EP0947289A1 - Läppmaschine - Google Patents

Läppmaschine Download PDF

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Publication number
EP0947289A1
EP0947289A1 EP99105171A EP99105171A EP0947289A1 EP 0947289 A1 EP0947289 A1 EP 0947289A1 EP 99105171 A EP99105171 A EP 99105171A EP 99105171 A EP99105171 A EP 99105171A EP 0947289 A1 EP0947289 A1 EP 0947289A1
Authority
EP
European Patent Office
Prior art keywords
smaller
platen
cast iron
lapping
lapping machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99105171A
Other languages
English (en)
French (fr)
Inventor
Toshihiro c/o Speedfam Co. Ltd. Seino
Akiro c/o Speedfam Co. Ltd. Yoshida
Kenji c/o Speedfam Co. Ltd. Amano
Tomohiro c/o Speedfam Co. Ltd. Aizawa
Takara c/o Hitachi Zosen Metal Works Co. Ltd Ito
Shinji c/o Hitachi Zosen Metal Works Co. Furusawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Hitachi Zosen Corp
Original Assignee
SpeedFam Co Ltd
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd, Hitachi Zosen Corp filed Critical SpeedFam Co Ltd
Publication of EP0947289A1 publication Critical patent/EP0947289A1/de
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C37/00—Cast-iron alloys
    • C22C37/04—Cast-iron alloys containing spheroidal graphite

Definitions

  • the work-piece and/or platens are rotated, under the constant supply of polishing compound slurry containing abrasives.
  • the abrasive By the effect of the abrasive, the surface of work-piece is removed gradually and a flat and precise surface can be generated.
  • the surface flatness of the lapped work-piece is an imitation of that of platen. Therefore, the dimensional accuracy and the flatness of the platen must be kept in precise level.
  • a cast iron platen can be ordinary used.
  • the conventional type lapping machine is not only hard for handling at the practical use, but also is not sufficient from the economical view point.
  • the added carbon is dispersed into fused iron during the fusion procedure and deposits as the spherical graphite homogeneously at the quenching process.
  • this cast iron is used as the lapping platen, said spherical graphite particles exists at the surface of the platen are removed by the friction caused by lapping action and forms fine hole. And the hole contributes to form an adequate surface roughness and catches fine particles of abrasive grain, and can be used as the lapping platen.
  • the inventors of this invention have carried out an intensive study to solve above mentioned problem which conventional lapping machine has, and have found that the use of specific Fe-Ni-Co type cast iron alloy as the material of lapping platen gives good results and accomplished the present invention. Namely, the inventors have took a metal component ratio of alloy into consideration as to control the state of carbon in the matrix of cast iron alloy, and have found a specific Fe-Ni-Co type cast iron alloy has not only low thermal expanding co-efficiency but also has proper features necessary as a platen such as stiffness or machinability. That is, the object of this invention is to provide a lapping machine which possesses a platen whose distortion by heat is small and not necessary to correct the surface so frequently.
  • the above mentioned object can be accomplished by a lapping machine which possesses a platen made of cast iron alloy containing 1.0 ⁇ 4.0 wt% of carbon, smaller than 38 wt% of summed weight of nickel and cobalt, smaller than 2.0 wt% of silicon, smaller than 2.0 wt% of manganese, smaller than 0.1 wt% of sulfur, smaller than 0.15 wt% of phosphorus, smaller than 0.1 wt% of magnesium and balancing weight of iron which contains small amount of impurity, wherein spherical graphite grains smaller than 50 ⁇ m diameter are dispersed in said cast iron alloy by smaller than 150pieces/mm 2 , and the thermal expanding co-efficiency of said cast iron alloy is smaller than 5 ⁇ 10 -6 /°C.
  • a lapping machine used in this invention is indicated by FIG.1, possesses a rotatable upper platen 1 at upper position and a rotatable lower position 2 at lower position as to faced, a work-piece 3 such as silicon wafer is held between said platens and rotated under the constant supply of lapping compound, and as the platen a cast iron platen having about 50 ⁇ 70 mm thickness is used.
  • the platen since the surface accuracy of the lapped work-piece is an imitation of that of platen, the platen must be stable against the external condition change such as temperature change.
  • the specific cast iron alloy used as the lapping platen in this invention has characteristics to satisfy above mentioned matter.
  • the thermal expanding co-efficiency (linear) of platen can be dropped to the level lower than 5 ⁇ 10 -6 /°C.
  • the diameter of said spherical graphite fine particle and the dispersing density of fine particles does not effect significantly to the ability of the cast iron, however, in a case of use as a platen, these factors are very important. That is, in the present invention, it is necessary that the diameter of spherical graphite dispersed in the matrix of alloy is smaller than 50 ⁇ m. When the spherical graphite is present at the surface of lapping platen, it is removed from the surface by the friction and the mark forms a fine pore.
  • the present invention it is necessary to disperse said fine particles of spherical graphite homogeneously in the matrix of alloy by smaller than 150/mm 2 density. If the dispersion in the alloy is not homogeneous, since the abnormal scratches are generated during the lapping process, the alloy can not be used as a platen.
  • a platen of 24B size (outer diameter is 1592 mm, thickness is 70 mm) is prepared and a double sided lapping machine having said platen at upper and lower position is assembled.
  • the work-piece of 8 inches (200 mm) size silicon wafer is processed by said double sided lapping machine.
  • the platens are not previously heated and any dummy runs are not carried out. From the first run, the products whose dimensional accuracy such as TTV or surface roughness are within the limit of quality standard can be obtained by 100% around productivity.
  • the cast iron alloy composed by following component is prepared. Content of carbon is 3.6 wt%, silicon content is 2.5 wt%, manganese content is 0.2 wt%, smaller than 0.04 wt% of sulfur, smaller than 0.1 wt% of phosphorus, smaller than 0.06 wt% of magnesium and balancing weight of iron.
  • the thermal expanding co-efficiency of the obtained cast iron alloy is 11 ⁇ 10 -6 /°C.
  • a platen of 24B size (outer diameter is 1592 mm, thickness is 70 mm) is prepared and a double sided lapping machine having said platen at upper and lower position is assembled. The work-piece of 8 inches (200 mm) size silicon wafer is processed by said double sided lapping machine.
  • the platens are not previously heated and any dummy runs are not carried out. Until 3rd runs, the lapped work-pieces are not stable from the view point of the dimensional accuracy and the productivity during first 3 runs is very low. From the 5th run, products having adequate quality can be obtained by high productivity.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP99105171A 1998-04-03 1999-03-30 Läppmaschine Withdrawn EP0947289A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9176898A JPH11286739A (ja) 1998-04-03 1998-04-03 ラッピング加工機
JP9176898 1998-04-03

Publications (1)

Publication Number Publication Date
EP0947289A1 true EP0947289A1 (de) 1999-10-06

Family

ID=14035756

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99105171A Withdrawn EP0947289A1 (de) 1998-04-03 1999-03-30 Läppmaschine

Country Status (2)

Country Link
EP (1) EP0947289A1 (de)
JP (1) JPH11286739A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021103709A1 (de) 2021-02-17 2022-08-18 Lapmaster Wolters Gmbh Doppel- oder Einseiten-Bearbeitungsmaschine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011092744A1 (ja) * 2010-01-29 2011-08-04 エヌ・ティ・ティ・アドバンステクノロジ株式会社 光ファイバー研磨装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1500766A (en) * 1974-06-14 1978-02-08 Goetzewerke Spheroidal cast-iron alloy of increased wear resistance
US4867803A (en) * 1985-03-25 1989-09-19 Kabushiki Kaisha Toshiba Lapping tools and method of manufacturing the same
JPH06212252A (ja) * 1993-11-15 1994-08-02 Toshiba Corp 研磨定盤用材料の製造方法
JPH09103956A (ja) * 1996-05-27 1997-04-22 Toshiba Corp 研磨定盤
EP0827810A1 (de) * 1996-09-05 1998-03-11 Kabushiki Kaisha Toshiba Werkstoff for Läppwerkzeug und Läppscheibe aus diesem Werkstoff

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1500766A (en) * 1974-06-14 1978-02-08 Goetzewerke Spheroidal cast-iron alloy of increased wear resistance
US4867803A (en) * 1985-03-25 1989-09-19 Kabushiki Kaisha Toshiba Lapping tools and method of manufacturing the same
JPH06212252A (ja) * 1993-11-15 1994-08-02 Toshiba Corp 研磨定盤用材料の製造方法
JPH09103956A (ja) * 1996-05-27 1997-04-22 Toshiba Corp 研磨定盤
EP0827810A1 (de) * 1996-09-05 1998-03-11 Kabushiki Kaisha Toshiba Werkstoff for Läppwerkzeug und Läppscheibe aus diesem Werkstoff

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 578 (C - 1269) 7 November 1994 (1994-11-07) *
PATENT ABSTRACTS OF JAPAN vol. 097, no. 008 29 August 1997 (1997-08-29) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021103709A1 (de) 2021-02-17 2022-08-18 Lapmaster Wolters Gmbh Doppel- oder Einseiten-Bearbeitungsmaschine

Also Published As

Publication number Publication date
JPH11286739A (ja) 1999-10-19

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