EP0633712B1 - Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre - Google Patents

Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre Download PDF

Info

Publication number
EP0633712B1
EP0633712B1 EP94201872A EP94201872A EP0633712B1 EP 0633712 B1 EP0633712 B1 EP 0633712B1 EP 94201872 A EP94201872 A EP 94201872A EP 94201872 A EP94201872 A EP 94201872A EP 0633712 B1 EP0633712 B1 EP 0633712B1
Authority
EP
European Patent Office
Prior art keywords
ray tube
tube
ray
holder
cooling medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94201872A
Other languages
English (en)
French (fr)
Other versions
EP0633712A1 (de
Inventor
Johannes Franciscus Martinus D'achard Van Enschut
Theodorus Jan Jeanette Maria Jenneskens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Priority to EP94201872A priority Critical patent/EP0633712B1/de
Publication of EP0633712A1 publication Critical patent/EP0633712A1/de
Application granted granted Critical
Publication of EP0633712B1 publication Critical patent/EP0633712B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H05G1/04—Mounting the X-ray tube within a closed housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H05G1/025—Means for cooling the X-ray tube or the generator

Definitions

  • the invention relates to an X-ray diffraction device, comprising an X-ray tube and a holder for accommodating the X-ray tube which comprises an anode which is cooled by means of a cooling medium and which is situated in the vicinity of a first end of the tube, which X-ray tube is adapted to produce a line-shaped X-ray focus, said device comprising conduit means for supplying and discharging the cooling medium.
  • Such X-ray diffraction device is known from SU-A-616 717.
  • a device and a tube of the kind set forth are known from a leaflet published by Applicant and entitled "High Power X-ray Diffraction Tubes".
  • the leaflet discloses an X-ray tube in which water is used as the cooling liquid for the anode.
  • the conduit means for the supply and discharging of the cooling water comprise a cooling water inlet, denoted therein as “Water in” and a cooling water outlet which is denoted therein as “Water out”, a duct which conducts the cooling water along the anode to be cooled being provided between said inlet and outlet.
  • the inlet and the outlet are both provided in a flange arranged on the tube at the area of an end which is situated in the vicinity of the anode to be cooled.
  • the X-ray tube is secured and positioned in the holder by means of said flange.
  • the cooling water is supplied and discharged via openings in an abutment in the holder, which openings correspond to the inlet and the outlet in the flange.
  • a line-shaped X-ray focus is formed wherefrom the radiation can be taken off in two mutually perpendicular directions, i . e . in the longitudinal direction of the focus and in a direction perpendicular thereto. For each of these directions an exit window is provided in the X-ray tube.
  • the X-ray tube preferably provides both focus shapes.
  • this is possible by taking off the X-rays in the longitudinal direction of the focus line at a small angle relative to the anode surface; the line focus is then seen as a (virtual) point focus.
  • the X-ray focus is seen to be line-shaped.
  • the direction for the X-rays is prescribed, because this direction defines the location of the specimen, the detectors and the other equipment of the analysis apparatus.
  • the desired switching-over from point focus to line focus and vice versa is then realised by rotating the X-ray tube in the holder through one quarter of a turn.
  • Rotation of the X-ray tube in its holder has the drawback that after rotation the location of the openings in the abutment in the holder no longer registers with the inlet and the outlet in the flange of the X-ray tube. It would be feasible to solve this problem by providing an adapter flange between the flange of the tube and the abutment in the holder, i.e. one adapter flange for each position of the tube. The holes present in the abutment could then register once more with the holes in the tube flange. It is a drawback of this solution, however, that it requires separate components (the adapter flanges) and that such an exchange can be performed by skilled personnel only.
  • the device in accordance with the invention is characterized in that the conduit means comprise tubular ducts which are connected to the X-ray tube, such that they move along there with when the tube is rotated through 90° in the holder, and which extend from the first end to the other end of the X-ray tube.
  • the first end of the X-ray tube may be slid into the holder so as to be secured therein. Its other end, whereto the supply cable for the high voltage and the filament current is secured, remains accessible to the operator. Because the cooling water connections are readily accessible at this area, the water tubes can be readily connected thereto. When the tube is rotated through 90°, the connection tubes simply move along.
  • a device for X-ray diffraction is characterized in that the tubular ducts extend on the outer side of the X-ray tube. This substantially simplifies the construction of the tube.
  • an X-ray diffraction device is characterized in that the parts for high-voltage insulation of the tube are made of a ceramic material. Said parts are customarily made of glass in known tubes. It is a known property of hand-made glass parts that they are liable to exhibit comparatively large dimensional tolerances. When use is made of a ceramic material, these parts can be manufactured with substantially smaller dimensional tolerances, resulting in smaller external dimensions of the tube. Space can then be readily reserved in the holder for the ducts for the cooling liquid.
  • the insulating parts of the tube are made of a ceramic material, a substantially more compact tube can be manufactured in comparison with glass-insulated tubes.
  • the path to be followed by the heat, developed by the filament (typically of the order of magnitude of 40 W), by conduction so as to reach the exterior of the tube is much smaller, whereas the thermal conduction of the ceramic material (for example, aluminium oxide, Al 2 O 3 ) is substantially higher than that of glass. Consequently, it may occur that given tube parts, notably those where the high-voltage connector is provided, reach an inadmissibly high temperature so that they cause damage.
  • a device in accordance with a particular embodiment of the invention is characterized in that the cathode of the X-ray tube is mounted on a base of the X-ray tube via a ceramic intermediate member, and that the tubular cooling medium ducts extending on the outer side of the X-ray tube are mounted so as to be in thermal contact with the base.
  • the high-voltage connector is accommodated in a recess in the base; the base, and hence also the connector, is then cooled by the contacting cooling water ducts.
  • Fig. 1 shows an X-ray diffraction device in which a goniometer 4 is mounted on a frame 2.
  • the goniometer 4 is provided with a graduated scale 6 for measuring the angular rotation of the X-ray source 7 mounted thereon and of the detector device 9 which is also mounted thereon.
  • the goniometer also comprises a specimen carrier 8 on which a specimen 10 is provided.
  • a graduated scale 12 For cases where measurement of the angular rotation of the specimen is important, there is provided a graduated scale 12.
  • the X-ray source 7 comprises a holder 12 for an X-ray tube which is not shown in this Figure and which is secured in the holder by way of a mounting ring 20.
  • the X-ray tube is connected by a high-voltage connector 16 supplying the high-voltage and the filament current for the X-ray tube via a high-voltage cable 18.
  • the inlet and outlet ducts 22 and 24 for the cooling water of the X-ray tube are provided at the same side of the X-ray tube.
  • the tube holder 12 also comprises an X-ray exit window 14 and a unit 16 for collimating the X-ray beam (a Soller slit).
  • the detector device 9 consists of a holder 26 for a Soller slit, a holder 28 for a monochromator crystal, and a detector 30.
  • the X-ray source as well as the detector are rotatable about the specimen, as shown in the Figure, it is not necessary to arrange the specimen so as to be rotatable. However, it is also possible to arrange the X-ray source so as to be immobile; this may be necessary in the event of large and heavy X-ray sources. In that case the specimen carrier as well as the detector should be rotatable.
  • Figs. 2a and 2b show a holder with an X-ray tube; Fig. 2a shows how the cooling water is supplied in the known situation, whereas Fig. 2b shows how the cooling water is supplied according to the present invention.
  • Fig. 2a shows a holder 12 with an X-ray tube 31.
  • the tube is positioned in the holder by way of a mounting flange 38 which cooperates with a rim 44 provided in the holder.
  • the tube is placed in the correct angular position by way of a cam 46.
  • the tube is secured in position by a clamping ring 20 which is clamped or screwed onto the holder 12.
  • the X-ray tube 31 comprises an anode 32 which is to be cooled.
  • the cooling water is conducted along the anode via ducts 34 and 36; these ducts form part of the holder 12.
  • the cooling water is supplied via a connection 22 and is subsequently conducted, via a duct 34, to the flange 38 which is provided with two diametrically oppositely situated passages 40 and 42.
  • a duct 48 via which the cooling water is conducted along the anode.
  • On the anode 32 a line-shaped electron focus is formed so that a line-shaped or point-shaped X-ray focus is formed, depending on the take-off direction.
  • the X-rays formed on the anode emanate from the holder via a window in the holder 12 (not shown in the Figure).
  • the line-shaped focus emits the X-rays via a first window 50; the point-shaped focus is observed by observing the line-shaped focus in a direction perpendicular thereto, via a window (not shown in the Figure) which has been rotated through 90° relative to the window 50.
  • a window not shown in the Figure
  • the relevant window of the tube in the holder must be rotated so as to register with the holder window; in the case of a line-shaped focus, therefore, the tube must be rotated through 90°. Rotation of the tube in the holder is not possible unless special steps are taken, because the water connections in the holder 12 and the flange 40 no longer register after rotation.
  • the invention offers a solution to this problem in the form of the embodiment shown in Fig. 2b.
  • cooling water is supplied to the anode 32 via two ducts 52 and 54 which extend around and outside the X-ray tube. These ducts are thermally connected to the base 56. The ducts are connected to a cooling water reservoir 58 wherefrom the cooling water is distributed across the rear of the anode 32. If it is necessary to rotate the X-ray tube in the holder through 90°, the water connection problems as described with reference to Fig. 2a will not occur in this configuration.
  • Fig. 3 is a more detailed representation of an X-ray tube for use in an X-ray diffraction device.
  • the tube comprises a filament 60 which is enclosed by a U-shaped cathode structure 62. Electrons emitted by the filament are accelerated by an electric field between the cathode and the anode and strike the anode with a high energy which is mainly converted into heat. A substantial part of the heat is dissipated by the cooling water transported through the ducts 52 and 54.
  • the cathode 62 is mounted on a support 64 which itself is mounted on a ceramic intermediate member 66. This intermediate member is mounted on the base 56 which is traversed by the ducts 52 and 54.
  • the heat produced by the filament 60 is to be discharged by convection or conduction. Because of the use of a ceramic material for the high-voltage insulation, there is a trend towards increasingly more compact X-ray tubes. The heat which must then be dissipated via the high-voltage insulation leads to higher temperatures of components on the outer side of the X-ray tube, such as the base 56. This is caused on the one hand by the shorter path between the filament 60 and the relevant component and on the other hand by the higher thermal conduction of the ceramic material in comparison with glass. Because cooling water is conducted along the base 56, this component cannot reach an inadmissibly high temperature.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Claims (4)

  1. Röntgenbeugungseinrichtung mit einer Röntgenröhre (7) und einem Halter (12) zum Aufnehmen der Röntgenröhre,
    welche Röntgenröhre eine Anode (32) umfasst, die mit Hilfe eines Kühlmediums gekühlt wird und die in der Nähe eines ersten Endes der Röhre liegt,
    welche Röntgenröhre zum Erzeugen eines linienförmigen Röntgenfokus ausgebildet ist,
    wobei die genannte Einrichtung Leitungsmittel (22, 24, 52, 54, 58) für die Zufuhr und Abfuhr des Kühlmediums umfasst,
    dadurch gekennzeichnet, dass
    die Leitungsmittel röhrenförmige Leitungen (52, 54) umfassen, die so mit der Röntgenröhre verbunden sind, dass sie sich mit ihr mit bewegen, wenn die Röhre in dem Halter um 90° gedreht wird, und die vom ersten Ende bis zum anderen Ende der Röntgenröhre verlaufen.
  2. Einrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die röhrenförmigen Leitungen (52, 54) auf der Außenseite der Röntgenröhre verlaufen.
  3. Einrichtung nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass die Teile (66) zur Hochspannungsisolation der Röhre aus Keramikmaterial hergestellt sind.
  4. Einrichtung nach Anspruch 3, dadurch gekennzeichnet, dass die Kathode (60, 62) der Röntgenröhre über ein keramisches Zwischenglied (66) auf einem Sockel (56) der Röntgenröhre montiert ist, und dass die an der Außenseite der Röntgenröhre verlaufenden röhrenförmigen Kühlmediumleitungen (52, 54) so montiert sind, dass sie mit dem Sokkel in Wärmekontakt stehen.
EP94201872A 1993-07-05 1994-06-29 Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre Expired - Lifetime EP0633712B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP94201872A EP0633712B1 (de) 1993-07-05 1994-06-29 Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP93201952 1993-07-05
EP93201952 1993-07-05
EP94201872A EP0633712B1 (de) 1993-07-05 1994-06-29 Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre

Publications (2)

Publication Number Publication Date
EP0633712A1 EP0633712A1 (de) 1995-01-11
EP0633712B1 true EP0633712B1 (de) 2002-03-13

Family

ID=26133894

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94201872A Expired - Lifetime EP0633712B1 (de) 1993-07-05 1994-06-29 Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre

Country Status (1)

Country Link
EP (1) EP0633712B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053760A1 (de) * 2006-11-15 2008-05-21 Bruker Axs Gmbh Drehbare, wassergekühlte Röntgenquelle

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2925760B1 (fr) * 2007-12-21 2010-05-14 Thales Sa Refroidissement d'un tube generateur de rayons x

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU616717A1 (ru) * 1977-01-11 1978-06-21 Предприятие П/Я М-5659 Рентгеновский дифрактометр
US4767961A (en) * 1981-02-17 1988-08-30 The Machlett Laboratories, Inc. X-ray generator cooling system
DE3869472D1 (de) * 1987-04-29 1992-04-30 Siemens Ag Kuehlvorrichtung fuer einen computertomographen.
EP0293791A1 (de) * 1987-06-02 1988-12-07 IVERSEN, Arthur H. Mit Flüssigkeit gekühlte Drehanoden
JPS6429764U (de) * 1987-08-17 1989-02-22
US5086449A (en) * 1990-08-08 1992-02-04 Picker International, Inc. Debubbler system for X-ray tubes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053760A1 (de) * 2006-11-15 2008-05-21 Bruker Axs Gmbh Drehbare, wassergekühlte Röntgenquelle
DE102006053760B4 (de) * 2006-11-15 2008-09-18 Bruker Axs Gmbh Drehbare, wassergekühlte Röntgenquelle

Also Published As

Publication number Publication date
EP0633712A1 (de) 1995-01-11

Similar Documents

Publication Publication Date Title
US5515414A (en) X-ray diffraction device comprising cooling medium connections provided on the X-ray tube
JP4999256B2 (ja) 改善された出力安定性を有するｘ線ソースアセンブリ、およびその流体ストリーム分析の適用
US7110506B2 (en) Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube for analyzing fluid streams
US5602899A (en) Anode assembly for generating x-rays and instrument with such anode assembly
US4531226A (en) Multiple electron beam target for use in X-ray scanner
EP0187020A2 (de) Röntgenstrahlenquelle mit hoher Intensität
US20100284519A1 (en) Electron Emitter Apparatus and Method of Assembly
US20100098218A1 (en) Apparatus for providing shielding in a multispot x-ray source and method of making same
JPS6331894B2 (de)
GB2208752A (en) X-ray generator
EP0633712B1 (de) Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre
US4280049A (en) X-ray spectrometer
US4196367A (en) X-ray tube
US4506375A (en) X-Ray calibration system
JP2004037345A (ja) 試料ホルダ及びｘ線装置
JP4302722B2 (ja) 試料冷却装置及びそれを備えた電子線照射型分析／観察装置
JPH07253472A (ja) 放射線検出器用ヘリウム３クライオスタットおよび分析装置
JPH1064695A (ja) Ｘ線発生装置及びそれを用いたｘ線装置
US20230413410A1 (en) X-ray generation target, x-ray generator, and x-ray imaging system
Dennison et al. Ultrahigh vacuum chamber for synchrotron x‐ray diffraction from films adsorbed on single‐crystal surfaces
JPS61115541A (ja) 真空ｘ線ｃｔ装置
JPH07122211A (ja) 回転対陰極型ｘ線発生装置
Marcus et al. A high vacuum large volume specimen chamber for an electron microscope
EP3346484A1 (de) Röntgenerzeugungsvorrichtung und -verfahren sowie probenmesssystem
Ilinski et al. Measurements of x-ray spectral flux and intensity distribution of APS/CHESS undulator radiation

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB NL

17P Request for examination filed

Effective date: 19950711

17Q First examination report despatched

Effective date: 19990429

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB NL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20020313

REF Corresponds to:

Ref document number: 69430088

Country of ref document: DE

Date of ref document: 20020418

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20021216

REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

REG Reference to a national code

Ref country code: FR

Ref legal event code: TP

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20130619

Year of fee payment: 20

Ref country code: DE

Payment date: 20130620

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20130703

Year of fee payment: 20

REG Reference to a national code

Ref country code: DE

Ref legal event code: R071

Ref document number: 69430088

Country of ref document: DE

REG Reference to a national code

Ref country code: GB

Ref legal event code: PE20

Expiry date: 20140628

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20140628

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20140701