EP1172455A3 - Method of surface treatment of titanium metal - Google Patents

Method of surface treatment of titanium metal Download PDF

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Publication number
EP1172455A3
EP1172455A3 EP01117022A EP01117022A EP1172455A3 EP 1172455 A3 EP1172455 A3 EP 1172455A3 EP 01117022 A EP01117022 A EP 01117022A EP 01117022 A EP01117022 A EP 01117022A EP 1172455 A3 EP1172455 A3 EP 1172455A3
Authority
EP
European Patent Office
Prior art keywords
carburizing
titanium metal
carbon
gas
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01117022A
Other languages
German (de)
French (fr)
Other versions
EP1172455A2 (en
Inventor
Eiichi Ishii
Takumi Sone
Yukihiro Sato
Kei Demizu
Hideo Kakutani
Koichi Tanaka
Shinichi Tanaka
Noriyoshi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tanaka Ltd
SDC Inc
Osaka Prefecture
Original Assignee
Tanaka Ltd
SDC Inc
Osaka Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Ltd, SDC Inc, Osaka Prefecture filed Critical Tanaka Ltd
Publication of EP1172455A2 publication Critical patent/EP1172455A2/en
Publication of EP1172455A3 publication Critical patent/EP1172455A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Abstract

A method of carburizing treatment is proposed in which if carburizing is carried out at a low temperature, carbon will not turn amorphose and deposit on the surface of a titanium metal but reliably penetrate into between metallic atoms. It is a method of surface treatment of a titanium metal comprising the steps of heating the titanium metal to a temperature of 400-690 °C in a cleaning gas atmosphere containing hydrogen gas, subjecting the surface of the titanium metal to cleaning by applying a DC voltage of 200-1500 V, and plasma carburizing in an atmosphere comprising a carburizing gas having the molar ratio of hydrogen atoms (H) to carbon atoms (C) adjusted to (H/C) ≦ 9 at a pressure of 13-400 Pa and a temperature of 400-690 °C . Ionization reaction in the gas is suppressed suitably. Because there exists no excessive carbon which is not used for carburization but turns soot or glass-like carbon, in the atmosphere during carburization, carburizing reaction progresses smoothly.
EP01117022A 2000-07-12 2001-07-12 Method of surface treatment of titanium metal Withdrawn EP1172455A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000211518 2000-07-12
JP2000211518 2000-07-12

Publications (2)

Publication Number Publication Date
EP1172455A2 EP1172455A2 (en) 2002-01-16
EP1172455A3 true EP1172455A3 (en) 2003-11-05

Family

ID=18707611

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01117022A Withdrawn EP1172455A3 (en) 2000-07-12 2001-07-12 Method of surface treatment of titanium metal

Country Status (2)

Country Link
US (1) US20020020476A1 (en)
EP (1) EP1172455A3 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5211503B2 (en) * 2007-02-16 2013-06-12 富士通セミコンダクター株式会社 Manufacturing method of semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062900A (en) * 1988-04-18 1991-11-05 Institut De Recherches De La Siderurgie Francaise Process for the improvement of the corrosion resistance of metallic materials
GB2261227A (en) * 1991-11-08 1993-05-12 Univ Hull Surface treatment of metals at low pressure
WO1998043284A1 (en) * 1997-03-27 1998-10-01 Micron Technology, Inc. Titanium metal treatment method, method of forming an electrically conductive interconnect, and method of reducing contact resistance of an elemental titanium contact

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2909361B2 (en) * 1993-09-21 1999-06-23 大阪府 Surface treatment method for titanium metal
WO1995034092A1 (en) * 1994-06-03 1995-12-14 Materials Research Corporation A method of nitridization of titanium thin films

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062900A (en) * 1988-04-18 1991-11-05 Institut De Recherches De La Siderurgie Francaise Process for the improvement of the corrosion resistance of metallic materials
GB2261227A (en) * 1991-11-08 1993-05-12 Univ Hull Surface treatment of metals at low pressure
WO1998043284A1 (en) * 1997-03-27 1998-10-01 Micron Technology, Inc. Titanium metal treatment method, method of forming an electrically conductive interconnect, and method of reducing contact resistance of an elemental titanium contact

Also Published As

Publication number Publication date
US20020020476A1 (en) 2002-02-21
EP1172455A2 (en) 2002-01-16

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