EP1174899A3 - Elektronenquellenvorrichtung - Google Patents

Elektronenquellenvorrichtung Download PDF

Info

Publication number
EP1174899A3
EP1174899A3 EP01306009A EP01306009A EP1174899A3 EP 1174899 A3 EP1174899 A3 EP 1174899A3 EP 01306009 A EP01306009 A EP 01306009A EP 01306009 A EP01306009 A EP 01306009A EP 1174899 A3 EP1174899 A3 EP 1174899A3
Authority
EP
European Patent Office
Prior art keywords
dielectric layers
emitter
cavity
silicon
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01306009A
Other languages
English (en)
French (fr)
Other versions
EP1174899A2 (de
Inventor
Si-Ty Lam
Henryk Birecki
Huei-Pei Kuo
Steven L. Naberhuis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of EP1174899A2 publication Critical patent/EP1174899A2/de
Publication of EP1174899A3 publication Critical patent/EP1174899A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/021Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
EP01306009A 2000-07-17 2001-07-12 Elektronenquellenvorrichtung Withdrawn EP1174899A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61787600A 2000-07-17 2000-07-17
US617876 2000-07-17

Publications (2)

Publication Number Publication Date
EP1174899A2 EP1174899A2 (de) 2002-01-23
EP1174899A3 true EP1174899A3 (de) 2002-09-18

Family

ID=24475402

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01306009A Withdrawn EP1174899A3 (de) 2000-07-17 2001-07-12 Elektronenquellenvorrichtung

Country Status (4)

Country Link
EP (1) EP1174899A3 (de)
JP (1) JP2002083555A (de)
CN (1) CN1334582A (de)
HK (1) HK1043433A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2836279B1 (fr) * 2002-02-19 2004-09-24 Commissariat Energie Atomique Structure de cathode pour ecran emissif
US6670628B2 (en) * 2002-04-04 2003-12-30 Hewlett-Packard Company, L.P. Low heat loss and small contact area composite electrode for a phase change media memory device
SE526069C2 (sv) * 2003-01-14 2005-06-28 Nilsson Materials Ab System för elektronisk datalagring
KR20060011668A (ko) * 2004-07-30 2006-02-03 삼성에스디아이 주식회사 전자 방출 소자와 이의 제조 방법
KR20060019846A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 전자 방출 소자
KR20060095318A (ko) * 2005-02-28 2006-08-31 삼성에스디아이 주식회사 전자 방출 소자와 이의 제조 방법
JP5723730B2 (ja) * 2011-09-05 2015-05-27 株式会社日立ハイテクノロジーズ エミッタ、ガス電界電離イオン源、およびイオンビーム装置
CN104934275B (zh) * 2015-05-18 2018-01-09 北京大学 基于金属钼基底的场致电子发射阴极阵列及其制备方法
CN106691457B (zh) * 2016-12-30 2022-08-02 胡振强 指纹显影器
CN117174549A (zh) * 2022-05-26 2023-12-05 华为技术有限公司 一种电子源芯片及其制备方法、电子设备

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469014A (en) * 1991-02-08 1995-11-21 Futaba Denshi Kogyo Kk Field emission element
US5516404A (en) * 1993-07-30 1996-05-14 Siemens Aktiengesellschaft Method for manufacturing a micro-electronic component having an electrically conductive tip of doped silicon
WO1996036061A1 (en) * 1995-05-08 1996-11-14 Advanced Vision Technologies, Inc. Field emission display cell structure and fabrication process
US5702281A (en) * 1995-04-20 1997-12-30 Industrial Technology Research Institute Fabrication of two-part emitter for gated field emission device
US5731597A (en) * 1995-09-25 1998-03-24 Korea Information & Communication Co., Ltd. Field emitter array incorporated with metal oxide semiconductor field effect transistors and method for fabricating the same
EP0856868A2 (de) * 1994-04-25 1998-08-05 Commissariat A L'energie Atomique Herstellungsverfahren einer Feldemissionselektronenquelle und nach diesem Verfahren hergestellter Feldemissionselektronenquelle
US5869169A (en) * 1996-09-27 1999-02-09 Fed Corporation Multilayer emitter element and display comprising same
EP0945885A1 (de) * 1993-09-08 1999-09-29 Silicon Video Corporation Herstellung und Struktur von elektronen-emittierenden Vorrichtungen mit hoher Emitter-Packungsdichte
EP1011123A2 (de) * 1998-12-07 2000-06-21 Sony Corporation Feldemissions-Kathodenvorrichtung, Verfahren zu deren Herstellung und Feldemissions-Anzeigevorrichtung

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469014A (en) * 1991-02-08 1995-11-21 Futaba Denshi Kogyo Kk Field emission element
US5516404A (en) * 1993-07-30 1996-05-14 Siemens Aktiengesellschaft Method for manufacturing a micro-electronic component having an electrically conductive tip of doped silicon
EP0945885A1 (de) * 1993-09-08 1999-09-29 Silicon Video Corporation Herstellung und Struktur von elektronen-emittierenden Vorrichtungen mit hoher Emitter-Packungsdichte
EP0856868A2 (de) * 1994-04-25 1998-08-05 Commissariat A L'energie Atomique Herstellungsverfahren einer Feldemissionselektronenquelle und nach diesem Verfahren hergestellter Feldemissionselektronenquelle
US5702281A (en) * 1995-04-20 1997-12-30 Industrial Technology Research Institute Fabrication of two-part emitter for gated field emission device
WO1996036061A1 (en) * 1995-05-08 1996-11-14 Advanced Vision Technologies, Inc. Field emission display cell structure and fabrication process
US5731597A (en) * 1995-09-25 1998-03-24 Korea Information & Communication Co., Ltd. Field emitter array incorporated with metal oxide semiconductor field effect transistors and method for fabricating the same
US5869169A (en) * 1996-09-27 1999-02-09 Fed Corporation Multilayer emitter element and display comprising same
EP1011123A2 (de) * 1998-12-07 2000-06-21 Sony Corporation Feldemissions-Kathodenvorrichtung, Verfahren zu deren Herstellung und Feldemissions-Anzeigevorrichtung

Also Published As

Publication number Publication date
CN1334582A (zh) 2002-02-06
HK1043433A1 (zh) 2002-09-13
EP1174899A2 (de) 2002-01-23
JP2002083555A (ja) 2002-03-22

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