EP1172455A3 - Oberflächenbehandlungsverfahren von Titan - Google Patents

Oberflächenbehandlungsverfahren von Titan Download PDF

Info

Publication number
EP1172455A3
EP1172455A3 EP01117022A EP01117022A EP1172455A3 EP 1172455 A3 EP1172455 A3 EP 1172455A3 EP 01117022 A EP01117022 A EP 01117022A EP 01117022 A EP01117022 A EP 01117022A EP 1172455 A3 EP1172455 A3 EP 1172455A3
Authority
EP
European Patent Office
Prior art keywords
carburizing
titanium metal
carbon
gas
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01117022A
Other languages
English (en)
French (fr)
Other versions
EP1172455A2 (de
Inventor
Eiichi Ishii
Takumi Sone
Yukihiro Sato
Kei Demizu
Hideo Kakutani
Koichi Tanaka
Shinichi Tanaka
Noriyoshi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tanaka Ltd
SDC Inc
Osaka Prefecture
Original Assignee
Tanaka Ltd
SDC Inc
Osaka Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Ltd, SDC Inc, Osaka Prefecture filed Critical Tanaka Ltd
Publication of EP1172455A2 publication Critical patent/EP1172455A2/de
Publication of EP1172455A3 publication Critical patent/EP1172455A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
EP01117022A 2000-07-12 2001-07-12 Oberflächenbehandlungsverfahren von Titan Withdrawn EP1172455A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000211518 2000-07-12
JP2000211518 2000-07-12

Publications (2)

Publication Number Publication Date
EP1172455A2 EP1172455A2 (de) 2002-01-16
EP1172455A3 true EP1172455A3 (de) 2003-11-05

Family

ID=18707611

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01117022A Withdrawn EP1172455A3 (de) 2000-07-12 2001-07-12 Oberflächenbehandlungsverfahren von Titan

Country Status (2)

Country Link
US (1) US20020020476A1 (de)
EP (1) EP1172455A3 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5211503B2 (ja) * 2007-02-16 2013-06-12 富士通セミコンダクター株式会社 半導体装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062900A (en) * 1988-04-18 1991-11-05 Institut De Recherches De La Siderurgie Francaise Process for the improvement of the corrosion resistance of metallic materials
GB2261227A (en) * 1991-11-08 1993-05-12 Univ Hull Surface treatment of metals at low pressure
WO1998043284A1 (en) * 1997-03-27 1998-10-01 Micron Technology, Inc. Titanium metal treatment method, method of forming an electrically conductive interconnect, and method of reducing contact resistance of an elemental titanium contact

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2909361B2 (ja) * 1993-09-21 1999-06-23 大阪府 チタン金属の表面処理方法
AU1745695A (en) * 1994-06-03 1996-01-04 Materials Research Corporation A method of nitridization of titanium thin films

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062900A (en) * 1988-04-18 1991-11-05 Institut De Recherches De La Siderurgie Francaise Process for the improvement of the corrosion resistance of metallic materials
GB2261227A (en) * 1991-11-08 1993-05-12 Univ Hull Surface treatment of metals at low pressure
WO1998043284A1 (en) * 1997-03-27 1998-10-01 Micron Technology, Inc. Titanium metal treatment method, method of forming an electrically conductive interconnect, and method of reducing contact resistance of an elemental titanium contact

Also Published As

Publication number Publication date
EP1172455A2 (de) 2002-01-16
US20020020476A1 (en) 2002-02-21

Similar Documents

Publication Publication Date Title
EP1473380A3 (de) Vorrichtung und Methode zur Herstellung von Metallschichten
WO2003021650A1 (fr) Procede de formation d'un film
TW357199B (en) Process for plasma enhanced anneal of titanium nitride
TW237484B (de)
KR100245361B1 (ko) 철계 재료상에 내식성 및 내마모성 층을 형성하는 방법
MY120524A (en) Part or jig for gas carburizing furnace
AU3724095A (en) Stainless steel acid treatment
EP1172455A3 (de) Oberflächenbehandlungsverfahren von Titan
EP1211329A3 (de) Verfahren und Vorrichtung zum Hochdruckgasabschrecken in einem Schutzgasofen
Rie et al. Plasma surface engineering of metals
MY125787A (en) One-step noble metal-aluminide coatings.
CA2326239A1 (fr) Procede de carbonitruration a basse pression de pieces en alliage metallique
DE59704123D1 (de) Verfahren zur Aufkohlung metallischer Werkstücke in einem Vakuum-Ofen
GR3034871T3 (en) Method and apparatus for cleaning a metal substrate
GB2245601A (en) Surface treatment of metals and alloys
US5851314A (en) Method for plasma carburization of metal workpieces
US7291229B2 (en) Method of surface treatment of titanium metal
EP1264914A3 (de) Verfahren und Vorrichtung zum Aufkohlen
EP0790533A3 (de) Verfahren und Apparat für Oberflächenreinigung
ES2080416T3 (es) Procedimiento para el tratamiento de aceros y metales refractarios.
EP1090673A3 (de) Behandlung von Gasmischungen
JP4744019B2 (ja) チタン金属の表面処理方法
Hou et al. Carbide Extreme Value and Carbon Potential Threshold
GB8828559D0 (en) Composition & method for coating metal surfaces
ATE278049T1 (de) Verfahren zur oberflächenbehandlung von titan, aus titan hergestellte oder mit titan beschichtete und nach einem derartigen verfahren behandelte gegenstände

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

17P Request for examination filed

Effective date: 20040504

AKX Designation fees paid

Designated state(s): DE ES FR GB IT

17Q First examination report despatched

Effective date: 20041019

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20050411