EP0922163B1 - Pompe a vide a piston avec admission et evacuation - Google Patents

Pompe a vide a piston avec admission et evacuation Download PDF

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Publication number
EP0922163B1
EP0922163B1 EP97936688A EP97936688A EP0922163B1 EP 0922163 B1 EP0922163 B1 EP 0922163B1 EP 97936688 A EP97936688 A EP 97936688A EP 97936688 A EP97936688 A EP 97936688A EP 0922163 B1 EP0922163 B1 EP 0922163B1
Authority
EP
European Patent Office
Prior art keywords
piston
vacuum pump
cylinder
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97936688A
Other languages
German (de)
English (en)
Other versions
EP0922163A1 (fr
Inventor
Jürgen Meyer
Rudolf Bahnen
Hans-Josef Burghard
Wolfgang Giebmanns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0922163A1 publication Critical patent/EP0922163A1/fr
Application granted granted Critical
Publication of EP0922163B1 publication Critical patent/EP0922163B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps

Definitions

  • a piston vacuum pump of this type is from US-A-48 54 825 known.
  • This pump according to the state of the art are two cylindrical compression chambers on the inlet side connected in parallel by two of the four stepped cylinders and form a first pump stage.
  • the cylindrical Compression chamber of a third cylinder forms the second stage of the pump.
  • the ring-shaped compression chambers of the three cylinders, their cylindrical compression chambers form the first and the second pump stage, are not equipped with inlets; They have no pump function.
  • the cylindrical compression chamber of the fourth cylinder forms a third stage of the vacuum pump. Your outlet is immediately at the exit the pump in connection.
  • a real fourth pump stage forms this ring-shaped Compression chamber not.
  • the piston vacuum pump 1 shown in Figure 1 includes the housing 2, the inlet 3 and the outlet 4. Inside There are four cylinder-piston systems in the housing 11, 21, 31 and 41, which are essentially identical are trained. They are opposed to each other in pairs - preferably arranged in one plane - that their pistons have a common crankshaft 5 can be driven.
  • the drive motor is at 6 designated.
  • the closure body 68 is the conical Section of the chamber 65 on (upper illustration of the valve 52). Gas passing through bore 69 only gets into the pump 1. The size and length of the hole 69 are chosen so that overpressures in the pump 1 are not occur.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (6)

  1. Pompe à vide à pistons (1) comportant une entrée (3), une sortie (4), quatre cylindres étagés (12, 22, 32, 42) qui conjointement avec un piston à gradin (13, 23, 33, 43) respectif, forment une chambre de compression cylindrique (14, 24, 34, 44) respective et une chambre de compression annulaire (15, 25, 35, 45) respective, caractérisée en ce que la pompe (1) présente pendant son fonctionnement normal quatre étages de pompe (54, 57, 61, 63) branchés les uns derrière les autres et en ce que quatre chambres de compression (14, 15, 24, 25) branchées en parallèle forment le premier étage.
  2. Pompe à vide à piston selon la revendication 1, caractérisée en ce que chacune des huit chambres de compression est équipée d'une admission et d'une sortie, en ce que l'entrée (3) de la pompe (1) est en communication avec les admissions (16, 18, 26, 28) des quatre chambres de compression (14, 15, 24, 25) de deux cylindres (12, 22), en ce que les sorties (17, 19, 27, 29) de ces quatre chambres de compression sont reliées aux deux admissions (36, 38) des deux chambres de compression (34, 35) d'un troisième cylindre (32), en ce que les sorties (37, 39) de ces deux chambres de compression (34, 35) sont reliées à l'admission de la chambre de compression cylindrique (44) du quatrième cylindre (41), et en ce que la sortie (47) de cette chambre de compression cylindrique (44) est reliée à l'admission (48) de la chambre de compression annulaire (45) du quatrième cylindre (42).
  3. Pompe à vide à piston selon l'une ou l'autre des revendications 1 et 2, caractérisée en ce que les systèmes à piston-et-cylindre (11, 21, 31, 41) sont agencés par paires en vis-à-vis les uns des autres de telle sorte que leurs pistons (13, 23, 33, 43) sont susceptibles d'être entraínés par un arbre de manivelle (5) commun.
  4. Pompe à vide à piston selon l'une ou l'autre des revendications 1, 2 et 3, caractérisée en ce que la pompe (1) est équipée d'un carter (2) étanche qui est relié via une buse (64) à une des chambres de compression, de préférence à la chambre de compression (45) annulaire agencée côté sortie.
  5. Pompe à vide à piston selon l'une ou l'autre des revendications 1, 2, 3 ou 4, caractérisée en ce qu'il est prévu une soupape d'entrée (52) dépendante de la pression.
  6. Pompe à vide à piston selon revendication 5, caractérisée en ce que la soupape (52) présente une chambre (65) avec un corps de fermeture (68) qui est équipé d'un perçage central (69) et qui est soumis à l'action de deux ressorts (70, 71).
EP97936688A 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation Expired - Lifetime EP0922163B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19634519A DE19634519A1 (de) 1996-08-27 1996-08-27 Kolbenvakuumpumpe mit Eintritt und Austritt
DE19634519 1996-08-27
PCT/EP1997/004282 WO1998009077A1 (fr) 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation

Publications (2)

Publication Number Publication Date
EP0922163A1 EP0922163A1 (fr) 1999-06-16
EP0922163B1 true EP0922163B1 (fr) 2001-11-28

Family

ID=7803766

Family Applications (2)

Application Number Title Priority Date Filing Date
EP97936688A Expired - Lifetime EP0922163B1 (fr) 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation
EP97944768A Expired - Lifetime EP0922165B1 (fr) 1996-08-27 1997-08-19 Pompe a faire le vide

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP97944768A Expired - Lifetime EP0922165B1 (fr) 1996-08-27 1997-08-19 Pompe a faire le vide

Country Status (3)

Country Link
EP (2) EP0922163B1 (fr)
DE (3) DE19634519A1 (fr)
WO (2) WO1998009077A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19921711A1 (de) 1999-05-12 2000-11-16 Leybold Vakuum Gmbh Kolbenvakuumpumpe
DE19926186A1 (de) * 1999-06-09 2000-12-14 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslassventil
DE19955688A1 (de) * 1999-11-19 2001-05-23 Leybold Vakuum Gmbh Kolben-Vakuumpumpe
DE19962445A1 (de) 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
DE10127082A1 (de) * 2001-06-02 2002-12-05 Leybold Vakuum Gmbh Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2032429A (en) * 1934-07-26 1936-03-03 Ingersoll Rand Co Load controlling apparatus for compressors
US2246932A (en) * 1939-09-21 1941-06-24 Chicago Pneumatic Tool Co Combination single and two stage vacuum pump
US2269620A (en) * 1940-06-15 1942-01-13 Chicago Pneumatic Tool Co Compressor regulator
US2765976A (en) * 1952-03-14 1956-10-09 Pennsylvania Pump & Compressor Two stage compressor
US3122162A (en) * 1963-06-20 1964-02-25 Asa D Sands Flow control device
DE1403963A1 (de) * 1963-07-02 1968-11-21 Kurt Braetsch Kompressor mit wenigstens drei Stufen
GB1089694A (en) * 1964-02-24 1967-11-01 J & E Hall Ltd Improvements in or relating to gas and vapour compressors
DE1910848A1 (de) * 1969-03-04 1970-09-17 Kurt Braetsch Kompressor
GB1258333A (fr) * 1968-04-08 1971-12-30
US4171188A (en) * 1976-08-03 1979-10-16 Chicago Pneumatic Tool Company Rotary air compressors with intake valve control and lubrication system
US4396345A (en) * 1981-05-07 1983-08-02 Ingersoll-Rand Company Unloader valve having bypass valving means
JPS58501474A (ja) * 1981-08-13 1983-09-01 コモンウエルス　サイエンテイフイツク　アンド　インダストリアルリサ−チ　オ−ガニゼイシヨン 往復動ピストン−シリンダ装置
JPS6085280A (ja) * 1983-10-18 1985-05-14 Shinku Kiko Kk ダイヤフラム形真空ポンプの逆流防止装置
US4854825A (en) * 1987-02-27 1989-08-08 Commonwealth Scientific And Industrial Research Organization Multi-stage vacuum pump
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
US5482443A (en) * 1992-12-21 1996-01-09 Commonwealth Scientific And Industrial Research Organization Multistage vacuum pump
JP3505233B2 (ja) * 1994-09-06 2004-03-08 サンデン株式会社 圧縮機
DE4432263C2 (de) * 1994-09-10 1996-07-11 Walterscheid Gmbh Gkn Kombinationsventil für sauggedrosselte Hydraulikpumpen

Also Published As

Publication number Publication date
WO1998009077A1 (fr) 1998-03-05
EP0922165A1 (fr) 1999-06-16
WO1998009079A1 (fr) 1998-03-05
EP0922163A1 (fr) 1999-06-16
DE19634519A1 (de) 1998-03-05
DE59712067D1 (de) 2004-12-09
DE59705578D1 (de) 2002-01-10
EP0922165B1 (fr) 2004-11-03

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