EP0896694A1 - Procede et dispositif pour la fabrication de films de composition exposes pour la photocomposition - Google Patents

Procede et dispositif pour la fabrication de films de composition exposes pour la photocomposition

Info

Publication number
EP0896694A1
EP0896694A1 EP96914158A EP96914158A EP0896694A1 EP 0896694 A1 EP0896694 A1 EP 0896694A1 EP 96914158 A EP96914158 A EP 96914158A EP 96914158 A EP96914158 A EP 96914158A EP 0896694 A1 EP0896694 A1 EP 0896694A1
Authority
EP
European Patent Office
Prior art keywords
film
exposed
laser
laser beam
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96914158A
Other languages
German (de)
English (en)
Inventor
Herbert Costard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Windi Winderlich GmbH
Original Assignee
Windi Winderlich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Windi Winderlich GmbH filed Critical Windi Winderlich GmbH
Publication of EP0896694A1 publication Critical patent/EP0896694A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50

Definitions

  • the invention relates to a method for the production of exposed typesetting films for the typesetting of light, in which a typesetting film, which has a transparent plastic base film and at least one applied cover layer, is scanned with a laser beam and exposed in a pixel-controlled manner by the type information, and a corresponding one Device for carrying out the method.
  • a laser beam is guided line by line over a set film via a rotating mirror.
  • a modulator is provided in the beam path between the laser and the rotating mirror, which electronically controls periodically deflects the laser beam and only allows it to reach the set film at intervals via the rotating mirror, the rotating mirror continuing to rotate between successive intervals, so that successive intervals occur in successive intervals Pixels of a line are exposed on the film.
  • a helium-neon laser is used as the laser light source.
  • the exposed photographic film on which, for example, the pages of a newspaper were imaged using the process steps mentioned, is then developed in the usual way to then use the film to produce the printing forms.
  • a method for producing photomasks for the further production of electronic circuits in which a film consists of a plastic carrier film, an extremely thin metal layer applied thereon and a plastic protective layer covering the metal layer.
  • the film is irradiated with an intense laser beam pixel by pixel, the energy of the laser beam destroying the metal layer at the pixels to be exposed and the metal coagulating to the finest particles.
  • the production of such multilayer structures is relatively complicated.
  • a set film which has a transparent plastic base film or carrier film and a top layer containing carbon black and / or graphite applied thereon.
  • the amount of carbon black and / or graphite applied in the top layer is selected so that the set film has a desired predetermined densitometric density or blackening.
  • the laser beam scans the film for pixels to be exposed with sufficient intensity to burn off the cover layer in these pixels so that only the transparent base film remains in the exposed pixels.
  • the radiation can be directed both directly and indirectly through the plastic base film onto the cover layer.
  • the laser power required is advantageously lower when irradiated through the plastic base film. After the irradiation, only the transparent plastic base film remains in the exposed areas, while the cover layer is retained in the unexposed areas, so that the exposed film directly obtains the desired image.
  • the use of carbon black and / or graphite as cover material enables a desired blackening to be achieved with relatively little material.
  • the materials mentioned which contain substantial proportions of atomic carbon, can be ignited relatively easily with a laser beam, so that the top layer at one pixel can be completely removed within a short exposure time (typically 10 ns to 10 ⁇ s) of the laser. It has been found that the soot and / or graphite-containing ⁇ covering layers fen by laser beams completely evaporation ⁇ and can burn without residue on the base film material Kunststoff ⁇ remain.
  • the energy density required for this is, for example, about 1 J / cm at a wavelength of 1.064 ⁇ m.
  • soot and / or graphite-containing cover layers Another important advantage of soot and / or graphite-containing cover layers is that essentially carbon dioxide is produced as the combustion product, so that no special protective measures are necessary to capture and suction off reaction products.
  • the method according to the invention it is therefore possible, by means of a single laser scanning of the set film, to produce an exposed set film which bears the desired image without further processing steps being necessary.
  • the typesetting film with a plastic base film and a soot and / or graphite-containing cover layer can be produced simply and inexpensively and is superior to all known typesetting films in this respect.
  • the top layer consists of a mixture of dispersed carbon black and binder, preferred binders being mixed polymers based on acrylic ester-acrylic / methacrylic acid, maleic acid styrene or polyurethane.
  • the cover layer can have thicknesses in the range of 1.5 to 10 ⁇ m, preferably 1.5 to 6 ⁇ m.
  • Lasers with good beam properties and sufficiently high power can be used for the process.
  • the most effective wave The length of the laser is determined by the interaction of the laser radiation with the material of the cover layer. Since soot and graphite have a high absorption in the entire optical wavelength range, lasers in the wavelength range from 180 nm to 10.6 ⁇ m are particularly suitable for the method. A large number of laser sources are available in this area, and at the same time there are sufficient optical aids for beam guidance.
  • Nd: YAG lasers in particular diode-pumped Nd: YAG lasers
  • YAG lasers diode-pumped Nd: YAG lasers
  • Such lasers are available today with sufficient power with diffraction-limited beam quality, for example with a power of 10 watts, which is completely sufficient for the purposes of the present invention.
  • diode lasers with good beam quality are also suitable for the method according to the invention due to their compactness and excellent modulability.
  • the covering layer is dimensioned according to its soot and / or graphite content and its thickness so that sufficient blackening is achieved, but the amount of material is small enough so that the covering layer can be easily burned off.
  • a cover layer can consist, for example, of pigment black with polyurethane as a binder and have a thickness of 4 ⁇ m. Polyester, for example, can be used as the material of the plastic base film, for example with a layer thickness of 75 ⁇ m.
  • a 75 ⁇ m thick PETP film (polyethylene terephthalate) is used as the plastic base film, to which a 2.1 ⁇ m thick cover layer is applied.
  • the top layer has the following composition:
  • the cover layer described has an optical density of 3.9.
  • a 2.4 ⁇ m thick cover layer with the following composition is applied to a plastic base film as in the previous example:
  • the cover layer just described has an optical density of 4.1.
  • a device can be constructed as follows, for example.
  • the laser beam of a diode-pumped Nd: YAG laser with a basic mode power of 20 watts is split into several partial beams, each of which can be modulated in intensity by a modulator.
  • These partial beams are expanded by optics adapted to the wavelength of the laser and focused on the film plane.
  • the deflection of each laser beam over the film is realized by a polygon scanner with several facets.
  • the film is exposed through the transparent plastic base film.
  • a suction device is arranged behind the film and disposes of the released gases. Since the film is insensitive to daylight, the film can be fed via an open film drum with more than 100 meters of film.
  • the device itself is not necessarily designed to be light-tight. Since the film is no longer under development with an additional highly precise alignment of the film, it is even possible to post-process the film.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Abstract

L'invention conerne un procédé et un dispositif pour la fabrication de films de composition exposés pour la photocomposition. Dans ce procédé, un film de composition présentant une feuille de base plastique transparente, sur laquelle est appliquée au moins une couche de surface, est exploré avec un faisceau laser et exposé pixel par pixel tout en étant guidé par les informations de composition. Dans le but de permettre la fabrication simple et peu onéreuse de films de composition, il est proposé d'utiliser un film de composition possédant une couche de surface contenant du noir de carbone et/ou du graphite sur la feuille de base plastique transparente, et de brûler avec le faisceau laser cette couche de surface au niveau des pixels à exposer. Ainsi, seule la feuille de base plastique transparente subsiste dans les régions exposées.
EP96914158A 1996-05-02 1996-05-02 Procede et dispositif pour la fabrication de films de composition exposes pour la photocomposition Withdrawn EP0896694A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1996/001806 WO1997042547A1 (fr) 1996-05-02 1996-05-02 Procede et dispositif pour la fabrication de films de composition exposes pour la photocomposition

Publications (1)

Publication Number Publication Date
EP0896694A1 true EP0896694A1 (fr) 1999-02-17

Family

ID=8166214

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96914158A Withdrawn EP0896694A1 (fr) 1996-05-02 1996-05-02 Procede et dispositif pour la fabrication de films de composition exposes pour la photocomposition

Country Status (4)

Country Link
EP (1) EP0896694A1 (fr)
AU (1) AU5763196A (fr)
DE (1) DE19681449D2 (fr)
WO (1) WO1997042547A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19918795A1 (de) * 1999-04-26 2000-11-02 Heidelberger Druckmasch Ag Trockenfilm für ablative Belichtung
IL131202A0 (en) * 1999-08-02 2001-01-28 Scitex Corp Ltd Method for proof-reading printing plates
EP3323017B1 (fr) * 2015-07-15 2019-04-10 Flint Group Germany GmbH Film de masquage pouvant etre soumis a une ablation laser

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787210A (en) * 1971-09-30 1974-01-22 Ncr Laser recording technique using combustible blow-off
AU6984274A (en) * 1973-06-08 1975-12-11 Grace W R & Co Printing plate process
CA1049312A (fr) * 1974-01-17 1979-02-27 John O.H. Peterson Plaque d'impression presensibilise avec masque formateur d'image au laser en position
US4245003A (en) * 1979-08-17 1981-01-13 James River Graphics, Inc. Coated transparent film for laser imaging
US4588674A (en) * 1982-10-14 1986-05-13 Stewart Malcolm J Laser imaging materials comprising carbon black in overlayer
DE4107378A1 (de) * 1991-03-08 1992-09-10 Basf Ag Mehrfach verwendbare kopiermaske

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9742547A1 *

Also Published As

Publication number Publication date
DE19681449D2 (de) 2000-02-10
AU5763196A (en) 1997-11-26
WO1997042547A1 (fr) 1997-11-13

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