EP0941496A1 - Phasenring zur realisierung eines positiven phasenkontrastes - Google Patents
Phasenring zur realisierung eines positiven phasenkontrastesInfo
- Publication number
- EP0941496A1 EP0941496A1 EP98948715A EP98948715A EP0941496A1 EP 0941496 A1 EP0941496 A1 EP 0941496A1 EP 98948715 A EP98948715 A EP 98948715A EP 98948715 A EP98948715 A EP 98948715A EP 0941496 A1 EP0941496 A1 EP 0941496A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- phase
- layer
- substrate
- putty
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 239000010409 thin film Substances 0.000 claims abstract description 8
- 239000004568 cement Substances 0.000 claims abstract description 5
- 230000010363 phase shift Effects 0.000 claims description 28
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 10
- 229910052709 silver Inorganic materials 0.000 claims description 10
- 239000004332 silver Substances 0.000 claims description 10
- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 239000005304 optical glass Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium(II) oxide Chemical class [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 239000006117 anti-reflective coating Substances 0.000 claims 1
- 230000007423 decrease Effects 0.000 claims 1
- 239000010408 film Substances 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 16
- 239000011521 glass Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/14—Condensers affording illumination for phase-contrast observation
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19743027 | 1997-09-29 | ||
| DE19743027A DE19743027A1 (de) | 1997-09-29 | 1997-09-29 | Phasenring zur Realisierung eines positiven Phasenkontrastes |
| PCT/DE1998/002228 WO1999017145A1 (de) | 1997-09-29 | 1998-08-03 | Phasenring zur realisierung eines positiven phasenkontrastes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0941496A1 true EP0941496A1 (de) | 1999-09-15 |
Family
ID=7844023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP98948715A Withdrawn EP0941496A1 (de) | 1997-09-29 | 1998-08-03 | Phasenring zur realisierung eines positiven phasenkontrastes |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6212009B1 (ja) |
| EP (1) | EP0941496A1 (ja) |
| JP (1) | JP4199833B2 (ja) |
| CN (2) | CN1267761C (ja) |
| DE (1) | DE19743027A1 (ja) |
| WO (1) | WO1999017145A1 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5285306B2 (ja) * | 2008-03-06 | 2013-09-11 | 豊 末永 | 光学部品及び光学部品を用いた位相差顕微鏡 |
| DE102011006018A1 (de) | 2011-03-24 | 2012-09-27 | Hilti Aktiengesellschaft | Befestigungssystem |
| WO2019235511A1 (ja) * | 2018-06-05 | 2019-12-12 | 株式会社ニコン | 位相板、対物レンズ、及び観察装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE45855C (de) * | TH. OTTO in Schkeuditz | Selbstthätiger Kuppelungsapparat mit Daumen für Seilbahnen | ||
| US2427689A (en) * | 1942-08-28 | 1947-09-23 | American Optical Corp | Microscope with special light modifiers |
| US2616334A (en) | 1947-11-25 | 1952-11-04 | Zernike Frits | Phase microscopy |
| AT180745B (de) * | 1953-06-17 | 1955-01-10 | Optische Werke C Reichert Ag | Kontrastmikroskop |
| AT187704B (de) * | 1953-09-23 | 1956-11-26 | Optische Werke C Reichert Ag | Phasenkontrastmikroskop |
| DE2261780C2 (de) * | 1972-12-16 | 1979-09-20 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Verfahren zur Herstellung von unmittelbar nebeneinander liegenden Strukturen |
| DE3412958A1 (de) * | 1984-04-06 | 1985-10-17 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Phasengitter |
| US5144362A (en) * | 1990-11-14 | 1992-09-01 | Mitsubishi Denki Kabushiki Kaisha | Projection aligner |
| JP3413238B2 (ja) | 1993-03-31 | 2003-06-03 | オリンパス光学工業株式会社 | 位相制御膜構造体 |
-
1997
- 1997-09-29 DE DE19743027A patent/DE19743027A1/de not_active Ceased
-
1998
- 1998-08-03 JP JP51955399A patent/JP4199833B2/ja not_active Expired - Fee Related
- 1998-08-03 EP EP98948715A patent/EP0941496A1/de not_active Withdrawn
- 1998-08-03 CN CN200410031776.6A patent/CN1267761C/zh not_active Expired - Fee Related
- 1998-08-03 CN CNB988019884A patent/CN1179226C/zh not_active Expired - Fee Related
- 1998-08-03 US US09/308,855 patent/US6212009B1/en not_active Expired - Lifetime
- 1998-08-03 WO PCT/DE1998/002228 patent/WO1999017145A1/de not_active Application Discontinuation
Non-Patent Citations (1)
| Title |
|---|
| See references of WO9917145A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1179226C (zh) | 2004-12-08 |
| JP2001508557A (ja) | 2001-06-26 |
| CN1244264A (zh) | 2000-02-09 |
| DE19743027A1 (de) | 1999-05-12 |
| JP4199833B2 (ja) | 2008-12-24 |
| US6212009B1 (en) | 2001-04-03 |
| WO1999017145A1 (de) | 1999-04-08 |
| CN1534324A (zh) | 2004-10-06 |
| CN1267761C (zh) | 2006-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE10301665B4 (de) | Optische Vorrichtung mit Sperrschicht, optisches System und Projektor | |
| EP2173571B2 (de) | Sicherheitselement | |
| EP1894736B1 (de) | Sicherheitselement mit farbkippender Motivschicht und Verfahren zu dessen Herstellung | |
| CH664533A5 (de) | Vorrichtung zum authentizitaetsnachweis. | |
| DE3148447A1 (de) | Fluessigkristall-anzeigevorrichtung mit zwei verdrillten nematischen schichten | |
| DE2903866A1 (de) | Anzeigevorrichtung | |
| DE102006019118A1 (de) | Element mit optischer Markierung, Verfahren zur Herstellung und Verwendung | |
| DE102010055688A1 (de) | Optisch variables Element | |
| EP0535324A1 (de) | Flüssigkristallanzeige | |
| DE2843327A1 (de) | Magnetooptische phasenmodulationseinrichtung | |
| DE3040953A1 (de) | Bildanzeigeeinrichtung unter verwendung der doppelbrechungseigenschaften von ferroelektrischem keramikmaterial | |
| EP0941496A1 (de) | Phasenring zur realisierung eines positiven phasenkontrastes | |
| DE102017105372B4 (de) | Transparentes Element mit einer Antireflex-Beschichtung und Verfahren zu dessen Herstellung | |
| DE4307519C2 (de) | Spiegel für Synchrotronstrahlung | |
| DE1901977A1 (de) | Perot-Fabry-Interferenzfilter | |
| EP3405838B1 (de) | Reflektives optisches element und optisches system für die euv-lithographie | |
| DE3435750A1 (de) | Verfahren zum erzielen einer konstanten masshaltigkeit von leiterbahnen in integrierten schaltkreisen | |
| DE10319005A1 (de) | Reflektives optisches Element, optisches System und EUV-Lithographievorrichtung | |
| EP1119848A2 (de) | Optische datenspeicherscheibe | |
| DE112019006494T5 (de) | Optischer Modulator | |
| DE3402258A1 (de) | Farbenzerlegendes bauelement | |
| DE2445775A1 (de) | Polarisator | |
| DE3401914A1 (de) | Interferenzfilter mit einem durchlassband | |
| DE2921178A1 (de) | Reflexminderungs-schicht auf hochreflektierenden oberflaechen und verfahren zu deren herstellung | |
| DE102017211502A1 (de) | Polarisationseinheit mit einer schaltbaren Polarisationsfilterstruktur |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 19990518 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): CH DE FR GB LI |
|
| RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: GUNKEL, CLAUS Inventor name: ALT-NEDVIDEK, SABINE |
|
| 17Q | First examination report despatched |
Effective date: 20040414 |
|
| RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: LEICA MICROSYSTEMS CMS GMBH |
|
| 17Q | First examination report despatched |
Effective date: 20040414 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 20071026 |