EP1127285A1 - Module electro-optique et son procede de production - Google Patents

Module electro-optique et son procede de production

Info

Publication number
EP1127285A1
EP1127285A1 EP99971928A EP99971928A EP1127285A1 EP 1127285 A1 EP1127285 A1 EP 1127285A1 EP 99971928 A EP99971928 A EP 99971928A EP 99971928 A EP99971928 A EP 99971928A EP 1127285 A1 EP1127285 A1 EP 1127285A1
Authority
EP
European Patent Office
Prior art keywords
optical component
circuit board
electro
printed circuit
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99971928A
Other languages
German (de)
English (en)
Inventor
Hans Kragl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harting Elecktro Optische Bauteile GmbH and Co KG
Original Assignee
Harting Elecktro Optische Bauteile GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1998151265 external-priority patent/DE19851265C2/de
Application filed by Harting Elecktro Optische Bauteile GmbH and Co KG filed Critical Harting Elecktro Optische Bauteile GmbH and Co KG
Publication of EP1127285A1 publication Critical patent/EP1127285A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/04Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
    • H05K3/045Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by making a conductive layer having a relief pattern, followed by abrading of the raised portions
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment

Definitions

  • the invention relates to an assembly consisting of a printed circuit board with an electro-optical component and an optical component.
  • the invention further relates to an approach for the manufacture of such an assembly.
  • Electro-optical components for example laser diodes, LEDs and
  • Photodetectors are coupled to an optical component, for example an optical fiber or a waveguide.
  • the electro-optical components are arranged on a substrate on which the optical component is also arranged.
  • An example of such an assembly is from the German publication
  • a photo detector gate is coupled to an optical fiber.
  • the pholodetector and the optical fiber are accommodated in a two-part substrate, a waveguide trench being provided in one substrate part, which trench separates the optically transparent one used when the two substrate parts are glued together
  • Adhesive is filled so that a waveguide coupling the photodetector and the optical fiber is formed.
  • the electro-optical component can only be precisely positioned relative to the optical component with great effort, for example using guide bevels which are intended to ensure the optimal alignment. Examples of such designs can be found in German Offenlegungsschriflcn 44 01 219 and 42 32 608 known.
  • the optical element which is coupled to the electro-optical component that is to say the waveguide in the example mentioned, is only formed when the two substrate parts are bonded together. If the waveguide is faulty, this means that the photodetector is also part of the committee because it is inseparable from the assembly.
  • Waveguides which can have dimensions down to 1 ⁇ m, are not sufficient.
  • the invention creates an assembly in which an optical component is arranged with the desired accuracy relative to an electro-optical component.
  • the invention also provides a method for producing such an assembly, which is characterized by a high bulge.
  • An assembly according to the invention consists of a printed circuit board and an optical component, the printed circuit board being provided with at least one electro-optical component, at least one conductor track for the connection of the electro-optical component and a three-dimensional, microstructured adjustment configuration, relative to which the electronic optical component is precisely arranged, and wherein a three-dimensional positional arrangement is provided on the optical component, which interacts with the Justicrgcstallung the circuit board such that the optical component is precisely coupled to the electro-optical component of the circuit board.
  • the assembly consists of two sub-assemblies, namely the printed circuit board with the electro-optical component and the optical component itself. These are individually functional so that they can be tested separately. So it can be checked with regard to the circuit board whether the
  • Conductor tracks for the connection of the electro-optical component, the connection of the electro-optical component with the conductor tracks and finally the electro-optical component itself are fully functional.
  • the optical component it can be checked whether the optical component, for example a waveguide or a
  • the electro-optical component is only coupled to the optical component when the circuit board and the optical component are joined, passively via the adjustment and the positional configuration.
  • the circuit board is an injection molded part which is partially provided with a metallization.
  • a heat sink is arranged at the bottom of the depression in which the electro-optical component is accommodated. This heatsink is used to
  • the heat sink can consist, for example, of a melamine layer which is formed at the same time as the metallization of the printed circuit board.
  • the heat sink can be used as one of the connections for the electro-optical component if it is connected to the heat sink in an electrically conductive manner, for example by means of adhesive.
  • the press fit ensures the precise arrangement of the electro-optical component in the recess without additional measures for securing the electro-optical component being required.
  • the electro-optical component has a rectangular base area and the depression is formed by a circular receiving milling hole, the dimensions of which are smaller than the diagonals of the base area, and that four adjustment holes are provided, which are assigned to the corners of the component are and their cut edges with the wall of the receiving milling hole serve for precise alignment of the component.
  • the recess of the electro-optical component can be formed in a very precise manner with a flat base surface by means of the receiving milling hole.
  • the adjustment holes then make it possible to hold the electro-optical component in a precise alignment in the receiving milling hole.
  • Parabolic reflector that forms the emitted light to the optical
  • Electro-optical components that In particular, LED chips emit light without a preferred direction. The light emitted by the LED chip, which is emitted outside the acceptance angle of the associated optical component, would be lost if, for example, the parabolic reflector is not used for beam shaping. Such a parabolic reflector replaces a converging lens, which could be used as an alternative, but which means a much higher expenditure on the lens.
  • the reflective layer of the parabolic reflector can be formed in a particularly simple manner from the metallization that is applied to the circuit board in order to also form the conductor tracks.
  • an optical fiber can be used as the optical component, the outer contour of which forms the positional configuration, and the adjustment design of the printed circuit board which interacts with the positional configuration can be achieved by a guide groove for the
  • Optical fiber can be formed in which it is received.
  • the optical component is thus directly aligned with the adjustment design, and thus relative to the electro-optical component of the printed circuit board, so that the desired coupling between the electro-optical and the optical component is obtained.
  • the guide groove is preferably formed with a V-shaped cross section.
  • the optical component can be arranged on a substrate on which the positional configuration is formed, which is microstructured.
  • the optical component is thus aligned indirectly with the interposition of the substrate relative to the electro-optical component.
  • the optical component is a waveguide or a mirror.
  • the optical components quasi need the substrate as a support structure. This is because the waveguide is usually formed in a well channel in the substrate, and the mirror can be formed by a reflectively designed surface with a suitable geometric structure, so that, for example, a concave mirror is provided, which is similar to a parabolic reflector from the electro-optical one Bautcil bundles provided light to another optical component, for example the end face of an optical fiber.
  • a method for producing an assembly from a printed circuit board, on which at least one electro-optical component is arranged, and an optical component, which is coupled to the electro-optical component contains the following steps: wherein a recess for receiving the electro-optical component and a three-dimensional adjustment design are formed. Then the circuit board blank. Completed by partially metallizing it to form a circuit board. The electro-optical component is then arranged in the depression and connected to the conductor track. Furthermore, an optical component is provided separately from the printed circuit board, on which a three-dimensional positioning design is provided. Finally, the printed circuit board and the optical component are joined together, the adjustment and the positioning design intermeshing and leading to a precise alignment of the printed circuit board and the optical component relative to one another.
  • circuit board and optical component are attached to each other.
  • This method enables the assembly to be manufactured particularly economically since, as is preferably provided, both the electro-optical component of the circuit board and the optical component can be tested separately for their correct function before the circuit board and optical component are connected. If correct functioning cannot be determined, only the corresponding subassembly belongs to the committee, so that the overall committee rate of the process is considerably improved.
  • the precise alignment of the components relative to one another required for the coupling between the electro-optical component and the optical component is quasi automatically obtained passively by the interlocking of the adjustment design and the positioning configuration.
  • the depression for receiving the electro-optical component and the three-dimensional adjustment design are molded from the injection mold so that it can be processed with the required precision without further processing steps be received.
  • the printed circuit board is heated in order to arrange the electro-optical component in the recess.
  • the thermal expansion that occurs during heating makes it possible to insert the component freely into the recess.
  • the shrinkage that occurs during cooling then leads to the electro-optical component being held securely and reliably in the recess with a suitable press fit, without further steps being necessary.
  • circuit board and optical component are glued directly to one another. In this way, the circuit board and the optical component are glued directly to one another.
  • the adhesive can also be used to fill any space between the mutually assigned surfaces of the electro-optical component and the optical component. This is not absolutely necessary, but increases the quality of the coupling between the two components if the adhesive is made of highly transparent material and completely fills the space in the siren path between the electro-optical and the optical component.
  • the optical component is attached to a substrate. where the positioning design is formed and which is connected to the circuit board. This gives more freedom in terms of the type of connection between the circuit board and the optical component.
  • the adhesive bonding mentioned above it can also be provided that the printed circuit board and the substrate are soldered to one another.
  • FIG. 1 is a schematic sectional view of an assembly according to a first embodiment of the invention
  • FIG. 2 is a plan view of a printed circuit board used in the assembly of Figure 1 before assembly with the electro-optical component;
  • FIG. 4 shows a top view of a silicon master part which is used for producing the printed circuit board blank from FIG. 2;
  • FIG. 6 shows a sectional view corresponding to the plane V-V of FIG. 4, a nickel workpiece which was obtained by molding the silicon master part from FIG. 5:
  • FIG. 7 shows, in a schematic plan view, a depression which can be used to hold an electro-optical component in a printed circuit board
  • FIG. 8 is a sectional view taken along the line VIII-VIII of Figure 12;
  • - Figure 9 is a schematic sectional view of an assembly according to a second embodiment of the invention.
  • FIG. 11 is a schematic sectional view of an assembly according to a fourth embodiment of the invention.
  • FIG. 13a shows a schematic sectional view of an assembly according to a sixth embodiment of the invention.
  • FIG. 14 shows, in a schematic sectional view, a first step for arranging the electro-optical component in a recess in the printed circuit board
  • FIG. 15 shows a schematic sectional view of a second step for arranging the electro-optical component in the depression of the printed circuit board
  • FIG. 16 is a schematic sectional view of an alternative second step for arranging the electro-optical component in a recess of the circuit board;
  • FIG. 18 is a perspective schematic view of the assembly of the seventh embodiment of the invention.
  • Figure 19 is a perspective exploded view of an assembly according to an eighth embodiment of the invention. and - Figure 20 in a rope view a part of the assembly of the eighth embodiment of the invention.
  • FIG. This consists of a circuit board 10 and two optical signals
  • Components here a mirror 54 and a waveguide 56, which are formed on a substrate 50.
  • the printed circuit board 10 (see also FIGS. 2 and 3) is preferably produced in an impression process, in particular in injection molding technology.
  • a Justicrgcstaltung 12 is formed on the surface of the circuit board, which here consists of a raised adjustment cross.
  • a depression 14 is formed in its surface, which is used to hold an electro-optical component 16.
  • the electro-optical component can be, in particular, a cyclo-optical chip, for example a laser diode, an LED, a VCSEL chip or a Pholodctektor.
  • Both the alignment cross 12 and the recess 14 are precisely microstructured with regard to their geometric shape and their arrangement relative to one another. This means that a desired geometry with a very high
  • two grooves 18 are further molded, which will later be used to form conductor tracks. At one end of the grooves 18 there are bores 20 for receiving contact pins 22.
  • the surface of the printed circuit board blank 10' must be covered with a
  • Metallization can be provided.
  • the blank is first plasma-cleaned, and then the surface is metallized by a chemical process or a vacuum evaporation process.
  • the metallization formed on the surface in this way is very thin, so that it can be polished or ground off without problems on all raised areas, that is to say all areas apart from the tying 14 and the trenches 18.
  • a metal layer 26 can be formed on the bottom of the depression 14, which serves as a heat sink for the electro-optical component that is later inserted into the depression 14.
  • the heat sink extends into an extension 14a of the depression, so that a larger area is available for the cooling effect.
  • different voltages can be applied to the metallizations in the grooves 18 or at the bottom of the depression 14 in order to use different amounts of material to deposit there.
  • the electro-optical component 16 is inserted into the depression 14 and connected to the two conductor tracks 24 by a bonding wire 28 each. It is also possible to get the electrical connection by gluing.
  • the heat sink 26 can also be used as an electrical connection of the electro-optical component 16.
  • the underside of the component 16 is connected to the heat sink 26 in an electrically conductive manner by soldering or conductive adhesive. Then only one bonding wire 18 is required to form the second connection of the electro-optical component via one of the conductor tracks 18. Regardless of the type of electrical connection of the electro-optical component, a good heat-conducting connection to the heat sink 26 must be ensured.
  • the electro-optical component 16 is now precisely arranged relative to the adjustment cross 12.
  • a positioning configuration 52 is formed on the substrate 50, which consists of a geometric structure that is inverse to the adjustment configuration 12 of the printed circuit board, in this case, therefore, of a recessed adjustment cross.
  • the substrate 50 is further provided with the two optical components mirror 54 and waveguide 56 mentioned briefly above.
  • the waveguide can be formed by known methods
  • Microstructure technology can be formed, and the mirror 54 can be formed by a metallization applied to an inclined surface of the substrate.
  • the positioning design 52 is the same as that
  • Adjustment design 12 mikroslrukturicrl, and the two optical components 54 and 56 of the substrate are precisely arranged relative to the positioning design.
  • the assembly is then obtained by joining the circuit board 10 and the substrate 50 together.
  • the printed circuit board and the substrate and thus the components attached to them are precisely aligned relative to one another.
  • the electro-optical component 16 of the circuit board is thus in the position which is required for optical coupling with the mirror 54 and the waveguide 56. This is indicated by a schematically illustrated beam path 60.
  • circuit board 10 and the substrate 50 are connected to one another. This can be done, for example, by soldering, for which purpose metallized areas on the printed circuit board 10 and the substrate 50 are advantageously used.
  • the circuit board and the substrate are preferably bonded to one another, with a suitable choice of the adhesive completely filling the space between the electro-optical component of the circuit board and the optical component of the substrate in the region of the beam path between the two components with a highly transparent adhesive can to improve the optical coupling.
  • the printed circuit board blank 10 'shown in FIG. 2 carries raised and recessed structures at the same time, the tool for its manufacture cannot be produced by the microstructure technology which is widespread in the field of integrated optics, since this generally does not allow material application. It is therefore necessary to use the technique of galvanic copying, with which raised and deepened structures can be formed. In addition, there is the problem of the depression 14 in the printed circuit board being vertical
  • FIG. 4 shows a silicon master part 10 ′′, the surface of which is inverse to the circuit board blank 10 ′ was formed using silicon micromechanics.
  • the adjustment cross 12 raised on the circuit board blank 10 ′ is designed as a recessed adjustment cross 12 ′′ (by KOH Etching), and the grooves 18 for the conductor tracks, which are formed in a recessed manner on the printed circuit board blank 10 ', are locally raised by removing the outer edge regions of the recessed structures by RIE ablation.
  • the outer edge areas of the depression 14 to be formed on the printed circuit board blank 10 ' have been etched away, so that the areas 14 "which later correspond to the depression 14 appear raised, to be precise with respect to that local environment.
  • the silicon master part 10 is now copied simply (or an odd number of times) so that the tool 10 '" shown in FIG. 6 is made of nickel, which is the first, third, ... generation.
  • This tool can now be structured in the desired manner using an NC drilling and milling machine.
  • Figures 7 and 8 is a
  • Example of the tying 14 shown for receiving the electro-optical component The recess 14 is formed by a large receiving hole, which is a milling hole with a straight bottom surface up to one Diameter of approx. 300 ⁇ m is currently technically feasible.
  • the cylindrical wall 14 ′ formed in this way has a diameter that is smaller than a diagonal of the electro-optical component that is later to be received in the depression 14.
  • an adjustment bore is formed with a diameter that is smaller than the diameter of the receiving bore and in particular can have a value of less than 100 ⁇ m.
  • the adjustment bores and the receiving bore overlap, so that the walls 14 "of the adjustment bores also intersect with the wall 14 'of the receiving bores.
  • the resulting eight cutting edges serve for the precise alignment of the electro-optical component in the recess 14, in each case by attack two cut edges on one and the other side of each corner of the electro-optical component.
  • FIG. 8 shows very well the flat base surface which is formed in this way and which later serves for the precise arrangement of the electro-optical component in the recess.
  • the edges of the component accommodated in the depression 14 are indicated in FIG.
  • a component with a square base in the same way, a component with a generally rectangular base area could also be used. In this case, only the receiving bore would have to be formed with an elongated hole-like shape.
  • FIG. 9 shows a second embodiment of an assembly according to the invention.
  • two substrates 50 are used, one carrying a mirror 54 and the other carrying a waveguide 56.
  • Each substrate is provided with a positional arrangement 52, so that the two optical components 54, 56 are optimally aligned and the electro-optical component 16 is connected to the waveguide 56 by end face coupling via the mirror 54.
  • FIG. 10 shows a third embodiment of an assembly according to the invention.
  • a mirror 54 is used as the optical component, which is formed by a metallized surface of the substrate 50. Since this the substrate 50 is not an integrated optical substrate, the substrate 50 can be produced, for example, as an injection molded part with the required precision.
  • an optical fiber 58 is used as the optical component, which is coupled via the mirror 54 to the electro-optical component 16 by end face coupling.
  • the optical fiber 58 is received in a guide groove in the circuit board.
  • the guide groove serves as a slurry of glass and the outer contour of the optical fiber 58 serves as a positional arrangement which, in cooperation with the juslier design, precisely aligns the optical fiber relative to the mirror 54 and the electro-optical component 16.
  • FIG. 11 shows a fourth embodiment of an assembly according to the invention.
  • the mirror In this embodiment, the mirror
  • the substrate 50 formed on the substrate 50 as a concave mirror so that it can be used for beam shaping.
  • the electro-optical component 16 used emits light without a preferred direction perpendicular to the surface, as is the case, for example, with an LED chip.
  • the curved surface on the substrate 50 required to produce the mirror 54 can be achieved, for example, by molding in an injection molding process.
  • FIG. 12 shows a circuit board for an assembly according to a fifth embodiment of the invention.
  • the parabolic surface can easily be achieved by using a correspondingly ground cutter for reworking the milling bore, as is known in principle from FIGS. 7 and 8.
  • the reflective coating of the reflector 32 can be achieved by means of the metallization used to produce the
  • Conductor tracks 24 is applied. It should be noted here that the bonding wires used to connect the electro-optical component 26
  • This embodiment is also electro-optical
  • Component 16 glued to a heat sink 26 on the bottom of the Well 14 is formed.
  • FIGS. 13a and 13b show an assembly according to a sixth embodiment.
  • a channel medium is inserted into the recess 14 as a cllro-optical component.
  • Lascrdiodc 16 used. This is coupled directly, that is to say without an interposed mirror, etc., to the optical component, which is designed here as an optical fiber 58.
  • a guide groove 12 with a V-shaped cross section serves as the adjustment mechanism.
  • the outer contour 52 of the optical fiber 58 which is shaped with the required precision in order to obtain the required alignment relative to the edge emitter LD, serves as the positional design.
  • FIGS. 14 to 16 show method steps such as the electro-optical component 16 safely and reliably in the recess
  • FIG. 14 shows the printed circuit board 10 and the electro-optical component 16 in the initial state.
  • the dimensions of the depression 14 are slightly smaller than the dimensions of the electro-optical component 16.
  • the printed circuit board 10 is heated from its initial temperature, which may be 20 ° C., for example, to a temperature of 100 ° C., for example.
  • the thermal expansion that occurs ensures that the dimensions of the depression 14 increase, so that the electro-optical component can now be inserted into the depression without problems.
  • the circuit board 10 has cooled back to its initial temperature, the walls of the depression 14 have come into contact with the electro-optical component 16 due to the painterly shrinkage that occurs, so that the latter is held reliably in the depression 14 with a press fit. No further measures are therefore required to attach the electro-optical component to the printed circuit board 10.
  • the electro-optical component 16 is replaced by a Press fit held in the recess 14.
  • this type of attachment is only suitable if the printed circuit board 10 has sufficient elasticity.
  • FIGS. 17 and 18 show an assembly according to a seventh
  • the printed circuit board 10 is provided with large contact areas 70 which have been produced by a suitable metallization.
  • the circuit board can be inserted into a SIMM connector with the contact areas in a manner comparable to howling
  • FIGS. 19 and 20 show an assembly according to an eighth embodiment of the invention.
  • the groove 18 in the substrate 50 serves as a positioning design 52 for the circuit board 10 to be used.
  • This is provided with adjustment structures 12 which are formed by the outer edges of an extension.
  • the parabolic mirror 54 is arranged in this continuous salt, in the interior of which a transmitting chip 16 is arranged.
  • This embodiment is characterized in that no separate positional circuits are required, but that the walls of the groove 18, which are already structured with high accuracy, ensure the alignment of the circuit board.
  • the substrate as a plug, which carries the optical components, for example in the form of optical fibers, and can be plugged onto the suitably structured printed circuit board.
  • Another advantage is that in addition to the Justiergcstaltung on the surface of the circuit board
  • Locking structures can be provided for different components, for example V-shaped grooves, so that the precise construction of lock-coupled integrated optical components, of fiber and fiber ribbon connectors or of fiber and fiber ribbon is possible on the circuit board.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

L'invention concerne un module contenant une carte de circuits (10) et un composant optique (54, 56, 58). La carte de circuits (10) comporte au moins un composant électro-optique (16), au moins un tracé conducteur (24) pour le raccordement du composant électro-optique (16) ainsi qu'un moyen de réglage microstructuré, tridimensionnel (12) par rapport auquel le composant électro-optique (16) est placé avec précision. Un moyen de positionnement tridimensionnel (52) prévu au niveau du composant optique (54, 56, 58) coopère avec le moyen de réglage (12) de la carte de circuits (10) de sorte que le composant optique (54, 56, 58) soit couplé avec précision au composant électro-optique (16) de la carte de circuits (10). Le composant électro-optique (16) est logé dans un évidement (14) de la carte de circuits. Dans un mode de réalisation de l'invention, le composant optique est une fibre optique (58).
EP99971928A 1998-11-06 1999-11-05 Module electro-optique et son procede de production Withdrawn EP1127285A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE1998151265 DE19851265C2 (de) 1998-11-06 1998-11-06 Elektro-optische Baugruppe sowie Verfahren zur Herstellung einer solchen Baugruppe
DE19851265 1998-11-06
PCT/EP1999/008485 WO2000028362A1 (fr) 1998-11-06 1999-11-05 Module electro-optique et son procede de production

Publications (1)

Publication Number Publication Date
EP1127285A1 true EP1127285A1 (fr) 2001-08-29

Family

ID=7886951

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99971928A Withdrawn EP1127285A1 (fr) 1998-11-06 1999-11-05 Module electro-optique et son procede de production

Country Status (6)

Country Link
US (1) US6504107B1 (fr)
EP (1) EP1127285A1 (fr)
JP (1) JP2002529787A (fr)
KR (1) KR20010086003A (fr)
DE (1) DE19861162A1 (fr)
WO (1) WO2000028362A1 (fr)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6670208B2 (en) * 2000-06-23 2003-12-30 Nec Corporation Optical circuit in which fabrication is easy
JP4635328B2 (ja) * 2000-11-28 2011-02-23 双葉電子工業株式会社 蛍光表示管
DE10065624C2 (de) 2000-12-29 2002-11-14 Hans Kragl Kopplungsanordnung zum optischen Koppeln eines Lichtwellenleiters mit einem elektro-optischen oder opto-elektrischen Halbleiterwandler
US20020110328A1 (en) 2001-02-14 2002-08-15 Bischel William K. Multi-channel laser pump source for optical amplifiers
WO2002079812A2 (fr) * 2001-03-28 2002-10-10 Iljin Corporation Module optique de taille reduite
EP1686399A1 (fr) 2001-05-02 2006-08-02 Oki Electric Industry Co., Ltd. Procédé de fabrication d'un élément optique
EP1298969A1 (fr) * 2001-09-27 2003-04-02 Agilent Technologies, Inc. (a Delaware corporation) Membre de base pour le montage de composants haute fréquence
US6628000B1 (en) * 2001-11-19 2003-09-30 National Semiconductor Corporation Techniques for maintaining parallelism between optical and chip sub-assemblies
JP3974480B2 (ja) * 2002-08-27 2007-09-12 沖電気工業株式会社 光学部材の実装方法および光モジュール
JP3947481B2 (ja) * 2003-02-19 2007-07-18 浜松ホトニクス株式会社 光モジュール及びその製造方法
TWI223870B (en) * 2003-06-27 2004-11-11 Nanya Technology Corp Method of forming capacitors having geometric deep trench
US6959134B2 (en) * 2003-06-30 2005-10-25 Intel Corporation Measuring the position of passively aligned optical components
US20050009239A1 (en) * 2003-07-07 2005-01-13 Wolff Larry Lee Optoelectronic packaging with embedded window
US6953990B2 (en) * 2003-09-19 2005-10-11 Agilent Technologies, Inc. Wafer-level packaging of optoelectronic devices
TW200821652A (en) * 2006-07-26 2008-05-16 Tomoegawa Co Ltd Optical connecting parts and optical connecting structure
KR100825732B1 (ko) * 2006-09-29 2008-04-29 한국전자통신연구원 광전배선 커넥터 모듈 및 그 모듈을 포함한 광전 통신 모듈
JP4865600B2 (ja) * 2007-03-06 2012-02-01 古河電気工業株式会社 光結合器
JP2009122197A (ja) * 2007-11-12 2009-06-04 Fujikura Ltd 光コネクタの位置決め構造
US20100098374A1 (en) * 2008-10-20 2010-04-22 Avago Technologies Fiber Ip (Signgapore) Pte. Ltd. Optoelectronic component based on premold technology
US20100165620A1 (en) * 2008-12-29 2010-07-01 Phoseon Technology, Inc. Reflector channel
JP5292184B2 (ja) * 2009-05-26 2013-09-18 株式会社東芝 光モジュール及びその製造方法
JP5102815B2 (ja) * 2009-08-31 2012-12-19 日立電線株式会社 光電気複合配線モジュールおよびその製造方法
US8477298B2 (en) * 2009-09-30 2013-07-02 Corning Incorporated Angle-cleaved optical fibers and methods of making and using same
US20110075976A1 (en) * 2009-09-30 2011-03-31 James Scott Sutherland Substrates and grippers for optical fiber alignment with optical element(s) and related methods
US8611716B2 (en) * 2009-09-30 2013-12-17 Corning Incorporated Channeled substrates for integrated optical devices employing optical fibers
US8295671B2 (en) * 2009-10-15 2012-10-23 Corning Incorporated Coated optical fibers and related apparatuses, links, and methods for providing optical attenuation
US8530818B2 (en) 2010-06-28 2013-09-10 Intel Corporation Apparatus, method and system for providing reflection of an optical signal
US9151918B2 (en) * 2010-08-26 2015-10-06 Vi Systems Gmbh Opto-electronic assembly for parallel high speed transmission
JP5664905B2 (ja) * 2011-01-18 2015-02-04 日立金属株式会社 光電変換モジュール
WO2013099415A1 (fr) * 2011-12-26 2013-07-04 株式会社フジクラ Module optique
US9323014B2 (en) * 2012-05-28 2016-04-26 Mellanox Technologies Ltd. High-speed optical module with flexible printed circuit board
US20130330033A1 (en) * 2012-06-12 2013-12-12 Futurewei Technologies, Inc. Tsv substrate with mirror and its application in high-speed optoelectronic packaging
TWI578043B (zh) * 2012-10-24 2017-04-11 鴻海精密工業股份有限公司 光電轉換模組
US9243784B2 (en) * 2012-12-20 2016-01-26 International Business Machines Corporation Semiconductor photonic package
US9400356B2 (en) 2013-03-14 2016-07-26 International Business Machines Corporation Fiber pigtail with integrated lid
TW201441705A (zh) * 2013-04-19 2014-11-01 Hon Hai Prec Ind Co Ltd 光學通訊模組
JP6138574B2 (ja) * 2013-05-15 2017-05-31 ローム株式会社 Ledモジュール
EP2865310A1 (fr) 2013-10-10 2015-04-29 Thomas Schiefer Dispositif de nettoyage
WO2018083966A1 (fr) * 2016-11-02 2018-05-11 国立研究開発法人産業技術総合研究所 Circuit optique et composant optique
TWI647501B (zh) * 2016-12-13 2019-01-11 峰川光電股份有限公司 主動光纜之製造方法
JP6920823B2 (ja) * 2017-01-20 2021-08-18 シチズンファインデバイス株式会社 反射部材付基板及びその製造方法
KR102206368B1 (ko) * 2017-12-05 2021-01-22 주식회사 라이팩 커넥터 플러그 및 이를 이용한 액티브 광 케이블 조립체
CN208569108U (zh) * 2018-06-27 2019-03-01 东莞市蓝光塑胶模具有限公司 一种易于固定的光纤连接器
DE102018009292A1 (de) 2018-11-26 2020-05-28 Harting Ag Elektrooptische Baugruppe mit Wärmeabführung sowie Verfahren zur Herstellung einer solchen Baugruppe

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611884A (en) * 1982-11-24 1986-09-16 Magnetic Controls Company Bi-directional optical fiber coupler
JPS61287264A (ja) * 1985-06-14 1986-12-17 Toshiba Corp 光半導体装置
DE3737251C2 (de) 1987-11-03 1997-02-27 Sel Alcatel Ag Halbleiter-Trägerelement für ein elektro-optisches Modul
US4787696A (en) 1987-12-18 1988-11-29 Gte Laboratories Incorporated Mounting apparatus for optical fibers and lasers
US4897711A (en) 1988-03-03 1990-01-30 American Telephone And Telegraph Company Subassembly for optoelectronic devices
JP2603522Y2 (ja) * 1991-03-29 2000-03-15 日本電気株式会社 イメージセンサ
US5179609A (en) 1991-08-30 1993-01-12 At&T Bell Laboratories Optical assembly including fiber attachment
JPH05113526A (ja) * 1991-10-21 1993-05-07 Omron Corp 光結合ユニツトおよびそれを用いたフアイバ光電センサ
US5259054A (en) 1992-01-10 1993-11-02 At&T Bell Laboratories Self-aligned optical subassembly
DE4232608C2 (de) * 1992-09-29 1994-10-06 Bosch Gmbh Robert Verfahren zum Herstellen eines Deckels für eine integriert optische Schaltung
DE4301455A1 (de) 1992-11-25 1994-05-26 Ant Nachrichtentech Anordnung zur Ankopplung von Lichtwellenleiterenden an Sende- oder Empfangselemente
DE4401219A1 (de) * 1994-01-18 1995-07-20 Bosch Gmbh Robert Integriert optisches Bauelement und Verfahren zur Herstellung eines integriert optischen Bauelements
US5432878A (en) * 1994-03-03 1995-07-11 Cts Corporation Silicon carrier for testing and alignment of optoelectronic devices and method of assembling same
DE4410740A1 (de) * 1994-03-28 1995-10-05 Bosch Gmbh Robert Integriert optische Schaltung
US5479540A (en) * 1994-06-30 1995-12-26 The Whitaker Corporation Passively aligned bi-directional optoelectronic transceiver module assembly
JPH08192532A (ja) * 1995-01-17 1996-07-30 Kyocera Corp 画像装置
DE19501285C1 (de) 1995-01-18 1996-05-15 Bosch Gmbh Robert Anordnung zur Umsetzung von optischen in elektrische Signale und Verfahren zur Herstellung
EP0804323B1 (fr) 1995-01-18 1998-11-04 Robert Bosch Gmbh Systeme permettant de convertir des signaux optiques en signaux electriques et procede de production
JP3658426B2 (ja) * 1995-01-23 2005-06-08 株式会社日立製作所 光半導体装置
US5739800A (en) * 1996-03-04 1998-04-14 Motorola Integrated electro-optical package with LED display chip and substrate with drivers and central opening

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0028362A1 *

Also Published As

Publication number Publication date
US6504107B1 (en) 2003-01-07
WO2000028362A1 (fr) 2000-05-18
KR20010086003A (ko) 2001-09-07
JP2002529787A (ja) 2002-09-10
DE19861162A1 (de) 2000-06-29

Similar Documents

Publication Publication Date Title
WO2000028362A1 (fr) Module electro-optique et son procede de production
DE10065624C2 (de) Kopplungsanordnung zum optischen Koppeln eines Lichtwellenleiters mit einem elektro-optischen oder opto-elektrischen Halbleiterwandler
DE19932430C2 (de) Opto-elektronische Baugruppe sowie Bauteil für diese Baugruppe
DE112008003784B4 (de) Flexible, optische Zwischenverbindung
DE112004000724B4 (de) Optischer Transceiver
DE10238741A1 (de) Planare optische Komponente und Kopplungsvorrichtung zur Kopplung von Licht zwischen einer planaren optischen Komponente und einem optischen Bauteil
AT503027B1 (de) Leiterplattenelement mit optoelektronischem bauelement und licht-wellenleiter
DE19819164C1 (de) Baugruppe
DE10023736A1 (de) Leiterplatte sowie Verfahren zur Herstellung einer Leiterplatte
EP0335104A2 (fr) Dispositif pour relier optiquement un ou plusieurs émetteurs optiques d'un ou plusieurs circuits intégrés
DE10004411A1 (de) Elektrooptisches Sende-/Empfangsmodul und Verfahren zu seiner Herstellung
DE60303140T2 (de) Optische verbindungsanordnung
DE202010016958U1 (de) Leuchtmodul für eine Beleuchtungseinrichtung eines Kraftfahrzeugs mit auf einem Silizium-Substrat angeordneten Halbleiterlichtquellen
DE60132214T2 (de) Verfahren zur herstellung einer optischen montageplatte
DE102017208523A1 (de) Photonisches Bauelement und Verfahren zu dessen Herstellung
DE19851265C2 (de) Elektro-optische Baugruppe sowie Verfahren zur Herstellung einer solchen Baugruppe
DE69816581T2 (de) Gegossenes Kunststoffgehäuse für ein Halbleiterbauelement
EP3577506B1 (fr) Circuit électro-optique comprenant un guide de transmission optique, module électro-optique destiné à être intégré dans un tel circuit électro-optique et procédé de fabrication d'une interface optique d'un circuit électro-optique
DE10310616B3 (de) Modul mit Schaltungsträger und elektrooptischem Wandler sowie Verfahren zur Herstellung desselben
DE10319900A1 (de) Optoelektronische Sende- und/oder Empfangsanordnung
EP1447696B1 (fr) Composant optoéléctronique modulaire
WO2005096682A2 (fr) Plaquette optoelectrique hybride totalement integree
DE102005002874B3 (de) Optoelektronisches Bauelement mit integrierter Wellenleiter-Ankopplung für passive Justage
DE10321257A1 (de) Metallträger (Leadframe) zur Aufnahme und Kontaktierung elektrischer und/oder optoelektronischer Bauelemente
DE10160508B4 (de) Anordnung zur Detektion von optischen Signalen mindestens eines optischen Kanals eines planaren optischen Schaltkreises und/oder zur Einkopplung optischer Signale in mindestens einen optischen Kanal eines planaren optischen Schaltkreises

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20010605

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

17Q First examination report despatched

Effective date: 20020328

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20021009