EP0293791A1 - Mit Flüssigkeit gekühlte Drehanoden - Google Patents

Mit Flüssigkeit gekühlte Drehanoden Download PDF

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Publication number
EP0293791A1
EP0293791A1 EP88108564A EP88108564A EP0293791A1 EP 0293791 A1 EP0293791 A1 EP 0293791A1 EP 88108564 A EP88108564 A EP 88108564A EP 88108564 A EP88108564 A EP 88108564A EP 0293791 A1 EP0293791 A1 EP 0293791A1
Authority
EP
European Patent Office
Prior art keywords
heat exchange
coolant
exchange surface
target
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88108564A
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English (en)
French (fr)
Inventor
Arthur H. Iversen
Stephen Whitaker
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Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0293791A1 publication Critical patent/EP0293791A1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes

Definitions

  • the present invention is directed to rotating targets illuminated by energy beams, and more particularly, to liquid cooled rotating anode x-ray tubes wherein high average power is achieved.
  • Liquid cooled rotating anode x-ray tubes are, in general, well known.
  • a hollow anode is disposed so that a rotating portion thereof is irradiated by an energy beam (e.g., electron beam).
  • the irradi­ated portion of the anode is generally referred to as the electron beam track.
  • Substantially all of the heat generated by irradiation by the energy beam is transmitted to a heat exchange surface, typically the interior wall of the hollow anode underlying the electron beam track and adjacent areas.
  • the heat exchange surface is generally an area of the interior surface of the anode larger than the electron beam track.
  • a flow of liquid coolant is passed into contact with the heat exchange surface to remove the heat therefrom, and thus cool the anode.
  • the general flow of coolant is axial, that is, along the line of the axis of anode rotation, approximately radially up an input anode face, axially across the anode heat ex­change surface, and then approximately radially down a discharge face of the anode, to be dis­charged axially along the line of the axis of anode rotation.
  • the useful curvature of the heat exchange surface is concave and interacts with the flow of coolant such that a single centrifugal force proportional to the square of the relative tangential velocity between the coolant and curved surface is established on the curved anode surface.
  • the present invention provides an internally liquid cooled rotating target of high average power capabilities that is illuminated by an energy beam (such as, for example, electro­magnetic, e.g., a laser; positively or negatively charged particles, e.g., electrons or ions, or neutral particles) wherein multiple independent centrifugal forces are established on an associ­ated heat transfer surface to enhance heat trans­fer.
  • an energy beam such as, for example, electro­magnetic, e.g., a laser; positively or negatively charged particles, e.g., electrons or ions, or neutral particles
  • a hollow anode 10 is centered with and fixedly mounted on outer hollow rotating shaft 12 and rotatably driven with shaft 12 about its axis, generally indicated as line 64.
  • a septum 14 is spaced from, and fixedly attached to, hollow anode 10, forming, in cooperation with anode 10, anode coolant input and discharge conduits 16 and 18, respectively.
  • a center tube 20 is fixably attached to septum 14, generally coaxial with shaft 12 and adapted for rotation with anode 10, shaft 12, and septum 14.
  • Center tube 20 provides an interior conduit 36 extending through septum 14 to communicate with input conduit 16.
  • a con­duit 24 communicating with output conduit 18 is defined by the inside diameter of outer hollow rotating shaft 12 and the outside diameter of inner rotating tube 20.
  • a curved heat exchange surface 22 is provided on the interior wall of anode 10.
  • Septum 14 includes a convex curved surface 42 in the proximity of concave curved anode heat transfer surface 22, defining there­between a conduit 23 (also sometimes hereinafter referred to as "heat exchange region 23"), com­municating between input conduit 16 and output conduit 18.
  • Outer hollow rotating shaft 12 extends to, and mates with, a rotating union 26.
  • Rotat­ing union 26, comprising a rotating segment 28 and a stationary segment 29, provides an essen­tially liquid-tight union.
  • Rotating segment 28 serves as a rotating sealing face, and preferably comprises a flange at the end of shaft 12.
  • the face end of shaft 12 may also be utilized as the rotating sealing face. This has the benefit of economy and compactness.
  • Stationary segment 29 of union 26 includes respective input and output hose couplers 30 and 32.
  • An internal rotating union 35 is pro­vided to mate rotating inner tube 20 with a coaxially disposed stationary inner tube 34.
  • Stationary tube 34 is hermetically sealed to stationary member 29 of union 26 at input coupler 30, and effectively extends interior conduit 36 to input coupler 30.
  • Rotating tube 20 suitably protrudes a distance into stationary segment 29 to facilitate inspection and maintenance of rotating union 35.
  • Rotating union 35 need not be liquid-tight; leakage of input coolant through rotating union 35 into the discharge coolant in conduit 24 need only be within acceptable limits.
  • coolant liquid is intro­duced to the system through input coupler 30, into conduit 36 within stationary interior tube 34 and inner rotating tube 20 (input flow gener­ally indicated by arrow 40).
  • the coolant enters, then flows up anode input conduit 16, through the heat exchange region 23, then down anode discharge conduit 18 and out conduit 24, ulti­mately exiting through output hose coupler 32.
  • Energy beam 43 e.g., electrons
  • a source e.g., electron gun 35
  • the heat generated is conducted to internal heat transfer surface 22.
  • heat transfer surface 22 heat is removed by boiling coolant which is generally in turbulent flow.
  • Tube 20 may contain a variable spiral element 38 or other means which serve to gradu­ally and smoothly cause the linear coolant flow 40 from stationary tube 34 to rotate without creating undesirable flow characteristics such as cavitation.
  • a variable spiral element 38 or other means which serve to gradu­ally and smoothly cause the linear coolant flow 40 from stationary tube 34 to rotate without creating undesirable flow characteristics such as cavitation.
  • Centrifugal flow pump vanes 44 serve to accelerate the liquid coolant both radially (as indicated by arrow 48) and circumferentially (as indicated by arrow 50).
  • the positioning and length of vanes 44 in conduit 16 may be varied for optimum performance, e.g., to control the coolant flow characteristics and/or the absolute angular velocity of the coolant.
  • Centrifugal flow pump vanes 44 terminate at a location 56 prior to the curved anode heat transfer surface 22. Extending the vanes 44 into the anode heat transfer region 23 could significantly reduce heat transfer because of premature burnout caused by the low pressure region that is present on the downstream side of the vanes.
  • Secondary flow directing vanes 58 may be employed to smooth out and make uniform the coolant flow as it departs the centrifugal flow pump to the heat exchange region 23. Vanes 58 also terminate at a location 60 prior to heat exchange region 23.
  • Discharge coolant in con­duit 18 may be divided into two flows (indicated by arrows 66 and 68), wherein coolant flow 66 discharges out conduit 24 and coolant flow 68 passes through a conduit 70 in septum 14 to join incoming coolant 48.
  • Multiple conduits 70, joining discharge conduit 18 with input conduit 16, are spaced periodically around the axis 64 of rotating septum 14.
  • the first centri­fugal force, a1 may be expressed as where v1 is the coolant tangential velocity 48 relative to curved anode surface 22 that lies in the plane shown in Figure 1, i.e., the planes containing and rotated about the line of the axis 64 of anode rotation; also sometimes herein­after referred to as the plane containing the axis of (anode or target) rotation; r is the local radius 61 of curvature of curved anode surface 22; and g is the gratitational constant.
  • This centrifugal force gives rise to a pressure gradient having a component perpendicular to the heat exchange surface which causes the more rapid removal of nucleate bubbles by radial vapor trans­port, thereby improving heat transfer.
  • a second centrifugal force arises from the absolute angular velocity 50 of the liquid coolant.
  • the angular velocity 50 lies in the plane of anode rotation, i.e., a plane that is orthogonal to the line of the axis 64 of anode rotation.
  • absolute angular velocity vector (v2) 50 is always orthogonal to relative tangen­tial velocity vector (v1) 48.
  • the second centri­fugal force a2 may be expressed as where v2 is the absolute angular velocity 50 and R is the radius 63 of the anode.
  • centrifugal force gives rise to a pressure gradient having a component perpendicu­lar to the heat exchange surface which also causes more rapid removal of nucleate bubbles by radial vapor transport, thereby improving heat transfer.
  • the centrifugal force arising from the absolute angular velocity 50 is directed along the anode radius 63. Therefore, at the curved anode heat transfer surface 22 position shown by arrow 61, which indicates the anode focal track centerline, the centrifugal force perpendicular to the heat exchange surface due to coolant rotation 50 at 61 is proportional to cos ⁇ (angle ⁇ generally indicated as 67).
  • the angle ⁇ may vary with application, e.g., 13° for medical, 20° for industrial, and 0° for crystal­lography.
  • First centrifugal force a1 from coolant flow 48 over curved anode surface 22, is inversely proportional to the local radius of curvature and is independent of angle.
  • the respective centrifugal force can be adjusted by varying the curvature of heat exchange surface 22; its angular disposition relative to the anode radius, the radial coolant velocity or any com­bination thereof.
  • the coolant flow After passing through anode heat ex­change region 23, the coolant flow passes into discharge conduit 18.
  • Means may be placed in discharge conduit 18 to progressively reduce the rotational component of velocity 50 imparted by the centrifugal flow pump vanes 44 to the cool­ant, in a manner such that much of the mechanical energy imparted to the coolant by the vanes is returned to the anode. This reduces the anode drive requirements, and results in a more effici­ent system.
  • turbine vanes 71 may be incorporated in discharge conduit 18. The positioning and length of vanes 71 may also be optimized.
  • Discharge conduit 24 may also be provided with a variable spiral ele­ment 72 or other means, which gradually reduce the remaining rotational velocity of the dis­charge coolant until, as it approaches discharge port 32, it becomes essentially a linear flow. If discharge port 32 is made tangent rather than centered to stationary segment 28 of rotating union 26, some rotation of the coolant may be desirable; the rotating coolant then can be caused to efficiently couple directly into the discharge port 32, thereby aiding in propelling the coolant through port 32.
  • the coolant After leaving discharge port 32, the coolant passes through a heat exchanger (not shown) and, if needed, a pump (not shown), and thence back to tube input port 30.
  • a ferrofluid bearing assembly 31 is employed to provide a high vacuum rotating seal and a suitable vacuum envelope 33 to contain the rotating anode 10 and electron gun 35, etc.
  • the rotating target may operate in atmosphere or a controlled atmosphere instead of a vacuum.
  • the unitary construction of the present invention wherein all elements within the anode are fixedly attached to the anode and rotate with it provides a number of advantages.
  • the septum fixed to and rotating with the anode, it is not necessary to employ support bearings mounted within the anode to permit the septum to be stationary while the anode rotates and main­tain precision alignment between the stationary septum and rotating anode.
  • Elimination of the stationary septum-rotating anode bearing reduces the probability of tube loss due to bearing failure, and therefore, can contribute to extend­ing tube life. Elimination of the stationary septum-rotating anode bearing and associated assembly can also reduce tube construction costs.
  • V groove 76 is suitably formed with respective opposing face 51 extending from interior apex 74 at a predetermined angle from a center line 49, preferably parallel to the anode radius.
  • a "V" groove geometry enables a long line focal spot to be projected as a relatively small focal spot 79 while obtaining a relatively uniform radiation intensity distribution over most of the included angle of the "V” groove.
  • This type of anode has application in x-ray lithography manufacturing of semiconductor devices. X-ray lithography is generally con­ducted in the 10-30 KV range, requiring high electron beam currents to reach desired high average powers. To achieve high electron beam currents, a modified version (e.g., linear) of the circular Gaines-type electron gun may be used, or dual electron guns 35 may be used. Each gun 35 is positioned at an angel ⁇ and on each side of the centerline 49 of "V" groove 76, and illuminates each of the opposing faces 51.
  • the electron guns 35 may also be displaced circumferentially and angled in such a manner that the electron beams illuminating each side 51 of the "V" groove 76 remain aligned with each other and are not displaced circumferen­tially with respect to each other. Both beams thus project as an unbroken x-ray focal spot that is essentially continuous from one side of the "V" groove surface 51 to the other, e.g., an unbroken square or rectangle.
  • This circumferen­tial displacement of the electron guns allows emerging x-rays of focal spot 79 to avoid inter­ception by electron guns 35.
  • Incoming coolant 40 in conduit 36 is engaged by respective centrifugal flow pump vanes 44 as it enters an input conduit 16. After being accelerated radially and circumferentially, the coolant departs centrifugal flow pump vane 44 at point 56, flows toward apex 74 of the "V" groove 76 where the coolant flow bifurcates, approxi­mately half the coolant flow passing up each side of concave curved anode heat exchange sur­faces 22 disposed on the interior of faces 51. Concave curved anode heat exchange surfaces 22 and respective corresponding convex curved sur­face 42 of septum 14 form conduit 23. After passing over heat exchange surfaces 22, the coolant flows into discharge conduits 18.
  • Means such as turbine vanes 71 are provided in dis­charge conduits 18 to reduce the absolute angular velocity of the discharge coolant.
  • the coolant is then discharged out conduit 24.
  • input conduit 36 and output conduit 24 may be provided with means such as variable spiral elements 38 or 72 to increase and decrease the rotational velocity of input and discharge coolant flows while traveling axially inward, conduit 36 or outward, conduit 24.
  • the opposing faces 51 of "V" groove 76 are shown in Figure 2 as linear. Concave curved anode heat exchange surfaces 22, however, may, in general, be characterized as diverging curves commencing at apex 74.
  • the "V" groove wall thickness 41 increases as the distance from the apex 74 increases.
  • the surface tempera­ture on the electron beam side 51 of the "V” groove increases. Therefore, it could be desir­able to also curve the electron beam side 51 of the "V” groove to maintain a constant wall thick­ness.
  • a preferred "V" groove 76 wall thick­ness 41 i.e., curvature, may be achieved, thereby minimizing surface 51 temperature, by selecting a curvature for surface 51 that pro­vides a variable wall thickness 41 that lies between that of the linear V shape shown in Figure 2 and the constant wall thickness result­ing from "V" groove surface 51 having a convex curvature corresponding to the concave curvature of heat transfer surface 22.
  • the desired curva­ture of surface 51 may be approximated by a series of connected straight lines each at suc­cessively increasing angles with respect to centerline 49 when starting from apex 74.
  • the curved anode heat transfer surface 22 may be prepared with nucleat­ing site cavities 78 of optimum dimensions 80, 81 and spacing 82 such that maximum heat flux removal is achieved without encountering the potentially destructive condition of film boil­ing, e.g., burnout.
  • the cavity-to-cavity spacing 82 is such that nucleate bubbles 87 of diameter 83 do not coalesce to form film boiling.
  • Cavity dimensions, such as diameter 80 and depth 81, may range from .002mm to 0.2mm and spacing 82 between cavities on the heat exchange surface may range from .03mm to 3mm.
  • This specified geometry of nucleating cavity dimensions 80 and spacing 82 between cavities may be achieved chemically, e.g., chemical milling, electronic­ally, e.g., lasers or electron beams, or mechanic­ally, e.g., drilling, hobbing, etc.
  • Heat transfer may be further enhanced by breaking up the viscous sublayer formed in the coolant proximate to the heat exchange sur­face.
  • roughness elements e.g., truncated cones 84, that range in height from about .3 times the thickness of the viscous sublayer to about several times the height of the combined thickness of the viscous sublayer and adjacent transition zone are provided on the heat transfer surface.
  • the height of the truncated cone ranges from 0.0001" to about 0.008".
  • cavities 78 may be disposed on the truncated cones 84.
  • the inside surfaces of the cavities serving as nucleate boiling sites and the outer surface of the truncated cones may be further prepared with microcavities 86, preferably re-entrant, with dimensions generally in the range of 10 ⁇ 4mm to 10 ⁇ 2mm.
  • Microcavities 86 serve as long-lived vapor traps that remain in equilibrium with the liquid and serve as the initial nucleate boiling site until the larger cavities 78 commence nucle­ate boiling.
  • full scale nucleate boiling becomes a two-step affair, with initial nucleate boiling taking place at the trapped vapor sites, and then in the larger cavities 78 when suffici­ent vapor has been accumulated.
  • Microcavities 86 may be created by judicious selection of diamond (or other cutting material) particle size which is embedded in the drill bit. With the laser, reactive liquids, vapors, or gases may be introduced or the surface may be coated with a material that decomposes upon heating, which react with the anode or target material to create the desired pitting (microcavities) effect.
  • cavity 78 and roughness 84 geometry in general, will not neces­sarily have the clearly defined geometries shown in Figures 3 and 4, e.g., diameter 80, height 85 and depth 81, but, depending on the nature of manufacture, may be oblong, re-entrant, random, etc.
  • Diameter 80 and depth 81 here refer to effective dimensions wherein approximately equivalent nucleate bubble or vapor generation characteristics are obtained from a cavity of specified random dimensions.
EP88108564A 1987-06-02 1988-05-28 Mit Flüssigkeit gekühlte Drehanoden Withdrawn EP0293791A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5733987A 1987-06-02 1987-06-02
US57339 1987-06-02

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0430367A2 (de) * 1989-11-29 1991-06-05 Philips Patentverwaltung GmbH Röntgenröhre
EP0633712A1 (de) * 1993-07-05 1995-01-11 Koninklijke Philips Electronics N.V. Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre
AT399243B (de) * 1989-04-24 1995-04-25 Gen Electric Drehanode für eine röntgenröhre
US5515414A (en) * 1993-07-05 1996-05-07 U.S. Philips Corporation X-ray diffraction device comprising cooling medium connections provided on the X-ray tube
EP0872872A1 (de) * 1997-04-18 1998-10-21 Siemens Medical Systems, Inc. Target zur Erzeugung von Röntgenstrahlen
WO2000054308A1 (en) * 1999-03-09 2000-09-14 Teledyne Technologies Incorporated Apparatus and method for cooling a structure using boiling fluid
US7656236B2 (en) 2007-05-15 2010-02-02 Teledyne Wireless, Llc Noise canceling technique for frequency synthesizer
US8179045B2 (en) 2008-04-22 2012-05-15 Teledyne Wireless, Llc Slow wave structure having offset projections comprised of a metal-dielectric composite stack
US9202660B2 (en) 2013-03-13 2015-12-01 Teledyne Wireless, Llc Asymmetrical slow wave structures to eliminate backward wave oscillations in wideband traveling wave tubes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4405876A (en) * 1981-04-02 1983-09-20 Iversen Arthur H Liquid cooled anode x-ray tubes
EP0142249A2 (de) * 1983-09-19 1985-05-22 Technicare Corporation Drehanoden-Röntgenröhre mit Hochvakuum
US4566116A (en) * 1982-04-30 1986-01-21 Hitachi, Ltd. Soft X-ray generator
EP0212548A2 (de) * 1985-08-12 1987-03-04 Fujitsu Limited Drehanodenanordnung für Röntgenstrahlenquelle

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4405876A (en) * 1981-04-02 1983-09-20 Iversen Arthur H Liquid cooled anode x-ray tubes
US4566116A (en) * 1982-04-30 1986-01-21 Hitachi, Ltd. Soft X-ray generator
EP0142249A2 (de) * 1983-09-19 1985-05-22 Technicare Corporation Drehanoden-Röntgenröhre mit Hochvakuum
EP0212548A2 (de) * 1985-08-12 1987-03-04 Fujitsu Limited Drehanodenanordnung für Röntgenstrahlenquelle

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT399243B (de) * 1989-04-24 1995-04-25 Gen Electric Drehanode für eine röntgenröhre
DE4012019B4 (de) * 1989-04-24 2004-11-18 General Electric Co. Drehanode für eine Röntgenröhre
EP0430367A2 (de) * 1989-11-29 1991-06-05 Philips Patentverwaltung GmbH Röntgenröhre
EP0430367A3 (en) * 1989-11-29 1991-09-11 Philips Patentverwaltung Gmbh X-ray tube
EP0633712A1 (de) * 1993-07-05 1995-01-11 Koninklijke Philips Electronics N.V. Röntgenstrahlen-Beugungsgerät mit Kühlmittel-Verbindung zur Röntgenröhre
US5515414A (en) * 1993-07-05 1996-05-07 U.S. Philips Corporation X-ray diffraction device comprising cooling medium connections provided on the X-ray tube
EP0872872A1 (de) * 1997-04-18 1998-10-21 Siemens Medical Systems, Inc. Target zur Erzeugung von Röntgenstrahlen
WO2000054308A1 (en) * 1999-03-09 2000-09-14 Teledyne Technologies Incorporated Apparatus and method for cooling a structure using boiling fluid
US6252934B1 (en) 1999-03-09 2001-06-26 Teledyne Technologies Incorporated Apparatus and method for cooling a structure using boiling fluid
US7656236B2 (en) 2007-05-15 2010-02-02 Teledyne Wireless, Llc Noise canceling technique for frequency synthesizer
US8179045B2 (en) 2008-04-22 2012-05-15 Teledyne Wireless, Llc Slow wave structure having offset projections comprised of a metal-dielectric composite stack
US9202660B2 (en) 2013-03-13 2015-12-01 Teledyne Wireless, Llc Asymmetrical slow wave structures to eliminate backward wave oscillations in wideband traveling wave tubes

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