DE59505320D1 - Reibungsvakuumpumpe mit kühlung - Google Patents

Reibungsvakuumpumpe mit kühlung

Info

Publication number
DE59505320D1
DE59505320D1 DE59505320T DE59505320T DE59505320D1 DE 59505320 D1 DE59505320 D1 DE 59505320D1 DE 59505320 T DE59505320 T DE 59505320T DE 59505320 T DE59505320 T DE 59505320T DE 59505320 D1 DE59505320 D1 DE 59505320D1
Authority
DE
Germany
Prior art keywords
cooling
vacuum pump
friction vacuum
friction
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59505320T
Other languages
English (en)
Inventor
Schulz-Hausmann Friedrich Von
Wilhelm Walter
Heinrich Englaender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59505320D1 publication Critical patent/DE59505320D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE59505320T 1994-10-31 1995-08-08 Reibungsvakuumpumpe mit kühlung Expired - Fee Related DE59505320D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4438812A DE4438812A1 (de) 1994-10-31 1994-10-31 Reibungsvakuumpumpe mit Kühlung
PCT/EP1995/003140 WO1996013667A1 (de) 1994-10-31 1995-08-08 Reibungsvakuumpumpe mit kühlung

Publications (1)

Publication Number Publication Date
DE59505320D1 true DE59505320D1 (de) 1999-04-15

Family

ID=6532098

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4438812A Withdrawn DE4438812A1 (de) 1994-10-31 1994-10-31 Reibungsvakuumpumpe mit Kühlung
DE59505320T Expired - Fee Related DE59505320D1 (de) 1994-10-31 1995-08-08 Reibungsvakuumpumpe mit kühlung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4438812A Withdrawn DE4438812A1 (de) 1994-10-31 1994-10-31 Reibungsvakuumpumpe mit Kühlung

Country Status (4)

Country Link
EP (1) EP0789815B1 (de)
JP (1) JPH10507806A (de)
DE (2) DE4438812A1 (de)
WO (1) WO1996013667A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19937392A1 (de) 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
JP2002276587A (ja) 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6912196B2 (ja) 2016-12-28 2021-08-04 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (de) * 1932-01-08 1934-11-20 Hugo Seemann Dr Turbohochvakuumpumpe
CH291846A (de) * 1950-04-12 1953-07-15 Philips Nv Hochvakuummolekularpumpe.
US2726807A (en) * 1950-09-28 1955-12-13 Finnell System Inc Vacuum apparatus for water and dirt removal
DE1025557B (de) * 1952-08-27 1958-03-06 Ernst Huerner Elektrisch angetriebener Axialluefter aus saeurefestem Kunststoff mit in den Lueftereingebautem Elektromotor, insbesondere zur Foerderung saeurehaltiger Medien
WO1989006319A1 (en) * 1987-12-25 1989-07-13 Sholokhov Valery B Molecular vacuum pump
JP2741863B2 (ja) * 1988-04-15 1998-04-22 株式会社日立製作所 ターボ真空ポンプ
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ

Also Published As

Publication number Publication date
EP0789815A1 (de) 1997-08-20
EP0789815B1 (de) 1999-03-10
DE4438812A1 (de) 1996-05-02
WO1996013667A1 (de) 1996-05-09
JPH10507806A (ja) 1998-07-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee