DE69113560D1 - Mechanismus zum Bewegen in einem Flach. - Google Patents

Mechanismus zum Bewegen in einem Flach.

Info

Publication number
DE69113560D1
DE69113560D1 DE69113560T DE69113560T DE69113560D1 DE 69113560 D1 DE69113560 D1 DE 69113560D1 DE 69113560 T DE69113560 T DE 69113560T DE 69113560 T DE69113560 T DE 69113560T DE 69113560 D1 DE69113560 D1 DE 69113560D1
Authority
DE
Germany
Prior art keywords
flat
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69113560T
Other languages
English (en)
Other versions
DE69113560T2 (de
Inventor
Hiroharu Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNI DATA Ltd
Nicotec Co Ltd
Original Assignee
UNI DATA Ltd
Nicotec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNI DATA Ltd, Nicotec Co Ltd filed Critical UNI DATA Ltd
Application granted granted Critical
Publication of DE69113560D1 publication Critical patent/DE69113560D1/de
Publication of DE69113560T2 publication Critical patent/DE69113560T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair
    • B23Q1/4809—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair followed perpendicularly by a single rotating pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B25J9/0078—Programme-controlled manipulators having parallel kinematics actuated by cables
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
    • F16H2019/069—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member with means for generating two superposed movements, e.g. for driving a X-Y table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18832—Reciprocating or oscillating to or from alternating rotary including flexible drive connector [e.g., belt, chain, strand, etc.]
    • Y10T74/18848—Reciprocating or oscillating to or from alternating rotary including flexible drive connector [e.g., belt, chain, strand, etc.] with pulley
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20348—Planar surface with orthogonal movement and rotation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Robotics (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
DE69113560T 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach. Expired - Fee Related DE69113560T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19067190 1990-07-20
JP3256037A JPH05228770A (ja) 1990-07-20 1991-07-01 平面運動機構

Publications (2)

Publication Number Publication Date
DE69113560D1 true DE69113560D1 (de) 1995-11-09
DE69113560T2 DE69113560T2 (de) 1996-06-05

Family

ID=26506240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69113560T Expired - Fee Related DE69113560T2 (de) 1990-07-20 1991-07-19 Mechanismus zum Bewegen in einem Flach.

Country Status (4)

Country Link
US (1) US5148716A (de)
EP (2) EP0599827A3 (de)
JP (1) JPH05228770A (de)
DE (1) DE69113560T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07156031A (ja) * 1993-12-01 1995-06-20 Micro Tec Kk ＸＹθテーブル
DE10359273A1 (de) 2003-12-17 2005-07-21 Erich Thallner Justiervorrichtung
JP5202278B2 (ja) * 2008-12-19 2013-06-05 アルファーデザイン株式会社 位置決め装置及び位置決め方法
JP5974416B2 (ja) * 2011-12-20 2016-08-23 学校法人立命館 ワイヤ駆動機構
JP6322718B6 (ja) * 2014-04-16 2018-07-11 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、リソグラフィ装置においてオブジェクトを位置決めするための方法、及びデバイス製造方法
WO2016096057A1 (en) * 2014-12-19 2016-06-23 Fundación Tecnalia Research & Innovation Planar motion device

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1453903A (en) * 1922-07-24 1923-05-01 George M Ask Power-transmitting mechanism
FR1022005A (fr) * 1950-07-13 1953-02-26 Commande par enroulements différentiels à vitesse, accélération et auto-stabilité variables
GB735359A (en) * 1953-01-09 1955-08-17 English Electric Co Ltd Improvements relating to gimbal mechanisms
NL129819C (de) * 1963-12-06
DE1801973A1 (de) * 1968-10-09 1970-06-04 Zuse Kg Trommel zum Antrieb eines flexiblen Elementes
CH552759A (de) * 1973-09-07 1974-08-15 Doka Otto Seilantrieb zur schlupffreien uebertragung einer linearen bewegung in eine drehbewegung.
US3926061A (en) * 1974-10-02 1975-12-16 Hewlett Packard Co Differential drive rotating disc impact printer
GB2088987A (en) * 1980-11-12 1982-06-16 Marconi Co Ltd Drive Systems
US4392140A (en) * 1981-07-20 1983-07-05 General Dynamics, Pomona Division Dual cable drive rolling arc gimbal
JPS5861429A (ja) * 1981-10-07 1983-04-12 Toshiba Corp 移動マイクロホン装置
USRE32414E (en) * 1981-12-08 1987-05-12 Zymark Corporation Robot and control system
GB2141684B (en) * 1982-12-01 1986-03-26 Garrett W Brown Improved suspension system for supporting and conveying equipment, such as a camera
DE3427949A1 (de) * 1984-03-20 1985-09-26 Preh, Industrieausrüstungen GmbH, 8740 Bad Neustadt X-y-koordinaten positioniereinrichtung
DE3427413C1 (de) * 1984-07-25 1986-01-02 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Tasteinrichtung
JPS61270044A (ja) * 1985-05-24 1986-11-29 Toshiba Corp ３軸移動ステ−ジ
JPS62281018A (ja) * 1986-05-30 1987-12-05 Nippon Telegr & Teleph Corp <Ntt> 角度制御装置
DE3718614A1 (de) * 1987-06-03 1988-12-22 Heidelberg Goetz Stromerzeugungsvorrichtung
GB2210350A (en) * 1987-09-25 1989-06-07 Kemble Instr Company Limited Machine drive system
US4932210A (en) * 1988-08-19 1990-06-12 The Boeing Company Shape memory metal precision actuator
JPH0256613A (ja) * 1988-08-22 1990-02-26 Iseki & Co Ltd アクチュエータにおける位置制御装置

Also Published As

Publication number Publication date
JPH05228770A (ja) 1993-09-07
EP0599827A2 (de) 1994-06-01
DE69113560T2 (de) 1996-06-05
EP0599827A3 (de) 1995-08-09
EP0469956B1 (de) 1995-10-04
US5148716A (en) 1992-09-22
EP0469956A1 (de) 1992-02-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee