EP1013623B1 - Matériau en oxyde mixte résistant à la corrosion - Google Patents
Matériau en oxyde mixte résistant à la corrosion Download PDFInfo
- Publication number
- EP1013623B1 EP1013623B1 EP99403207A EP99403207A EP1013623B1 EP 1013623 B1 EP1013623 B1 EP 1013623B1 EP 99403207 A EP99403207 A EP 99403207A EP 99403207 A EP99403207 A EP 99403207A EP 1013623 B1 EP1013623 B1 EP 1013623B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- corrosion
- rare earth
- resistant material
- ytterbium
- erbium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/44—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249967—Inorganic matrix in void-containing component
- Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249971—Preformed hollow element-containing
- Y10T428/249974—Metal- or silicon-containing element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249987—With nonvoid component of specified composition
- Y10T428/24999—Inorganic
Definitions
- the present invention relates to a novel corrosion-resistant composite oxide material having extremely high corrosion resistance against an atmosphere of a halogen-containing corrosive gas a plasma of such a gas.
- the manufacturing process of various semi-conductor devices involves a step of dry etching or a dry-process formation of a thin film on a substrate surface which is conducted sometimes by using a highly reactive and highly corrosive halogen-containing gas such as chlorine- and/or a fluorine-containing gas, referred to as a processing gas hereinafter, in a chamber for plasma generation in some cases.
- a highly reactive and highly corrosive halogen-containing gas such as chlorine- and/or a fluorine-containing gas
- a silica-based material or silicon carbide-based material is used as a material for forming parts of the plasma instrument or apparatus coming into contact with such a highly corrosive atmosphere including, for example, inner walls of the plasma chamber and various jigs such as holders to support a semiconductor silicon wafer, protective covers, insulation rings and the like.
- a corrosion-resistant material is formed from a mixture of fluoride compounds according to the above mentioned proposal, such a material cannot be used at a temperature of several hundreds centigrade or higher because the melting point of such a fluoride mixture is so low.
- a single kind of a fluoride compound such as yttrium fluoride is used as a material for forming a corrosion-resistant material, the fluoride compound is converted into the corresponding oxyfluoride at a temperature of 1000°C or higher in the presence of even a trace amount of oxygen in the atmosphere so that full corrosion resistance can no longer be exhibited under such conditions.
- Japanese Patent Kokai 10-45467 discloses compositions including multiple oxide of aluminium and/or silicon and a IIIa group metal like Y, La, Ce, Nd and Dy. These compositions are used as corrosion resistant member composition e.g. for discharge walls of lamps, discharge tubes, inner walls of plasma processing apparatus used in semi-conductor device manufacture.
- the present invention accordingly has an object to provide a novel corrosion-resistant material capable of withstanding corrosive attack of any halogen-containing gases or plasma thereof at elevated temperatures even in the presence of oxygen in the atmosphere to overcome the above described disadvantages in the prior art.
- the present invention provides a novel corrosion-resistant material capable of withstanding attack of a halogen containing corrosive gas or a plasma thereof, formed from a composite oxide having a crystalline structure of a rare earth aluminium garnet expressed by the formula Ln 3 Al 5 O 12 , characterized in that:
- the most characteristic feature of the inventive corrosion-resistant material is that it is formed from a sintered composite oxide of a specific rare earth aluminium garnet having a crystalline structure of garnet, of which the composite oxide has a chemical composition of the formula Ln 3 Al 5 O 12 in which Ln is a rare earth element or a combination of rare earth elements selected from the group consisting of holmium, erbium, thulium, ytterbium and lutetium or, preferably, from the group consisting of erbium, thulium, ytterbium and lutetium.
- the halogen-containing corrosive gas which the corrosion-resistant material of the invention can withstand, includes fluorine-containing gases such as sulfur hexafluoride SF 6 , nitrogen trifluoride NF 3 , carbon tetrafluoride CF 4 , fluoroform CHF 3 , chlorine trifluoride CIF 3 and hydrogen fluoride HF, chlorine-containing gases such as chlorine Cl 2 , boron trichloride BCl 3 and silicon tetrachloride SiCl 4 , bromine-containing gases such as hydrogen bromide HBr and bromine Br 2 and iodine-containing gases such as hydrogen iodide HI.
- a halogen-containing plasma atmosphere can be generated by applying microwaves or high-frequency waves to an atmosphere of the above mentioned halogen-containing case.
- the rare earth constituent Ln forming the composite oxide of Ln 3 Al 5 O 12 can be any one or any combination of the rare earth elements including holmium, erbium, thulium, ytterbium and lutetium, it is preferable that the rare earth constituent Ln is selected from erbium, thulium, ytterbium and lutetium because these four rare earth elements each have an ionic radius smaller than that of yttrium which is used conventionally in a halogen-resistant anti-corrosion material and have lower basicity to exhibit very high corrosion resistance against halogen-containing corrosive gases. It is not always necessary that these four elements are used each in a high purity form but can be used as a mixture of the four elements so that the costs required for high-purity separation of the individual elements can be saved.
- the corrosion resistance of a corrosion-resistant material greatly depends on the surface area of the material coming into contact with the corrosive gas.
- the surface roughness Ra of the corrosion-resistant material of the invention does not exceed 1 ⁇ m so that the surface area of the article can be kept so low.
- a value 1 ⁇ m of Ra serves as a measure of the surface area above which the corrosion resistance of the material would be adversely affected due to an increase in the surface area coming into contact with the corrosive atmosphere.
- composite oxide body forming the inventive corrosion-resistant material has a porosity not exceeding 3% in order to prevent localized proceeding of corrosion on the pore surfaces along with an effect of decreasing the surface roughness of the sintered body.
- porosity is too large, it may be the case that electric fields are concentrated at or in the vicinity of the pores in the surface layer to accelerate proceeding of corrosion and the surface roughness Ra can hardly be so low as to be 1 ⁇ m or smaller.
- the corrosion resistance of the composite oxide material against halogen-containing corrosive gases is affected by the grain size of the composite oxide body.
- the grains of the body have a particle diameter not exceeding 50 ⁇ m since a great decrease is caused in the mechanical strength of the body when the grain size thereof is too large.
- the method for the preparation of the corrosion-resistant material of the invention is not particularly limitative.
- a powder having a particle diameter of 0.1 to 5 ⁇ m obtained from a blend of the starting materials including aluminium oxide and a rare earth oxide in a stoichiometric proportion by co-melting followed by solidification by cooling and pulverization is compression-molded into a powder compact which is subjected to a sintering heat treatment at a temperature of 1300 to 1800°C for 1 to 6 hours in vacuum or in an atmosphere of an inert gas to ensure a low porosity of the sintered body as desired followed by machining of the sintered body into the form of a desired material and grinding and polishing of the surface to ensure a desirable surface roughness.
- the thus obtained sintered body is highly corrosion resistant against attack of a halogen-containing corrosive gas or plasma thereof so that the material is useful as a lining material on the surface coming into contact with such a corrosive atmosphere.
- Sintered composite oxide bodies of ytterbium aluminium garnet Yb 3 Al 5 O 12 and erbium aluminium garnet Er 3 Al 5 O 12 were prepared by sintering powder compacts of the respective composite oxide powders having an average particle diameter of 1.5 ⁇ m at a temperature of up to 1800°C in vacuum or in an atmosphere of nitrogen or a mixture of nitrogen and hydrogen for 2 to 6 hours to give sintered bodies having a porosity of substantially 0% or about 2%, respectively, as calculated from the bulk density determined by the Archimede's method and the true density of the respective garnets.
- These sintered bodies were mechanically ground and polished on the surface to give a surface roughness Ra of 0.1 ⁇ m or 0.8 ⁇ m for the ytterbium aluminium garner samples and 0.1 ⁇ m or 0.7 ⁇ m for the erbium aluminium garnet samples.
- the surface roughness and porosity of the sintered body are each an important factor affecting the etching rate which is large when the surface of the sintered body is too coarse or the porosity thereof is too large.
- the etching rate of the sintered bodies of yttrium aluminum garnet cannot be small enough even when the surface roughness thereof is sufficiently low and the porosity thereof is sufficiently small.
- Sintered bodies of substantially zero porosity were prepared from the ytterbium aluminum garnet and erbium aluminum garnet powders in about the same manner as in Example by sintering at 1800 °C in vacuum for 2, 4 or 8 hours and they were ground and polished on the surface to give a surface roughness Ra of 0.1 ⁇ m.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Compositions Of Oxide Ceramics (AREA)
Claims (4)
- Matière résistant à la corrosion capable de résister à l'attaque d'un gaz corrosif halogéné ou d'un plasma de celui-ci, formée à partir d'un oxyde composite ayant une structure cristalline d'un grenat alumineux des Terres Rares exprimée par la formule Ln3Al5O12, caractérisée en ce que :Ln est un élément des Terres Rares ou une combinaison d'éléments des Terres Rares choisis dans le groupe constitué par l'holmium, l'erbium, le thulium, l'ytterbium et le lutétium,la rugosité de surface de ladite matière, Ra, ne dépasse pas 1 µm,la porosité de ladite matière ne dépasse pas 3%,le diamètre du grain cristallin de ladite matière ne dépasse pas 50 µm, eten ce qu'elle peut être obtenue par frittage d'un comprimé de poudre dudit grenat alumineux des Terres Rares pendant 1 à 6 heures à une température dans la gamme de 1 300°C à 1 800°C, dans une atmosphère sous vide ou une atmosphère d'un gaz inerte.
- Matière résistant à la corrosion selon la revendication 1, dans laquelle Ln est un élément des Terres Rares ou une combinaison d'éléments des Terres Rares choisis dans le groupe constitué par l'erbium, le thulium, l'ytterbium et le lutétium.
- Matière résistant à la corrosion selon la revendication 2, dans laquelle Ln est une combinaison d'erbium, de thulium, d'ytterbium et de lutétium.
- Procédé permettant de former une matière résistant à la corrosion selon les revendications 1 à 3, dans lequel une poudre ayant un diamètre de particules de 0,1 à 5 µm est obtenue à partir d'un mélange des matières premières comprenant de l'oxyde d'aluminium et un oxyde des Terres Rares dans une proportion stoechiométrique par co-fusion, suivie d'une solidification par refroidissement et d'une pulvérisation, caractérisé en ce que ladite poudre est moulée par compression en un comprimé de poudre qui est soumis à un traitement thermique de frittage à une température de 1 300°C à 1 800°C pendant 1 à 6 heures, sous vide ou dans une atmosphère d'un gaz inerte, pour former un corps fritté qui est soumis à un façonnage sous la forme de la matière souhaitée, à un meulage et à un polissage de la surface pour assurer une rugosité de surface souhaitable.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36225798 | 1998-12-21 | ||
JP36225798 | 1998-12-21 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1013623A2 EP1013623A2 (fr) | 2000-06-28 |
EP1013623A3 EP1013623A3 (fr) | 2000-07-05 |
EP1013623B1 true EP1013623B1 (fr) | 2004-09-15 |
Family
ID=18476392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99403207A Expired - Lifetime EP1013623B1 (fr) | 1998-12-21 | 1999-12-17 | Matériau en oxyde mixte résistant à la corrosion |
Country Status (3)
Country | Link |
---|---|
US (1) | US6326076B1 (fr) |
EP (1) | EP1013623B1 (fr) |
DE (1) | DE69920152T2 (fr) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6383964B1 (en) * | 1998-11-27 | 2002-05-07 | Kyocera Corporation | Ceramic member resistant to halogen-plasma corrosion |
US6642656B2 (en) * | 2000-03-28 | 2003-11-04 | Ngk Insulators, Ltd. | Corrosion-resistant alumina member and arc tube for high-intensity discharge lamp |
US6686045B2 (en) * | 2001-01-31 | 2004-02-03 | Shin-Etsu Chemical Co., Ltd. | Composite fine particles, conductive paste, and conductive film |
JP2002356387A (ja) * | 2001-03-30 | 2002-12-13 | Toshiba Ceramics Co Ltd | 耐プラズマ性部材 |
US6620756B2 (en) * | 2001-06-20 | 2003-09-16 | Ues, Inc. | Ceramic matrix composite cutting tool material |
US6884514B2 (en) * | 2002-01-11 | 2005-04-26 | Saint-Gobain Ceramics & Plastics, Inc. | Method for forming ceramic layer having garnet crystal structure phase and article made thereby |
US6780787B2 (en) * | 2002-03-21 | 2004-08-24 | Lam Research Corporation | Low contamination components for semiconductor processing apparatus and methods for making components |
US7968205B2 (en) | 2005-10-21 | 2011-06-28 | Shin-Etsu Chemical Co., Ltd. | Corrosion resistant multilayer member |
JP5235584B2 (ja) * | 2008-09-30 | 2013-07-10 | キヤノン株式会社 | 光学素子 |
US10157731B2 (en) * | 2008-11-12 | 2018-12-18 | Applied Materials, Inc. | Semiconductor processing apparatus with protective coating including amorphous phase |
US9034199B2 (en) | 2012-02-21 | 2015-05-19 | Applied Materials, Inc. | Ceramic article with reduced surface defect density and process for producing a ceramic article |
US9212099B2 (en) | 2012-02-22 | 2015-12-15 | Applied Materials, Inc. | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics |
US9850568B2 (en) | 2013-06-20 | 2017-12-26 | Applied Materials, Inc. | Plasma erosion resistant rare-earth oxide based thin film coatings |
US9711334B2 (en) | 2013-07-19 | 2017-07-18 | Applied Materials, Inc. | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings |
US9583369B2 (en) * | 2013-07-20 | 2017-02-28 | Applied Materials, Inc. | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles |
US9725799B2 (en) | 2013-12-06 | 2017-08-08 | Applied Materials, Inc. | Ion beam sputtering with ion assisted deposition for coatings on chamber components |
US9976211B2 (en) * | 2014-04-25 | 2018-05-22 | Applied Materials, Inc. | Plasma erosion resistant thin film coating for high temperature application |
US9869013B2 (en) | 2014-04-25 | 2018-01-16 | Applied Materials, Inc. | Ion assisted deposition top coat of rare-earth oxide |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62223009A (ja) * | 1986-03-20 | 1987-10-01 | Ube Ind Ltd | α−サイアロン粉末の製法 |
GB2243364B (en) * | 1990-04-06 | 1994-06-15 | Ube Industries | Sialon-based sintered body and process for producing same |
US5805973A (en) * | 1991-03-25 | 1998-09-08 | General Electric Company | Coated articles and method for the prevention of fuel thermal degradation deposits |
JP3007730B2 (ja) * | 1991-09-26 | 2000-02-07 | 守 大森 | 希土類酸化物−アルミナ焼結体およびその製造方法 |
JPH06389A (ja) * | 1992-03-02 | 1994-01-11 | Nippon Steel Corp | 自動車触媒用高耐熱型メタル担体 |
US5573862A (en) * | 1992-04-13 | 1996-11-12 | Alliedsignal Inc. | Single crystal oxide turbine blades |
JPH0652599A (ja) * | 1992-07-29 | 1994-02-25 | Sony Corp | Vtrのリール台ブレーキ装置 |
DE69317967T2 (de) * | 1992-09-14 | 1998-12-10 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | Wasserstoffabsorbierende Legierung für Batterien, Verfahren zu ihrer Herstellung und Nickel-Metallhydrid Sekundärbatterie |
US5902763A (en) * | 1995-01-19 | 1999-05-11 | Ube Industries, Inc. | Fused ceramic composite |
CN1211312C (zh) * | 1996-07-01 | 2005-07-20 | 宇部兴产株式会社 | 陶瓷复合材料和多孔陶瓷材料及其生产方法 |
JP3261044B2 (ja) * | 1996-07-31 | 2002-02-25 | 京セラ株式会社 | プラズマプロセス装置用部材 |
JP3619330B2 (ja) * | 1996-07-31 | 2005-02-09 | 京セラ株式会社 | プラズマプロセス装置用部材 |
JP3362113B2 (ja) * | 1997-07-15 | 2003-01-07 | 日本碍子株式会社 | 耐蝕性部材、ウエハー設置部材および耐蝕性部材の製造方法 |
CA2255983C (fr) * | 1997-12-16 | 2007-10-23 | Konoshima Chemical Co., Ltd. | Ceramique resistante a la corrosion et methode de production de celle-ci |
-
1999
- 1999-12-17 EP EP99403207A patent/EP1013623B1/fr not_active Expired - Lifetime
- 1999-12-17 DE DE69920152T patent/DE69920152T2/de not_active Expired - Lifetime
- 1999-12-21 US US09/468,304 patent/US6326076B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1013623A3 (fr) | 2000-07-05 |
DE69920152D1 (de) | 2004-10-21 |
EP1013623A2 (fr) | 2000-06-28 |
US6326076B1 (en) | 2001-12-04 |
DE69920152T2 (de) | 2005-09-22 |
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