EP0898704A1 - Materiel d'inspection faisant appel a la topographie a petit angle pour determiner la structure et la composition internes d'un objet - Google Patents

Materiel d'inspection faisant appel a la topographie a petit angle pour determiner la structure et la composition internes d'un objet

Info

Publication number
EP0898704A1
EP0898704A1 EP98902696A EP98902696A EP0898704A1 EP 0898704 A1 EP0898704 A1 EP 0898704A1 EP 98902696 A EP98902696 A EP 98902696A EP 98902696 A EP98902696 A EP 98902696A EP 0898704 A1 EP0898704 A1 EP 0898704A1
Authority
EP
European Patent Office
Prior art keywords
radiation
detector
collimator
beams
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98902696A
Other languages
German (de)
English (en)
Inventor
Oleg V. Komardin
Albert F. Lawrence
Pavel I. Lazarev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quanta Vision Inc
Original Assignee
Quanta Vision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU97101221A external-priority patent/RU2119659C1/ru
Priority claimed from RU97105594A external-priority patent/RU2119660C1/ru
Application filed by Quanta Vision Inc filed Critical Quanta Vision Inc
Publication of EP0898704A1 publication Critical patent/EP0898704A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G01V5/22Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G01V5/22Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
    • G01V5/222Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays measuring scattered radiation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/419Imaging computed tomograph

Definitions

  • This invention relates to methods and devices determining the internal structure and composition of objects using small angle deflection of penetrating radiation.
  • Known absorption radiography devices determine the internal structure of an object by recording the intensity distribution of radiation transmitted through the object. Variations in the intensity distribution result from differences in radiation absorption in different paths through the object. For such devices, scattering of radiation in the object creates background noise and reduces image contrast.
  • U.S. patent Ser. No. 4,651,002 proposed recording the scattered radiation separately using a collimator and filter, and subsequently subtracting the recorded scattered radiation intensity from the overall intensity distribution obtained when the object is X-rayed.
  • U.S. patent Ser. No. 4,651,002 measures an integral of scattered intensity which does not require a fine adjustment of the relative positions of collimation and filter lattices.
  • the filter is implemented as a mobile element, and the scattering is measured for large angles.
  • U.S. patent Ser. No. 4,549,307 proposed special lids that block incident radiation and form spots on an object being inspected. In the spots, only the background i.e., only the scattered radiation is recorded. The background level over the entire image is approximated from measurements in the spots and is subsequently subtracted from the overall absorption signal to obtain a higher-contrast image.
  • the above-described devices identify or determine the internal structure of an object from the intensity distribution of the radiation transmitted without deflection through the object. If the object contains substances only weakly differing in absorbing properties, an image obtained using these devices may lack the contrast required to distinguish the parts of the object containing such substances, and imaging the object's internal structure may require an approach other than absorption radiography.
  • British patent No. 2,299,251 (1996) proposed a device using Bragg reflection from the crystal structures to identify crystalline and poly-crystalline substances. A collimator of the device allows recording of the energy spectrum for each separate region of an object through which the radiation passes.
  • the energy spectrum distribution of the polychromatic radiation reflected at a selected angle is characteristic of the crystal structure of the substance reflecting the radiation and hence allows identification of the substance using a database of energy spectrum distributions.
  • This method was proposed to use for identifying explosives in luggage. However, the method is limited to detecting substance with a crystalline or polycrystalline structure.
  • RU 2012872 (1994) describe devices for imaging an object's internal structure using the effects of X-ray refraction at boundaries between parts of the object with different electronic densities. Refraction deflects X-rays by up to three seconds. These devices use single crystals to collimate the incident radiation and filter the refracted radiation. A drawback of these devices is their dependence on single crystal reflection according to the Bragg law which causes small aperture ratios. For every wavelength, the radiation is reflected at a certain angle within a deflection interval equal to the angular interval of the Bragg reflection, about ten angular seconds. This means that only a fraction of 10 " of the source radiation energy is used for imaging the object. Published PCT patent application No.
  • WO96/17240 (1996) describes devices that achieve larger aperture ratios using aperture lattices instead of single crystals.
  • a collimation lattice before the object forms an incident flux as a series of narrow, weakly diverging beams.
  • a filter lattice between the object and a detector acts as a scattering radiation filter. The two lattices are positioned with respect to each other so that the penetrating radiation flux in the absence of an analyzed object would not reach the detector.
  • the object is immobile with respect to the detector, and the spatial frequency and positions of the detecting rays determine
  • the collimation lattice is preferably large enough to encompass the entire object and should have the opaque regions no more than 0.05-0.1 mm wide to ensure a suitable resolution for detecting inhomogeneities in the analyzed object. These two requirements of the collimation lattice increase the device cost and complicate adjustments of the device.
  • U.S. patents Ser. Nos. 4,751,772, 4,754,469, 4,956,856, 5,008,911 , and 5,265,144 describe methods and devices for examining biological tissues and identifying explosives in luggage by recording the spectra of coherent radiation scattered at angles within 1° to 12° of an incident beam direction. A large part of the elastically scattered radiation is within those angles if the X-ray energy is small enough. As specified in those patents, analysis of the object uses a narrow collimated beam of monochromatic or polychromatic radiation. The intensity of the coherently scattered radiation is measured using a detecting system resolving both the energy and the scattering angle of the radiation.
  • This invention aims to obtain information on substance distribution over the volume of an analyzed object using a relatively inexpensive device having a high aperture ratio. Further, the invention aims to create a device that is easier to produce and operate while having enhanced image quality when imaging or forming a projection of an object's internal structure.
  • One embodiment of the invention forms a small-angle topogram which is essentially a picture or projection of an objected formed using radiation coherently scattered at small angles in the object. Additionally, scattering curves are determined for multiple beams traversing the object at different angles. The scattering curves relate each image point to the diffraction properties of a part of an object through which an associated radiation beam passed. The scattering curves and the topogram indicate small-angle scattering intensity thus carry information about the molecular composition of the object. In the measurements, each scatter intensity is a superposition of several scattering curves from different object areas through the radiation beam passes. This hampers analysis of the object.
  • tomographic techniques can determine an approximate scattering curves I( ⁇ ) for specific points or regions of the object.
  • Each substance has a unique scattering curve, and scattering curves of substances of interest can be entered into a database. By comparing an obtained approximate scattering curve with scattering curves in the database, the substance contained in a specific region of an object can be identified
  • the principles of the invention can be implemented variety of devices.
  • One such device is a small-angle topography device that includes: a source of penetrating radiation; a collimator forming the incident radiation flux as a series of narrow, weakly-diverging beams incident on an object; a spatial filter behind the object; and a coordinate-sensitive detector behind the filter.
  • the collimator has areas transparent to the radiation are slits or channels alternating with areas opaque to the radiation.
  • the spatial filter is a regular periodic structure similar to the collimator but has the areas of opaque material corresponding to the transparent areas of the collimator so that the opaque areas of the filter block radiation on direct paths from the transparent areas of the collimator. Each beam from the collimator covers a separate area in an object projection.
  • the device further includes a facility for moving the object relative to the penetrating radiation beam, to scan the object and obtain the complete projection of the object on the detector.
  • the collimator includes a regular periodic structure consisting of areas opaque to the radiation and the transparent channels. The shapes and positions of the channels can differ but can be, for example, slits or circular orifices positioned in a hexagonal pattern.
  • a slit collimator can include alternating plates opaque to the radiation with gaps between the plates or alternatively two diaphragms where an input diaphragm has one or several slits and an output diaphragm has multiple slits.
  • a collimator having transparent channels with circular apertures can be implemented either as a capillary twist, or as two diaphragms, an input diaphragm with one or several orifices and an output diaphragm with many orifices.
  • a slitless collimator uses the X-ray transmission effect at the border of two flat polished plates, with repeated complete internal reflection (CIR).
  • CIR complete internal reflection
  • a slitless collimator is implemented as a set of metal or glass plates with polished surfaces stacked on top of each other without gaps, and pressed together under high pressure.
  • a modified slitless includes a stack of the polished-surfaced plates having unpolished bands on the reflecting surfaces perpendicular to the X-ray path.
  • the spatial filter is a regular periodic structure complementary to the collimator i.e., the spatial filter is arranged to screen the direct radiation from the collimator, and transmits the radiation that the object scatters at angles in a desired range.
  • the spatial filter should be implemented as a linear raster for a slit collimator, and as a raster with round opaque regions for a collimator with cylindrical channels.
  • the collimator directs separate beams of penetrating radiation to separate areas of the analyzed object, so that relative motion of the object across the beams is needed to obtain the complete picture of the object's internal structure.
  • the facility for moving the object should therefore be a device ensuring uniform motion of the object across the scanning rays with a velocity sufficient to obtain the necessary exposure on the detecting device.
  • the detecting device is a coordinate-sensitive X-ray radiation sensor that simultaneously registers information from all beams.
  • An information processing system receives collects information from the detector and creates an object image with contrast indicating differences in the small-angle scattering. That image can be compared to an image obtained in the absorption contrast.
  • the processing system determines small-angle scattering curves and compares the determined curves to an available book or database of scattering curves of known substances.
  • the processing system identifies the substance of an element when a matching scattering curve is found in the data base.
  • Another embodiment of a device for small-angle topography includes a radiation source, a slit collimator forming the incident flux as a number of small, weakly diverging beams incident on an object, and a spatial filter positioned behind the object where detector elements are disposed in the spatial filter.
  • the spatial filter can be a slit raster made of opaque plates with the registering elements placed in the slits.
  • the widths of the plates are selected to ensure the scattered radiation from one beam does not affect the registering elements for a neighboring beam.
  • the depths and widths of the gaps between the plates are such that each individual detector registers radiation falling on a definite angular ranges.
  • One embodiment includes three gaps and three detector elements per incident beam.
  • a central detector element for a beam measures the intensity of the radiation transmitted directly through the object.
  • the other two detector elements for the beam measure the intensity of radiation deflected into the desired angular range to either side of the central element.
  • Each of the detector elements is connected to a processing system that separates intensity information associated with the radiation scattered by the object from intensity information associated with undeflected radiation.
  • Two images can be formed on a monitor, one image corresponding to the small-angle contrast of the object, the other corresponding to the abso ⁇ tion contrast.
  • a method for examining an object X-rays the object at different angles and determines a three dimensional distribution of the absorption factors of the object. Additionally, a small-angle scattering curve is obtained for each object element.
  • the object which for example, can be luggage that is being checked for explosives
  • the scanning can be performed by moving the optical elements of the device (e.g., the collimator, spatial filter, and detector), or by moving the object. Moving the object is typically more practical in luggage control devices.
  • each beam is selected according to the required resolution of the device i.e., according to the size of an area that the substance to be identified occupies in the object.
  • the width of each of the flat beam in the direction perpendicular to the scanning direction encompasses the entire analyzed object.
  • a coordinate-sensitive detector For each beam, a coordinate-sensitive detector records the intensity of the radiation transmitted through the object.
  • the detector can be a system of linear detecting elements oriented parallel to the plane of the incident beam. With that orientation, the spatial resolution of the coordinate-sensitive detectors determine the minimum size of revealed inhomogeneties.
  • each beam successively scans the entire object.
  • the intensity of the radiation transmitted through the object depends on absorption factors of the substances the beam crosses. From the measured transmittance of beams crossing the same object cell at different angles, an average absorption factor can be determined for the substances filling that cell.
  • the values of the measured intensities of the radiation transmitted through the object is transferred into the processing system that calculates the distribution of the absorption factor over the entire object volume.
  • the object is then represented as a three- dimensional matrix of elementary cells, each having a constant absorption factor. Each of the cells is considered to be filled with one substance only. From the obtained absorption factor distribution, average atomic numbers can be determined for the substances in the cells. Since different substances may have similar absorption factors, the object image obtained in this mode of X-raying may be unable to discriminate between the substances with similar absorption factors. To discriminate between substances having similar absorption factors, coherent small-angle scattering (SAS) is used.
  • SAS coherent small-angle scattering
  • the small-angle scattering curves appearing for individual beam when a complex object is X-rayed are superpositions of scattering curves of all the substances crossed as a beam passes through the object.
  • a separate SAS system can be used for each beam.
  • Each SAS system includes a collimator, a spatial filter, and a coordinate-sensitive detector to measure small-angle scattering curves for the beams formed by the collimator.
  • Each collimator forms a series of narrow, weakly diverging beams from the single source.
  • the object successively passes through the SAS systems so that each of the systems scans the object. Processing the small-angle scattering curves measured for beams at different scanning angles yields a distribution of scattering curves characterizing the structure and composition of the object.
  • Measuring the small-angle scattering intensity at several different angles and then constructing the corresponding approximate scattering curves for each cell (or volume element) in the object allows identification of the substance in the cell.
  • the accuracy of the approximation of a cell's scattering curve is higher for larger numbers of angles for which the coherent scattering intensities are measured.
  • the range of the measured small-angle scattering can be limited to the angular region in which the major part of the coherently scattered radiation is located, namely, the so-called central diffraction peak region. This region may be from 5 angular seconds to 1 degree depending on the wavelength used and the structural properties of the material. Recording small-angle scattering in the central peak region provides greater intensity for the recorded radiation.
  • the processing system can create object images from two types of information, abso ⁇ tion factors and small-angle scattering curves. By combining the two types of images, the data processing system can determine the three-dimensional internal structure image of the object, with identification of the substances composing the object and graphically display the internal structure and composition on a display screen.
  • the total number of different SAS systems used in the device is selected according to the complexity of the analyzed object. For example, in luggage control, the overall number of substances present in each analyzed object, typically does not exceed thirty. Four analyzing beams 40° apart from each other are sufficient to determine abso ⁇ tion factors of the substances, and the SAS systems can be positioned in spaces between the individual beams for abso ⁇ tion measurement. The overall spread of the system is about 120°.
  • One embodiment of the invention contains a source of penetrating radiation, a system measuring radiation abso ⁇ tion in the analyzed object, a system measuring radiation scattered at small angles, and a device for moving the object for scanning.
  • the system for measuring abso ⁇ tion in the analyzed object consists of a slit collimator forming fan-shaped beams, a filter positioned behind the object to eliminate background radiation to improve the image contrast, and a number of coordinate-sensitive detectors. Each detector records the intensity of the transmitted radiation for a separate beam and has spatial resolution along a direction parallel to the plane of the incident beam.
  • each collimator slit determines the width and angular divergence of the beam and should be such that the size of the incident beam on the object in the scanning direction is less than the minimal size of a inhomogeneity to be detected. Otherwise, a substance may not be discriminated from background of a surrounding medium.
  • the size of the beam projection in the direction pe ⁇ endicular to the scanning direction should be no less than the object dimensions.
  • a coordinate-sensitive detector records the radiation transmitted through the object during the whole period of object scanning. The measured intensities of the transmitted radiation for different angles of beam incidence onto the object are transferred into the data procession system where the object image is constructed from intensity values of the transmitted radiation in the form of an abso ⁇ tion factor distribution over three-dimensional matrix elementary cells.
  • the measuring system for the small-angle scattering from the object uses penetrating radiation from the same source and identical blocks positioned at different angles to the direction of the scanning motion. Every such block contains a collimator, a spatial filter, and a two-coordinate coordinate-sensitive detector. Each collimator is between the source and the object and shapes the radiation flux into one or several narrow weakly diverging beams falling on the object.
  • a multislit collimator is a regular periodic structure consisting of regions transparent to the radiation alternating with opaque regions. The lines of the surfaces forming the opaque regions should converge at the focal spot of the source for every collimator to increase the energy efficiency of the device. Accordingly, the radiation reaching different slits of the collimator may be emitted by different parts of the source focal spot.
  • a spatial filter which is positioned before the coordinate-sensitive detector, matches the collimator and blocks direct radiation as described above.
  • the collimator forms beams penetrating particular parts of the object, so it is necessary to move across the detecting beams to obtain the whole image of the object's internal structure in the beams scattered by small angles.
  • a conveyor moves the object through the systems for measuring the abso ⁇ tion and small angle scattering, with a speed slow enough to provide the necessary exposure times for the detectors in both systems.
  • the detecting device for recording the small- angle scattering is a two-dimensional coordinate-sensitive X-ray element that can be a charge-coupled device, photodiode matrix, a luminescent screen, or X-ray film. The detector sensitivity determines the required power of the radiation source and the speed of scanning the object.
  • the data processing system receives a data signal from the coordinate-sensitive detector and forms the object's image according to the intensity of small-angle scattering which can be compared to the image obtained from abso ⁇ tion. Small-angle scattering curves obtained for individual cells in the object are compared with the available data base of small-angle scattering curves to identify the substances in the cells.
  • both the radiation transmitted without abso ⁇ tion and the intensity distribution of small-angle scattering are recorded simultaneously.
  • a series of narrow weakly diverging beams is formed from a single source of penetrating radiation using a collimator. Radiation is recorded using detecting elements (e.g., a bar of charge-coupled elements or X-ray range photodiodes) positioned deep inside a raster of slits made of plates opaque to the radiation. The plate thicknesses are selected to eliminate the influence of the radiation scattered from one beam to a recording element for the neighboring elements. The depths and widths of gaps between the plates is determined by the requirement for the individual detector to register radiation falling onto it at a specific angle.
  • Fig. 1 shows a small angle topography device in accordance with an embodiment of the invention.
  • Fig. 2 shows cross sections of a fan beam from a collimator that is opaque except for one or more slit-shaped transparent regions.
  • Fig. 3 shows a collimator which in accordance with an embodiment of the invention is formed from a block of opaque material with transparent channels or aperture.
  • Fig. 4 illustrates relative positions of a collimator, a spatial filter, and a coordinate sensitive detector in an analyzer using fan beams in accordance with the invention.
  • Fig. 5 shows a system having a spatial filter which in accordance with an embodiment of the invention is a set of plates with detector elements placed in slits between the plates.
  • Fig. 6 shows a system in an embodiment of the invention in which penetrating radiation that passes undeflected through an object is converted into visible light.
  • Figs. 7A and 7B show different views of a luggage control facility in accordance with an embodiment of the invention.
  • Fig. 8 shows a luggage control facility that in accordance with an aspect of the invention, separately measures radiation transmitted without scattering and radiation scattered at small angles.
  • Fig. 9 illustrates data processing and output to a display screen for the system of Fig. 8.
  • Fig. 10 shows another device embodiment of the invention in which the two detector system are combined in one spatial filter.
  • Fig. 1 1 shows a spatial filter and detector system which in accordance with an aspect of the invention is a slit raster with recording elements positioned in the slits.
  • Fig. 1 shows a small-angle topography device 100 that includes a source 101 of penetrating radiation, a collimator 120 including diaphragms 102 and 106 that shape radiation incident on an analyzed object 105, and a spatial filter 110 between object 105 and a coordinate sensitive detector 113.
  • Source 101 in an exemplary embodiment of the invention is an X-ray tube that directs X-rays at diaphragm 102.
  • source 101 can be any type of X-ray radiation source, provided radiation 104 has the hardness and the intensity necessary to X-ray object 105.
  • diaphragm 102 is a sheet of a material such as tungsten or lead that is opaque to the penetrating radiation.
  • an orifice 103 which may be a slit, circular, or any desired shape, limits the divergence of radiation 104 that passes to diaphragm 106.
  • Diaphragm 106 has alternating regions 107 and 108 that are respectively transparent and opaque to the penetrating radiation.
  • Transparent regions 107 may be empty openings in diaphragm 106 or filled with a transparent material such as a polymer. Radiation passing through transparent regions 107 is incident on object 105.
  • Collimator 120 and spatial filter 110 are interrelated and determine many of the device's operation parameters.
  • the focal spot of source 101 has dimensions that depend on the configuration of collimator 120 and spatial filter 110.
  • Spatial filter 110 has transparent regions 1 11 and opaque regions 112 in the path of radiation 109 that passes through object 105.
  • Transparent regions 111 of spatial filter 1 10 transmit the coherent radiation scattered at small angles.
  • Opaque regions 112 absorb the direct radiation from associated transparent regions 107 of collimator 120 (i.e., the radiation that passes through object 105 without being deflected) and radiation scattered at large angles. Accordingly, in the absence of object 105, detector 113 registers only a background intensity signal. When object 105 is in the region between collimator 120 and filter 110, object 105 scatters radiation and creates an image signal on detector 113.
  • the intensity distribution of small-angle scattered radiation obtained on coordinate-sensitive detector 113 carries information about the structure of object 105 and indicates the scattering ability of substances contained in object 105.
  • coordinate-sensitive detector indicates a detector that records separate intensities or measurements at different coordinates on the detector.
  • measured small-angle scattering curves can be compared to a data base of scattering curves for selected known substances.
  • the data base may contain for example, a set of scattering curves where each curve is represented by a table of intensities indexed angel and corresponds to a substance to be detected such as an explosive material or controlled substance.
  • Collimator 120 forms narrow, weakly diverging beams and includes a regular periodic structure consisting of areas 108 opaque to the radiation and transparent channels through areas 107.
  • the shapes and positions of the channels can differ but can be, for example, slits or circular orifices positioned in a hexagonal pattern.
  • the suitable spacing and shapes for the channels in the collimator depend on nature of object 105.
  • General requirements for collimators 120 are as follows. First, lines of the surfaces forming the transparent channels should converge at the focal spot of source 101 to enhance the energy efficiency of device 100. The radiation reaching different collimator channels may result from different parts of the focal spot thus permitting use of powerful wide-focus sources.
  • collimator 120 should form beams with a divergence ⁇ small enough to permit detection of radiation scattered in a desired small-angle range, in particular, to ensure that every beam that object 105 scatters by more than a minimum angle ⁇ is outside the primary flux.
  • the structure of collimator 120 should be such that scattering within the desired range of angles from neighboring beams do not overlap each other at detector 113. This ensures clear detection at small angles up to an angle ⁇ . (Angles ⁇ and ⁇ determine the desired small-angle range, with angle ⁇ typically of 5 angular seconds of more and angle ⁇ being up to 1° or more.)
  • collimator 120 and spatial filter 110 should be separated by a distance larger than the cross dimensions of collimator 120.
  • a slit collimator i.e., a collimator having transmission channels in the shape of slits
  • Fig. 2 illustrates the relation of a cross-section 207 of radiation at a slit in a collimator to a cross-section 212 of the primary radiation at a spatial filter behind object 105.
  • a transparent region 107 of output diaphragm 106 controls the size of cross-section 207
  • spatial filter 110 has an opaque region 112 matching the size and position of cross-section 212.
  • a slit in a collimator illuminates only a band of object 105 at a time, but scanning the band of radiation across object 105 provides data on the structure of the entire object.
  • Two ways to scan object 105 are moving the optical elements of the device relative to object 105 and moving the object 105.
  • Moving object 105 is preferred because moving the optical elements (collimator 120 and filter 110) may cause vibrations that shift the relative position of opaque region 112 and matching transparent region 107.
  • a drive 1 14 rocks a lever 1 15 that is hinged at one end 118 and connected to object 105 and detector 1 13 by hinged traction bars 1 16 and 117, respectively.
  • displacements of object 105 and detector 1 13 are synchronous and proportional to the distance from the divergence point of source 101 to object 105 and to detector 1 10 respectively.
  • An alternative collimator configuration has radiation-transparent channels with circular apertures.
  • Such collimators can be implemented either as a capillary twist, such as available from X-ray Optics, Inc. of Albany, NY or as two diaphragms, an input diaphragm with one or many orifices and an output diaphragm with many orifices.
  • Fig. 3 shows a collimator 320 and a spatial filter 310 for beams with circular profiles.
  • collimator 320 is a block 322 of material opaque to the radiation with transparent channels 324. Axes of channels 324 are along lines 326 converging at a point 301 that coincides with the source focus of the radiation source.
  • Spatial filter 310 matches collimator 320 and is a block 312 of material transparent to the radiation having regions 314 in block 312 filled with a material opaque to the radiation such as tin, tungsten, titanium, or lead. Axes of regions 314 are also along lines 326 converging at point 301.
  • Blocks 322 and 312 can be manufactured using photolithography and etching.
  • projections in (or surrounding) the regions of channels 324 are made in a plate of a polymer transparent to penetrating radiation.
  • the projections can be inclined to the surface of the plate at angles originating from a source focus.
  • the plate is then etched to remove unexposed portions (or exposed portions depending on the material in the plate) of the plate.
  • the removed portions are then filled with a material opaque to the penetrating radiation, e.g., tungsten powder.
  • inclined openings in regions 314 are made through a plate made of a polymer transparent for the penetrating radiation, and the openings are filled with a material opaque to the penetrating radiation.
  • a slitless collimator forms beams with thicknesses of a micron or less and divergences of a few angular minutes.
  • a slitless collimator which uses the X-ray transmission effect caused by complete internal reflection (CIR) at the border of two flat polished plates, can be implemented as a set of metal or glass plates with polished surfaces stacked on top of each other without gaps and pressed together under high pressure.
  • Slitless collimators have high aperture ratios and allow beams 1 to 2 ⁇ m wide.
  • the lengths of the plates in the direction of X-rays propagation allow complete abso ⁇ tion of the part of the beam not passing along the boundary between the plates (the working plane).
  • the effective width of a channel along which the X-rays propagate in a slitless collimator is determined by the penetration depth of the radiation into the medium during CIR, which is from tens to hundreds of angstroms. Practically, this value depends on the polishing quality and flatness of the plates, and conditions of their pressing.
  • the divergence 2 ⁇ of the beam passed through a slitless collimator is equal to the input aperture angle of the collimator but cannot exceed the twice the CIR critical angle, 2 ⁇ .
  • the input aperture angle is determined as
  • f is the focus size of the X-ray tube along the direction pe ⁇ endicular to the collimator working plane
  • D is the distance from the tube focus to the collimator input.
  • a modified slitless collimator provides extremely narrow (with divergences less than ten angular seconds) high-intensity X-ray beams.
  • This collimator also consists of a stack of the polished-surfaced plates pressed together, but unpolished bands are made on the reflecting surfaces pe ⁇ endicular to the X-ray path, and located at such distances from the device input and output as to be able to completely absorb the beams. After the beams pass through the input boundary of the polished surfaces according to CIR, the beams proceeding at larger angles fall onto the unpolished regions of the surfaces which absorb the radiation. However, the beams proceeding at smaller angles reach the collimating device output because they do not fall on the unpolished surfaces.
  • the small-angle scattering spatial filter is a regular periodic structure complementary to the collimator i.e., the spatial filter is arranged to screen the direct rays formed by the collimator, and transmits the radiation scattered in the object at angles in the range from ⁇ to ⁇ .
  • the spatial filter matches the collimator.
  • the spatial filter should be implemented as a linear raster while for the tightly packed cylindrical channels as a raster with round apertures.
  • Fig. 4 shows another embodiment of a collimator 420 and a spatial filter 410.
  • collimator 420 includes a set of plates 424 of a material opaque to the radiation positioned adjacent to each other with gaps 425 between plates 424.
  • plates 424 along the direction of the radiation depends on the abso ⁇ tion of the penetrating radiation by the material of the plate. Plates 24 have a length sufficient to cover the entire projection of the analyzed object.
  • Spatial filter 410 consists of a set of plates 426 made of a material opaque to the penetrating radiation. Gaps 427 between plates 426 form slits transparent to the radiation.
  • Each of plates 426 has a thickness along the direction of radiation propagation selected according to the ability of the material to absorb the radiation, a length that covers the entire projection field of the object, and a width sufficient to block direct radiation from an associated gap 425 in collimator 420.
  • Absorbing plates 426 collectively screen all penetrating radiation direct from gaps 425 so that a two- dimensional detector 413, which is behind spatial filter 410 measures only the intensity of scattered radiation.
  • Fig. 5 shows an embodiment of an imaging system where a spatial filter 510 is a set of plates 530 opaque to the penetrating radiation and gaps between plates 530 contain bars of radiation detectors 531.
  • Each of the radiation detectors 531 corresponds to a beam from collimator 420, and plates 530 have thicknesses set to stop the radiation scattered from one beam from reaching the detector 531 corresponding to a neighboring beam.
  • the width and length of each gap between plates 530 select a specific angular range of radiation that reaches the detector 531 in the gap.
  • a processing system 534 which may be a general pu ⁇ ose computer or specialized processing equipment, records and processes measured intensities from detectors 531.
  • Processing system 534 forms image signal 532 and 533 corresponding to radiation passed through object 105 without scattering and radiation scattered by object 105.
  • the contrast results from the differences in abso ⁇ tion coefficients of the materials in object 105
  • signal 533 indicates contrast in the intensity of small-angle scattering.
  • the intensity in small scattering corresponds to one specific angle from each of the determined scattering curves.
  • intensity in the image could represent intensity of radiation at a specific angle that is a scattering maximum for a selected substance so that the image selective highlight the selected substance.
  • intensity at a point in the image could represent an integral of the scattering curve corresponding to the point.
  • regions of an object identified as containing a particular substance can be assigned a false color associated with the substance.
  • a display 535 displays the two images of the object's internal structure.
  • Fig. 6 illustrates another small-angle topography device 600.
  • Device 600 contains a source 636 of penetrating radiation and an input diaphragm 638 positioned in the path of radiation flux 637 from source 636.
  • Input diagram 638 has several slits 639 that form a radiation flux 640 falling on object 105.
  • An output diagram 641 between diaphragm 639 and object 105 forms many narrow weakly-diverging beams directed to analyzed object 105.
  • a spatial filter 642 includes a set of parallel plates 643 with gaps between plates 643 forming many slits 644.
  • Plates 643 of the filter 642 are coated with a phosphor and located in the areas that diaphragm 641 shadows from penetrating radiation flux 644.
  • the phosphor on the surface of plates 643 transforms the penetrating radiation scattered by object 105 into visible light.
  • the light then passes through an optical system including a concave mirror 645 and a collecting lens 646 to a detector 647 which registers the intensity distribution of the radiation scattered as indicated by the distribution of visible light from plates 643.
  • Device 600 can thus forms two images of the internal structure of the analyzed object. One image determined from the distribution of scattered radiation forms on detector 647, and another image determined from the direct radiation passing through object 105 to a detector 648 behind plates 643. This provides more complete information about the object's internal structure.
  • Collimators in the above described embodiments direct separate beams of penetrating radiation to separate areas of the analyzed object, and relative motion of the object across the beams is needed to obtain a complete image of the object's internal structure.
  • the facility for moving the object should be a device ensuring uniform motion of the object across the scanning rays with a velocity sufficient to obtain the necessary exposure on a detector.
  • the detector is a coordinate-sensitive X-ray radiation sensor that simultaneously registers information from all the beams.
  • the detector could be, for example, a photodiode matrix, a luminescent screen, or X- ray photographic film.
  • Figs. 7 A and 7B illustrate use of an embodiment of the invention in a luggage control facility 700.
  • the luggage control facility includes a conveyor 749 which moves an analyzed object 705 (luggage) through an area between a penetrating radiation source 750 and a detector 751.
  • X-ray radiation from source 750 which is under conveyor 749, passes through a collimator 752 forming many narrow, weakly diverging X-ray radiation beams.
  • the beams further pass through object 705 to a spatial filter 753 that absorbs the non-scattered part of the radiation.
  • the coherent radiation scattered at small angles passes through filter 753 and reaches detector 751.
  • detector 751 registers radiation deflected in a fragment of the internal structure image of object 705.
  • a processing unit 752 which is connected to detector 751 and a drive 755 for conveyor 749, records information from detector 751 concerning each fragment along with information about the position of object 705. From information indicating the fragment of the object's internal structure and the object's position, computing unit 754 generates a complete image of the object's internal structure and transfers the image to a video display 56.
  • Fig. 7B shows relative positions of conveyor 749, radiation source 750, collimator 752, spatial filter 753, detector 751, and analyzed object 705.
  • Alternative luggage control facility can employ other small-angle topography devices such as those shown in Figs. 4, 5, or 6.
  • Fig. 8 shows a luggage control facility 800 including a transmission measurement system and an SAS measurement system.
  • the transmission measurement system measures radiation transmitted without deflection through object (luggage) 705 and includes a source 801 of penetrating radiation, a collimator 804, a spatial filter 808, and coordinate sensitive detectors 807.
  • the SAS measurement system measures radiation that object 705 deflects at small angles and includes of source 801, collimators 805, spatial filters 812, and coordinate-sensitive detectors 815.
  • source 801 is an X-ray tube that is common to both systems and directs radiation through collimators 804 and 805 to object 705 on moving conveyor 749. Conveyor 749 moves object 705 through the transmission measurement system and then through the small-angle measurement system.
  • Collimator 704 comprises separate blocks of material opaque to penetrating radiation, with slit-shaped transparent regions 806 formed in the blocks.
  • Slit axes are along lines converging at a point coinciding with the focal spot of source 801 of the penetrating radiation (e.g., the X-ray tube focus). Beams from slits 806 are at angles with the plane of conveyor 749 that are as different as possible from each other.
  • the slit widths select a beam size that preferably matches the widths of areas that sought substances are assumed to occupy in object 705. Pe ⁇ endicular to the slit width, collimator 704 form beams covering all of object 705.
  • Coordinate-sensitive detectors 807 positioned parallel to collimator slits 806 record the radiation transmitted through object 705 without deflection.
  • Each coordinate-sensitive detector 807 measures a series of radiation intensities corresponding to coordinates along a line parallel to slits 806.
  • the coordinate resolution of each detector 807 determines the spatial resolution in the direction pe ⁇ endicular to that of the object motion.
  • a spatial filter 808 has a series of slits including a slit between each detector 807 and object 705. Filter 808 reduces the amount of deflected radiation reaching detectors 807 and thereby improves the signal-to-noise ratio for the recorded intensity of the transmitted radiation.
  • collimators 805 direct a number of narrow, weakly diverging beams to object 705.
  • Each of collimators 805 has alternating opaque regions 810 and transparent regions 809 that form channels for the penetrating radiation.
  • the axes of the channels in each of collimators 805 are along directions 811 converging at the focus of radiation source 801.
  • the axes of the collimators 805 also converge at the source focus but are at various angles relative to conveyor 749.
  • the orientations of central axes of collimators 805 are as different as possible from each other.
  • Spatial filters 812 include transparent regions 813 and opaque regions 814 in the path of the radiation exiting object 705.
  • Each spatial filter 812 is positioned relative to an associate collimator 805 so that opaque regions 814 of the filter block radiation from transparent regions 809 of the associated collimator 805.
  • the radiation that object 705 scatters at small angles passes through transparent regions 813.
  • the dimensions of the transparent regions in this case, the widths and the depths of the slits), the structure period (distance between slits) of the collimators 805, and the dimensions of the transparent regions of spatial filters 812 are selected to ensure that associated coordinate-sensitive detectors 815 receive the radiation that object 705 scatters into a specific angular range.
  • a typical angular range is from about 0 to 0.5 degrees but is preferably less that 6 to 12 angular minutes.
  • Each detector 815 is a two-dimensional coordinate-sensitive element having resolution sufficient to build a small-angle scattering curve for each primary beam.
  • detectors 807 measure the radiation intensities of the beams from collimators 804.
  • a processing unit 916 shown in Fig. 9 receives from detectors 807 signals indicating unattenuated intensities. Processing unit 916 can be specialized hardware or as routines executed in a general pu ⁇ ose computer. While object 705 moves through the transmission measurement system, detectors 807 measure the intensity of radiation transmitted through object 705 at various angles, and processing system 916 receives signals indicating radiation intensities after partial abso ⁇ tion and scattering in object 705. Processing unit 916 calculates the ratios of the intensities measured in the presence of object 705 to intensities measured in the absence of object 705 and determines an abso ⁇ tion factor distribution over the volume of object 705.
  • filters 812 block direct radiation from reaching detectors 815. Accordingly, when object 705 is not in the small-angle measurement system, detectors 815 record only the background radiation intensity.
  • An SAS data processing unit 917 shown in Fig. 9 receives and processes from the measured small- angle scattering intensity from detectors 815 and the abso ⁇ tion factor distribution from processing unit 916. Processing unit 917 compensates for abso ⁇ tion along the deflected paths when calculating small-angle scattering curves. Processing unit 917 processes the data obtained from the small-angle scattering systems. The small-angle scattering systems differ in the angles at which the primary beams traverse object 705 during scanning. This allows processing unit 917 to construct small-angle scattering curves for cells distributed over the volume of object 705.
  • a processing unit 918 compares images of object 705 obtained for abso ⁇ tion and for small-angle scattering and compares the scattering curves for the cells in object 705 to a data base of small- angle scattering curves for known substances. Based on comparison results, a three- dimensional image of object 705 is formed and displayed on video display screen 919 with substances composing object 705 being identified.
  • FIG. 10 shows an embodiment of a luggage control facility 1000 in accordance with the invention.
  • Facility 1000 includes source 101 of penetrating radiation and collimators 1020 forming narrow weakly diverging fan-shaped beams.
  • the fan- shaped beams are directed at object 705 which is on moving conveyor 749.
  • Collimators 1020 are oriented with respect to object 705 so that their axes are inclined to the direction of motion of object 705 at angles that differ as much as possible from each other.
  • Each collimator 1020 has a corresponding spatial filter 1024 and a corresponding set of coordinate sensitive detectors 1023.
  • Coordinate-sensitive detectors 1023 are in slits in spatial filters 1024 and measure intensities of radiation 1021, which is scattered at small angles, and radiation 1022, which is transmitted without scattering.
  • Each fan-beam from collimator is associated with at least two detectors 1023, a detector located along an undeflected path of the associated scan beam and a neighboring detector for measuring radiation scattered at small angles from the associated beam.
  • Fig. 11 shows a perspective view of a filter and detector system 1100 associated with one of collimators 1020 in system 1000 of Fig. 10.
  • System 1100 includes plates 1125 that are opaque to penetrating radiation and coordinate-sensitive detectors 1023 that are in the gaps between plates 1125.
  • the thicknesses of plates 1125 are selected to prevent radiation scattered from one fan beam from reaching a detector 1023 associated with another fan-beam.
  • the lengths and widths of the slots between plates 1125 are selected according to the requirement for each individual detector to record radiation falling in a specific angular range of transmitted or scattered radiation.
  • Signals from detectors 1023 are transferred to processing units, such as units 916 and 917 of Fig. 9, via two independent channels.
  • a first channel is connected to the detectors 1023 that record radiation intensities of undeflected radiation and carries data channel indicating abso ⁇ tion factors of materials composing the object.
  • Detectors 1023 for abso ⁇ tion measurement can be linear coordinate-sensitive detectors that measure a series of intensities along the length of a slit.
  • the second channel is connected to the detectors recording the radiation scattered at small angles.
  • Detectors for measuring scattered radiation can be two-dimensional or linear coordinate-sensitive detectors. Two-dimensional coordinate-sensitive detectors can measure intensities at different angles relative to each point along a slit.
  • a processing unit processes the two channels of information in the same fashion as described above and then transfers an image to a video display screen.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Geophysics (AREA)
  • Biochemistry (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Theoretical Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pulmonology (AREA)
  • Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

La présente invention concerne des dispositifs de topographie par rayons X permettant de déterminer la structure et la composition des objets. Selon un mode de réalisation de la présente invention, un appareil à balayage forme des images par diffusion à petit angle. Un filtre spatial (808) sélectionne le rayonnement qu'un objet (705) diffuse à de petits angles et arrête les autres rayonnements. Un détecteur (815) sensible aux coordonnées se trouvant derrière le filtre enregistre le rayonnement diffusé. Une image de l'objet est construite à partir des informations de diffusion à petit angle et la composition des différentes régions de l'objet est déterminée à partir des courbes de diffusion des régions. Dans un mode de réalisation, l'invention comprend une source (801) de rayonnement pénétrant, un système de détection des rayonnements transmis au travers d'un objet analysé, un système de détection du rayonnement que l'objet diffuse à de petits angles, et une unité (749) permettant de déplacer l'objet au cours du balayage.
EP98902696A 1997-01-24 1998-01-23 Materiel d'inspection faisant appel a la topographie a petit angle pour determiner la structure et la composition internes d'un objet Withdrawn EP0898704A1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
RU97101221A RU2119659C1 (ru) 1997-01-24 1997-01-24 Устройство для малоугловой топографии (варианты)
RU97101221 1997-01-24
RU97105594A RU2119660C1 (ru) 1997-04-08 1997-04-08 Устройство для определения состава и структуры неоднородного объекта (варианты)
RU97105594 1997-04-08
PCT/US1998/001299 WO1998033062A1 (fr) 1997-01-24 1998-01-23 Materiel d'inspection faisant appel a la topographie a petit angle pour determiner la structure et la composition internes d'un objet

Publications (1)

Publication Number Publication Date
EP0898704A1 true EP0898704A1 (fr) 1999-03-03

Family

ID=26653910

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98902696A Withdrawn EP0898704A1 (fr) 1997-01-24 1998-01-23 Materiel d'inspection faisant appel a la topographie a petit angle pour determiner la structure et la composition internes d'un objet

Country Status (5)

Country Link
EP (1) EP0898704A1 (fr)
JP (1) JP2000512764A (fr)
CN (1) CN1216109A (fr)
AU (2) AU6039798A (fr)
WO (2) WO1998033063A1 (fr)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6483891B1 (en) * 1998-09-17 2002-11-19 Quanta Vision, Inc. Reduced-angle mammography device and variants
IT1320201B1 (it) 2000-06-09 2003-11-26 Dylog Italia Spa Dispositivo di ispezione a raggi x per prodotti alimentari.
JP4149230B2 (ja) * 2002-10-16 2008-09-10 富士フイルム株式会社 放射線画像撮影システムおよび放射線画像検出器
US7065175B2 (en) * 2003-03-03 2006-06-20 Varian Medical Systems Technologies, Inc. X-ray diffraction-based scanning system
CN1794951A (zh) * 2003-05-28 2006-06-28 皇家飞利浦电子股份有限公司 扇形射束相干散射计算机断层摄影
ES2270254T3 (es) 2003-10-06 2007-04-01 Yxlon International Security Gmbh Un procedimiento para determinar el cambio de posicion de una unidad de equipaje para inspeccionar una zona sospechosa en esta unidad de equipaje.
GB0420222D0 (en) * 2004-09-11 2004-10-13 Koninkl Philips Electronics Nv Coherent scatter imaging
DE102004050543A1 (de) 2004-10-16 2006-04-20 Bruker Axs Gmbh Analysegerät mit variabel ausgeleuchtetem Streifendetektor
DE102004060609A1 (de) * 2004-12-16 2006-06-29 Yxlon International Security Gmbh Verfahren zum Messen des Impulsübertragungsspektrums von elastisch gestreuten Röntgenquanten
DE102004060612B4 (de) * 2004-12-16 2007-10-31 GE Homeland Protection, Inc., , Newark Anordnung zum Messen des Impulsübertragungsspektrums von elastisch gestreuten Röntgenquanten
JP2006177760A (ja) * 2004-12-22 2006-07-06 Nagoya Electric Works Co Ltd X線検査装置、x線検査方法およびx線検査プログラム
WO2006138521A2 (fr) * 2005-06-16 2006-12-28 Ii-Vi Incorporated Systeme d'imagerie par diffusion de photons et analyse de l'energie
DE102005039642B3 (de) * 2005-08-22 2007-02-22 Yxlon International Security Gmbh Kollimatorensystem für eine Röntgendiffraktometrie, Röntgenbeugungsscanner sowie Verfahren zur Durchführung einer Röntgenbeugungsanalyse
DE102006012946A1 (de) * 2006-03-21 2007-09-27 Siemens Ag Strahlungserfassungseinheit für einen Computertomographen
GB2441578A (en) * 2006-09-08 2008-03-12 Ucl Business Plc Phase Contrast X-Ray Imaging
GB0706088D0 (en) * 2007-03-29 2007-05-09 Durham Scient Crystals Ltd X-ray imaging of materials
GB0706089D0 (en) * 2007-03-29 2007-10-31 Durham Scient Crystals Ltd X-ray imaging of materials
CN102565097B (zh) * 2008-03-18 2014-07-09 同方威视技术股份有限公司 用于对被检物体进行放射性物质探测和x光辐射成像的系统
GB0823093D0 (en) 2008-12-19 2009-01-28 Durham Scient Crystals Ltd Apparatus and method for characterisation of materials
US7756249B1 (en) * 2009-02-19 2010-07-13 Morpho Detection, Inc. Compact multi-focus x-ray source, x-ray diffraction imaging system, and method for fabricating compact multi-focus x-ray source
JP2012170645A (ja) * 2011-02-22 2012-09-10 Canon Inc X線撮像装置およびx線撮像方法
DE102011006421A1 (de) * 2011-03-30 2012-10-04 Siemens Aktiengesellschaft Digitaler Röntgendetektor
CN102411157B (zh) * 2011-08-05 2014-10-29 北京睿思厚德辐射信息科技开发有限公司 物体单侧扫描双侧立体成像的方法及装置
US9297772B2 (en) 2013-07-30 2016-03-29 Industrial Technology Research Institute Apparatus for amplifying intensity during transmission small angle—X-ray scattering measurements
TWI538565B (zh) * 2013-10-15 2016-06-11 財團法人工業技術研究院 增加穿透式小角度x光散射之散射強度的裝置
CN104754848B (zh) 2013-12-30 2017-12-08 同方威视技术股份有限公司 X射线发生装置以及具有该装置的x射线透视成像系统
KR20170127412A (ko) * 2015-01-16 2017-11-21 라피스캔 시스템스, 인코포레이티드 관심대상이 되는 물질의 검출을 위한 비침습검사 시스템과 방법
CN104873214B (zh) * 2015-05-22 2018-04-13 北京师范大学 早期乳腺癌的检测装置
CN108445023B (zh) * 2016-11-09 2020-08-14 上海伊斯曼电气股份有限公司 一种用于x射线异物检测仪的探测盒
US10281414B2 (en) * 2016-12-01 2019-05-07 Malvern Panalytical B.V. Conical collimator for X-ray measurements
EP3553507A1 (fr) * 2018-04-13 2019-10-16 Malvern Panalytical B.V. Appareil d'analyse à rayons x
BR102018008275B1 (pt) * 2018-04-24 2023-12-12 Marcio Issamu Haraguchi Sistema e processo de imageamento de equipamentos industriais
CN108956657A (zh) * 2018-08-23 2018-12-07 深圳码隆科技有限公司 一种安检过程中液体识别方法及其装置
CN109374660B (zh) * 2018-11-22 2024-09-06 北京科技大学 用于排笔光束的高通量粉末衍射的装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60181638A (ja) * 1984-02-29 1985-09-17 Toshiba Corp 放射線像撮影装置
DE3526015A1 (de) * 1985-07-20 1987-01-22 Philips Patentverwaltung Verfahren zum bestimmen der raeumlichen verteilung der streuquerschnitte fuer elastisch gestreute roentgenstrahlung und anordnung zur durchfuehrung des verfahrens
US5007072A (en) * 1988-08-03 1991-04-09 Ion Track Instruments X-ray diffraction inspection system
DE4101544A1 (de) * 1991-01-19 1992-07-23 Philips Patentverwaltung Roentgengeraet
DE59308726D1 (de) * 1992-02-06 1998-08-13 Philips Patentverwaltung Anordnung zum Messen des Impulsübertragsspektrums von elastisch gestreuten Röntgenquanten
US5802137A (en) * 1993-08-16 1998-09-01 Commonwealth Scientific And Industrial Research X-ray optics, especially for phase contrast imaging
RU2098797C1 (ru) * 1994-11-30 1997-12-10 Алексей Владиславович Курбатов Способ получения проекции объекта с помощью проникающего излучения и устройство для его осуществления

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9833062A1 *

Also Published As

Publication number Publication date
WO1998033062A1 (fr) 1998-07-30
JP2000512764A (ja) 2000-09-26
AU6039798A (en) 1998-08-18
WO1998033063A1 (fr) 1998-07-30
AU5929198A (en) 1998-08-18
CN1216109A (zh) 1999-05-05

Similar Documents

Publication Publication Date Title
US6054712A (en) Inspection equipment using small-angle topography in determining an object's internal structure and composition
EP0898704A1 (fr) Materiel d'inspection faisant appel a la topographie a petit angle pour determiner la structure et la composition internes d'un objet
US10466185B2 (en) X-ray interrogation system using multiple x-ray beams
US5717733A (en) X-ray and neutron diffractometric imaging of the internal structure of objects
CN103648388B (zh) 相位对比度成像设备
RU2098797C1 (ru) Способ получения проекции объекта с помощью проникающего излучения и устройство для его осуществления
JP4796254B2 (ja) X線アレイ検出器
US6483891B1 (en) Reduced-angle mammography device and variants
US5805662A (en) Using deflected penetrating radiation to image an object's internal structure
US20100254514A1 (en) Detection of x-ray scattering
US11726048B2 (en) Sample inspection apparatus employing a diffraction detector
JPS61132846A (ja) 物体検査装置
JP2001524011A (ja) 組織分析装置
JPH05264479A (ja) X線分析装置
GB2560165A (en) Sample inspection apparatus employing a diffraction detector
JP2005003447A (ja) 表面検査方法および表面検査装置
RU2119660C1 (ru) Устройство для определения состава и структуры неоднородного объекта (варианты)
JPH0954050A (ja) X線小角散乱装置
WO1996023210A1 (fr) Rayonnement penetrant devie destine a reproduire en image la structure interne d'un objet
RU2119659C1 (ru) Устройство для малоугловой топографии (варианты)
RU2137114C1 (ru) Способ малоугловой интроскопии и устройства для его осуществления (варианты)
JP2002333409A (ja) X線応力測定装置
RU2173087C2 (ru) Устройство для малоугловой маммографии (варианты)
GB2560164A (en) Sample inspection apparatus employing a diffraction detector
RU2167411C2 (ru) Устройство для рентгенодиагностики с использованием малоуглового рассеянного излучения (варианты)

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19981020

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE DE ES FR GB GR IE IT NL SE

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20060701