and / or a mechanical spring means.
  • the counter-loading means have a counter-acting surface which is in operative connection with the valve member of the shut-off valve and is constantly connected to the operating pressure applied to the main inflow channel. In this way, the counteracting force depends on the upcoming operating pressure. It can now be influenced by appropriate specification of the area ratios that can be set directly proportional by setting the operating pressure of the target negative pressure value.
  • suction nozzle units are supplied with the same operating pressure during operation of the device, so that a single pressure medium connection is sufficient to ensure the pressure medium supply.
  • the vacuum generator device can already be advantageously operated with a single main suction nozzle unit.
  • a plurality of parallel main suction nozzle units may be readily available, which can also be interconnected in such a way that sets a particular desired performance.
  • the illustrated vacuum generator apparatus 1 includes a main suction nozzle unit 2 and an auxiliary suction nozzle unit 3, and the terms "main” and “additive”, also in connection with the other components of the vacuum generating apparatus, are used only for better discrimination.
  • the term "suction nozzle unit” will generally be used without any precedence.
  • the suction nozzle units 2, 3 have a structure known per se and have an ejector device 4 with a jet nozzle channel 5 and a catch nozzle channel 6 arranged in the axial extension thereof. Between the two channels mentioned above there is an open space to the side, which forms a suction opening which are designated for better distinction in the two suction nozzle units 2, 3 as the main suction opening 7 and as an additional suction opening 8.
  • Each suction nozzle unit 2, 3 has a main or additional inflow opening 12, 13 which defines the inlet of a respective jet nozzle channel 5.
  • To the catching nozzle channel 6 joins a communicating with the atmosphere R main or additional discharge channel 14, 15 at.
  • a main inflow channel 16 Upstream of the main inflow opening 12 is a main inflow channel 16, which leads to a feed opening 18, via which a pressure medium, preferably compressed air, can be fed in at a desired operating pressure p B.
  • a pressure medium preferably compressed air
  • the additional inflow opening 13 of the additional suction nozzle unit 3 can also be supplied with the corresponding pressure medium.
  • a main suction channel 22 is connected, which leads to a space to be evacuated 24.
  • This can for example be formed by the interior of the suction cup or suction cup of a vacuum handling device, with the aid of objects can be sucked, transported and stored.
  • the vacuum generator device 1 may have a housing 25 which, with the exception of the space 24 to be evacuated, contains all the device components, the main suction channel 22 leading to a connection opening 26 located on the outer surface of the housing 25, to which via Channels or fluid lines a to be evacuated space 24 defining component can be connected.
  • the additional suction opening 8 of the additional suction nozzle unit 3 is also in communication with the main suction channel 22.
  • both suction ports 7, 8 simultaneously with the space to be evacuated 24 in connection, the channels used can be at least partially designed as a unit.
  • a preferably designed as a 2/2-way valve shut-off valve 27 is turned on, which can be actuated in response to the currently prevailing in the main suction passage 22 and thus in the evacuated space 24 vacuum p U.
  • Fig. 1 apparent open position in which it allows an unrestricted pressure medium supply of the main suction nozzle unit 2.
  • the passage through the main inflow channel 16 is shut off and the pressure medium supply to the main suction nozzle unit 2 is interrupted.
  • the control of the instantaneous position of the shut-off valve 27 takes place without electrical measures directly through the vacuum to be evacuated 24 currently prevailing vacuum p U , tapped in the embodiment at a tapping point 28 from the main suction channel 22 and fed as a fluid pressure signal Beaufschlagungs simulation a 32 of the shut-off valve 27 becomes.
  • a feed channel 33 extending between the tapping point 28 and the loading surface 32 may be provided, as shown in FIG Fig. 1 is indicated.
  • the supply channel 33 is omitted, since the tapping point 28 is here directly in the main suction channel 22, in that the loading surface 32 is realized as a movable wall section of the main suction channel 22.
  • the basic position of the shut-off valve 27 representing an open position is defined by counteracting means 34. While the negative pressure p U prevailing in the main inflow channel 16 exerts a loading force F B oriented in the closing direction of the shut-off valve 27 on the loading surface 32, the counter-loading means 34 cause a counteracting force F G oriented opposite to the loading force F B in the direction of the open position.
  • the counteracting force F G is caused by acting on a counter-acting surface 32 of the check valve 27 operating pressure p B.
  • both the loading surface 32 and the counterbearing surface 35 are expediently in operative connection with a valve member 36 of the shut-off valve 27 and are expediently provided directly on the valve member 36.
  • the valve member 36 Since the counter-application surface 35 is constantly exposed to the operating pressure p B , there is a counter-acting force F G constantly pushing the valve member 36 in the direction of the open position.
  • the valve member 36 actually switching force arises as a resultant force between the counter-acting force F G and derived from the currently prevailing negative pressure p U Beaufschlagungskraft F B.
  • the switching behavior of the shut-off valve 27 can be influenced by appropriate specification of the area ratio between the loading surface 32 and the counter-application surface 35.
  • the counter-application force F G depends on the height of the operating pressure p B in the embodiment, there is the advantageous possibility to variably set the desired target negative pressure by variable specification of the operating pressure p B. It can be specified on the area ratios that the height of the negative pressure or vacuum is achieved in proportion to the input side operating pressure.
  • the counteracting means for generating the counteracting force could also have an in Fig. 1 dash-dotted lines indicated spring device 37 have, for example, a gas spring device or a mechanical spring device, wherein the spring force can be adjusted appropriately to pretend the counter-acting force and thus the desired target vacuum as needed can.
  • the space to be evacuated 24 is circumferentially closed and contains a certain volume of air.
  • stationary pressure medium preferably compressed air, fed, which passes first unhindered to the inflow openings 12, 13 of both suction nozzle units 2, 3 and flows through the latter, where it via the outflow 14, 15 to the environment R is blown out.
  • a suction effect is caused in the region of the suction openings 7, 8, which is a suction of the air from the adjacent to the suction ports 7, 8 channels and to be evacuated Room 24 causes.
  • the suction devices 38 are in Fig. 1 indicated by arrows.
  • the target negative pressure p US builds up abruptly and immediately leads to a closing of the shut-off valve 27.
  • the main suction nozzle unit 2 is inoperative and only the auxiliary suction nozzle unit 3 is in operation.
  • the overall result is a reduction of the pressure medium consumption, which allows an economical operation of the vacuum generator device 1.
  • the additional suction nozzle unit 3 is unaffected by the position of the check valve 27 constantly, continuously in operation, it ultimately ensures the achievement of the desired target negative pressure, which then causes the complete closing of the check valve 27.
  • the main suction nozzle unit 2 is completely shut down, and the air consumption in turn depends on the geometric Parameters of the main suction nozzle unit 2 operatively connected in parallel additional suction nozzle unit. 3
  • a check valve 39 is turned on. It can according to the illustration of the Fig. 2 be designed as a flap-check valve. It is designed so that it prevents a flow of fluid opposite to that caused by the main suction nozzle unit 2 suction direction 38, with the main suction nozzle unit 2 in operation, however, allows the suction flow in the desired manner.
  • the Fig. 3 shows the flow rate V of the fed via the inlet port 18 and through the suction nozzle units 2, 3 total flowing therethrough pressure medium in time-dependent form, in other words the fluid consumption V over time t.
  • the flow rate of the vacuum generator device 1 according to the invention is plotted at 42 in a solid line. Accordingly, at the switch-on time t 0 of the device, a maximum volumetric flow determined by the sum of the flow rates of the two suction nozzle units 2, 3 then gradually decreases in accordance with the reduction in the flow cross-section predetermined by the shut-off valve 27, until finally the curve section 42a is achieved with a minimum volumetric flow , which is determined by the sole operation of the auxiliary suction nozzle unit 3.
  • dashed line 43 illustrates the much higher constant air consumption of a conventional Vacuum generating device 1, which has no air-saving function and has only one with the main suction nozzle unit 2 comparable suction nozzle unit.
  • the dot-dashed curve 44 finally illustrates the air consumption of a vacuum generating device according to the prior art, which has only one main suction nozzle unit 2 with upstream shut-off valve 27, but does not have the additional suction nozzle unit 3 according to the invention.
  • the curve is similar to that in the invention, the minimum air consumption indicated by the curve section 44a is considerably higher than in the case of the design according to the invention, despite the additional suction nozzle unit 3 constantly operating there.
  • the Fig. 4 shows the structure of the negative pressure p U as a function of the operating time, wherein the vacuum structure according to the invention with the solid line 45 is illustrated.
  • the dashed line 46 illustrates the vacuum structure of a comparable but comparable to the invention, but no additional suction nozzle unit possessing device, although the initial vacuum structure is similar, but the maximum value remains considerably below that of the inventive design.
  • the suction nozzle units 2, 3 there is the further possibility of designing the suction nozzle units 2, 3 differently with respect to the maximum possible flow rate and the suction power, and thus to adapt them specifically to the respective application.
  • the auxiliary suction nozzle unit 3 it is possible to design the auxiliary suction nozzle unit 3 in such a way that the suction flow rate which can be generated by the operating pressure applied to it is approximately comparable to the leakage flow which occurs in the region of the space 24 to be evacuated, for example the relevant suction cup does not lie absolutely hermetically close to the object to be handled.
  • the additional suction nozzle unit 3 is designed for a lower compared to the main suction nozzle unit 2 maximum pressure medium flow rate in terms of the injected pressure medium.
  • the main suction nozzle unit 2 it is possible to design the main suction nozzle unit 2 for high flow, which ensures that even a relatively high volume is emptied relatively quickly.
  • the additional suction nozzle unit 3, however, can be designed for high vacuum.
  • a dot-dash line 52 is in Fig. 1 makes it clear that the existing outflow channels 14, 15 can also be brought together without further notice, so that the venting takes place via a common outflow opening.
  • the Fig. 2 shows a particularly advantageous and compact embodiment of the vacuum generator device 1, in which the shut-off valve 27 is integrated into the housing 25, which also contains the suction nozzle units 2, 3.
  • the loading surface 32 is formed by a movable wall portion of the main flow channel 22, wherein they are on the end face of a piston portion of the valve member 36, which is adjustably guided in a corresponding receptacle 53 of the housing 25.
  • the valve member 36 protrudes more or less into the main suction channel 22 and thereby controls the provided fürströmquerrough 53 for the pressure medium.
  • the counter-application surface 35 has the same orientation as the loading surface 32 and is remote from a further loading surface 54 of the valve member 36, which is exposed via a bore 55 to the atmospheric pressure p A.
  • the maximum possible vacuum can be achieved despite an existing economy device.
  • the characteristic curves for the operating pressure and the vacuum are identical with and without economy device.
  • the existing pressure-dependent control of the markable as an air-saving valve shut-off valve is virtually static with small leakage in the suction channels or in the space to be evacuated. This results in low wear.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Claims (11)

  1. Dispositif générateur de vide, comprenant une unité principale à buses d'aspiration (2) qui peut être alimentée au moyen d'un canal principal d'arrivée (16) avec un agent de pression se trouvant sous une pression de service prédéfinie, lequel entraîne un effet d'aspiration lors de l'écoulement à travers l'unité principale à buses d'aspiration (2) dans un canal principal d'aspiration (22) se raccordant à une ouverture principale d'aspiration (7), et relié ou pouvant être relié à un espace (24) à mettre sous vide, une vanne d'arrêt (27) pouvant être actionnée en fonction de la dépression régnant momentanément dans l'espace (24) à mettre sous vide étant insérée dans le canal principal d'arrivée (16), laquelle vanne peut provoquer une interruption de l'alimentation en agent de pression de l'unité principale à buses d'aspiration (2) lorsqu'une dépression de consigne prédéfinie est atteinte, une unité supplémentaire à buses d'aspiration (3) montée en parallèle au niveau de l'effet à l'unité principale à buses d'aspiration (2) étant prévue, laquelle unité est alimentée pendant le fonctionnement du dispositif constamment avec un agent de pression se trouvant à une pression de service et s'écoulant à nouveau au moyen d'un canal supplémentaire de sortie (15) et qui dispose d'une ouverture supplémentaire d'aspiration (8) se trouvant en liaison fluidique avec le canal principal d'aspiration (22) de l'unité principale à buses d'aspiration (2), un clapet antiretour (39) bloquant dans le sens contraire au sens d'aspiration (38) pouvant être provoqué par l'unité principale à buses d'aspiration (2) étant inséré dans le canal principal d'aspiration (22) entre les deux ouvertures d'aspiration (7, 8), caractérisé en ce que la vanne d'arrêt (27) est réalisée sous forme de vanne à 2/2 voies et le canal d'évacuation supplémentaire (15) de l'unité supplémentaire à buses d'aspiration (39) communique directement avec l'atmosphère (R).
  2. Dispositif générateur de vide selon la revendication 1, caractérisé en ce que l'unité supplémentaire à buses d'aspiration (3) est conçue pour un débit d'agent de pression maximum, plus faible par rapport à celui de l'unité principale à buses d'aspiration (2), de l'agent de pression injecté.
  3. Dispositif générateur de vide selon la revendication 1 ou 2, caractérisé en ce que l'unité supplémentaire à buses d'aspiration (3) est conçue de telle sorte que le débit d'écoulement d'évacuation pouvant être généré par cette unité en cas d'application de la pression de service se situe au niveau des fuites apparaissant sur l'espace (24) à mettre sous vide.
  4. Dispositif générateur de vide selon l'une des revendications 1 à 3, caractérisé en ce que, pour l'actionnement de la vanne d'arrêt (27), la dépression régnant dans l'espace (24) à mettre sous vide est appliquée constamment sur une surface d'actionnement (32) en liaison active avec l'élément obturateur (36) de la vanne d'arrêt (27), des contre-moyens d'actionnement (34) étant prévus, lesquels provoquent par rapport à l'élément obturateur (36) une contre-force d'actionnement (FG) dirigée en sens contraire à la force d'actionnement (FB) causée par la dépression appliquée.
  5. Dispositif générateur de vide selon la revendication 4, caractérisé en ce que les contre-moyens d'actionnement contiennent un dispositif à ressort (37) causant la contre-force d'actionnement (FG) et de préférence réglable.
  6. Dispositif générateur de vide selon la revendication 4, caractérisé en ce que les moyens de contre-actionnement (34) contiennent une contre-surface d'actionnement (35) en liaison active avec l'élément obturateur (36) de la vanne d'arrêt (27), surface sur laquelle est appliquée constamment la pression de service s'appliquant sur le canal principal d'arrivée (16).
  7. Dispositif générateur de vide selon la revendication 6, caractérisé en ce que le rapport de surfaces entre la surface d'actionnement (32) et la contre-surface d'actionnement (35) est choisi de telle sorte que le vide pouvant être généré dans l'espace (24) à mettre sous vide est proportionnel à la pression de service appliquée sur le canal principal d'arrivée (16).
  8. Dispositif générateur de vide selon l'une des revendications 4 à 7, caractérisé en ce que la surface d'actionnement (32) est formée par une partie de paroi mobile du canal principal d'arrivée (16) et est prévue de préférence sur une surface frontale de l'élément obturateur (36).
  9. Dispositif générateur de vide selon l'une des revendications 1 à 8, caractérisé en ce que toutes les unités à buses d'aspiration (2, 3) sont alimentées pendant le fonctionnement du dispositif avec un agent de pression exposé à la même pression de service.
  10. Dispositif générateur de vide selon l'une des revendications 1 à 9, caractérisé en ce que plusieurs unités principales à buses d'aspiration (2, 48) montées en parallèle sont présentes.
  11. Dispositif générateur de vide selon l'une des revendications 1 à 10, caractérisé par une vanne d'arrêt (27) avec un comportement de commande constant.
EP01949425A 2000-07-07 2001-06-21 Dispositif pour creer le vide Expired - Lifetime EP1299649B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10033212A DE10033212C1 (de) 2000-07-07 2000-07-07 Vakuumerzeugervorrichtung
DE10033212 2000-07-07
PCT/EP2001/006997 WO2002004817A1 (fr) 2000-07-07 2001-06-21 Dispositif pour creer le vide

Publications (2)

Publication Number Publication Date
EP1299649A1 EP1299649A1 (fr) 2003-04-09
EP1299649B1 true EP1299649B1 (fr) 2008-02-13

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Application Number Title Priority Date Filing Date
EP01949425A Expired - Lifetime EP1299649B1 (fr) 2000-07-07 2001-06-21 Dispositif pour creer le vide

Country Status (7)

Country Link
US (1) US7140389B2 (fr)
EP (1) EP1299649B1 (fr)
JP (1) JP2004502904A (fr)
AT (1) ATE386213T1 (fr)
DE (2) DE10033212C1 (fr)
ES (1) ES2298241T3 (fr)
WO (1) WO2002004817A1 (fr)

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EP1299649A1 (fr) 2003-04-09
US7140389B2 (en) 2006-11-28
DE10033212C1 (de) 2002-01-24
DE50113599D1 (de) 2008-03-27
JP2004502904A (ja) 2004-01-29
ATE386213T1 (de) 2008-03-15
US20020144739A1 (en) 2002-10-10
WO2002004817A1 (fr) 2002-01-17
ES2298241T3 (es) 2008-05-16

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