EP0836719A1 - Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs - Google Patents

Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs

Info

Publication number
EP0836719A1
EP0836719A1 EP96919439A EP96919439A EP0836719A1 EP 0836719 A1 EP0836719 A1 EP 0836719A1 EP 96919439 A EP96919439 A EP 96919439A EP 96919439 A EP96919439 A EP 96919439A EP 0836719 A1 EP0836719 A1 EP 0836719A1
Authority
EP
European Patent Office
Prior art keywords
ultrapure
sensor
mixing
mixed fluid
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP96919439A
Other languages
German (de)
English (en)
Other versions
EP0836719A4 (fr
Inventor
Joe G. Hoffman
R. Scot Clark
Allen H. Jones, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide America Corp
Original Assignee
Startec Ventures Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1995/007649 external-priority patent/WO1996039358A1/fr
Application filed by Startec Ventures Inc filed Critical Startec Ventures Inc
Priority claimed from PCT/US1996/010389 external-priority patent/WO1996039651A1/fr
Publication of EP0836719A1 publication Critical patent/EP0836719A1/fr
Publication of EP0836719A4 publication Critical patent/EP0836719A4/fr
Ceased legal-status Critical Current

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  • Cleaning Or Drying Semiconductors (AREA)

Abstract

Système et procédé permettant de mélanger et/ou de diluer des fluides ultrapurs, tels que des acides liquides, pour la fabrication de semi-conducteurs. Ledit système comporte des premier et second distributeurs chimiques adaptés pour contenir respectivement des premier et second fluides à mélanger, un raccord entre les premier et second distributeurs chimiques qui permet aux premier et second fluides de s'écouler par ledit raccord et de se mêler pour former un fluide mélangé, ledit raccord permettant en outre au fluide mélangé de s'écouler jusqu'à un lieu requis par l'opérateur, et un dispositif d'émission d'ondes ultrasoniques (28). Ledit dispositif est placé en un lieu lui permettant d'émettre une onde ultrasonique à travers le fluide mélangé et comporte un moyen destiné à mesurer la vitesse de l'onde à travers le fluide mélangé et donc à mesurer indirectement une proportion définie par une quantité du premier produit chimique par rapport à une quantité du second produit chimique dans le fluide mélangé.
EP96919439A 1995-06-05 1996-06-05 Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs Ceased EP0836719A4 (fr)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
PCT/US1995/007649 WO1996039358A1 (fr) 1995-06-05 1995-06-05 Purification de gaz ammoniac jusqu'au niveau requis pour son utilisation dans la fabrication de composants electroniques
WOPCT/US95/07649 1995-06-06
US1810495P 1995-07-07 1995-07-07
US49956295A 1995-07-07 1995-07-07
US499562 1995-07-07
US1782896P 1996-03-08 1996-03-08
US61272996A 1996-03-08 1996-03-08
US612729 1996-03-08
PCT/US1996/010389 WO1996039651A1 (fr) 1995-06-05 1996-06-05 Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs

Publications (2)

Publication Number Publication Date
EP0836719A1 true EP0836719A1 (fr) 1998-04-22
EP0836719A4 EP0836719A4 (fr) 1999-08-18

Family

ID=27486686

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96919439A Ceased EP0836719A4 (fr) 1995-06-05 1996-06-05 Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs

Country Status (1)

Country Link
EP (1) EP0836719A4 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091834A (en) * 1975-11-14 1978-05-30 Sandoz Ltd. Apparatus for automatically preparing solution of controlled concentration
WO1992016306A2 (fr) * 1991-03-19 1992-10-01 Startec Ventures, Inc. Production de composants electroniques de haute precision au moyen de liquides tres purs

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091834A (en) * 1975-11-14 1978-05-30 Sandoz Ltd. Apparatus for automatically preparing solution of controlled concentration
WO1992016306A2 (fr) * 1991-03-19 1992-10-01 Startec Ventures, Inc. Production de composants electroniques de haute precision au moyen de liquides tres purs

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO9639651A1 *

Also Published As

Publication number Publication date
EP0836719A4 (fr) 1999-08-18

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