EP0690980A1 - Vakuum-lecksuchgerät für die testgaslecksuche mit leichten gasen - Google Patents
Vakuum-lecksuchgerät für die testgaslecksuche mit leichten gasenInfo
- Publication number
- EP0690980A1 EP0690980A1 EP93919111A EP93919111A EP0690980A1 EP 0690980 A1 EP0690980 A1 EP 0690980A1 EP 93919111 A EP93919111 A EP 93919111A EP 93919111 A EP93919111 A EP 93919111A EP 0690980 A1 EP0690980 A1 EP 0690980A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- gas
- vacuum
- leak detector
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Definitions
- Vacuum leak detector for test gas leak detection with light gases
- the invention relates to a vacuum leak detector for test gas leak detection with light gases as test gas such as helium, with a test specimen which on the one hand has a gas-tight connection with a vacuum pump and on the other hand a gas-tight connection with a gas detector, and with the means for spraying the test specimen with Test gas are assigned.
- test gas such as helium
- Mass spectrometers or vacuum measuring devices are used as gas detectors, the display of which depends on the type of gas. (Max Wutz, "Theory and Practice of Vacuum Technology", 1965, published by Friedrich Vieweg & Sohn, Braunschweig, page 410)
- the invention is based on the object of a vacuum leak detection device for test gas leak detection with light gases as test gas such as helium and with a test specimen which on the one hand has a gas-tight connection to a vacuum pump and on the other hand, has a gas-tight connection with a gas detector and which means for spraying with test gas are to be improved in such a way that its response sensitivity increases when searching for leaks, the pumping time is reduced until the readiness to search for leaks and leak detection is made possible at comparatively higher pressures .
- a vacuum leak detector of the type mentioned in the preamble of claim 1 with the invention in that a high-vacuum pump is switched on in the connection between the gas detector and the test object, the compressive capacity of the test gas being lower than for heavy gases such as nitrogen and water vapor, and that the pump is arranged with the fore-vacuum side to the test object and with the high-vacuum side to the detector.
- the response sensitivity in the leak detection of the vacuum system is significantly increased in a surprisingly simple manner and the pumping time until readiness for leak detection is significantly reduced.
- a leak detection result is achieved even at comparatively higher pressures.
- the vacuum leak detector according to the invention is considerably less complicated and less expensive than known leak detectors with regard to the functional elements assigned to it, and it has a relatively very high sensitivity in comparison to conventional leak detectors, the display of which is dependent on the type of gas. Characterized in that a high-vacuum pump is switched on in the connection between the gas detector and the test object, the compression capacity of the test gas being lower than for heavy gases, the pump with the fore-vacuum side to the test object and with the A high-vacuum side is arranged to the detector, a degressive pressure stage is generated between the test object and the gas detector.
- the pump lets the helium pass through the pressure stage in the direction of the gas detector, while the measurement of disruptive or adulterating gases such as nitrogen and water vapor from the high-vacuum pump due to the comparatively extremely high compression capacity in the direction of the test object are conveyed away from the detector.
- Leak detection is possible as long as the total pressure is lower than the maximum permissible backing pressure of the high vacuum pump.
- FIG. 1 shows an arrangement of a conventional vacuum leak detector for test gas leak detection
- FIG. 2 shows an arrangement of a leak detector according to the invention
- Figure 3 is a diagram of the compressive capacity of a
- Figure 4 shows another embodiment with a measured value formation over a differentiation stage
- Figure 5 is a circuit example for the differentiation stage.
- Figure 1 shows the family tree of a conventional vacuum leak detector for test gas leak detection with light test gas such as helium.
- the test object 1 has a gas-tight connection 2 with a vacuum pump 3 and a gas-tight connection Connection 4 with a gas detector 5.
- a test gas spray gun 10 is assigned to the test object 1 for spraying with test gas. This is sprayed with test gas after sufficient evacuation. If the test object 1 has leaks or leaks, test gas penetrates the test object 1 through the pressure drop between the outside atmosphere and the vacuum. Its increase in concentration is then determined and displayed by the gas detector 5.
- the gas detector 5 can be equipped with any display 6, for example a digital display or an analog display or a combination of both types of display. As described above, in this known leak detection arrangement according to FIG. 1, the response sensitivity is comparatively low and therefore unsatisfactory.
- a significant improvement is achieved with the arrangement shown in FIG. 2 by switching on a high vacuum pump 7 in the connection 4 between the gas detector 5 and the test object 1.
- This is specifically a type of high-vacuum pump 7 of this type, whose compression capacity for the test gas, for example helium, is significantly lower than for heavy gases such as nitrogen or water vapor.
- the pump 7 is arranged with the fore-vacuum side 8 to the test object 1 and with the high-vacuum side 9 to the gas detector 5.
- the relatively heavier gases from the gas detector 5 are conveyed outside via the connecting line 4 to the test object 1 and from the test object 1 through the vacuum pump 3, while the test gas creates helium via the high-vacuum pump 7 ⁇ open degressive pressure level of the vacuum in the direction of the gas detector 5 and accumulates there with an increase in concentration.
- this increases the response sensitivity of the leak detector according to the invention significantly.
- FIG. 3 shows in a diagram the compressive capacity of a turbomolecular pump for different types of gas as a function of the speed.
- Logarithmic values for the compressive capacity of hydrogen (H 2 ), helium (He), water vapor (H 2 0) and nitrogen (N 2 ) are given on the Y axis of the diagram. At a certain speed, these are approximately 25 in number for H 2 , 100 for He 100, 18,000 for H 2 0 and 190,000 for N 2 . This results in a relative compression ratio of:
- the pump 7 can either be a molecular pump, a turbo-molecular pump or a diffusion pump. It is also possible that the pump 7 has a combination of the aforementioned types of pumps. Furthermore, the pump 7 should have a configuration for the highest possible vacuum resistance.
- the gas detector 5 can be a mass spectrometer, but the gas detector 5 can also be a total pressure measuring device such as heat conduction, ionization, Penning, membrane or friction vacuum meters or a combination of the vacuum meters mentioned.
- a sufficiently sensitive pressure measuring device is, for example, the mass spectrometer. If it is set to the mass of helium, it delivers an ion current proportional to the helium partial pressure. In conventional leak detectors, this results in an ion current signal proportional to the leak rate. However, if it is used to measure an increase in helium concentration, then the ion current essentially only represents the previous history, ie that during previous measurements over the amount of helium accumulated over time. With a further positive measurement, the ion current changes only by a very small amount.
- the leak rate q H. is therefore given by a differential quotient, namely:
- this is expediently designed as a differentiation stage, the gain of which increases with increasing frequency.
- the passive elements of the differentiating stage are to be dimensioned such that the differentiation conditions are largely fulfilled for characteristic times in measuring operation or for the frequencies corresponding to them.
- FIG. 4 shows an embodiment in which a differentiating stage 20 is connected to the gas detector 5. The measured value is shown on the display 6 via the differentiating stage 20.
- FIG. 5 An example of a differentiation stage 20 is shown in FIG. 5. It is connected downstream of the mass spectrometer 5 and comprises the input (operational) amplifier 24, the output 25 of which via an inverting amplifier 26 and an inverting integrator 27 and a resistor R-. 28 is connected to the input 22.
- the output 25 of the input amplifier is connected to the output 30 of the differentiating stage via an amplifier 29 (with a selectable gain factor V_-).
- the output voltage of the differentiating stage is thus equal to the time derivative of the mass spectrometer current to be measured.
- the measuring current which also rises steadily due to the steadily increasing argon pressure, acts at the output of the differentiating stage as a constant voltage, which can be subtracted if necessary.
- any range switching that may be required can take place via the two 31 by adding a resistor R 2 33 whose value is smaller as the output voltage of the integrator increases than Ri is switched to the input of the differentiating stage.
- connection can, for example, be voltage-dependent via a zener diode 32.
- the transmission constant of the differentiating stage can be reduced by increasing the amplification of the amplifier 29 accordingly.
- the sensitive input amplifier does not need to amplify the full background current.
- the differentiating element is not directly connected to the high-resistance input circuit; this simplifies the design for area switching.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19924228148 DE4228148A1 (de) | 1992-08-25 | 1992-08-25 | Vakuum-Lecksuchgerät für die Testgaslecksuche mit leichten Gasen |
DE4228148 | 1992-08-25 | ||
PCT/EP1993/002227 WO1994004901A1 (de) | 1992-08-25 | 1993-08-20 | Vakuum-lecksuchgerät für die testgaslecksuche mit leichten gasen |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0690980A1 true EP0690980A1 (de) | 1996-01-10 |
EP0690980B1 EP0690980B1 (de) | 1998-03-04 |
Family
ID=6466341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP93919111A Expired - Lifetime EP0690980B1 (de) | 1992-08-25 | 1993-08-20 | Vakuum-lecksuchgerät für die testgaslecksuche mit leichten gasen |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0690980B1 (de) |
JP (1) | JP3166859B2 (de) |
DE (2) | DE4228148A1 (de) |
WO (1) | WO1994004901A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9405028U1 (de) * | 1994-03-24 | 1994-06-09 | Leybold AG, 50968 Köln | Testgas-Lecksuchgerät |
DE102004050762A1 (de) * | 2004-10-16 | 2006-04-20 | Inficon Gmbh | Verfahren zur Lecksuche |
DE102007057944A1 (de) * | 2007-12-01 | 2009-06-04 | Inficon Gmbh | Verfahren und Vorrichtung zur Dichtheitsprüfung |
CN103868660B (zh) * | 2014-04-09 | 2017-10-20 | 上海科石科技发展有限公司 | 卤素气体专用检漏装置及辅助开机结构 |
DE102016205381B4 (de) | 2016-03-31 | 2023-11-30 | Inficon Gmbh | Gaslecksuche mit einer Testgassprühvorrichtung |
CN111562060A (zh) * | 2020-06-22 | 2020-08-21 | 上海真兰仪表科技股份有限公司 | 一种氦检方法及其系统 |
CN112798193B (zh) * | 2020-10-16 | 2022-12-13 | 湖南澳美佳健康科技有限公司 | 一种新型氦检漏仪 |
CN112710437A (zh) * | 2020-12-21 | 2021-04-27 | 东部超导科技(苏州)有限公司 | Sf6断路器箱体干式真空检漏系统及检漏方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3690151A (en) * | 1968-07-25 | 1972-09-12 | Norton Co | Leak detector |
DE6903550U (de) * | 1969-01-30 | 1969-05-29 | Asf Gmbh | Tankschutzeinrichtung |
US3968675A (en) * | 1974-06-07 | 1976-07-13 | Varian Associates | Method and apparatus for preparing a mass spectrometer leak detector system for operation |
DE2924258A1 (de) * | 1979-06-15 | 1980-12-18 | Leybold Heraeus Gmbh & Co Kg | Verfahren zum betrieb eines lecksuchgeraetes sowie dafuer geeignetes lecksuchgeraet |
DE3038089A1 (de) * | 1980-10-09 | 1982-05-19 | Messer Griesheim Gmbh, 6000 Frankfurt | Verfahren zum ermitteln der stationaeren leckrate |
DE3124205A1 (de) * | 1981-06-19 | 1982-12-30 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Lecksuchanordnung |
DE3144503C2 (de) * | 1981-11-09 | 1985-03-21 | Cit-Alcatel GmbH, 6980 Wertheim | Massenspektrometer-Lecksuchgerät |
DE3616319C1 (de) * | 1986-05-15 | 1987-07-02 | Cit Alcatel Gmbh | Heliumlecksuchanlage |
DE3828588C1 (de) * | 1988-08-23 | 1989-12-07 | Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De | |
DE3831258C1 (de) * | 1988-09-14 | 1989-10-12 | Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De | |
FR2658292B1 (fr) * | 1990-02-09 | 1994-09-16 | Cit Alcatel | Detecteur de fuite a helium fonctionnant a contre-courant, portable pour tester une enceinte possedant son propre groupe de pompage. |
JP2500488B2 (ja) * | 1991-02-08 | 1996-05-29 | ヤマハ株式会社 | 漏洩試験方法及び漏洩試験装置 |
DE4140366A1 (de) * | 1991-12-07 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen |
-
1992
- 1992-08-25 DE DE19924228148 patent/DE4228148A1/de not_active Withdrawn
-
1993
- 1993-08-20 DE DE59308231T patent/DE59308231D1/de not_active Expired - Lifetime
- 1993-08-20 EP EP93919111A patent/EP0690980B1/de not_active Expired - Lifetime
- 1993-08-20 JP JP50591094A patent/JP3166859B2/ja not_active Expired - Lifetime
- 1993-08-20 WO PCT/EP1993/002227 patent/WO1994004901A1/de active IP Right Grant
Non-Patent Citations (1)
Title |
---|
See references of WO9404901A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP3166859B2 (ja) | 2001-05-14 |
DE59308231D1 (de) | 1998-04-09 |
WO1994004901A1 (de) | 1994-03-03 |
EP0690980B1 (de) | 1998-03-04 |
DE4228148A1 (de) | 1994-03-03 |
JPH08500672A (ja) | 1996-01-23 |
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