EP1295384A1 - Elektronisches mikrobauteil sowie dieses enthaltender sensor bzw. antrieb - Google Patents

Elektronisches mikrobauteil sowie dieses enthaltender sensor bzw. antrieb

Info

Publication number
EP1295384A1
EP1295384A1 EP01949575A EP01949575A EP1295384A1 EP 1295384 A1 EP1295384 A1 EP 1295384A1 EP 01949575 A EP01949575 A EP 01949575A EP 01949575 A EP01949575 A EP 01949575A EP 1295384 A1 EP1295384 A1 EP 1295384A1
Authority
EP
European Patent Office
Prior art keywords
blades
equipotential
fixed
mobile
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01949575A
Other languages
English (en)
French (fr)
Inventor
François Valentin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PHS Mems
Original Assignee
PHS Mems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PHS Mems filed Critical PHS Mems
Publication of EP1295384A1 publication Critical patent/EP1295384A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

Definitions

  • such a substrate (1) comprises two conductive layers (2, 4) of great thickness relative to an insulating intermediate layer (3).
  • a microcomponent comprises a fixed part (11), and a mobile part (10).
  • the fixed part (11) is mechanically integral and immobile relative to the rest of the substrate (1).
  • the movable part (10) is connected to the rest of the substrate by means of two thinner zones (12, 13). These thinner areas (12, 13) have a capacity for bending or twisting which allows movement of the central area (14) of the movable part (10).
  • the blades (21) of the fixed part extend over the entire height of the substrate.
  • the blades (20) of the movable part (10) have a height, measured perpendicular to the plane (5) of the main face of the substrate, which is less than that of the blades (21) of the fixed part.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
EP01949575A 2000-06-29 2001-06-28 Elektronisches mikrobauteil sowie dieses enthaltender sensor bzw. antrieb Withdrawn EP1295384A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0008420 2000-06-29
FR0008420A FR2810976B1 (fr) 2000-06-29 2000-06-29 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant
PCT/FR2001/002075 WO2002001706A1 (fr) 2000-06-29 2001-06-28 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant

Publications (1)

Publication Number Publication Date
EP1295384A1 true EP1295384A1 (de) 2003-03-26

Family

ID=8851884

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01949575A Withdrawn EP1295384A1 (de) 2000-06-29 2001-06-28 Elektronisches mikrobauteil sowie dieses enthaltender sensor bzw. antrieb

Country Status (6)

Country Link
US (1) US20030164042A1 (de)
EP (1) EP1295384A1 (de)
JP (1) JP2004502146A (de)
AU (1) AU2001270703A1 (de)
FR (1) FR2810976B1 (de)
WO (1) WO2002001706A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7168680B2 (en) * 2004-07-22 2007-01-30 Harris Corporation Embedded control valve using electroactive material
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
US7690254B2 (en) * 2007-07-26 2010-04-06 Honeywell International Inc. Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
DE102008043836A1 (de) 2008-11-19 2010-05-20 Robert Bosch Gmbh Verfahren zum Betreiben eines elektrostatischen Antriebs und elektrostatische Antriebe
US20120146452A1 (en) * 2010-12-10 2012-06-14 Miradia, Inc. Microelectromechanical system device and semi-manufacture and manufacturing method thereof
ITTO20131014A1 (it) 2013-12-12 2015-06-13 St Microelectronics Int Nv Struttura oscillante attuata elettrostaticamente con controllo della fase di inizio oscillazione, e relativi metodo di fabbricazione e metodo di pilotaggio
GB2579057A (en) * 2018-11-16 2020-06-10 Atlantic Inertial Systems Ltd Accelerometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547742B1 (de) * 1991-12-19 1995-12-13 Motorola, Inc. Dreiachsiger Beschleunigungsmesser
DE4419844B4 (de) * 1994-06-07 2009-11-19 Robert Bosch Gmbh Beschleunigungssensor
GB9416683D0 (en) * 1994-08-18 1994-10-19 British Tech Group Accelerometer
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
DE19537814B4 (de) * 1995-10-11 2009-11-19 Robert Bosch Gmbh Sensor und Verfahren zur Herstellung eines Sensors
JP2000206142A (ja) * 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
JP2002131331A (ja) * 2000-10-24 2002-05-09 Denso Corp 半導体力学量センサ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0201706A1 *

Also Published As

Publication number Publication date
US20030164042A1 (en) 2003-09-04
FR2810976B1 (fr) 2003-08-29
JP2004502146A (ja) 2004-01-22
FR2810976A1 (fr) 2002-01-04
WO2002001706A1 (fr) 2002-01-03
AU2001270703A1 (en) 2002-01-08

Similar Documents

Publication Publication Date Title
EP1698041B1 (de) Elektrostatische steuereinrichtung
EP2546188B1 (de) Verfahren zur Herstellung einer Struktur mit einer aufgehängten Membran und einer vergrabenen Elektrode
EP2018571B1 (de) Bewegungsempfindliche anordnung mit mindestens einem transistor
EP2617129B1 (de) Vorrichtung mit freihängendem träger und piezoresistive vorrichtung zur verlagerungserkennung
EP2520900B1 (de) Gyroskop mit reduzierter parasitärer Kapazität
EP1281664A1 (de) Verfahren zur Herstellung eines optisches, mikroelektromechanisches Bauelementes
EP3257808B1 (de) Mikroelektromechanische und/oder nanoelektromechanische vorrichtung mit bewegung ausserhalb der ebene, die mit kapazitiven mitteln zur änderung der oberfläche ausgestattet ist
EP1295384A1 (de) Elektronisches mikrobauteil sowie dieses enthaltender sensor bzw. antrieb
EP3234536A2 (de) Dynamischer drucksensor mit verbessertem betrieb
FR3120622A1 (fr) Commutateur MEMS à commande électrique et son procédé de réalisation
EP3585723A1 (de) Mems- oder nems-vorrichtung mit gestapeltem stoppelement
EP1444779B1 (de) Mikroelektromechanischer resonator mit abstimmbarem luftspalt und verfahren zu dessen abstimmung
EP2949621B1 (de) Kapazitive mikro- und/ oder nanoelektronische Vorrichtung mit erhöhter Kompaktheit
EP1705151A1 (de) Mikroelektromechanisches System mit einem sich biegendem Balken
WO2013068474A1 (fr) Procede ameliore de realisation d'un dispositif a cavites formees entre un element suspendu reposant sur des plots isolants semi-enterres dans un substrat et ce substrat
EP3264480B1 (de) Elektromechanisches stellglied
EP3828943B1 (de) Mechanisches microsystem mit entsprechendem herstellungsprozess
FR2865201A1 (fr) Technique de realisation de structures a forte topologie auto-alignees
WO2003069645A1 (fr) Procede de fabrication d'un micro-composant du type micro-interrupteur
EP0864093A1 (de) Sensor, insbesondere akzelerometer, stellglied und herstellungsverfahren für eine sensor- oder stellgliedstruktur mit stellenweiser elektrischer isolation
WO2005069473A1 (fr) Composants mems electrostatiques permettant un deplacement vertical important
WO2005069057A9 (fr) Composants optiques et leur procede de realisation
FR2818391A1 (fr) Dispositif permettant le positionnement et le maintien de l'extremite d'une fibre optique a l'interieur d'un substrat
WO2002091556A1 (fr) Actionneur electrostatique
FR2830004A1 (fr) Micro-actionneur de miroir

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20030114

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

RBV Designated contracting states (corrected)

Designated state(s): DE DK FR GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20051220