EP0789815B1 - Pompe a vide a friction pourvue d'un systeme de refroidissement - Google Patents

Pompe a vide a friction pourvue d'un systeme de refroidissement Download PDF

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Publication number
EP0789815B1
EP0789815B1 EP95929813A EP95929813A EP0789815B1 EP 0789815 B1 EP0789815 B1 EP 0789815B1 EP 95929813 A EP95929813 A EP 95929813A EP 95929813 A EP95929813 A EP 95929813A EP 0789815 B1 EP0789815 B1 EP 0789815B1
Authority
EP
European Patent Office
Prior art keywords
pump according
housing
pump
drive motor
situated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95929813A
Other languages
German (de)
English (en)
Other versions
EP0789815A1 (fr
Inventor
Friedrich Von Schulz-Hausmann
Wilhelm Walter
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0789815A1 publication Critical patent/EP0789815A1/fr
Application granted granted Critical
Publication of EP0789815B1 publication Critical patent/EP0789815B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system

Definitions

  • the invention relates to a single-flow friction vacuum pump with a housing in which axially one behind the other an inlet, the pump active areas as well a drive motor are arranged and in which a fan is integrated.
  • the present invention is based on the object a friction vacuum pump of the type mentioned equipped with improved air cooling.
  • this object is achieved by the characterizing Features of claim 1 solved.
  • the fan is axially laterally from the drive motor is, the disadvantages described do not exist more.
  • the cooling effect is more even.
  • the rotor side, due to the resulting heat of compression endangered bearings are adequately cooled.
  • the built-in fan is expediently operated in such a way that it is controlled by a temperature sensor.
  • the The pump is then constantly facing an undesirable temperature increase protected.
  • FIGS. 1 to 6 are the pump itself with 1, its inlet with 2 and their outlet designated 3.
  • the housing of the pump 1 includes the two sections 4 and 5.
  • the housing section 4 surrounds the stator 6 and the rotor 7 the friction pump.
  • Figures 1 and 4 show that components the friction pump turbomolecular pump stages 8 and Siegbahn pump stages are 9.
  • the housing section 5 surrounds the drive motor 11, the Stator with 12 and the rotor is designated 13. Of the Housing section 5 is part of a chassis' 14 with the Interior 15, in which the drive motor 11 and others Components. Otherwise, the chassis is 14 carriers all other components of the pump 1. On the inlet 2 opposite end face is the interior 15 with the Disc 16 covered.
  • the shaft 17 which carries the rotor 7 is also in the chassis 14 stored, in such a way that the rotor 13 of the drive motor 11 is located between their bearings 18 and 19.
  • the rotor 13 is located within a space 20 which is formed by the chassis 14 and by a can 21. This space 20 is gas-tight to the outside. This runs the Rotor 13 of the drive motor 11 in a vacuum while the Motor stator 12 is located outside the vacuum. So that is no gas-tight bushing required.
  • the spring 22 which serves to generate the camp staff. She is the one assigned drive-side end of the shaft 17 and as conical spiral spring. Compared to the otherwise Disc springs used in this area have a conical designed spiral spring a much flatter characteristic, so that it is essentially independent of tolerances constant pitch force is ensured. Across from cylindrical coil springs has a conical shape Coil spring has the advantage that its axial length is smaller.
  • the exterior of the entire pump 1 is essentially conical designed.
  • the cross section of their housing or their housing sections 4, 5 widens from inlet 2 to the drive side there. This measure allows an axially short construction, because there is enough space on the drive side stands around several of the components arranged there side by side to be able to order.
  • a fan 23 is located in the interior 15 of the chassis 14 a fan 23. It is on the side next to the drive motor 11 arranged and can either be in continuous operation or controlled by a temperature sensor, not shown become. Adequate cooling of the pump, in particular of their drive motor 11 is thereby ensured.
  • FIGS. 1 to 3 extends the plane generating the pad 24 parallel to the shaft 17 of the pump 1.
  • a flat surface 27 is provided with an opening 28.
  • This opening 28 equipped with a grating 29 serves as Suction opening for the fan 23 arranged next to it Cooled air drawn in again passes through openings 31 and 32 after it flows around the drive motor 11.
  • the Openings 31 are in the interior 15 of the Chassis' 14 covering disk 16.
  • the openings 32 open into a groove 33, which is located between the housing sections 4 and 5 is located.
  • FIGS. 4 to 6 forms the pad 24 generating plane with the Shaft 17 an angle, such that the pad 24 compared to the pad 24 in the embodiment according to Figures 1 to 3 is larger.
  • the fans 23 assigned Suction openings 34 and 35 also in the disk 16 and in the groove 33.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (14)

  1. Pompe à vide à friction (1) à un seul flux, comportant un boítier (4, 5) dans lequel une admission (2), les surfaces de pompage actives (8, 9), ainsi qu'un moteur d'entraínement (11) sont agencés axialement les uns derrière les autres et dans lequel est intégré un ventilateur (23), caractérisée en ce que le ventilateur (23) est agencé latéralement à côté du moteur d'entraínement (11), vu en direction axiale du moteur d'entraínement, et en ce que la paroi du boítier est équipée d'orifices d'aspiration et de sortie d'air.
  2. Pompe selon la revendication 1, caractérisée en ce que son boítier (4, 5) est réalisé en deux parties, en ce que le tronçon de boítier (4) entoure un stator (6) et un rotor (7) et en ce que le tronçon de boítier (5) entoure le moteur d'entraínement (11).
  3. Pompe selon la revendication 2, caractérisée en ce que le tronçon de boítier (5) fait partie d'un châssis (14) dans la chambre intérieure (15) dans laquelle se trouve le moteur d'entraínement (11), et en ce que la face frontale ouverte de la chambre intérieure (15) est recouverte par une plaque (16).
  4. Pompe selon la revendication 3, caractérisée en ce que la plaque (16) est équipée d'orifices d'admission d'air (35) et d'orifices de sortie d'air (31).
  5. Pompe selon l'une quelconque des revendications 1 à 4, caractérisée en ce que les orifices d'admission d'air (34) et les orifices de sortie d'air (32) débouchent dans une gorge périphérique dans le boítier de la pompe (1).
  6. Pompe selon les revendications 1 et 5, caractérisée en ce que la gorge (33) se trouve entre les deux tronçons de boítier (4, 5).
  7. Pompe selon l'une quelconque des revendications 3 à 5, caractérisée en ce que l'arbre (17) portant le rotor (7) est monté dans le châssis (14), et ceci de telle sorte que le rotor (13) du moteur d'entraínement (11) se trouve entre ses paliers (18, 19).
  8. Pompe selon la revendication 7, caractérisée en ce que le châssis (14) et une gaine (21) forment un espace (20) étanche aux gaz dans lequel se trouve le stator (12) du moteur.
  9. Pompe selon l'une ou l'autre des revendications 7 et 8, caractérisée en ce que un ressort hélicoïdal (22) conique associé à la face frontale de l'arbre (17), côté entraínement, sert à générer les forces de portée sur les paliers.
  10. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que son boítier est réalisé de telle sorte qu'il s'évase de manière sensiblement conique depuis l'admission (2) jusqu'au côté entraínement.
  11. Pompe selon la revendication 2 et la revendication 10, caractérisée en ce que le tronçon de boítier (5) est équipé d'une surface de raccordement (24) plane sur laquelle se trouvent un raccord (3) au vide préliminaire, un connecteur (24) pour un convertisseur de fréquence et/ou un raccord de mise à l'air (26).
  12. Pompe selon la revendication 11, caractérisée en ce que la surface de raccordement (24) s'étend parallèlement à l'arbre (17).
  13. Pompe selon la revendication 11, caractérisée en ce que la surface de raccordement (24) forme avec l'arbre (17) un angle, et ceci de telle sorte que la surface de raccordement (24) est agrandie et accessible de plusieurs côtés.
  14. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce qu'il est prévu un palpeur de température pour commander le ventilateur (23) intégré au boítier de la pompe.
EP95929813A 1994-10-31 1995-08-08 Pompe a vide a friction pourvue d'un systeme de refroidissement Expired - Lifetime EP0789815B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4438812 1994-10-31
DE4438812A DE4438812A1 (de) 1994-10-31 1994-10-31 Reibungsvakuumpumpe mit Kühlung
PCT/EP1995/003140 WO1996013667A1 (fr) 1994-10-31 1995-08-08 Pompe a vide a friction pourvue d'un systeme de refroidissement

Publications (2)

Publication Number Publication Date
EP0789815A1 EP0789815A1 (fr) 1997-08-20
EP0789815B1 true EP0789815B1 (fr) 1999-03-10

Family

ID=6532098

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95929813A Expired - Lifetime EP0789815B1 (fr) 1994-10-31 1995-08-08 Pompe a vide a friction pourvue d'un systeme de refroidissement

Country Status (4)

Country Link
EP (1) EP0789815B1 (fr)
JP (1) JPH10507806A (fr)
DE (2) DE4438812A1 (fr)
WO (1) WO1996013667A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19937392A1 (de) 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
JP2002276587A (ja) 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6912196B2 (ja) * 2016-12-28 2021-08-04 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (de) * 1932-01-08 1934-11-20 Hugo Seemann Dr Turbohochvakuumpumpe
CH291846A (de) * 1950-04-12 1953-07-15 Philips Nv Hochvakuummolekularpumpe.
US2726807A (en) * 1950-09-28 1955-12-13 Finnell System Inc Vacuum apparatus for water and dirt removal
DE1025557B (de) * 1952-08-27 1958-03-06 Ernst Huerner Elektrisch angetriebener Axialluefter aus saeurefestem Kunststoff mit in den Lueftereingebautem Elektromotor, insbesondere zur Foerderung saeurehaltiger Medien
GB2232205B (en) * 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump
JP2741863B2 (ja) * 1988-04-15 1998-04-22 株式会社日立製作所 ターボ真空ポンプ
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ

Also Published As

Publication number Publication date
WO1996013667A1 (fr) 1996-05-09
EP0789815A1 (fr) 1997-08-20
DE59505320D1 (de) 1999-04-15
DE4438812A1 (de) 1996-05-02
JPH10507806A (ja) 1998-07-28

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