EP0599827A2 - Mechanismus zum Bewegen in einem Flach - Google Patents

Mechanismus zum Bewegen in einem Flach Download PDF

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Publication number
EP0599827A2
EP0599827A2 EP94400069A EP94400069A EP0599827A2 EP 0599827 A2 EP0599827 A2 EP 0599827A2 EP 94400069 A EP94400069 A EP 94400069A EP 94400069 A EP94400069 A EP 94400069A EP 0599827 A2 EP0599827 A2 EP 0599827A2
Authority
EP
European Patent Office
Prior art keywords
belts
pair
plane motion
belt
motion mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP94400069A
Other languages
English (en)
French (fr)
Other versions
EP0599827A3 (de
Inventor
Hiroharu C/O Uni Data Ltd. Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNI DATA Ltd
Nicotec Co Ltd
Original Assignee
UNI DATA Ltd
Nicotec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNI DATA Ltd, Nicotec Co Ltd filed Critical UNI DATA Ltd
Publication of EP0599827A2 publication Critical patent/EP0599827A2/de
Publication of EP0599827A3 publication Critical patent/EP0599827A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair
    • B23Q1/4809—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair followed perpendicularly by a single rotating pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B25J9/0078—Programme-controlled manipulators having parallel kinematics actuated by cables
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
    • F16H2019/069—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member with means for generating two superposed movements, e.g. for driving a X-Y table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18832—Reciprocating or oscillating to or from alternating rotary including flexible drive connector [e.g., belt, chain, strand, etc.]
    • Y10T74/18848—Reciprocating or oscillating to or from alternating rotary including flexible drive connector [e.g., belt, chain, strand, etc.] with pulley
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20348—Planar surface with orthogonal movement and rotation

Definitions

  • This invention relates to an automatization apparatus for machining processing, assembling, measuring, inspection and the like and, more particularly, to a plane motion mechanism suitable for determining a position and a posture of a table in a plane.
  • a plane motion mechanism according to the first part of claim 1 is known (see article "A High Precision Alignment Device” by A. Engletor and P. Bierbaum, pages 43-45, Solid State Technology, Volume 11, No. 11 November 1968).
  • a motion in a plane has three degrees of freedom.
  • the motion is realized by the use of three joints.
  • positioning of a workpiece on a machining center is practised such that a slide table in a Y-direction is mounted on a slide table in an X-direction, and a rotary table in a ⁇ -direction is mounted on an assembly including the slide tables in the X- and Y- directions, to control three axes including X, Y and ⁇ .
  • This is called an orthogonal coordinate system.
  • a horizontal multiple-joint robot an upper arm is moved angularly by a shoulder joint through ⁇ 1, a front arm is moved angularly by an elbow joint through ⁇ 2, and a hand is rotated by a wrist joint through ⁇ 3, to control three axes including ⁇ 1, ⁇ 2 and ⁇ 3, thereby obtaining a position and a posture (X, Y, ⁇ ).
  • X l1cos ⁇ 1 + l2cos( ⁇ 1 + ⁇ 2)
  • Y l1sin ⁇ 1 + l2sin( ⁇ 1 + ⁇ 2)
  • ⁇ ⁇ 1 + ⁇ 2 + ⁇ 3
  • the arrangement is such that a second axis is mounted on a motion of a first axis, and the last axis is mounted on an assembly including the first and second axes.
  • the axis in the lowermost level must move drive mechanisms and guide mechanisms for the respective upper two levels including the second and third axes.
  • a large power is required.
  • a plane motion mechanism comprising: a base having a top planar surface; a table mounted on said top planar surface of said base for movement thereon in plane motion, said table being circular in cross-section and having an outer peripheral side surface; at least a pair of first and second elongated power transmitting means; and a pair of drive means for driving said first and second elongated power transmitting means, respectively.
  • the first and second elongated power transmitting means extend in contact with the outer peripheral side surface of the table to generate friction between said first and second power transmitting means and said outer peripheral side surface of said table.
  • the use of the endless belts enables rotational speed of the table not to be limited. Accordingly, it is possible to control the table more freely. Further, since the table can be controlled in position regardless of the number of turns of the belts, it is possible to realize a plane motion with an accuracy, by means of more simple arrangement.
  • the arrangement of the invention it is possible to calculate the moving direction of the table on the basis of vector composition or analysis of the tensile direction of the endless belt. Furthermore, regarding the rotational speed, there occurs no limit. Accordingly, it is possible to freely move the table within the predetermined area on the table, and it is possible to move angularly the table at a predetermined control position without a limit.
  • a plane motion mechanism which comprises a base 10 having a top planar surface 91.
  • the base 10 is mounted at a predetermined position in the vertical direction.
  • a table 20 having a circular outer peripheral side surface 92 is mounted on the top planar surface 91 of the base 10 for linear movement and angular movement about an axis 25 thereon in plane motion.
  • Four cylindrical elements 11, 12, 13 and 14 rotatable about their respective axes 93, 94, 95 and 96 have respective cylindrical outer peripheral side surfaces.
  • First, second, third and fourth elongated power transmitting means that is, four belts 1, 2, 3 and 4 pass respectively about the cylindrical outer peripheral side surfaces of the respective cylindrical elements 11, 12, 13 and 14 so that the four belts 1, 2, 3 and 4 are defined or determined in their respective tensile directions.
  • the first ends of the respective belts 1, 2, 3 and 4 are connected respectively to four tension-applying means or drive motors 21, 22, 23 and 24, for applying tension forces respectively to the belts 1, 2, 3 and 4, i.e. for pulling the belts, respectively.
  • a control unit 30 is provided for controlling the drive motors 21, 22, 23 and 24.
  • the drive motors 21, 22, 23 and 24 are mounted on a side surface of the base 10 so as to extend vertically.
  • the drive motors 21, 22, 23 and 24 are so-called DD motors having no reduction gears, which can generate high torque.
  • the drive motors 21, 22, 23 and 24 have respective output shafts 31, 32, 33 and 34 to which the first ends of the respective belts 1, 2, 3 and 4 are fixedly connected.
  • the belts 1, 2, 3 and 4 extend respectively about the cylindrical elements 11, 12, 13 and 14, and the second ends of the respective belts 1, 2, 3 and 4 are fixedly connected to the outer peripheral side surface 92 of the table 20 at their respective predetermined locations. In this connection, if the belts 1, 2, 3 and 4 vary in vertical position, the belts will be intertwined with each other.
  • the outer peripheral side surface of the table 20 is formed with a plurality of belt grooves 61, 62, 63 and 64.
  • each of the cylindrical elements 11, 12, 13 and 14 is formed in its outer periphery, with a plurality of belt grooves 71, 72, 73 and 74.
  • Each of the belts 1, 2, 3 and 4 extends along a corresponding one of the belt grooves 71, 72, 73 and 74 in the outer periphery of the cylindrical element 11, 12, 13 or 14.
  • relief means is provided for relieving friction between the top planar surface 91 of the base 10 and the lower surface of the table 20.
  • the relief means is made of a polytetrafluoroethylene film 81 (trade name : Teflon) or the like which is mounted on the lower surface of the table 20. Further, the lower surface of the polytetrafluoroethylene film 81 is formed with a plurality of grooves 82 for retaining a film of lubricant.
  • the belts 1, 2, 3 and 4 are fixedly connected to the table 20 along their respective belt grooves 71, 72, 73 and 74 in the cylindrical elements 11,12, 13 and 14 which are predetermined correspondingly to the belts 1, 2, 3 and 4 respectively.
  • the belt 1 is fixedly connected to the outer peripheral side surface 92 of the table 20 at a point 38 and the belt 2 is fixedly connected to the table 20 at a fixing point 39.
  • the belts 3 and 4 are located on a side opposite to the fixing points 38 and 39.
  • the drive motors 21 and 24 take up the belts 1 and 4, respectively, while the other drive motors 22 and 23 loosen the belts 2 and 3, respectively. Further, in order to angularly move the table 20 in the clockwise direction, the belts 2 and 4 are taken respectively about the output shafts 31 and 34 of the respective drive motors 21 and 24, while the belts 1 and 3 are loosened.
  • the relationship between the motion of the table 20 and the belts 1, 2, 3 and 4 is indicated by the following table. The case where the belts 1, 2, 3 and 4 are taken up is indicated by (+), while the case where the belts 1, 2, 3 and 4 are loosened is indicated by (-).
  • the amount of movement of the table 20 is determined depending upon the lengths of the respective belts 1, 2, 3 and 4.
  • the lengths of the respective belts 1, 2, 3 and 4 are beforehand calculated on the basis of the configuration and dimension of the table 20 and are stored in the control unit 30.
  • Paths of the respective belts 1, 2, 3 and 4 may be taught by either a playback system or a numerical control system. Further, it is possible to operate a joy stick or the like so that an operator manually commands the coordinates X, Y and ⁇ to drive the drive motors 21, 22, 23 and 24 on the basis of calculation.
  • the paths of the respective belts 1, 2, 3 and 4 are beforehand taught in the control unit 30, whereby it is possible to slide the table 20 freely to the position and posture defined by (X, Y, ⁇ ).
  • the drive motors 21, 22, 23 and 24 can be mounted on the side surface of the base 10 so as to extend vertically, it is possible to supply a planar motion mechanism significantly thinner than a conventional orthogonal coordinate system in which motor guides are arranged below a table through a plurality of levels.
  • the planar motion mechanism according to the embodiment of Fig. 1 has no structures or constructions corresponding respectively to conventional ball screws and screw arms. Accordingly, the working or operational area of the base per se is brought to the dimension of the base.
  • the planar motion mechanism according to the embodiment of Fig. 1 is improved with respect to orthogonal or horizontal joint mechanisms regarding the required planar surface.
  • Figs. 3(A), 3(B) and 3(C) show various variations regarding the winding of the belts 1, 2, 3 and 4 about the table 20.
  • Fig. 3(A) shows a so-called "8"-shaped winding manner.
  • the table 20 moves in plane motion within an area indicated by dot-and-dash lines in Fig. 4(A).
  • Fig. 3(B) shows a so-called "O"-shaped winding manner.
  • Fig. 3(C) shows a winding manner which is to be called a so-called combination type of "8" and "O".
  • the table 20 moves in plane motion within an area indicated by dot-and-dash lines in Fig. 4(C).
  • the belts 1, 2, 3 and 4 may be not only DD motors, but also DC motors, AC motors, brushless motors or the like.
  • the belts 1, 2, 3 and 4 are not directly connected respectively to the motors 21, 22, 23 and 24, but reduction gears may be used between the belts 1, 2, 3 and 4 and the motors 21, 22, 23 and 24.
  • the belts 1, 2, 3 and 4 may be drawn by respective direct-acting piston/cylinder assemblies (not shown).
  • Fig. 5 shows a first modification of the embodiment according to Fig. 1, in which the table 20 is driven by three motors 21, 22 and 23. It will be seen that the table 20 can be moved straight and moved angularly within an area A of the top planar surface 92 of the base 10, which is surrounded by dot-and-dash lines in Fig. 5. That is, the first modification enables the table 20 to occupy any planar position and posture defined by X, Y, ⁇ .
  • the cylindrical elements 11, 12 and 13 are provided correspondingly with the belts 1, 2 and 3.
  • the tensile direction of the respective belts 1, 2, 3 and 4 the locations where the belts 1, 2, 3 and 4 are connected to the table 20, the vertical positions of the respective belts 1, 2, 3 and 4 and the vertical positions of the respective grooves 61, 62, 33, 64, 71, 72, 73 and 74 can also suitably be modified.
  • the (X, Y, ⁇ ) motion is possible, if the belts 1, 2, 3 and 4 are connected to the table 20 in the arrangements illustrated respectively in Figs. 3(B) and 3(C).
  • Fig. 6 shows a second modification of the embodiment illustrated in Fig. 1.
  • an helical spring 201 is substituted for one of the drive motors 21, 22, 23 and 24.
  • the helical spring 201 always applies a tension force to the belt 3, i.e. to the table 20.
  • the helical spring 201 has intensity or spring constant which may suitably be set depending upon the weight of the table 20 or a subject load applied to the helical spring 201. Of course two or more helical springs may be substituted respectively for two or more drive motors 21, 22, 23 and 24.
  • the (X, Y, ⁇ ) motion of the table 20 is determined only depending upon the tensile directions of the respective belts 1, 2, 3 and 4 or 1, 2 and 3. Accordingly, if the cylindrical elements 11, 12, 13 and 14 or 11, 12 and 13 are defined or determined in position, there is produced such a degree of freedom that the drive motors 21, 22, 23 and 24 or 21, 22 and 23 may be placed or arranged anywhere.
  • the cylindrical elements 11, 12, 13 and 14 should be placed respectively at corners of an elongated rectangle.
  • the table 20 has an angular or square configuration in cross-section which hinders pulling or tension of the belts 1, 2, 3 and 4 or 1, 2 and 3, there are no problems if the belt grooves 61, 62, 63 and 64 have adequate radii of curvature, and if the lengths of the respective belts 1, 2, 3 and 4 or 1, 2 and 3 are suitably determined.
  • the speed and tension of each of the drive motors 21, 22, 23 and 24 or 21, 22 and 23 are so programmed as to be corrected automatically depending upon rotational speed of a tool, a configuration of a workpiece, material and the kind of the used tool and the like, there can be provided necessary and sufficient constancy.
  • the arrangement may be such that a plurality of sensors are provided for detecting items such as length, tension and the like of respective belts, and the position and posture of the table 20, and three elements or factors (X, Y, and Rotational Torque) applied to the table 20 are obtained by computation, so that feedback control is made possible.
  • Figs. 7(A) and 7(B) show a plane motion mechanism according to an embodiment of the invention.
  • the plane motion mechanism comprises a base 40 having a top planar surface 301, and a table 41 mounted on the top planar surface 301 of the base 40.
  • a pair of endless belts 42 and 43 are wound about an outer peripheral side surface of the table 41 to drive the same.
  • the endless belt 42 passes about a pair of motor pulleys 44 and 45.
  • a pair of tension pulleys 51 and 52 urge the endless belt 42 respectively against the pair of motor pulleys 44 and 45.
  • the endless belt 43 passes about a pair of motor pulleys 46 and 47.
  • a pair of tension pulleys 53 and 54 urge the endless belt 43 respectively against the pair of motor pulleys 46 and 47.
  • the base 40 and the table 41 have the same construction as the base 10 and the table 20 of the above-described embodiment of Figs. 1 to 6. In the arrangement illustrated in Fig. 7(A), however, it is unnecessary to form grooves, along which the endless belts 42 and 43 extend, in the outer peripheral side surface of the table 41.
  • the endless belts 42 and 43 may be wound about the table 41 in a two-stage manner, as shown in Fig. 8(A).
  • the arrangement may be such that the endless belt 42 is divided into a pair of endless belt sections 312 and 313.
  • the endless belt 43 and the pair of endless belt sections 312 and 313 are wound about the table 41 in a three-stage manner such that the endless belt 43 extends between the pair of endless belt sections 312 and 313.
  • a moment M O is generated in a direction indicated by the arrows, if each of the endless belts 41 and 43 have reduced width. Accordingly, it is desirable that, in order to move the table 41 stably, the endless belt sections 312 and 313 are wound about the table 41 in the manner of three or more stages as illustrated in Fig. 8(B).
  • the endless belts 42 and 43 are made of steel belts, for example.
  • an antislipping element such as rubber, coating or the like is applied to the contact surface of each of the endless belts 42 and 43.
  • the endless belts 42 and 43 may be timing belts, perforation belts or the like.
  • the plane motion mechanism using the endless belts 42 and 43 has the following disadvantage.
  • the endless belt 43 largely deflects on the side toward which the table 41 moves when it is desired to move the table 41 to the right.
  • Figs. 9(A) and 9(B) show a first modification of the embodiment illustrated in Figs. 7(A) and 7(B), which can prevent the endless belts 42 and 43 from being deflected.
  • the first modification illustrated in Figs. 9(A), 9(B) and 9(D) is the same in arrangement as said embodiment of Figs. 7(A) and 7(B).
  • the table 41 is mounted on the top planar surface 301 of the base 40, the pair of endless belts 42 and 43 are wound about the table 41, and the motor pulleys 44 through 47 drive the pair of endless belts 42 and 43.
  • the endless belt 42 passes about a tension roller 68 through three guide rollers 61, 62 and 63.
  • the endless belt 43 passes about a tension roller 69 through three guide rollers 64, 65 and 66.
  • the guide pulleys 61 to 66 are fixed with respect to the base 40, the tension pulleys 68 and 69 are slidable toward and away from each other.
  • a coil spring 70 extends between frames of the respective tension pulleys 68 and 69 to pull the same toward each other in order to apply substantially constant tensions respectively to the endless belts 42 and 43.
  • Fig. 10 shows an example of an arrangement for returning the table 41 to an original point.
  • the arrangement comprises a pair of sliders 75 and 76 which are respectively mounted on the lower surfaces of the respective tension pulleys 68 and 69.
  • the pair of sliders 75 and 76 are movable toward and away from each other along a guide rail 79.
  • the arrangement is such that the sliders 75 and 76 can simultaneously depress the operators of the respective limit switches 77 and 78 which are arranged in position corresponding to the original position of the table, to detect the original position of the table 41.
  • the point, where the sliders 75 and 76 simultaneously depress the operators of the respective limit switches 77 and 78 to turn on an AND circuit is the original point.
  • Fig. 11 shows a second modification of the embodiment illustrated in Figs. 7(A) and 7(B).
  • a first belt 401 has one end thereof connected to a drive motor 411.
  • the first belt 401 extends about the table 41 on the top planar surface 301 of the base 45.
  • the other end of the belt 401 is connected to an output shaft of a drive motor 412.
  • a second belt 402 has one end thereof connected to a drive motor 413.
  • the second belt 402 extends about the table 41 on the top planar surface 301 of the base 45.
  • the other end of the belt 402 is connected to an output shaft of a drive motor 414.
  • grooves may be formed in the outer peripheral side surface of the table 41 and in the outer peripheral side surface of each of the output shafts of the respective drive motors 411 to 414.
  • the plane motion mechanism according to the invention is applicable not only to the automatization of processing machines, assembling machines and inspecting and measuring machines, in factories, but also to other fields such as display of goods, toys and the like.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Robotics (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
EP94400069A 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach. Withdrawn EP0599827A3 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP190671/90 1990-07-20
JP19067190 1990-07-20
JP3256037A JPH05228770A (ja) 1990-07-20 1991-07-01 平面運動機構
JP256037/91 1991-07-01
EP91402027A EP0469956B1 (de) 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP91402027.6 Division 1991-07-19

Publications (2)

Publication Number Publication Date
EP0599827A2 true EP0599827A2 (de) 1994-06-01
EP0599827A3 EP0599827A3 (de) 1995-08-09

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Application Number Title Priority Date Filing Date
EP94400069A Withdrawn EP0599827A3 (de) 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach.
EP91402027A Expired - Lifetime EP0469956B1 (de) 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach

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Application Number Title Priority Date Filing Date
EP91402027A Expired - Lifetime EP0469956B1 (de) 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach

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Country Link
US (1) US5148716A (de)
EP (2) EP0599827A3 (de)
JP (1) JPH05228770A (de)
DE (1) DE69113560T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07156031A (ja) * 1993-12-01 1995-06-20 Micro Tec Kk ＸＹθテーブル
DE10359273A1 (de) 2003-12-17 2005-07-21 Erich Thallner Justiervorrichtung
JP5202278B2 (ja) * 2008-12-19 2013-06-05 アルファーデザイン株式会社 位置決め装置及び位置決め方法
JP5974416B2 (ja) * 2011-12-20 2016-08-23 学校法人立命館 ワイヤ駆動機構
JP6322718B6 (ja) * 2014-04-16 2018-07-11 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、リソグラフィ装置においてオブジェクトを位置決めするための方法、及びデバイス製造方法
WO2016096057A1 (en) * 2014-12-19 2016-06-23 Fundación Tecnalia Research & Innovation Planar motion device

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GB1088858A (en) * 1963-12-06 1967-10-25 Luwa Ag Drive apparatus for a carriage upon a guideway
US3926061A (en) * 1974-10-02 1975-12-16 Hewlett Packard Co Differential drive rotating disc impact printer

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Also Published As

Publication number Publication date
JPH05228770A (ja) 1993-09-07
DE69113560T2 (de) 1996-06-05
EP0599827A3 (de) 1995-08-09
DE69113560D1 (de) 1995-11-09
EP0469956B1 (de) 1995-10-04
US5148716A (en) 1992-09-22
EP0469956A1 (de) 1992-02-05

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