EP0735321A2 - Procédé et dispositif pour la purification des effluents gazeux nocifs par conversion chimique - Google Patents

Procédé et dispositif pour la purification des effluents gazeux nocifs par conversion chimique Download PDF

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Publication number
EP0735321A2
EP0735321A2 EP96102122A EP96102122A EP0735321A2 EP 0735321 A2 EP0735321 A2 EP 0735321A2 EP 96102122 A EP96102122 A EP 96102122A EP 96102122 A EP96102122 A EP 96102122A EP 0735321 A2 EP0735321 A2 EP 0735321A2
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EP
European Patent Office
Prior art keywords
flame
fuel gas
burner
gas
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96102122A
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German (de)
English (en)
Other versions
EP0735321A3 (fr
EP0735321B1 (fr
Inventor
Horst Dr. Reichardt
Lothar Dipl.-Ing. Ritter
Günter Dipl.-Ing. Firkert
Lutz Dipl.-Phys. Labs
Konrad Dipl.-Phys. Gehmlich
Gerold Hofmann
Michael Dipl-Ing. Hentrich
Wido Wiesenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Das-Duennschicht Anlagen Systeme Dresden GmbH
Das Duennschicht Anlagen Systeme GmbH
Original Assignee
Das-Duennschicht Anlagen Systeme Dresden GmbH
Das Duennschicht Anlagen Systeme GmbH
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Application filed by Das-Duennschicht Anlagen Systeme Dresden GmbH, Das Duennschicht Anlagen Systeme GmbH filed Critical Das-Duennschicht Anlagen Systeme Dresden GmbH
Publication of EP0735321A2 publication Critical patent/EP0735321A2/fr
Publication of EP0735321A3 publication Critical patent/EP0735321A3/fr
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Publication of EP0735321B1 publication Critical patent/EP0735321B1/fr
Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel

Definitions

  • the invention relates to a method and devices for cleaning pollutant-containing exhaust gases by chemical reaction in a combustion chamber.
  • waste gases containing pollutants are produced.
  • These exhaust gases include fluorine-containing hydrocarbons or other fluorine compounds.
  • inert gases such as argon or nitrogen are major components of the exhaust gases. Because of the high proportion of such gases, these exhaust gases themselves are usually not combustible.
  • the pollutants or their reaction products have a toxic effect or, due to their harmful effects in the atmosphere, promote ozone depletion and the greenhouse effect.
  • a whole series of methods are known for exhaust gas purification.
  • the cleaning is very often carried out by sorption of the pollutants from the exhaust gas, for example in oxidizing aqueous solution (DE 3342816).
  • Pollutants that are not sorbed in this way or are not efficiently treated can be converted by chemical conversion processes, for example thermal decomposition (EU 0384803) by heating or by burning in an oxygen-containing environment (US Pat. No. 5,183,646). If this is done by burning, exhaust gases with a high proportion of inert gas have to be introduced into a combustion gas flame, for example from a natural gas or hydrogen / oxygen mixture. Harmful secondary products of the conversion are then removed from the exhaust gas, for example by sorption or washing processes.
  • Exhaust gas cleaning is generally a multi-stage process in which partial processes such as thermal decomposition or oxidation, cooling, sorption, hydrolysis and washing out of solid reaction products take place (EP 89 110 875).
  • the exhaust gas is passed in succession, for example, through a device with a combustion chamber and at least one further device, for example one which operates on the washing principle.
  • Devices for purifying exhaust gas have also been proposed, in which the exhaust gas is passed successively through a combustion chamber for combusting the pollutants and a washing chamber, which are structurally combined to form a unit (EP 89 110 875).
  • a disadvantage of such methods and devices with thermal decomposition of the pollutants in a combustion chamber and with a washing chamber are the thermal and electrolytic corrosion of the wall surfaces and other parts, in particular the combustion chamber, under the action of gaseous reaction products from the combustion. This corrosion is critically increased by the high temperature of the burned fuel gas mixture and exhaust gases, especially if these e.g. Hydrogen halides, e.g. HF, and water vapor included.
  • Hydrogen halides e.g. HF
  • an improvement in the efficiency of the cleaning in the direction of a low pollutant content in the cleaned exhaust gas can be achieved by increasing the amount of fuel gas relative to the amount of the supplied exhaust gas, but this route is associated with a critical deterioration in the economy of the exhaust gas cleaning because of the increased fuel gas consumption .
  • the invention has for its object to improve the effectiveness of the purification of exhaust gases by chemical conversion in a fuel gas flame, ie to drastically reduce the percentage of residual pollutants in the cleaned exhaust gas.
  • no unburned constituents of the fuel gas should be contained in the cleaned exhaust gas. In particular, it can be achieved that no secondary pollutants arise during combustion and are released with the cleaned exhaust gas.
  • the object is achieved by a method according to claim 1, 2 and 3 and a device according to claim 4 or 5 .
  • the method assumes that a fuel gas mixture is used in a combustion chamber with a burner to generate a fuel gas flame and that the exhaust gas, which contains the pollutants, in particular fluorine-containing hydrocarbons or other fluorine compounds, is fed into this flame.
  • the chemical conversion of the pollutant components of the exhaust gas takes place in the flame.
  • the burned exhaust gas contains gaseous reaction products of the pollutants.
  • a strongly reducing fame area is created, into which the exhaust gases to be cleaned are fed with the pollutants, on the other hand a strongly oxidizing flame area is created.
  • a strongly reducing flame is created in which the fuel gas mixture of fuel gas and oxygen, for example town gas, natural gas or hydrogen and oxygen, is fed into the burner with an excess of the fuel gas compared to the portion required for stoichiometric combustion and brought to combustion.
  • the exhaust gas usually a mixture of an inert gas (argon or nitrogen) and the fluorine-containing pollutant, such as C 2 F 6 , CHF 3 , SF 6 , NF 3 , is introduced into this flame.
  • the combustion reactions of the fuel gas run in the flame (CH 4th + 2O 2nd ⁇ CO 2nd + 2H 2nd O respectively. 2H 2nd + O 2nd ⁇ 2H 2nd O) and the reactions to Implementation of the pollutant (a possible reaction 1: 2C 2nd F 6 + 14H 2nd ⁇ 4CH 4th + 12HF and as secondary reaction 2: 4CH 4th + 8O 2nd ⁇ 4CO 2nd + 8H 2nd O) in parallel.
  • the reducing flame now contains unused fuel gas (CH 4 and H 2 in the example) and secondary pollutants (CH 4 and HF in the example).
  • the spatially separate feeding of a fuel gas mixture of a different composition into the flame creates, in addition to the reducing flame area primarily created in the burner, a second oxidizing flame area.
  • fuel gases and oxygen with a clear excess of oxygen compared to said conditions, which can burn without residue, air can be supplied as an oxygen supplier or pure oxygen at all.
  • the second oxidizing flame area is characterized by an excess of oxygen.
  • gases from the combusted fuel gas mixture CO 2 , H 2 O
  • unused fuel gas components in the example CH 4 and H 2
  • secondary pollutants in the example HF, CH 4
  • the complete combustion is also given according to the law of mass action, since an excess of oxygen is set in this flame area.
  • the heated inert components of the exhaust gas e.g. N 2
  • the inert combustion products predominantly CO 2 and water vapor
  • the secondary pollutants in the example HF
  • the secondary pollutants are removed in a manner known per se by sorption or hydrolysis.
  • the combustion products are sucked out of the combustion chamber and passed through an aqueous solution, for example in a spray washing device.
  • the method is carried out with a device which essentially consists of a preferably rotationally symmetrical combustion chamber with an annular burner arranged in an end face of the combustion chamber.
  • the fuel and the ring burner separately supplied oxygen or the fuel gas mixture (natural gas / oxygen or hydrogen / oxygen).
  • the fuel gas flame forms on the burner.
  • a feed preferably in the center of the ring burner, supplies the exhaust gas to be cleaned with the pollutants contained therein. Thanks to the central feed, the flue gas is enclosed on all sides by the fuel gas flame, an important prerequisite for effective conversion of pollutants.
  • the additional supply of fuel gas mixture with an excess of oxygen, air or pure oxygen into a ring burner takes place via one or more bores or channels of a second concentric ring.
  • a flame is formed above the burner, with a strongly reducing flame area as the core of the flame above the inner ring of the burner and with a strong one oxidizing flame area as the jacket of the flame over the outer ring of the burner.
  • the additional supply of air or oxygen takes place via one or more inlet channels in the wall the combustion chamber in the area of the ring burner.
  • a flame forms on the ring burner, the core of which is strongly reducing, since a fuel gas mixture with a deficit of oxygen is supplied to the ring burner in the sense mentioned.
  • the flame burns in the combustion chamber in a "jacket" of air or pure oxygen, so that a flame area is also formed in this way around the reducing flame area, which has a strong oxidizing effect.
  • the extraction on the combustion chamber, through which the combustion products are extracted, is dimensioned such that it passes through the holes or channels in the wall. ensures the air supply required for combustion.
  • the additional supply of air or oxygen into the flame area under positive pressure can be metered more precisely through the inlet channels in the wall of the combustion chamber.
  • Fig. 1 shows the device in a schematic longitudinal section.
  • the device according to the invention essentially consists of a cylindrical combustion chamber (1) made of a corrosion-resistant material. It has a diameter of 18 cm and is 60 cm high.
  • annular burner (3) to which the fuel gas mixture of fuel gas and oxygen is fed via a feed (4).
  • the position of the combustion chamber is vertical (other positions, also inclined, are also possible).
  • the ring burner (3) has a diameter of 25 mm.
  • the fuel gas flame (6) forms above the ring channel (5).
  • the exhaust gas with the toxic pollutants is fed to the burner (3) via the feed (7). It enters the fuel gas flame (6) centrally through the bore (8).
  • the burner (3) has an additional feed (9) for a fuel gas mixture of a different composition than that which is let into the feed (4).
  • the tubular connection for the suction (14) through which the combustion gases are either transferred into the exhaust air duct or into devices for carrying out further sub-processes of a multi-stage exhaust gas cleaning.
  • the device is completed by an ignition electrode for the fuel gas mixture and by a monitor (15) which provides sensor signals for optimal control of the device for exhaust gas purification.
  • the exhaust gas consists of approx. 58.5 l / min nitrogen and approx. 1.5 l / min C 2 F 6 as a pollutant.
  • the exhaust gas is fed to the cleaning device through an exhaust pipe.
  • 9 l / min H 2 and 9 l / min O 2 are fed to the inner ring (5) of the ring burner (3).
  • 3 l / min CH 4 and 15 l / min O 2 are additionally fed to the outer ring (10) of the ring burner (3).
  • the flame area (11) of the flame (6) which forms over the annular gap (5) is strongly reducing.
  • the exhaust gas to be cleaned which contains fluorinated hydrocarbon C 2 F 6 as the main pollutant, passes through the bore (8)
  • the pollutant is converted almost completely into CH 4 and HF.
  • the flame temperature is in the range from 1200 to 1400 ° C.
  • the flame region (12) which forms at the annular gap (10) and which envelops the flame region (11) like a jacket is strongly oxidizing.
  • the reactions that preferably take place here are the combustion of CH 4 to CO 2 and water vapor and of H 2 to water vapor.
  • the approximately 1000 ° C hot burned gas mixtures over the flame flow in the direction of arrow (13) perpendicularly from the burner (3) in the direction of the suction (14), from there they are fed to a washing device known per se, in which the gas is below 50 ° C is cooled.
  • the HF part is hydrolyzed.
  • the gas is cleaned, ie practically free of pollutants, released into the environment.
  • the pollutant content is reduced to less than 1% by means of the exhaust gas purification method according to the invention, as a result of which a gas with less than 15 ppm of pollutant enters the exhaust air.

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
EP96102122A 1995-03-30 1996-02-14 Procédé pour la purification des effluents gazeux nocifs par conversion chimique Expired - Lifetime EP0735321B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19511644 1995-03-30
DE19511644A DE19511644A1 (de) 1995-03-30 1995-03-30 Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung

Publications (3)

Publication Number Publication Date
EP0735321A2 true EP0735321A2 (fr) 1996-10-02
EP0735321A3 EP0735321A3 (fr) 1997-03-26
EP0735321B1 EP0735321B1 (fr) 2000-04-12

Family

ID=7758136

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96102122A Expired - Lifetime EP0735321B1 (fr) 1995-03-30 1996-02-14 Procédé pour la purification des effluents gazeux nocifs par conversion chimique

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EP (1) EP0735321B1 (fr)
DE (2) DE19511644A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768109A2 (fr) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Dispositif et procédé pour la purification de gaz d'échappement
EP0819887A3 (fr) * 1996-06-19 1998-10-28 Osaka Sanso Kogyo Limited Combustion des fumées
EP1291069A1 (fr) * 2001-08-30 2003-03-12 DAS-DÜNNSCHICHT ANLAGEN SYSTEME GmbH DRESDEN Procédé et dispositif pour la purification d'effluents gazeux, en particulier chargés avec des comoposés fluorés, dans une chambre de combustion avec alimentation separée des gaz
US7462333B2 (en) * 2002-04-11 2008-12-09 Das-Dunnschicht Anlagen Systeme Gmbh Dresden Device for the purification of exhaust gases consisting of fluorine-containing compounds in a combustion reactor
CN107191933A (zh) * 2017-06-13 2017-09-22 武汉理工大学 一种等离子体助燃式多孔介质燃烧系统

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29712026U1 (de) * 1997-07-09 1998-11-12 Ebara Germany Gmbh Brenner für die Verbrennung von Abgasen mit mindestens einer kondensationsfähigen Komponente
CN106642161A (zh) * 2016-12-29 2017-05-10 江门市崖门新财富环保工业有限公司 富氧燃烧器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986001131A1 (fr) * 1984-08-17 1986-02-27 American Combustion, Inc. Procede et appareil generateurs de flammes
EP0262561A2 (fr) * 1986-09-29 1988-04-06 Mitsubishi Jushi Engineering Co., Ltd. Méthode de combustion des gaz résiduaires provenant des procédés de fabrication des semi-conducteurs et un appareil de combustion des gaz résiduaires
EP0285485A1 (fr) * 1987-03-18 1988-10-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et dispositif de destruction d'effluents gazeux toxiques
EP0311317A2 (fr) * 1987-10-06 1989-04-12 Toyo Sanso Co., Ltd. Procédé pour la combustion des gaz d'échappement spécifiques contenant des substances délétères

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3529309A1 (de) * 1985-08-16 1987-03-19 Hoechst Ag Vorrichtung zum verbrennen von fluorkohlenwasserstoffen
DE3802504A1 (de) * 1988-01-28 1989-08-10 Wistra Thermoprozesstech Brenner
DD273008A1 (de) * 1988-06-15 1989-11-01 Elektromat Veb Vorrichtung zum reinigen von abgasen aus niederdruckprozessen
US5267850A (en) * 1992-06-04 1993-12-07 Praxair Technology, Inc. Fuel jet burner

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986001131A1 (fr) * 1984-08-17 1986-02-27 American Combustion, Inc. Procede et appareil generateurs de flammes
EP0262561A2 (fr) * 1986-09-29 1988-04-06 Mitsubishi Jushi Engineering Co., Ltd. Méthode de combustion des gaz résiduaires provenant des procédés de fabrication des semi-conducteurs et un appareil de combustion des gaz résiduaires
EP0285485A1 (fr) * 1987-03-18 1988-10-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et dispositif de destruction d'effluents gazeux toxiques
EP0311317A2 (fr) * 1987-10-06 1989-04-12 Toyo Sanso Co., Ltd. Procédé pour la combustion des gaz d'échappement spécifiques contenant des substances délétères

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768109A2 (fr) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Dispositif et procédé pour la purification de gaz d'échappement
EP0768109A3 (fr) * 1995-10-16 1997-12-17 Teisan Kabushiki Kaisha Dispositif et procédé pour la purification de gaz d'échappement
US5891404A (en) * 1995-10-16 1999-04-06 Teisan Kabushiki Kaisha Exhaust gas treatment unit
EP0819887A3 (fr) * 1996-06-19 1998-10-28 Osaka Sanso Kogyo Limited Combustion des fumées
EP1291069A1 (fr) * 2001-08-30 2003-03-12 DAS-DÜNNSCHICHT ANLAGEN SYSTEME GmbH DRESDEN Procédé et dispositif pour la purification d'effluents gazeux, en particulier chargés avec des comoposés fluorés, dans une chambre de combustion avec alimentation separée des gaz
US7462333B2 (en) * 2002-04-11 2008-12-09 Das-Dunnschicht Anlagen Systeme Gmbh Dresden Device for the purification of exhaust gases consisting of fluorine-containing compounds in a combustion reactor
DE10304489B4 (de) * 2002-04-11 2014-07-31 Das Environmental Expert Gmbh Einrichtung zur Reinigung von Abgasen mit fluorhaltigen Verbindungen in einem Verbrennungsreaktor mit niedriger Stickoxidemission
CN107191933A (zh) * 2017-06-13 2017-09-22 武汉理工大学 一种等离子体助燃式多孔介质燃烧系统

Also Published As

Publication number Publication date
DE59604931D1 (de) 2000-05-18
DE19511644A1 (de) 1996-10-02
EP0735321A3 (fr) 1997-03-26
EP0735321B1 (fr) 2000-04-12

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