DE69103499T2 - Hochleistungsleckdetektor mit drei Molekularfiltern. - Google Patents

Hochleistungsleckdetektor mit drei Molekularfiltern.

Info

Publication number
DE69103499T2
DE69103499T2 DE69103499T DE69103499T DE69103499T2 DE 69103499 T2 DE69103499 T2 DE 69103499T2 DE 69103499 T DE69103499 T DE 69103499T DE 69103499 T DE69103499 T DE 69103499T DE 69103499 T2 DE69103499 T2 DE 69103499T2
Authority
DE
Germany
Prior art keywords
pump
valve
low
rate
leak detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69103499T
Other languages
English (en)
Other versions
DE69103499D1 (de
Inventor
Jacques Tallon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE69103499D1 publication Critical patent/DE69103499D1/de
Publication of DE69103499T2 publication Critical patent/DE69103499T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
DE69103499T 1990-09-05 1991-09-03 Hochleistungsleckdetektor mit drei Molekularfiltern. Expired - Fee Related DE69103499T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9011027A FR2666410B1 (fr) 1990-09-05 1990-09-05 Detecteur de fuite haut flux a trois filtres moleculaires.

Publications (2)

Publication Number Publication Date
DE69103499D1 DE69103499D1 (de) 1994-09-22
DE69103499T2 true DE69103499T2 (de) 1994-12-08

Family

ID=9400095

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69103499T Expired - Fee Related DE69103499T2 (de) 1990-09-05 1991-09-03 Hochleistungsleckdetektor mit drei Molekularfiltern.

Country Status (7)

Country Link
US (1) US5193380A (de)
EP (1) EP0475246B1 (de)
JP (1) JPH04233428A (de)
AT (1) ATE110168T1 (de)
DE (1) DE69103499T2 (de)
ES (1) ES2062635T3 (de)
FR (1) FR2666410B1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2681688B1 (fr) * 1991-09-24 1993-11-19 Alcatel Cit Installation de detection de fuites de gaz utilisant la technique de reniflage.
DE4326267A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Lecksuchgerät
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE19846799A1 (de) * 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Folien-Lecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Folien-Lecksucher
FR2787192B1 (fr) * 1998-12-10 2001-01-05 Cit Alcatel Vitesse variable sur le pompage primaire d'un detecteur de fuites par gaz traceur
US6178700B1 (en) 1999-07-23 2001-01-30 Alabama Metal Industries Corporation Door frame reinforcing structure
DE10156205A1 (de) 2001-11-15 2003-06-05 Inficon Gmbh Testgaslecksuchgerät
DE602004010257T2 (de) * 2003-06-11 2008-10-02 Varian, Inc., Palo Alto Verfahren und vorrichtung zum erfassen von grossen leckagen
CN100523764C (zh) * 2003-06-11 2009-08-05 瓦里安有限公司 通过累积方法检漏的方法和装置
DE102007043382A1 (de) 2007-09-12 2009-03-19 Inficon Gmbh Schnüffellecksucher
DE102011107334B4 (de) 2011-07-14 2023-03-16 Leybold Gmbh Lecksucheinrichtung sowie Verfahren zum Überprüfen von Gegenständen auf Dichtigkeit mittels einer Lecksucheinrichtung
CN104330222A (zh) * 2014-11-21 2015-02-04 山西新华化工有限责任公司 面具水下气密检测系统
CN109519407A (zh) * 2018-12-06 2019-03-26 北京东方计量测试研究所 一种宽量程高精度分子泵压缩比测试装置及方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1474137A (fr) * 1966-02-08 1967-03-24 Alcatel Sa Détecteur de fuites à l'hélium aisément transportable
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
US4499752A (en) * 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4583394A (en) * 1984-08-07 1986-04-22 Japan Atomic Energy Research Institute Device and method for leak location
US4618855A (en) * 1984-12-14 1986-10-21 Genelco, Inc. Soil pollution monitoring system
GB2190204B (en) * 1986-05-09 1990-10-17 Boc Group Plc Improvement in leak detectors
DE3775213D1 (de) * 1987-03-27 1992-01-23 Leybold Ag Lecksuchgeraet und betriebsverfahren dazu.
US4863496A (en) * 1988-04-13 1989-09-05 E. I. Du Pont De Nemours And Co. Reactive posttreatment for gas separation membranes
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
FR2653558B1 (fr) * 1989-10-23 1994-06-10 Cit Alcatel Systeme de detection de fuites a gaz traceur.
US5010761A (en) * 1990-03-01 1991-04-30 Superior Industries International, Inc. Automated leak detection apparatus and method therefor

Also Published As

Publication number Publication date
FR2666410A1 (fr) 1992-03-06
ES2062635T3 (es) 1994-12-16
ATE110168T1 (de) 1994-09-15
JPH04233428A (ja) 1992-08-21
EP0475246B1 (de) 1994-08-17
FR2666410B1 (fr) 1993-10-08
US5193380A (en) 1993-03-16
DE69103499D1 (de) 1994-09-22
EP0475246A1 (de) 1992-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee