EP0592472B1 - Modul zum aufbau einer reinraumdecke - Google Patents

Modul zum aufbau einer reinraumdecke Download PDF

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Publication number
EP0592472B1
EP0592472B1 EP92912382A EP92912382A EP0592472B1 EP 0592472 B1 EP0592472 B1 EP 0592472B1 EP 92912382 A EP92912382 A EP 92912382A EP 92912382 A EP92912382 A EP 92912382A EP 0592472 B1 EP0592472 B1 EP 0592472B1
Authority
EP
European Patent Office
Prior art keywords
chamber
sound
opening
module according
ceiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92912382A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0592472A1 (de
Inventor
Udo Jung
Herbert Eidam
Wilhelm Gerk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grenzebach GmbH and Co KG
Original Assignee
Babcock BSH AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock BSH AG filed Critical Babcock BSH AG
Publication of EP0592472A1 publication Critical patent/EP0592472A1/de
Application granted granted Critical
Publication of EP0592472B1 publication Critical patent/EP0592472B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S454/00—Ventilation
    • Y10S454/906—Noise inhibiting means

Definitions

  • the invention relates to a module for constructing a clean room ceiling according to the preamble of claim 1.
  • a clean room system is known from EP-A-0 196 333, which has a false ceiling with a support system and ceiling modules which are designed as filter-fan modules, as return air modules and as blind modules. Different arrangement of the different ceiling modules allows zones of different degrees of purity to be set.
  • a prerequisite for laminar flow in the clean room is an even distribution of speed behind the high-performance suspended matter filters, which can be generated by applying the filters evenly.
  • the high-performance particulate filters have very high air resistances, which significantly reduce the flow velocities. Only the static pressure component of an air flow upstream of the high-performance particulate filters is therefore effective.
  • the laminar flow technology therefore requires an air flow with as little turbulence as possible and with the highest possible static pressure in the chamber in front of the high-performance particulate filters.
  • a low-turbulence flow is promoted by a one-sided air supply to this chamber in front of the high-performance particulate filters.
  • the static pressure component of a flow can be increased by converting dynamic pressure into static pressure.
  • Such conversion is achieved by passing the air through a multi-chamber system, thereby reducing the flow rate.
  • Such a chamber system has so-called tunnel modules known from DE-U 88 05 774, which are strung together to form clean rooms using laminar flow technology with the highest levels of purity.
  • a tunnel module consists of an upper part and two side walls.
  • the upper part has a chamber system with a return air inlet, a fan and superimposed chambers, the lower chamber being delimited by high-performance suspended matter filters arranged in tiles. The air is led through the chamber system and through the filters to the clean room.
  • the desired conversion from dynamic to static pressure takes place and thus a reduction in the flow speed in front of the high-performance particulate filters.
  • small and medium-sized cleanrooms can be quickly assembled and disassembled and enlarged or reduced. They are particularly suitable for retrofitting in existing buildings. In the case of new buildings, however, one would like to dispense with double walls, namely those of the tunnel modules and those of the building, and not limit oneself to a clean room limited by the width of the tunnel modules.
  • a generic module for building a clean room ceiling is known from DE-OS 38 36 147.
  • the object of the invention is to develop a module according to the preamble of claim 1 which, with good flow guidance and with the smallest possible height and weight, has good sound reduction.
  • a clean room ceiling can be constructed using laminar flow technology.
  • the modules can be assembled into a clean room ceiling of any size, with the exchange of individual modules e.g. for maintenance is easily possible.
  • the return air is drawn in from the plenum between the clean room ceiling and the housing ceiling and directed to the fan through the upper chamber, which is equipped with noise reduction devices.
  • the size of the return air opening is dimensioned such that on the one hand the flow velocity is not too high, which would be the case if the opening were too small, and on the other hand the distance in the upper chamber is sufficiently long to reduce noise.
  • the combination of a sound insulation lining in the upper chamber, silencing backdrops in the middle chamber and a sound absorption plate in the lower chamber enables good sound reduction with a lower overall height of the module and lower weight of the noise protection devices compared to the corresponding sizes of the tunnel module.
  • the height of the upper chamber, the height of the silencing baffles in the middle chamber, and thus the height of the middle chamber and the weight of all soundproofing devices, can be reduced.
  • claims 2 to 8 influence the air flowing through the middle chamber into the lower chamber in such a way that the lowest possible turbulence air flow with the highest possible static pressure component in the chamber in front of the high-performance particulate filters.
  • the main advantage of a fan consisting of two parts, the motor of which is fastened in the module via vibration dampers, is that hardly any vibrations occur by the fans in a clean room with a clean room ceiling constructed from the modules.
  • the rectifying plate according to claim 10 leads to an equalization of the air flow in the upper chamber above the fan.
  • Modules according to claim 11 are particularly suitable for building a ceiling for clean rooms in which conditioned air is required.
  • Figure 1 shows a vertical section through a module of the first example.
  • FIG. 2 shows an enlarged section of FIG. 1 in the area around the opening connecting the middle and the lower chamber.
  • FIG. 3 shows the section corresponding to FIG. 2 for a module of the second example.
  • a module for the construction of a clean room ceiling has an approximately cuboid housing with a rectangular plan, with its ceiling 1, its side walls 2, 3 and the front and rear walls, which are not visible in the drawing and which are parallel to the plane of the drawing, made of bent metal sheets.
  • the module is divided by two intermediate floors 4, 5 into three flat chambers 6, 7, 8, one above the other, which extend over the entire width (perpendicular to the plane of the drawing in FIG. 1).
  • the chamber heights of the three chambers 6, 7, 8 are approximately the same size.
  • the chambers 6, 7, 8 are connected to one another by mutually arranged openings 9, 10 in the intermediate floors 4, 5.
  • the upper chamber has in the ceiling 1 a return air opening 11 covered with a grille or a control flap, which, starting from the side wall 3, extends over a fifth to a quarter of the length of the module and over its entire width.
  • the opening 9 of the upper intermediate floor 4 is located in the vicinity of the side wall 2 opposite the return air opening 11.
  • the opening 10 of the lower intermediate floor 5 is a gap between the edge of the lower intermediate floor 5, which does not quite reach the side wall 3, and the side wall 3 remains free.
  • the lower chamber 8 is delimited at the bottom by three high-performance suspended matter filters 12 which are placed next to one another, the high-performance suspended matter filters 12 resting on folds of the side walls 2, 3, the front and the rear wall.
  • the high-performance particulate filters 12 are installed with seals and sealing compound.
  • a fan 13 which is designed as a housing-free radial fan with an external rotor motor 15 and has blades 16 curved backwards. Seen from above on the inlet nozzle 14, its direction of rotation is clockwise.
  • the fan 13 is divided into two parts, its inlet nozzle 14 sitting in the opening 9 of the upper intermediate floor 4 and being fastened to the upper intermediate floor 4 and its external rotor motor 15 being fastened to the lower intermediate floor 5.
  • the distance of the fan axis 17 from the side wall 5 lying next to it corresponds approximately to 0.8 times the diameter of the fan 13. Its distance from the front wall is approximately 40% of the width of the module.
  • the external rotor motor 15 of the fan 13 is mounted on a plate 20 fastened to a rectangular frame 19 by means of four rubber oscillating elements 18.
  • the frame 19 is screwed onto the intermediate floor 5 at four points near the side wall 2, the front and the rear wall via small 5 mm thick plates (not shown in the drawing).
  • the ceiling 1, the upper intermediate floor 4 and the side walls 2, 3 are provided with a sound insulation lining 23, e.g. Soundproofing panels, which are made of foamed plastic and have a pyramid or honeycomb surface, covered.
  • a sound insulation lining 23 e.g. Soundproofing panels, which are made of foamed plastic and have a pyramid or honeycomb surface, covered.
  • the sound insulation lining 23 extends on the ceiling 1 from the return air opening 11 to the side wall 2, with the opening 21 being excluded, and on the upper intermediate floor 4 from the side wall 3 to close to the inlet nozzle 14.
  • the thickness the sound insulation lining 23 is approximately a quarter of the height of the upper chamber 6, so that a gap remains between them, the height of which is approximately half the chamber height.
  • silencing baffles 25, 26, which extend from the fan 13 in the direction of the side wall 3.
  • the upper silencing backdrop 25 extends to the side wall 3, fills the corner between the upper intermediate floor 4 and the sidewall 3 and covers the sidewall 3 up to the level of the lower intermediate floor 5.
  • the lower silencing backdrop 26 extends to the opening 10.
  • the height H 1 of the silencing backdrop 25, 26 on the intermediate floors 4, 5 and the height H2 of the gap remaining between them each amount to approximately one third of the chamber height, the height H2 of the gap being somewhat larger, for example by a factor of 1.2 than that of the silencing backdrops 25, 26.
  • the width of the upper silencing backdrop 25 on the side wall 3 is only about a quarter of its height on the upper intermediate floor 4.
  • the lower silencing backdrop 26 is rounded at its end facing the side wall 3, the cross section of the end forming a semicircle around a half-height H 1 center M 1.
  • the soundproofing backdrops 25, 26 have a smooth, abrasion-resistant glass fleece as a cover and are filled with mineral wool on the inside.
  • baffles 27, 28 extending from the front to the rear wall. Their cross sections describe arcs, the common center M2 of their arcs being shifted to the center M1 somewhat towards the lower intermediate floor 5 is.
  • the circular arc of the guide plate 27 arranged in front of the end of the lower silencing backdrop 26 begins vertically above the center points M1, M2 in the gap between the silencing backdrops 25, 26 and extends through the opening 10 into the lower chamber 8. It forms a complete semicircle, i.e. the ⁇ 1 shown in Figure 2 between a horizontal line passing through the center M 2 and the end of the circular arc is 90 ° C.
  • the circular arc of the second guide plate 28 begins perpendicularly above the beginning of the circular arc of the first guide plate 27 and likewise extends through the opening 10 into the lower chamber 8. However, it only forms an approximately 120 ° circular arc, i.e. the angle ⁇ 2 is 40 ° C, and ends somewhat higher than the arc of the first baffle 27 in the lower chamber 8th
  • the height H3 of the gap between the lower silencing link 26 and the beginning of the guide plate 27 is approximately 20 to 30%, for example 25%, and the height H4 of the gap between the lower silencing link 26 and the beginning of the guide plate 28 is approximately 50 to 66%, eg 58%, the total height H2 of the gap.
  • the difference between the radius R2 of the guide plate 28 and the radius R1 of the guide plate 27 corresponds to the difference between height H4 and height H3.
  • the lower intermediate floor 5 is covered in the lower chamber 8 with a sound absorption plate 29.
  • the sound absorption plate 29 extends from the side wall 2 to the vicinity of the opening 10, which it does not reach, but in the direction of which it is chamfered.
  • the sound absorption panel 29 consists of several layers, e.g. a layer made of plastic foam and a bitumen layer.
  • the direction of air flow is symbolized by arrows.
  • the free interiors of the upper chamber 6 and the middle chamber 7 form a hairpin-shaped air duct.
  • the air duct in the middle chamber 7 is branched into three ducts by the two guide plates 27, 28. The branching continues in the opening 10 of the lower intermediate floor 5 and in a small, adjoining area of the lower chamber 8.
  • the modules are tiled in a grid-like frame construction over the entire surface of the clean room ceiling.
  • return air is drawn in from the plenum between the clean room ceiling and the building ceiling via the return air opening 11 and the upper chamber 6 and conditioned air via the opening 21 and fed to the clean room via the middle and lower chambers 7, 8 through the high-performance suspended matter filters 12.
  • the cleaned air flows through the entire clean room in a laminar manner.
  • a module of the example 2 differs from that of the example 1 in that it does not have three, but two high-performance suspended matter filters 12. Its layout is accordingly square and the chamber lengths are only two thirds of the chamber lengths of the module of Example 1. The width and height of the module and the heights of the chambers 6, 7, 8 correspond to those of the module of Example 1.
  • the height H2 of the gap between the lower and upper silencing backdrops 26, 25 is smaller than the height H1 of the silencing backdrops 25, 26.
  • the height H2 in this example is two thirds of the height H1.
  • the module of Example 2 also differs from that of Example 1 in that the baffles 27, 28 do not protrude as far into the lower chamber 8 as in the latter, the angles ⁇ 1 and ⁇ 2 values of e.g. Accept 40 ° C and 20 ° C.
  • the amount H3 is also 25% and the amount H4 50% of the total amount H2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Building Environments (AREA)
  • Vehicle Interior And Exterior Ornaments, Soundproofing, And Insulation (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
  • Floor Finish (AREA)
EP92912382A 1991-07-08 1992-06-10 Modul zum aufbau einer reinraumdecke Expired - Lifetime EP0592472B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4122582 1991-07-08
DE4122582A DE4122582C2 (de) 1991-07-08 1991-07-08 Modul zum Aufbau einer Reinraumdecke
PCT/EP1992/001297 WO1993001454A1 (de) 1991-07-08 1992-06-10 Modul zum aufbau einer reinraumdecke

Publications (2)

Publication Number Publication Date
EP0592472A1 EP0592472A1 (de) 1994-04-20
EP0592472B1 true EP0592472B1 (de) 1994-12-21

Family

ID=6435690

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92912382A Expired - Lifetime EP0592472B1 (de) 1991-07-08 1992-06-10 Modul zum aufbau einer reinraumdecke

Country Status (11)

Country Link
US (1) US5462484A (el)
EP (1) EP0592472B1 (el)
JP (1) JPH06508913A (el)
AT (1) ATE116053T1 (el)
CA (1) CA2110694A1 (el)
DE (3) DE9116423U1 (el)
DK (1) DK0592472T3 (el)
ES (1) ES2066621T3 (el)
GR (1) GR3015448T3 (el)
RU (1) RU2074293C1 (el)
WO (1) WO1993001454A1 (el)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN103752103A (zh) * 2014-01-26 2014-04-30 苏州新区枫桥净化设备厂 一种净化层流罩

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DE102011106512A1 (de) * 2011-06-15 2013-01-03 Steinbeis GmbH & Co. für Technologietransfer vertreten durch STZ EURO Steinbeis-Transferzentrum Energie- Umwelt-Reinraumtechnik Filtervorrichtung
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US10024531B2 (en) 2013-12-19 2018-07-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
AU2015269672B2 (en) 2014-06-06 2019-05-16 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
CN106152373B (zh) * 2015-03-25 2019-12-03 大金工业株式会社 空调室内机的控制方法及空调室内机
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USD886275S1 (en) 2017-01-26 2020-06-02 Airius Ip Holdings, Llc Air moving device
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103752103A (zh) * 2014-01-26 2014-04-30 苏州新区枫桥净化设备厂 一种净化层流罩

Also Published As

Publication number Publication date
RU2074293C1 (ru) 1997-02-27
ES2066621T3 (es) 1995-03-01
WO1993001454A1 (de) 1993-01-21
DK0592472T3 (da) 1995-05-29
JPH06508913A (ja) 1994-10-06
US5462484A (en) 1995-10-31
DE9116423U1 (de) 1992-09-17
CA2110694A1 (en) 1993-01-21
DE4122582A1 (de) 1993-01-14
GR3015448T3 (en) 1995-06-30
ATE116053T1 (de) 1995-01-15
EP0592472A1 (de) 1994-04-20
DE4122582C2 (de) 1994-12-15
DE59201037D1 (de) 1995-02-02

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