EP0836719A1 - Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs - Google Patents
Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteursInfo
- Publication number
- EP0836719A1 EP0836719A1 EP96919439A EP96919439A EP0836719A1 EP 0836719 A1 EP0836719 A1 EP 0836719A1 EP 96919439 A EP96919439 A EP 96919439A EP 96919439 A EP96919439 A EP 96919439A EP 0836719 A1 EP0836719 A1 EP 0836719A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ultrapure
- sensor
- mixing
- mixed fluid
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US1995/007649 WO1996039358A1 (fr) | 1995-06-05 | 1995-06-05 | Purification de gaz ammoniac jusqu'au niveau requis pour son utilisation dans la fabrication de composants electroniques |
WOPCT/US95/07649 | 1995-06-06 | ||
US1810495P | 1995-07-07 | 1995-07-07 | |
US49956295A | 1995-07-07 | 1995-07-07 | |
US499562 | 1995-07-07 | ||
US1782896P | 1996-03-08 | 1996-03-08 | |
US61272996A | 1996-03-08 | 1996-03-08 | |
US612729 | 1996-03-08 | ||
PCT/US1996/010389 WO1996039651A1 (fr) | 1995-06-05 | 1996-06-05 | Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0836719A1 true EP0836719A1 (fr) | 1998-04-22 |
EP0836719A4 EP0836719A4 (fr) | 1999-08-18 |
Family
ID=27486686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96919439A Ceased EP0836719A4 (fr) | 1995-06-05 | 1996-06-05 | Systeme et procede de melange in situ de produits chimiques a purete ultraelevee pour l'elaboration de semi-conducteurs |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP0836719A4 (fr) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4091834A (en) * | 1975-11-14 | 1978-05-30 | Sandoz Ltd. | Apparatus for automatically preparing solution of controlled concentration |
WO1992016306A2 (fr) * | 1991-03-19 | 1992-10-01 | Startec Ventures, Inc. | Production de composants electroniques de haute precision au moyen de liquides tres purs |
-
1996
- 1996-06-05 EP EP96919439A patent/EP0836719A4/fr not_active Ceased
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4091834A (en) * | 1975-11-14 | 1978-05-30 | Sandoz Ltd. | Apparatus for automatically preparing solution of controlled concentration |
WO1992016306A2 (fr) * | 1991-03-19 | 1992-10-01 | Startec Ventures, Inc. | Production de composants electroniques de haute precision au moyen de liquides tres purs |
Non-Patent Citations (1)
Title |
---|
See also references of WO9639651A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP0836719A4 (fr) | 1999-08-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 19980102 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB IT NL |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: AIR LIQUIDE AMERICA CORPORATION |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 19990702 |
|
AK | Designated contracting states |
Kind code of ref document: A4 Designated state(s): DE FR GB IT NL |
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RIC1 | Information provided on ipc code assigned before grant |
Free format text: 6G 05D 11/13 A, 6B 01F 15/04 B, 6H 01L 21/00 B, 6C 01C 1/02 B, 6C 01B 7/19 B, 6C 01B 21/38 B |
|
17Q | First examination report despatched |
Effective date: 20000517 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
|
18R | Application refused |
Effective date: 20021216 |