EP1172455A3 - Procédé de traitement de surface de titane - Google Patents

Procédé de traitement de surface de titane Download PDF

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Publication number
EP1172455A3
EP1172455A3 EP01117022A EP01117022A EP1172455A3 EP 1172455 A3 EP1172455 A3 EP 1172455A3 EP 01117022 A EP01117022 A EP 01117022A EP 01117022 A EP01117022 A EP 01117022A EP 1172455 A3 EP1172455 A3 EP 1172455A3
Authority
EP
European Patent Office
Prior art keywords
carburizing
titanium metal
carbon
gas
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01117022A
Other languages
German (de)
English (en)
Other versions
EP1172455A2 (fr
Inventor
Eiichi Ishii
Takumi Sone
Yukihiro Sato
Kei Demizu
Hideo Kakutani
Koichi Tanaka
Shinichi Tanaka
Noriyoshi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tanaka Ltd
SDC Inc
Osaka Prefecture
Original Assignee
Tanaka Ltd
SDC Inc
Osaka Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Ltd, SDC Inc, Osaka Prefecture filed Critical Tanaka Ltd
Publication of EP1172455A2 publication Critical patent/EP1172455A2/fr
Publication of EP1172455A3 publication Critical patent/EP1172455A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
EP01117022A 2000-07-12 2001-07-12 Procédé de traitement de surface de titane Withdrawn EP1172455A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000211518 2000-07-12
JP2000211518 2000-07-12

Publications (2)

Publication Number Publication Date
EP1172455A2 EP1172455A2 (fr) 2002-01-16
EP1172455A3 true EP1172455A3 (fr) 2003-11-05

Family

ID=18707611

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01117022A Withdrawn EP1172455A3 (fr) 2000-07-12 2001-07-12 Procédé de traitement de surface de titane

Country Status (2)

Country Link
US (1) US20020020476A1 (fr)
EP (1) EP1172455A3 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5211503B2 (ja) * 2007-02-16 2013-06-12 富士通セミコンダクター株式会社 半導体装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062900A (en) * 1988-04-18 1991-11-05 Institut De Recherches De La Siderurgie Francaise Process for the improvement of the corrosion resistance of metallic materials
GB2261227A (en) * 1991-11-08 1993-05-12 Univ Hull Surface treatment of metals at low pressure
WO1998043284A1 (fr) * 1997-03-27 1998-10-01 Micron Technology, Inc. Procede de traitement d'un metal contenant du titane, procede de formation d'une interconnexion electroconductrice et procede de reduction de la resistance d'un contact en titane elementaire

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2909361B2 (ja) * 1993-09-21 1999-06-23 大阪府 チタン金属の表面処理方法
WO1995034092A1 (fr) * 1994-06-03 1995-12-14 Materials Research Corporation Procede de nitruration de couches minces de titane

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062900A (en) * 1988-04-18 1991-11-05 Institut De Recherches De La Siderurgie Francaise Process for the improvement of the corrosion resistance of metallic materials
GB2261227A (en) * 1991-11-08 1993-05-12 Univ Hull Surface treatment of metals at low pressure
WO1998043284A1 (fr) * 1997-03-27 1998-10-01 Micron Technology, Inc. Procede de traitement d'un metal contenant du titane, procede de formation d'une interconnexion electroconductrice et procede de reduction de la resistance d'un contact en titane elementaire

Also Published As

Publication number Publication date
US20020020476A1 (en) 2002-02-21
EP1172455A2 (fr) 2002-01-16

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